DE69909046T2 - Ofen zum Erwärmen von Gegenständen - Google Patents

Ofen zum Erwärmen von Gegenständen Download PDF

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Publication number
DE69909046T2
DE69909046T2 DE69909046T DE69909046T DE69909046T2 DE 69909046 T2 DE69909046 T2 DE 69909046T2 DE 69909046 T DE69909046 T DE 69909046T DE 69909046 T DE69909046 T DE 69909046T DE 69909046 T2 DE69909046 T2 DE 69909046T2
Authority
DE
Germany
Prior art keywords
oven
articles
heating objects
furnace
track
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69909046T
Other languages
English (en)
Other versions
DE69909046D1 (de
Inventor
Franciscus Cornelis Dings
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
OTB Solar BV
Original Assignee
OTB Group BV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by OTB Group BV filed Critical OTB Group BV
Application granted granted Critical
Publication of DE69909046D1 publication Critical patent/DE69909046D1/de
Publication of DE69909046T2 publication Critical patent/DE69909046T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67098—Apparatus for thermal treatment
    • H01L21/67115—Apparatus for thermal treatment mainly by radiation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
    • F27B9/06—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity heated without contact between combustion gases and charge; electrically heated
    • F27B9/062—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity heated without contact between combustion gases and charge; electrically heated electrically heated
    • F27B9/066—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity heated without contact between combustion gases and charge; electrically heated electrically heated heated by lamps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
    • F27B9/06—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity heated without contact between combustion gases and charge; electrically heated
    • F27B9/08—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity heated without contact between combustion gases and charge; electrically heated heated through chamber walls
    • F27B9/082—Muffle furnaces
    • F27B9/084—Muffle furnaces the muffle being fixed and in a single piece
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
    • F27B9/14—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity characterised by the path of the charge during treatment; characterised by the means by which the charge is moved during treatment
    • F27B9/20—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity characterised by the path of the charge during treatment; characterised by the means by which the charge is moved during treatment the charge moving in a substantially straight path tunnel furnace
    • F27B9/24—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity characterised by the path of the charge during treatment; characterised by the means by which the charge is moved during treatment the charge moving in a substantially straight path tunnel furnace being carried by a conveyor
    • F27B9/2407—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity characterised by the path of the charge during treatment; characterised by the means by which the charge is moved during treatment the charge moving in a substantially straight path tunnel furnace being carried by a conveyor the conveyor being constituted by rollers (roller hearth furnace)
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
    • F27B9/14—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity characterised by the path of the charge during treatment; characterised by the means by which the charge is moved during treatment
    • F27B9/20—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity characterised by the path of the charge during treatment; characterised by the means by which the charge is moved during treatment the charge moving in a substantially straight path tunnel furnace
    • F27B9/24—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity characterised by the path of the charge during treatment; characterised by the means by which the charge is moved during treatment the charge moving in a substantially straight path tunnel furnace being carried by a conveyor
    • F27B9/243—Endless-strand conveyor
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D1/00—Casings; Linings; Walls; Roofs
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D3/00—Charging; Discharging; Manipulation of charge
    • F27D3/12—Travelling or movable supports or containers for the charge
    • F27D2003/121—Band, belt or mesh
    • F27D2003/122—Band made from longitudinal wires or bars
DE69909046T 1998-12-17 1999-12-17 Ofen zum Erwärmen von Gegenständen Expired - Lifetime DE69909046T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL1010836A NL1010836C2 (nl) 1998-12-17 1998-12-17 Oven voor het vervaardigen van zonnecellen.

Publications (2)

Publication Number Publication Date
DE69909046D1 DE69909046D1 (de) 2003-07-31
DE69909046T2 true DE69909046T2 (de) 2004-01-15

Family

ID=19768333

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69909046T Expired - Lifetime DE69909046T2 (de) 1998-12-17 1999-12-17 Ofen zum Erwärmen von Gegenständen

Country Status (7)

Country Link
US (1) US6288366B1 (de)
EP (1) EP1010960B1 (de)
AT (1) ATE243834T1 (de)
DE (1) DE69909046T2 (de)
ES (1) ES2197575T3 (de)
NL (1) NL1010836C2 (de)
PT (1) PT1010960E (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111238229A (zh) * 2020-01-09 2020-06-05 济南麦哈勃冶金技术开发有限公司 锆芯烧结隧道窑连续出料系统

