DE69911963D1 - Verfahren und vorrichtung zum bohren von mikrosacklöchern in elektrischen schaltungspackungen - Google Patents

Verfahren und vorrichtung zum bohren von mikrosacklöchern in elektrischen schaltungspackungen

Info

Publication number
DE69911963D1
DE69911963D1 DE69911963T DE69911963T DE69911963D1 DE 69911963 D1 DE69911963 D1 DE 69911963D1 DE 69911963 T DE69911963 T DE 69911963T DE 69911963 T DE69911963 T DE 69911963T DE 69911963 D1 DE69911963 D1 DE 69911963D1
Authority
DE
Germany
Prior art keywords
drilling
electrical circuit
holes
microsack
circuit boxes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69911963T
Other languages
English (en)
Other versions
DE69911963T2 (de
Inventor
Charles Gower
Thomas Rumsby
Wyn Thomas
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Exitech Ltd
Original Assignee
Exitech Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Exitech Ltd filed Critical Exitech Ltd
Application granted granted Critical
Publication of DE69911963D1 publication Critical patent/DE69911963D1/de
Publication of DE69911963T2 publication Critical patent/DE69911963T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/0011—Working of insulating substrates or insulating layers
    • H05K3/0017—Etching of the substrate by chemical or physical means
    • H05K3/0026—Etching of the substrate by chemical or physical means by laser ablation
    • H05K3/0032—Etching of the substrate by chemical or physical means by laser ablation of organic insulating material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
    • B23K26/0622—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses
    • B23K26/0624—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses using ultrashort pulses, i.e. pulses of 1ns or less
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/38—Removing material by boring or cutting
    • B23K26/382—Removing material by boring or cutting by boring
    • B23K26/389—Removing material by boring or cutting by boring of fluid openings, e.g. nozzles, jets
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/0011—Working of insulating substrates or insulating layers
    • H05K3/0017—Etching of the substrate by chemical or physical means
    • H05K3/0026—Etching of the substrate by chemical or physical means by laser ablation
    • H05K3/0032—Etching of the substrate by chemical or physical means by laser ablation of organic insulating material
    • H05K3/0035—Etching of the substrate by chemical or physical means by laser ablation of organic insulating material of blind holes, i.e. having a metal layer at the bottom

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Laser Beam Processing (AREA)
  • Printing Elements For Providing Electric Connections Between Printed Circuits (AREA)
  • Perforating, Stamping-Out Or Severing By Means Other Than Cutting (AREA)
  • Structure Of Printed Boards (AREA)
DE69911963T 1998-05-27 1999-05-27 Verfahren und vorrichtung zum bohren von mikrosacklöchern in elektrischen schaltungspackungen Expired - Fee Related DE69911963T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GBGB9811328.5A GB9811328D0 (en) 1998-05-27 1998-05-27 The use of mid-infrared lasers for drilling microvia holes in printed circuit (wiring) boards and other electrical circuit interconnection packages
GB9811328 1998-05-27
PCT/GB1999/001698 WO1999062310A1 (en) 1998-05-27 1999-05-27 Method and apparatus for drilling microvia holes in electrical circuit interconnection packages

Publications (2)

Publication Number Publication Date
DE69911963D1 true DE69911963D1 (de) 2003-11-13
DE69911963T2 DE69911963T2 (de) 2004-05-19

Family

ID=10832746

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69911963T Expired - Fee Related DE69911963T2 (de) 1998-05-27 1999-05-27 Verfahren und vorrichtung zum bohren von mikrosacklöchern in elektrischen schaltungspackungen

Country Status (8)

Country Link
US (1) US6576869B1 (de)
EP (1) EP1090537B1 (de)
JP (1) JP2002517103A (de)
AT (1) ATE251835T1 (de)
AU (1) AU4273699A (de)
DE (1) DE69911963T2 (de)
GB (2) GB9811328D0 (de)
WO (1) WO1999062310A1 (de)

