DE69925027T2 - Ferroelektrischer varaktor mit eingebauter gleichstromblockierung - Google Patents
Ferroelektrischer varaktor mit eingebauter gleichstromblockierung Download PDFInfo
- Publication number
- DE69925027T2 DE69925027T2 DE69925027T DE69925027T DE69925027T2 DE 69925027 T2 DE69925027 T2 DE 69925027T2 DE 69925027 T DE69925027 T DE 69925027T DE 69925027 T DE69925027 T DE 69925027T DE 69925027 T2 DE69925027 T2 DE 69925027T2
- Authority
- DE
- Germany
- Prior art keywords
- tunable
- tunable dielectric
- electrode
- voltage
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000000903 blocking effect Effects 0.000 title claims abstract description 35
- 239000003990 capacitor Substances 0.000 claims abstract description 72
- 239000000758 substrate Substances 0.000 claims description 19
- 239000000919 ceramic Substances 0.000 claims description 5
- 239000002131 composite material Substances 0.000 claims description 5
- 239000010409 thin film Substances 0.000 claims description 5
- 229910052454 barium strontium titanate Inorganic materials 0.000 claims description 3
- 239000010408 film Substances 0.000 claims description 3
- -1 LaAlO 3 Inorganic materials 0.000 claims description 2
- 229910020068 MgAl Inorganic materials 0.000 claims description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 2
- 229910052594 sapphire Inorganic materials 0.000 claims description 2
- 239000010980 sapphire Substances 0.000 claims description 2
- 239000000126 substance Substances 0.000 claims 1
- 239000010410 layer Substances 0.000 description 52
- 239000000463 material Substances 0.000 description 21
- 238000003780 insertion Methods 0.000 description 6
- 230000037431 insertion Effects 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- 239000003989 dielectric material Substances 0.000 description 5
- 230000005540 biological transmission Effects 0.000 description 4
- 230000015556 catabolic process Effects 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 238000000608 laser ablation Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000007650 screen-printing Methods 0.000 description 2
- 239000000565 sealant Substances 0.000 description 2
- 239000011343 solid material Substances 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 239000004593 Epoxy Substances 0.000 description 1
- 239000013590 bulk material Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000008030 elimination Effects 0.000 description 1
- 238000003379 elimination reaction Methods 0.000 description 1
- 230000005294 ferromagnetic effect Effects 0.000 description 1
- 239000012761 high-performance material Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 239000012811 non-conductive material Substances 0.000 description 1
- 125000002524 organometallic group Chemical group 0.000 description 1
- 230000010363 phase shift Effects 0.000 description 1
- 239000004814 polyurethane Substances 0.000 description 1
- 229920002635 polyurethane Polymers 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G7/00—Capacitors in which the capacitance is varied by non-mechanical means; Processes of their manufacture
- H01G7/06—Capacitors in which the capacitance is varied by non-mechanical means; Processes of their manufacture having a dielectric selected for the variation of its permittivity with applied voltage, i.e. ferroelectric capacitors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
- H01P1/00—Auxiliary devices
- H01P1/18—Phase-shifters
- H01P1/181—Phase-shifters using ferroelectric devices
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
- Semiconductor Integrated Circuits (AREA)
- Ceramic Capacitors (AREA)
- Saccharide Compounds (AREA)
- Pharmaceuticals Containing Other Organic And Inorganic Compounds (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US10768498P | 1998-11-09 | 1998-11-09 | |
| US107684P | 1998-11-09 | ||
| PCT/US1999/026113 WO2000028613A1 (en) | 1998-11-09 | 1999-11-04 | Ferroelectric varactor with built-in dc blocks |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE69925027D1 DE69925027D1 (de) | 2005-06-02 |