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ITMI20012628A1 (it) * 2001-12-13 2003-06-13 Eurosolare Spa Forno di cottura di dispositivi fotovoltaici
US8960099B2 (en) * 2002-07-22 2015-02-24 Brooks Automation, Inc Substrate processing apparatus
US7959395B2 (en) 2002-07-22 2011-06-14 Brooks Automation, Inc. Substrate processing apparatus
US7988398B2 (en) 2002-07-22 2011-08-02 Brooks Automation, Inc. Linear substrate transport apparatus
US7575406B2 (en) * 2002-07-22 2009-08-18 Brooks Automation, Inc. Substrate processing apparatus
JP2004286425A (ja) * 2003-03-06 2004-10-14 Ngk Insulators Ltd 線材を用いた搬送機構並びにそれを使用した熱処理炉及び熱処理方法
US8545159B2 (en) * 2003-10-01 2013-10-01 Jusung Engineering Co., Ltd. Apparatus having conveyor and method of transferring substrate using the same
US7514650B2 (en) * 2005-12-08 2009-04-07 Despatch Industries Limited Partnership Continuous infrared furnace
US20090183675A1 (en) * 2006-10-13 2009-07-23 Mustafa Pinarbasi Reactor to form solar cell absorbers
US20080175993A1 (en) * 2006-10-13 2008-07-24 Jalal Ashjaee Reel-to-reel reaction of a precursor film to form solar cell absorber
US9103033B2 (en) * 2006-10-13 2015-08-11 Solopower Systems, Inc. Reel-to-reel reaction of precursor film to form solar cell absorber
US20090050208A1 (en) * 2006-10-19 2009-02-26 Basol Bulent M Method and structures for controlling the group iiia material profile through a group ibiiiavia compound layer
DE102008061537A1 (de) 2008-12-03 2010-06-10 Aci-Ecotec Gmbh & Co. Kg Aushärtevorrichtung für photovoltaische Dünnschicht-Solarzellen
US8602706B2 (en) * 2009-08-17 2013-12-10 Brooks Automation, Inc. Substrate processing apparatus
WO2011130518A1 (en) * 2010-04-14 2011-10-20 Babcock & Wilcox Technical Services Y-12, Llc Heat treatment furnace
CN102062533A (zh) * 2010-10-29 2011-05-18 常州亿晶光电科技有限公司 无网带硅电池片烧结炉的炉膛温区气流隔热装置
US8816253B2 (en) * 2011-01-21 2014-08-26 Tp Solar, Inc. Dual independent transport systems for IR conveyor furnaces and methods of firing thin work pieces
US9915475B2 (en) * 2011-04-12 2018-03-13 Jiaxiong Wang Assembled reactor for fabrications of thin film solar cell absorbers through roll-to-roll processes
US9589817B2 (en) 2011-04-15 2017-03-07 Illinois Tool Works Inc. Dryer
CN103560179B (zh) * 2013-11-18 2015-10-28 北京金晟阳光科技有限公司 具有se功能的水平辊道式连续扩散设备
CN111238226B (zh) * 2020-01-09 2021-07-02 济南麦哈勃冶金技术开发有限公司 锆芯自动烧结隧道窑系统
CN112563371B (zh) * 2020-12-11 2022-10-14 常州时创能源股份有限公司 N型晶硅电池硼发射极的制备方法及应用

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111238229A (zh) * 2020-01-09 2020-06-05 济南麦哈勃冶金技术开发有限公司 锆芯烧结隧道窑连续出料系统
CN111238229B (zh) * 2020-01-09 2021-07-09 济南麦哈勃冶金技术开发有限公司 锆芯烧结隧道窑连续出料系统

Also Published As

Publication number Publication date
NL1010836C2 (nl) 2000-06-23
EP1010960A1 (de) 2000-06-21
ATE243834T1 (de) 2003-07-15
DE69909046D1 (de) 2003-07-31
PT1010960E (pt) 2003-10-31
EP1010960B1 (de) 2003-06-25
US6288366B1 (en) 2001-09-11
ES2197575T3 (es) 2004-01-01

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: OTB SOLAR B.V., EINDHOVEN, NL