DE69928172T2 - Vacuumpumpe - Google Patents

Vacuumpumpe Download PDF

Info

Publication number
DE69928172T2
DE69928172T2 DE69928172T DE69928172T DE69928172T2 DE 69928172 T2 DE69928172 T2 DE 69928172T2 DE 69928172 T DE69928172 T DE 69928172T DE 69928172 T DE69928172 T DE 69928172T DE 69928172 T2 DE69928172 T2 DE 69928172T2
Authority
DE
Germany
Prior art keywords
pump
rotor
rotors
inlet
screw
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69928172T
Other languages
German (de)
English (en)
Other versions
DE69928172D1 (de
Inventor
Nigel Paul Horsham West Sussex Schofield
Michael Henry Reigate Surrey North
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards Ltd
Original Assignee
BOC Group Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from GBGB9813048.7A external-priority patent/GB9813048D0/en
Priority claimed from GBGB9814659.0A external-priority patent/GB9814659D0/en
Application filed by BOC Group Ltd filed Critical BOC Group Ltd
Application granted granted Critical
Publication of DE69928172D1 publication Critical patent/DE69928172D1/de
Publication of DE69928172T2 publication Critical patent/DE69928172T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01C—ROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
    • F01C21/00—Component parts, details or accessories not provided for in groups F01C1/00 - F01C20/00
    • F01C21/02—Arrangements of bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/082—Details specially related to intermeshing engagement type pumps
    • F04C18/084—Toothed wheels
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0042—Driving elements, brakes, couplings, transmissions specially adapted for pumps
    • F04C29/0078—Fixing rotors on shafts, e.g. by clamping together hub and shaft
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/50—Bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2250/00—Geometry
    • F04C2250/20—Geometry of the rotor
    • F04C2250/201—Geometry of the rotor conical shape

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Details And Applications Of Rotary Liquid Pumps (AREA)
DE69928172T 1998-06-17 1999-06-15 Vacuumpumpe Expired - Lifetime DE69928172T2 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
GB9813048 1998-06-17
GBGB9813048.7A GB9813048D0 (en) 1998-06-17 1998-06-17 Improvements in vacuum pumps
GB9814659 1998-07-07
GBGB9814659.0A GB9814659D0 (en) 1998-07-07 1998-07-07 Improvements in screw pumps

Publications (2)

Publication Number Publication Date
DE69928172D1 DE69928172D1 (de) 2005-12-15
DE69928172T2 true DE69928172T2 (de) 2006-07-13

Family

ID=26313883

Family Applications (2)

Application Number Title Priority Date Filing Date
DE69928172T Expired - Lifetime DE69928172T2 (de) 1998-06-17 1999-06-15 Vacuumpumpe
DE69929749T Expired - Fee Related DE69929749T2 (de) 1998-06-17 1999-06-15 Schraubenpumpe

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE69929749T Expired - Fee Related DE69929749T2 (de) 1998-06-17 1999-06-15 Schraubenpumpe

Country Status (4)

