DE69929941D1 - Mikroskopische Kapazitätmesssystem und Testsystem - Google Patents

Mikroskopische Kapazitätmesssystem und Testsystem

Info

Publication number
DE69929941D1
DE69929941D1 DE69929941T DE69929941T DE69929941D1 DE 69929941 D1 DE69929941 D1 DE 69929941D1 DE 69929941 T DE69929941 T DE 69929941T DE 69929941 T DE69929941 T DE 69929941T DE 69929941 D1 DE69929941 D1 DE 69929941D1
Authority
DE
Germany
Prior art keywords
microscopic
capacity measuring
test system
measuring system
test
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69929941T
Other languages
English (en)
Other versions
DE69929941T2 (de
Inventor
Yoshihiro Hirota
Toshiyuki Matsumoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Application granted granted Critical
Publication of DE69929941D1 publication Critical patent/DE69929941D1/de
Publication of DE69929941T2 publication Critical patent/DE69929941T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
    • G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
    • G01R27/26—Measuring inductance or capacitance; Measuring quality factor, e.g. by using the resonance method; Measuring loss factor; Measuring dielectric constants ; Measuring impedance or related variables
    • G01R27/2605—Measuring capacitance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Resistance Or Impedance (AREA)
DE69929941T 1998-08-11 1999-08-11 Mikroskopische Kapazitätmesssystem und Testsystem Expired - Lifetime DE69929941T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP22693198A JP3474111B2 (ja) 1998-08-11 1998-08-11 微小容量測定システム及びプロービングシステム
JP22693198 1998-08-11

Publications (2)

Publication Number Publication Date
DE69929941D1 true DE69929941D1 (de) 2006-04-27
DE69929941T2 DE69929941T2 (de) 2006-08-03

Family

ID=16852858

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69929941T Expired - Lifetime DE69929941T2 (de) 1998-08-11 1999-08-11 Mikroskopische Kapazitätmesssystem und Testsystem

Country Status (6)

Country Link
US (1) US6348809B1 (de)
EP (1) EP0980004B1 (de)
JP (1) JP3474111B2 (de)
KR (1) KR100329359B1 (de)
DE (1) DE69929941T2 (de)
TW (1) TW438978B (de)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW546480B (en) * 2000-03-07 2003-08-11 Sumitomo Metal Ind Circuit, apparatus and method for inspecting impedance
US6563299B1 (en) * 2000-08-30 2003-05-13 Micron Technology, Inc. Apparatus for measuring parasitic capacitance and inductance of I/O leads on an electrical component using a network analyzer
JP4592993B2 (ja) * 2001-03-28 2010-12-08 コーア株式会社 電気特性値測定用ユニットおよび測定装置
JP2002296320A (ja) * 2001-03-28 2002-10-09 Koa Corp 電気特性値測定用ユニットおよび測定装置
JP4249448B2 (ja) * 2001-09-06 2009-04-02 東京エレクトロン株式会社 容量計の校正方法、校正用標準容量ボックス、静電容量の測定方法、容量測定用ボックス及び容量計
JP4037194B2 (ja) 2002-07-09 2008-01-23 沖電気工業株式会社 ゲート容量測定用レイアウトパターン
US6924653B2 (en) * 2002-08-26 2005-08-02 Micron Technology, Inc. Selectively configurable microelectronic probes
JP2004184323A (ja) * 2002-12-05 2004-07-02 Sharp Corp 静電容量測定方法
US7030631B1 (en) 2004-12-10 2006-04-18 Jennings Thomas A Method and apparatus for monitoring and determining the moisture content of a substance in a container
JP5502597B2 (ja) * 2010-05-24 2014-05-28 ルネサスエレクトロニクス株式会社 インピーダンス検出回路およびインピーダンス検出方法
JP2017049139A (ja) * 2015-09-02 2017-03-09 株式会社東海理化電機製作所 静電検出装置
CN110887877A (zh) * 2019-11-22 2020-03-17 中国人民解放军国防科技大学 一种铁路接触线缺陷检测传感器及检测方法
CN113484539B (zh) * 2021-07-01 2023-09-05 兰州空间技术物理研究所 一种静电悬浮加速度计调制及偏置电压的加载系统及方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6114578A (ja) 1984-06-30 1986-01-22 Suzuki Shigeo 容量計
US4797620A (en) * 1986-08-20 1989-01-10 Williams Bruce T High voltage electrostatic surface potential monitoring system using low voltage A.C. feedback
JPH09280806A (ja) 1996-04-09 1997-10-31 Nissan Motor Co Ltd 静電容量式変位計
JP3085209B2 (ja) * 1996-09-12 2000-09-04 株式会社村田製作所 表面電位センサ

Also Published As

Publication number Publication date
DE69929941T2 (de) 2006-08-03
US6348809B1 (en) 2002-02-19
EP0980004B1 (de) 2006-02-22
JP2000055956A (ja) 2000-02-25
TW438978B (en) 2001-06-07
EP0980004A3 (de) 2000-09-27
KR100329359B1 (ko) 2002-03-22
KR20000017230A (ko) 2000-03-25
JP3474111B2 (ja) 2003-12-08
EP0980004A2 (de) 2000-02-16

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition