DE69934547D1 - Tintentrahldruckkopf mit grossem Silizium-wafer und zugehöriges Herstellungsverfahren - Google Patents

Tintentrahldruckkopf mit grossem Silizium-wafer und zugehöriges Herstellungsverfahren

Info

Publication number
DE69934547D1
DE69934547D1 DE69934547T DE69934547T DE69934547D1 DE 69934547 D1 DE69934547 D1 DE 69934547D1 DE 69934547 T DE69934547 T DE 69934547T DE 69934547 T DE69934547 T DE 69934547T DE 69934547 D1 DE69934547 D1 DE 69934547D1
Authority
DE
Germany
Prior art keywords
manufacturing process
silicon wafer
inkjet printhead
associated manufacturing
large silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69934547T
Other languages
English (en)
Other versions
DE69934547T2 (de
Inventor
Renato Conta
Franco Fabbri
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Telecom Italia SpA
Original Assignee
Telecom Italia SpA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Telecom Italia SpA filed Critical Telecom Italia SpA
Application granted granted Critical
Publication of DE69934547D1 publication Critical patent/DE69934547D1/de
Publication of DE69934547T2 publication Critical patent/DE69934547T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1635—Manufacturing processes dividing the wafer into individual chips
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1603—Production of bubble jet print heads of the front shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49401—Fluid pattern dispersing device making, e.g., ink jet
DE69934547T 1998-07-06 1999-06-29 Tintentrahldruckkopf mit grossem Silizium-wafer und zugehöriges Herstellungsverfahren Expired - Lifetime DE69934547T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
IT98TO000592A ITTO980592A1 (it) 1998-07-06 1998-07-06 Testina di stampa a getto di inchiostro con piastrina di silicio di grandi dimensioni e relativo processo di fabbricazione
ITTO980592 1998-07-06

Publications (2)

Publication Number Publication Date
DE69934547D1 true DE69934547D1 (de) 2007-02-08
DE69934547T2 DE69934547T2 (de) 2007-10-04

Family

ID=11416907

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69934547T Expired - Lifetime DE69934547T2 (de) 1998-07-06 1999-06-29 Tintentrahldruckkopf mit grossem Silizium-wafer und zugehöriges Herstellungsverfahren

Country Status (4)

Country Link
US (1) US6497470B2 (de)
EP (1) EP0970812B1 (de)
DE (1) DE69934547T2 (de)
IT (1) ITTO980592A1 (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1320381B1 (it) * 2000-05-29 2003-11-26 Olivetti Lexikon Spa Metodo per la fabbricazione di una testina di eiezione di gocce diliquido particolarmente adatta per operare con liquidi chimicamente
NL1019613C2 (nl) * 2001-12-19 2003-06-20 Micronit Microfluidics Bv Werkwijze voor het verdelen van een substraat in een aantal individuele chipdelen.
ITTO20020144A1 (it) * 2002-02-20 2003-08-20 Olivetti I Jet Spa Testina di stampa composita a getto d'inchiostro e relativo procedimento di realizzazione.
US7152958B2 (en) * 2002-11-23 2006-12-26 Silverbrook Research Pty Ltd Thermal ink jet with chemical vapor deposited nozzle plate
EP2026973B1 (de) * 2006-04-28 2011-04-06 Telecom Italia S.p.A. Tintenstrahldruckkopfplatte und herstellungsverfahren dafür
EP2864123B1 (de) * 2012-09-25 2019-08-07 Hewlett-Packard Development Company, L.P. Druckkopfdüse mit wärmesteuerung
WO2014051536A1 (en) * 2012-09-25 2014-04-03 Hewlett-Packard Development Company, L.P. Print head die
JP6885475B2 (ja) * 2017-12-26 2021-06-16 コニカミノルタ株式会社 インクジェットヘッドの製造方法、インクジェット記録装置の製造方法、インクジェットヘッド及びインクジェット記録装置

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3289046A (en) 1964-05-19 1966-11-29 Gen Electric Component chip mounted on substrate with heater pads therebetween
US4296421A (en) 1978-10-26 1981-10-20 Canon Kabushiki Kaisha Ink jet recording device using thermal propulsion and mechanical pressure changes
US4663640A (en) 1984-07-20 1987-05-05 Canon Kabushiki Kaisha Recording head
US4741796A (en) 1985-05-29 1988-05-03 Siemens Aktiengesellschaft Method for positioning and bonding a solid body to a support base
DE3717294C2 (de) * 1986-06-10 1995-01-26 Seiko Epson Corp Tintenstrahlaufzeichnungskopf
USH629H (en) 1987-01-09 1989-04-04 The United States Of America As Represented By The Secretary Of The Army Non-destructive semiconductor chip bonding and chip removal
US4899180A (en) * 1988-04-29 1990-02-06 Xerox Corporation On chip heater element and temperature sensor
US5442384A (en) * 1990-08-16 1995-08-15 Hewlett-Packard Company Integrated nozzle member and tab circuit for inkjet printhead
US5305015A (en) 1990-08-16 1994-04-19 Hewlett-Packard Company Laser ablated nozzle member for inkjet printhead
US5278584A (en) 1992-04-02 1994-01-11 Hewlett-Packard Company Ink delivery system for an inkjet printhead
US6190492B1 (en) 1995-10-06 2001-02-20 Lexmark International, Inc. Direct nozzle plate to chip attachment
US5719605A (en) * 1996-11-20 1998-02-17 Lexmark International, Inc. Large array heater chips for thermal ink jet printheads

Also Published As

Publication number Publication date
EP0970812B1 (de) 2006-12-27
ITTO980592A1 (it) 2000-01-06
DE69934547T2 (de) 2007-10-04
US20020126184A1 (en) 2002-09-12
US6497470B2 (en) 2002-12-24
EP0970812A1 (de) 2000-01-12

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