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JP4899265B2 (ja) * 2000-11-16 2012-03-21 凸版印刷株式会社 多層配線基板及びその製造方法、並びにレーザードリル装置
JP2002261422A (ja) * 2001-03-01 2002-09-13 Cmk Corp パルスレーザを用いた非貫通孔の加工方法
US20030102159A1 (en) * 2001-12-04 2003-06-05 Loo Mike C. Optimum power and ground bump pad and bump patterns for flip chip packaging
TWI286826B (en) * 2001-12-28 2007-09-11 Via Tech Inc Semiconductor package substrate and process thereof
US20090169868A1 (en) * 2002-01-29 2009-07-02 Vanderbilt University Methods and apparatus for transferring a material onto a substrate using a resonant infrared pulsed laser
US6998156B2 (en) * 2002-01-29 2006-02-14 The United States Of America As Represented By The Secretary Of The Navy Deposition of thin films using an infrared laser
DE10209617C1 (de) * 2002-03-05 2003-08-07 Siemens Ag Laserbeschriftungsverfahren
DE10307309B4 (de) * 2003-02-20 2007-06-14 Hitachi Via Mechanics, Ltd., Ebina Vorrichtung und Verfahren zur Bearbeitung von elektrischen Schaltungssubstraten mittels Laser
US20060108336A1 (en) * 2004-11-23 2006-05-25 Northrop Grumman Corporation Fabrication process for large-scale panel devices
FI20041525A (fi) * 2004-11-26 2006-03-17 Imbera Electronics Oy Elektroniikkamoduuli ja menetelmä sen valmistamiseksi
US7544304B2 (en) * 2006-07-11 2009-06-09 Electro Scientific Industries, Inc. Process and system for quality management and analysis of via drilling
US7886437B2 (en) * 2007-05-25 2011-02-15 Electro Scientific Industries, Inc. Process for forming an isolated electrically conductive contact through a metal package
US10412788B2 (en) * 2008-06-13 2019-09-10 Lg Chem, Ltd. Heating element and manufacturing method thereof
US7943862B2 (en) * 2008-08-20 2011-05-17 Electro Scientific Industries, Inc. Method and apparatus for optically transparent via filling
KR101251785B1 (ko) * 2010-01-12 2013-04-08 주식회사 엘지화학 발열유리 및 이의 제조방법
EP2601393B1 (de) 2010-08-06 2020-01-15 Exxonmobil Upstream Research Company Systeme und verfahren zur optimierung einer stöchiometrischen verbrennung
US9245795B2 (en) * 2013-05-28 2016-01-26 Intel Corporation Methods of forming substrate microvias with anchor structures
US9328011B2 (en) 2013-06-04 2016-05-03 Coherent, Inc. Laser-scribing of chemically strengthened glass
US9414498B2 (en) * 2013-09-20 2016-08-09 Coherent, Inc. Via-hole drilling in a printed circuit board using a carbon monoxide laser
US9565762B1 (en) * 2013-12-06 2017-02-07 Marvell Israel (M.I.S.L) Ltd. Power delivery network in a printed circuit board structure
US10274806B2 (en) 2015-11-06 2019-04-30 Coherent, Inc. Pulse-dividing method and apparatus for a pulsed carbon monoxide laser
US10423047B2 (en) 2016-07-27 2019-09-24 Coherent, Inc. Laser machining method and apparatus
US11342256B2 (en) 2019-01-24 2022-05-24 Applied Materials, Inc. Method of fine redistribution interconnect formation for advanced packaging applications
IT201900006736A1 (it) 2019-05-10 2020-11-10 Applied Materials Inc Procedimenti di fabbricazione di package
IT201900006740A1 (it) 2019-05-10 2020-11-10 Applied Materials Inc Procedimenti di strutturazione di substrati
US11931855B2 (en) 2019-06-17 2024-03-19 Applied Materials, Inc. Planarization methods for packaging substrates
US11862546B2 (en) 2019-11-27 2024-01-02 Applied Materials, Inc. Package core assembly and fabrication methods
US11257790B2 (en) 2020-03-10 2022-02-22 Applied Materials, Inc. High connectivity device stacking
US11454884B2 (en) 2020-04-15 2022-09-27 Applied Materials, Inc. Fluoropolymer stamp fabrication method
US11400545B2 (en) 2020-05-11 2022-08-02 Applied Materials, Inc. Laser ablation for package fabrication
US11232951B1 (en) 2020-07-14 2022-01-25 Applied Materials, Inc. Method and apparatus for laser drilling blind vias
US11676832B2 (en) 2020-07-24 2023-06-13 Applied Materials, Inc. Laser ablation system for package fabrication
US11521937B2 (en) 2020-11-16 2022-12-06 Applied Materials, Inc. Package structures with built-in EMI shielding
US11404318B2 (en) 2020-11-20 2022-08-02 Applied Materials, Inc. Methods of forming through-silicon vias in substrates for advanced packaging
US11705365B2 (en) 2021-05-18 2023-07-18 Applied Materials, Inc. Methods of micro-via formation for advanced packaging

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DD147437A1 (de) * 1979-11-27 1981-04-01 Lessig Hans Joerg Verfahren zur strukturierung der isolationsschicht von flexiblen isolationsschicht-metall-verbunden
US4504727A (en) * 1982-12-30 1985-03-12 International Business Machines Corporation Laser drilling system utilizing photoacoustic feedback
US4681656A (en) * 1983-02-22 1987-07-21 Byrum James E IC carrier system
US4789770A (en) * 1987-07-15 1988-12-06 Westinghouse Electric Corp. Controlled depth laser drilling system
US5166493A (en) * 1989-01-10 1992-11-24 Canon Kabushiki Kaisha Apparatus and method of boring using laser
US5126532A (en) * 1989-01-10 1992-06-30 Canon Kabushiki Kaisha Apparatus and method of boring using laser
US5593606A (en) * 1994-07-18 1997-01-14 Electro Scientific Industries, Inc. Ultraviolet laser system and method for forming vias in multi-layered targets
US5841099A (en) * 1994-07-18 1998-11-24 Electro Scientific Industries, Inc. Method employing UV laser pulses of varied energy density to form depthwise self-limiting blind vias in multilayered targets
DE19518868A1 (de) * 1995-05-23 1996-11-28 Manfred Dr Rer Nat Di Ostertag Verfahren und Vorrichtung zur Photoablation anorganischer, nicht metallischer Korrosionskrusten und Ablagerungen
DE69737991T2 (de) * 1996-11-20 2008-04-30 Ibiden Co., Ltd., Ogaki Laserbearbeitungsvorrichtung, verfahren und vorrichtung zur herstellung einer mehrschichtigen, gedruckten leiterplatte

Also Published As

Publication number Publication date
DE69911963T2 (de) 2004-05-19
JP2002517103A (ja) 2002-06-11
AU4273699A (en) 1999-12-13
GB9912274D0 (en) 1999-07-28
EP1090537B1 (de) 2003-10-08
ATE251835T1 (de) 2003-10-15
WO1999062310A1 (en) 1999-12-02
US6576869B1 (en) 2003-06-10
GB9811328D0 (en) 1998-07-22
GB2337719A (en) 1999-12-01
EP1090537A1 (de) 2001-04-11

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee