DE69907095D1 - Herstellungsverfahren für optische Filter - Google Patents
Herstellungsverfahren für optische FilterInfo
- Publication number
- DE69907095D1 DE69907095D1 DE69907095T DE69907095T DE69907095D1 DE 69907095 D1 DE69907095 D1 DE 69907095D1 DE 69907095 T DE69907095 T DE 69907095T DE 69907095 T DE69907095 T DE 69907095T DE 69907095 D1 DE69907095 D1 DE 69907095D1
- Authority
- DE
- Germany
- Prior art keywords
- manufacturing process
- optical filters
- filters
- optical
- manufacturing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
- C23C14/042—Coating on selected surface areas, e.g. using masks using masks
- C23C14/044—Coating on selected surface areas, e.g. using masks using masks using masks to redistribute rather than totally prevent coating, e.g. producing thickness gradient
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
- B29D11/00—Producing optical elements, e.g. lenses or prisms
- B29D11/00634—Production of filters
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/22—Absorbing filters
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Ophthalmology & Optometry (AREA)
- Health & Medical Sciences (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Filters (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP24013098 | 1998-08-26 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69907095D1 true DE69907095D1 (de) | 2003-05-28 |
DE69907095T2 DE69907095T2 (de) | 2003-12-11 |
Family
ID=17054954
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69907095T Expired - Lifetime DE69907095T2 (de) | 1998-08-26 | 1999-08-26 | Herstellungsverfahren für optische Filter |
Country Status (3)
Country | Link |
---|---|
US (1) | US6475557B1 (de) |
EP (1) | EP0982604B1 (de) |
DE (1) | DE69907095T2 (de) |
Families Citing this family (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6419803B1 (en) * | 2001-03-16 | 2002-07-16 | 4Wave, Inc. | System and method for making thin-film structures using a stepped profile mask |
TW574592B (en) * | 2003-01-29 | 2004-02-01 | Asia Optical Co Inc | Multi-color film-plating process of a single piece type filter and color rotation wheel set equipped with the filter |
US7901870B1 (en) | 2004-05-12 | 2011-03-08 | Cirrex Systems Llc | Adjusting optical properties of optical thin films |
US7565084B1 (en) | 2004-09-15 | 2009-07-21 | Wach Michael L | Robustly stabilizing laser systems |
US20060281310A1 (en) * | 2005-06-08 | 2006-12-14 | Applied Materials, Inc. | Rotating substrate support and methods of use |
US8094270B2 (en) * | 2005-12-06 | 2012-01-10 | Jds Uniphase Corporation | Thin-film optical retarders |
US20080285165A1 (en) * | 2007-05-14 | 2008-11-20 | Wu Kuohua Angus | Thin film filter system and method |
US8647437B2 (en) * | 2010-05-31 | 2014-02-11 | Ci Systems (Israel) Ltd. | Apparatus, tool and methods for depositing annular or circular wedge coatings |
JP6319985B2 (ja) | 2013-10-11 | 2018-05-09 | インターナショナル・ビジネス・マシーンズ・コーポレーションInternational Business Machines Corporation | 光モジュール及び光モジュール製造方法。 |
CN104264110B (zh) * | 2014-08-29 | 2017-09-22 | 宁波英飞迈材料科技有限公司 | 一种制备二维组合材料芯片的方法 |
KR102502192B1 (ko) * | 2015-01-23 | 2023-02-21 | 마테리온 코포레이션 | 개선된 투과를 갖는 근적외선 광학 간섭 필터 |
US9804310B2 (en) | 2015-02-17 | 2017-10-31 | Materion Corporation | Method of fabricating anisotropic optical interference filter |
CN105911624B (zh) * | 2016-06-20 | 2017-05-10 | 三明福特科光电有限公司 | 一种生产矩形线性渐变滤光片的方法及其生产装置 |
GB201702478D0 (en) * | 2017-02-15 | 2017-03-29 | Univ Of The West Of Scotland | Apparatus and methods for depositing variable interference filters |
CN107523789B (zh) * | 2017-09-18 | 2019-04-19 | 江门市卡色光学有限公司 | 一种渐变灰滤镜镀制装置及其镀制方法 |
DE102018133062A1 (de) * | 2018-12-20 | 2020-06-25 | Optics Balzers Ag | Verfahren zur Herstellung eines linear variablen optischen Filters |
TWI730862B (zh) * | 2020-08-03 | 2021-06-11 | 國立陽明交通大學 | 製造具厚度變化的薄膜的方法 |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3530824A (en) * | 1964-08-25 | 1970-09-29 | Optical Coating Laboratory Inc | Deposition apparatus including rotatable and orbital masking assembly |
US3859131A (en) * | 1970-11-27 | 1975-01-07 | Baird Atomic Inc | Process involving optical thin film filters protected against deterioration from humidity |
US4022928A (en) * | 1975-05-22 | 1977-05-10 | Piwcyzk Bernhard P | Vacuum deposition methods and masking structure |
JPS5214426A (en) | 1975-07-23 | 1977-02-03 | Matsushita Electric Ind Co Ltd | Tehrmal record printing head |
CA1197088A (en) | 1983-10-17 | 1985-11-26 | Jerzy A. Dobrowolski | Vapour deposition regulating apparatus |
US5032461A (en) * | 1983-12-19 | 1991-07-16 | Spectrum Control, Inc. | Method of making a multi-layered article |
JPH032802A (ja) | 1989-05-31 | 1991-01-09 | Minolta Camera Co Ltd | 連続干渉フィルターの製造方法 |
US5872655A (en) * | 1991-07-10 | 1999-02-16 | Optical Coating Laboratory, Inc. | Monolithic linear variable filter and method of manufacture |
JP3002802B2 (ja) | 1993-09-06 | 2000-01-24 | 大島農機株式会社 | 二段式立体駐車装置 |
EP1126309A1 (de) * | 1994-04-12 | 2001-08-22 | Domenico Orzi | Optische Filteranordnung |
JPH0886914A (ja) | 1994-09-19 | 1996-04-02 | Matsushita Electric Ind Co Ltd | ダイクロイック膜の形成方法及び形成装置 |
JPH09243822A (ja) * | 1996-03-06 | 1997-09-19 | Yokogawa Electric Corp | 多波長選択光学フィルタの製造装置及び多波長選択光学フィルタ |
JPH09324267A (ja) | 1996-06-06 | 1997-12-16 | Nippon Telegr & Teleph Corp <Ntt> | 積層薄膜の製造装置とそれを用いた積層薄膜の作製方法 |
US5866204A (en) * | 1996-07-23 | 1999-02-02 | The Governors Of The University Of Alberta | Method of depositing shadow sculpted thin films |
JP4058122B2 (ja) | 1996-10-07 | 2008-03-05 | 昭和オプトロニクス株式会社 | 光学素子用誘電体多層膜の成膜装置 |
-
1999
- 1999-08-26 US US09/383,659 patent/US6475557B1/en not_active Expired - Fee Related
- 1999-08-26 EP EP99116720A patent/EP0982604B1/de not_active Expired - Lifetime
- 1999-08-26 DE DE69907095T patent/DE69907095T2/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0982604A2 (de) | 2000-03-01 |
EP0982604A3 (de) | 2001-01-03 |
EP0982604B1 (de) | 2003-04-23 |
DE69907095T2 (de) | 2003-12-11 |
US6475557B1 (en) | 2002-11-05 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |