DE69937531D1 - Elektronenmikroskop und spektroskopisches system - Google Patents

Elektronenmikroskop und spektroskopisches system

Info

Publication number
DE69937531D1
DE69937531D1 DE69937531T DE69937531T DE69937531D1 DE 69937531 D1 DE69937531 D1 DE 69937531D1 DE 69937531 T DE69937531 T DE 69937531T DE 69937531 T DE69937531 T DE 69937531T DE 69937531 D1 DE69937531 D1 DE 69937531D1
Authority
DE
Germany
Prior art keywords
electronic microscope
spectroscopic system
spectroscopic
microscope
electronic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69937531T
Other languages
English (en)
Other versions
DE69937531T2 (de
Inventor
John C C Day
Robert Bennett
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Renishaw PLC
Original Assignee
Renishaw PLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=26313625&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE69937531(D1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Priority claimed from GBGB9809834.6A external-priority patent/GB9809834D0/en
Priority claimed from GBGB9809835.3A external-priority patent/GB9809835D0/en
Application filed by Renishaw PLC filed Critical Renishaw PLC
Application granted granted Critical
Publication of DE69937531D1 publication Critical patent/DE69937531D1/de
Publication of DE69937531T2 publication Critical patent/DE69937531T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/22—Optical or photographic arrangements associated with the tube
    • H01J37/226—Optical arrangements for illuminating the object; optical arrangements for collecting light from the object
    • H01J37/228—Optical arrangements for illuminating the object; optical arrangements for collecting light from the object whereby illumination and light collection take place in the same area of the discharge
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0202—Mechanical elements; Supports for optical elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0208—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using focussing or collimating elements, e.g. lenses or mirrors; performing aberration correction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0216—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using light concentrators or collectors or condensers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0243—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows having a through-hole enabling the optical element to fulfil an additional optical function, e.g. a mirror or grating having a throughhole for a light collecting or light injecting optical fiber
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/44—Raman spectrometry; Scattering spectrometry ; Fluorescence spectrometry
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/28—Scanning microscopes
    • H01J2237/2803—Scanning microscopes characterised by the imaging method
    • H01J2237/2808—Cathodoluminescence
DE69937531T 1998-05-09 1999-05-05 Elektronenmikroskop und spektroskopisches system Expired - Fee Related DE69937531T2 (de)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
GB9809834 1998-05-09
GBGB9809834.6A GB9809834D0 (en) 1998-05-09 1998-05-09 Spectroscopy system
GB9809835 1998-05-09
GBGB9809835.3A GB9809835D0 (en) 1998-05-09 1998-05-09 Electron microscope and spectroscopy system
PCT/GB1999/001395 WO1999058939A1 (en) 1998-05-09 1999-05-05 Electron microscope and spectroscopy system

Publications (2)

Publication Number Publication Date
DE69937531D1 true DE69937531D1 (de) 2007-12-27
DE69937531T2 DE69937531T2 (de) 2008-09-18

Family

ID=26313625

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69937531T Expired - Fee Related DE69937531T2 (de) 1998-05-09 1999-05-05 Elektronenmikroskop und spektroskopisches system

Country Status (4)

Country Link
EP (1) EP0995086B1 (de)
JP (1) JP4392990B2 (de)
DE (1) DE69937531T2 (de)
WO (1) WO1999058939A1 (de)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0118981D0 (en) * 2001-08-03 2001-09-26 Renishaw Plc Electron microscope and spectroscopy system
JP2001330563A (ja) * 2000-05-23 2001-11-30 Jeol Ltd 検査装置
DE10042123B9 (de) * 2000-08-28 2007-07-19 Nanophotonics Ag Vorrichtung zur Durchführung von optischen Messungen an einer Probe in einer Vakuumkammer
GB0106342D0 (en) 2001-03-15 2001-05-02 Renishaw Plc Spectroscopy apparatus and method
JP3907121B2 (ja) * 2004-02-26 2007-04-18 株式会社リガク Ｘ線分析装置およびｘ線分析装置用通路装置
US8126205B2 (en) 2006-09-25 2012-02-28 Cambridge Research & Instrumentation, Inc. Sample imaging and classification
EP1953791A1 (de) * 2007-02-05 2008-08-06 FEI Company Vorrichtung zum Betrachten einer Probe mit einem Teilchenstrahl und einem optischen Mikroskop
JP2008249478A (ja) * 2007-03-30 2008-10-16 Toray Res Center:Kk カソードルミネッセンス装置及びそれを用いた分析方法
DE102009015341A1 (de) * 2009-03-27 2010-10-07 Carl Zeiss Ag Verfahren und Vorrichtungen zur optischen Untersuchung von Proben
US20120138792A1 (en) * 2009-04-15 2012-06-07 Nanofactory Instruments Ab Optical probing in electron microscopes
JP5507177B2 (ja) * 2009-09-25 2014-05-28 株式会社堀場製作所 光検出装置
WO2011126041A1 (ja) 2010-04-06 2011-10-13 大学共同利用機関法人自然科学研究機構 複合顕微鏡装置
FR2960699B1 (fr) * 2010-05-27 2013-05-10 Centre Nat Rech Scient Systeme de detection de cathodoluminescence souple et microscope mettant en oeuvre un tel systeme.
JP2014209406A (ja) * 2011-07-20 2014-11-06 キヤノンアネルバ株式会社 イオンビーム発生装置、およびイオンビームプラズマ処理装置
US10707051B2 (en) * 2018-05-14 2020-07-07 Gatan, Inc. Cathodoluminescence optical hub
GB202203238D0 (en) 2022-03-09 2022-04-20 Renishaw Plc Optical apparatus
GB202203237D0 (en) 2022-03-09 2022-04-20 Renishaw Plc Optical apparatus
GB202203236D0 (en) 2022-03-09 2022-04-20 Renishaw Plc Optical apparatus

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51142343A (en) * 1975-05-23 1976-12-07 Hitachi Ltd On-off device for optical microscope
DE2739828C2 (de) * 1977-09-03 1986-07-03 Gesellschaft für Strahlen- und Umweltforschung mbH, 8000 München Einrichtung zur Analyse von Proben
GB2002169B (en) * 1977-08-03 1982-01-06 Leybold Heraeus Gmbh & Co Kg Apparatus for sample analysis
FR2485189A1 (fr) * 1980-06-19 1981-12-24 Beauvineau Jacky Spectroscope optique a reseaux et miroirs pour microscope electronique a balyage
JPS60247141A (ja) * 1984-05-22 1985-12-06 Shimadzu Corp カソ−ドルミネツセンス装置
US4851677A (en) * 1984-12-07 1989-07-25 Fuji Photo Co., Ltd. Apparatus for recording and reproducing image produced by an electron microscope including an optical filter and a deflecting element
FR2596863B1 (fr) * 1986-04-07 1988-06-17 Centre Nat Rech Scient Dispositif de microscopie analytique, propre a former a la fois une sonde raman et une sonde electronique
DE69221423T2 (de) * 1991-09-30 1998-03-19 Beckman Instruments Inc Verbesserte Fluoreszenz-Erfassung von Proben in einem Kapillarrohr
JPH0719969A (ja) * 1993-07-05 1995-01-20 Hitachi Ltd 応力測定方法及びその装置
GB9410395D0 (en) * 1994-05-24 1994-07-13 Renishaw Plc Spectroscopic apparatus
JPH0829692A (ja) * 1994-07-11 1996-02-02 Nikon Corp 蛍光顕微鏡
JPH08124510A (ja) * 1994-10-27 1996-05-17 Shimadzu Corp 分析装置の試料ステージ駆動装置
US5614726A (en) * 1995-03-23 1997-03-25 Beckman Instruments, Inc. Automated optical alignment system and method using Raman scattering of capillary tube contents

Also Published As

Publication number Publication date
JP2002514747A (ja) 2002-05-21
DE69937531T2 (de) 2008-09-18
JP4392990B2 (ja) 2010-01-06
EP0995086A1 (de) 2000-04-26
WO1999058939A1 (en) 1999-11-18
EP0995086B1 (de) 2007-11-14

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Legal Events

Date Code Title Description
8381 Inventor (new situation)

Inventor name: BENNETT, ROBERT, GLOUCESTERSHIRE GL10 3TT, GB

Inventor name: DAY, JOHN, BRISTOL BS2 8BS, GB

8363 Opposition against the patent
8339 Ceased/non-payment of the annual fee