| DE69925027T2 true DE69925027T2 (de) | 2006-01-12 |
Family
ID=22317911
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE69925027T Expired - Fee Related DE69925027T2 (de) | 1998-11-09 | 1999-11-04 | Ferroelektrischer varaktor mit eingebauter gleichstromblockierung |
Country Status (10)
| Country | Link |
|---|---|
| EP (1) | EP1135825B1 (enExample) |
| JP (1) | JP2002529938A (enExample) |
| KR (1) | KR20010086007A (enExample) |
| CN (1) | CN1325552A (enExample) |
| AT (1) | ATE294452T1 (enExample) |
| AU (1) | AU1342800A (enExample) |
| CA (1) | CA2349636A1 (enExample) |
| DE (1) | DE69925027T2 (enExample) |
| EA (1) | EA003062B1 (enExample) |
| WO (1) | WO2000028613A1 (enExample) |
Families Citing this family (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2001084660A1 (en) | 2000-05-02 | 2001-11-08 | Paratek Microwave, Inc. | Voltage tuned dielectric varactors with bottom electrodes |
| US6774077B2 (en) * | 2001-01-24 | 2004-08-10 | Paratek Microwave, Inc. | Electronically tunable, low-loss ceramic materials including a tunable dielectric phase and multiple metal oxide phases |
| WO2001099224A1 (en) * | 2000-06-16 | 2001-12-27 | Paratek Microwave, Inc. | Electronically tunable dielectric composite thick films |
| DE10062614A1 (de) * | 2000-12-15 | 2002-07-04 | Forschungszentrum Juelich Gmbh | Anordnung mit abstimmbarer Kapazität und Verfahren zu deren Herstellung |
| US8609017B2 (en) | 2001-01-24 | 2013-12-17 | Blackberry Limited | Electronically tunable, low-loss ceramic materials including a tunable dielectric phase and multiple metal oxide phases |
| US6690251B2 (en) | 2001-04-11 | 2004-02-10 | Kyocera Wireless Corporation | Tunable ferro-electric filter |
| DE60207546T2 (de) * | 2001-04-11 | 2006-07-27 | Kyocera Wireless Corp., San Diego | Antennenschnittstelleneinheit |
| WO2002084783A1 (en) * | 2001-04-11 | 2002-10-24 | Kyocera Wireless Corporation | Tunable isolator |
| US6937195B2 (en) | 2001-04-11 | 2005-08-30 | Kyocera Wireless Corp. | Inverted-F ferroelectric antenna |
| WO2002084310A1 (en) * | 2001-04-11 | 2002-10-24 | Kyocera Wireless Corporation | Low-loss tunable ferro-electric device and method of characterization |
| WO2002084788A1 (en) * | 2001-04-11 | 2002-10-24 | Kyocera Wireless Corporation | Tunable antenna matching circuit |
| US7164329B2 (en) | 2001-04-11 | 2007-01-16 | Kyocera Wireless Corp. | Tunable phase shifer with a control signal generator responsive to DC offset in a mixed signal |
| US7394430B2 (en) | 2001-04-11 | 2008-07-01 | Kyocera Wireless Corp. | Wireless device reconfigurable radiation desensitivity bracket systems and methods |
| US6535076B2 (en) | 2001-05-15 | 2003-03-18 | Silicon Valley Bank | Switched charge voltage driver and method for applying voltage to tunable dielectric devices |
| US7184727B2 (en) | 2002-02-12 | 2007-02-27 | Kyocera Wireless Corp. | Full-duplex antenna system and method |
| US7176845B2 (en) | 2002-02-12 | 2007-02-13 | Kyocera Wireless Corp. | System and method for impedance matching an antenna to sub-bands in a communication band |
| US7180467B2 (en) | 2002-02-12 | 2007-02-20 | Kyocera Wireless Corp. | System and method for dual-band antenna matching |
| DE10344616A1 (de) * | 2003-09-25 | 2005-04-21 | Bosch Gmbh Robert | Bauelement mit einer regelbaren Dünnschichtkapazität |
| JP2005236389A (ja) * | 2004-02-17 | 2005-09-02 | Kyocera Corp | アレーアンテナおよびそれを用いた無線通信装置 |
| US7728377B2 (en) | 2005-09-23 | 2010-06-01 | Agile Rf, Inc. | Varactor design using area to perimeter ratio for improved tuning range |
| RU2443033C1 (ru) * | 2010-12-24 | 2012-02-20 | Владимир Андреевич Степанец | Способ управления емкостью электрического конденсатора и конденсатор переменной емкости на основе этого способа |
| EP3319165B1 (en) * | 2016-11-07 | 2020-03-18 | Nokia Technologies Oy | A radio frequency reflection type phase shifter, and method of phase shifting |
| CN109119248B (zh) | 2017-06-23 | 2025-02-25 | 北京北方华创微电子装备有限公司 | 可调电容及阻抗匹配装置 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4807085A (en) * | 1987-05-28 | 1989-02-21 | Iwasaki Electric Co., Ltd. | Nonlinear capacitor for generating high-voltage pulses |
| JPH08509103A (ja) * | 1992-12-01 | 1996-09-24 | スーパーコンダクティング・コア・テクノロジーズ・インコーポレーテッド | 高温度超電導膜および強誘電性膜を含む同調可能マイクロ波装置 |
| US5745335A (en) * | 1996-06-27 | 1998-04-28 | Gennum Corporation | Multi-layer film capacitor structures and method |
-
1999
- 1999-11-04 EP EP99956927A patent/EP1135825B1/en not_active Expired - Lifetime
- 1999-11-04 JP JP2000581709A patent/JP2002529938A/ja active Pending
- 1999-11-04 CN CN99813104A patent/CN1325552A/zh active Pending
- 1999-11-04 AT AT99956927T patent/ATE294452T1/de not_active IP Right Cessation
- 1999-11-04 CA CA002349636A patent/CA2349636A1/en not_active Abandoned
- 1999-11-04 AU AU13428/00A patent/AU1342800A/en not_active Abandoned
- 1999-11-04 DE DE69925027T patent/DE69925027T2/de not_active Expired - Fee Related
- 1999-11-04 WO PCT/US1999/026113 patent/WO2000028613A1/en not_active Ceased
- 1999-11-04 EA EA200100542A patent/EA003062B1/ru not_active IP Right Cessation
- 1999-11-04 KR KR1020017005740A patent/KR20010086007A/ko not_active Withdrawn
Also Published As
| Publication number | Publication date |
|---|---|
| ATE294452T1 (de) | 2005-05-15 |
| JP2002529938A (ja) | 2002-09-10 |
| CN1325552A (zh) | 2001-12-05 |
| AU1342800A (en) | 2000-05-29 |
| EP1135825A1 (en) | 2001-09-26 |
| EA200100542A1 (ru) | 2001-10-22 |
| EA003062B1 (ru) | 2002-12-26 |
| KR20010086007A (ko) | 2001-09-07 |
| EP1135825B1 (en) | 2005-04-27 |
| DE69925027D1 (de) | 2005-06-02 |
| WO2000028613A1 (en) | 2000-05-18 |
| CA2349636A1 (en) | 2000-05-18 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| DE69925027T2 (de) | Ferroelektrischer varaktor mit eingebauter gleichstromblockierung | |
| US6404614B1 (en) | Voltage tuned dielectric varactors with bottom electrodes | |
| DE69909313T2 (de) | Spannungsgesteuerte varaktoren und abstimmbare geräte mit derartigen varaktoren | |
| DE60104304T2 (de) | Mikrostreifenleiter-phasenschieber | |
| DE60026388T2 (de) | Spannungsgesteuerte koplanare Phasenschieber | |
| US6377440B1 (en) | Dielectric varactors with offset two-layer electrodes | |
| DE60110827T2 (de) | Verfahren zur kanalfrequenzzuteilung für hf- und mikrowellenduplexer | |
| DE69232740T2 (de) | Spannungsvariabler kondensator | |
| DE102009010863B4 (de) | Volumenakustikwellenvorrichtung mit Halbleiterschicht, sowie entsprechende Reihen- und Parallel-abstimmbare BAW-Vorrichtung | |
| DE112016005613T5 (de) | Spannungsabhängig abstimmbarer mehrschichtiger Kondensator | |
| DE1791285B2 (de) | Verfahren zum Nachstimmen piezoelektrischer Resonatoren und nach dem Verfahren nachgestimmte piezoelektrische Resonatoren | |
| DE19915247A1 (de) | Spannungsabhängiger Dünnschichtkondensator | |
| EP2517218B1 (de) | Varaktor und verfahren zur herstellung eines varaktors | |
| DE69328243T2 (de) | Filter und verfahren zu seiner herstellung | |
| DE19958892B4 (de) | Piezoelektrischer Resonator mit Dickendehnungsvibration und Verwendung desselben | |
| DE10137121A1 (de) | Piezoelektrischer Oszillator | |
| DE112018005239T5 (de) | Abstimmbarer Mehrschichtkondensator mit hoher Kapazität und Array | |
| WO2008145477A1 (de) | Kondensatorstruktur mit veränderbarer kapazität und verwendung der kondensatorstruktur | |
| DE19814688A1 (de) | Chip-artiges piezoelektrisches Filter | |
| DE102019124861B4 (de) | Filterchip und SAW-Resonator erster Art | |
| DE112021006016T5 (de) | System und Verfahren zum Mischen von Radiofrequenzsignalen | |
| DE102018213051B4 (de) | Spannungskontrollierbarer Kondensator mit ferroelektrischer Schicht und Verfahren zum Herstellen des spannungskontrollierbaren Kondensators mit ferroelektrischer Schicht | |
| DE10245106A1 (de) | Glas-Keramik-Zusammensetzung, Vorrichtung und Bauelement mit der Glas-Keramik-Zusammensetzung | |
| DE10234980B4 (de) | Durchschlagfester mit akustischen Wellen arbeitender Resonator | |
| DE2546453C3 (de) | Piezoelektrische Kristalleinheit mit einem monolithischen Plättchen |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8364 | No opposition during term of opposition | ||
| 8339 | Ceased/non-payment of the annual fee |