Country Link
US (2) US6217305B1 (enExample)
EP (3) EP0965757A3 (enExample)
JP (3) JP2000064976A (enExample)
DE (2) DE69928172T2 (enExample)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19963173B4 (de) * 1999-12-27 2011-05-19 Leybold Vakuum Gmbh Schraubenvakuumpumpe
GB0004404D0 (en) * 2000-02-24 2000-04-12 Boc Group Plc Improvements in vacuum pumps
JP4558349B2 (ja) * 2004-03-02 2010-10-06 財団法人国際科学振興財団 真空ポンプ
EP1859163A4 (en) * 2005-03-10 2014-11-26 Alan Notis PUMP OR ENGINE WITH SCREW CONIC ETCHED BY PRESSURIZATION
US20070020115A1 (en) * 2005-07-01 2007-01-25 The Boc Group, Inc. Integrated pump apparatus for semiconductor processing
US20070081893A1 (en) * 2005-10-06 2007-04-12 The Boc Group, Inc. Pump apparatus for semiconductor processing
GB0525378D0 (en) 2005-12-13 2006-01-18 Boc Group Plc Screw Pump
JP2007170341A (ja) * 2005-12-26 2007-07-05 Toyota Industries Corp スクリュー式流体機械
TWI438342B (zh) 2006-07-28 2014-05-21 Lot Vacuum Co Ltd 具有魯式與螺旋轉子之複合型乾式真空幫浦
DE102010014884A1 (de) * 2010-04-14 2011-10-20 Baratti Engineering Gmbh Vakuumpumpe
JP6377839B2 (ja) * 2015-03-31 2018-08-22 株式会社日立産機システム ガス圧縮機
FR3065040B1 (fr) * 2017-04-07 2019-06-21 Pfeiffer Vacuum Groupe de pompage et utilisation
GB2606224B (en) * 2021-04-30 2024-01-31 Edwards Ltd Stator for a vacuum pump

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2511878A (en) * 1950-06-20 Rathman
US678570A (en) * 1900-10-22 1901-07-16 William Anthony Jones Motor.
US1191423A (en) * 1913-01-15 1916-07-18 H & S Pump Company Pump.
GB384355A (en) * 1931-08-05 1932-12-08 Frederick Charles Greenfield Improvements in and relating to rotary machines for the compression and propulsion of
US2079083A (en) * 1935-03-29 1937-05-04 Imo Industri Ab Fluid meter
FR1309885A (fr) * 1960-12-15 1962-11-23 Ishikawajima Harima Heavy Ind Machine rotative pour la compression de gaz ou agissant inversement comme moteur
NL282778A (enExample) * 1960-12-15
US3180559A (en) * 1962-04-11 1965-04-27 John R Boyd Mechanical vacuum pump
CH613258A5 (enExample) * 1975-09-24 1979-09-14 Suter Fa Alois
US4405286A (en) * 1982-01-21 1983-09-20 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Actively suspended counter-rotating machine
JPS59208077A (ja) * 1983-05-11 1984-11-26 Hitachi Ltd テ−パ状スクリユ−ロ−タの製造方法
JPH06100082B2 (ja) * 1986-10-24 1994-12-12 株式会社日立製作所 スクリユ流体機械
JP2619468B2 (ja) * 1988-04-06 1997-06-11 株式会社日立製作所 無給油式スクリュー流体機械
JPH01267384A (ja) * 1988-04-15 1989-10-25 Hitachi Ltd 勾配歯を有するスクリューロータ
JPH08144977A (ja) * 1994-11-24 1996-06-04 Kashiyama Kogyo Kk 複合ドライ真空ポンプ
DE19522555A1 (de) * 1995-06-21 1997-01-02 Sihi Ind Consult Gmbh Rotationskolbenverdichter mit zwei Rotoren
US6019586A (en) * 1998-01-20 2000-02-01 Sunny King Machinery Co., Ltd. Gradationally contracted screw compression equipment

Also Published As

Publication number Publication date
DE69929749T2 (de) 2006-08-24
EP0965758A2 (en) 1999-12-22
JP2000064976A (ja) 2000-03-03
JP4388167B2 (ja) 2009-12-24
DE69929749D1 (de) 2006-04-20
EP0965756A2 (en) 1999-12-22
JP2000073976A (ja) 2000-03-07
EP0965757A3 (en) 2001-01-31
DE69928172D1 (de) 2005-12-15
US6217305B1 (en) 2001-04-17
EP0965757A2 (en) 1999-12-22
EP0965756A3 (en) 2001-01-31
US6200116B1 (en) 2001-03-13
JP2000064975A (ja) 2000-03-03
EP0965756B1 (en) 2006-02-08
EP0965758B1 (en) 2005-11-09
EP0965758A3 (en) 2001-01-31

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: EDWARDS LTD., CRAWLEY, WEST SUSSEX, GB