DE69512557D1 - Herstellungsverfahren für optischen Wellenleiter - Google Patents

Herstellungsverfahren für optischen Wellenleiter

Info

Publication number
DE69512557D1
DE69512557D1 DE69512557T DE69512557T DE69512557D1 DE 69512557 D1 DE69512557 D1 DE 69512557D1 DE 69512557 T DE69512557 T DE 69512557T DE 69512557 T DE69512557 T DE 69512557T DE 69512557 D1 DE69512557 D1 DE 69512557D1
Authority
DE
Germany
Prior art keywords
manufacturing process
optical waveguides
waveguides
optical
manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69512557T
Other languages
English (en)
Other versions
DE69512557T2 (de
Inventor
Hiroo Kanamori
Chisai Hirose
Yuji Matsuura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Publication of DE69512557D1 publication Critical patent/DE69512557D1/de
Application granted granted Critical
Publication of DE69512557T2 publication Critical patent/DE69512557T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00—Other methods of shaping glass
    • C03B19/14—Other methods of shaping glass by gas- or vapour- phase reaction processes
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00—Other methods of shaping glass
    • C03B19/14—Other methods of shaping glass by gas- or vapour- phase reaction processes
    • C03B19/1453—Thermal after-treatment of the shaped article, e.g. dehydrating, consolidating, sintering
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/02—Surface treatment of glass, not in the form of fibres or filaments, by coating with glass
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12035—Materials
    • G02B2006/12038—Glass (SiO2 based materials)
DE69512557T 1994-04-22 1995-04-21 Herstellungsverfahren für optischen Wellenleiter Expired - Fee Related DE69512557T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6084630A JPH07294760A (ja) 1994-04-22 1994-04-22 光導波路の製造方法

Publications (2)

Publication Number Publication Date
DE69512557D1 true DE69512557D1 (de) 1999-11-11
DE69512557T2 DE69512557T2 (de) 2000-02-17

Family

ID=13836011

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69512557T Expired - Fee Related DE69512557T2 (de) 1994-04-22 1995-04-21 Herstellungsverfahren für optischen Wellenleiter

Country Status (5)

Country Link
US (1) US5693116A (de)
EP (1) EP0678763B1 (de)
JP (1) JPH07294760A (de)
DE (1) DE69512557T2 (de)
ES (1) ES2138676T3 (de)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6442973B1 (en) 1995-01-06 2002-09-03 Nikon Corporation Synthetic silica glass and its manufacturing method
JPH11209134A (ja) * 1998-01-23 1999-08-03 Nikon Corp 合成石英ガラスおよびその製造方法
US5800860A (en) * 1995-06-28 1998-09-01 Lucent Technologies Inc. Method of manufacturing planar optical waveguides
BR9707515A (pt) 1996-12-16 1999-07-27 Corning Inc Estoque de alimentac o de formac o de sílica dopada com germânio e processo
JP3270353B2 (ja) * 1997-03-05 2002-04-02 日本電気株式会社 光導波路の製造方法
KR100509510B1 (ko) * 1997-07-15 2005-10-21 삼성전자주식회사 균일한 평면 광도파로 제작방법
US7024087B2 (en) * 2000-11-30 2006-04-04 Matsushita Electric Industrial Co., Ltd. Optical waveguide and method of forming the same
US20030070452A1 (en) * 2001-10-12 2003-04-17 Alcatel Process for online spheroidization of quartz and silica particles
US7290407B1 (en) 2001-12-19 2007-11-06 Jesse Chienhua Shan Triangle-shaped planar optical waveguide having reduced scattering loss
KR100461874B1 (ko) * 2002-09-04 2004-12-14 광주과학기술원 Ｆｈｄ 공정을 이용한 광민감성 평면 도파로형 소자의제작방법

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58105111A (ja) * 1981-12-18 1983-06-22 Nippon Telegr & Teleph Corp <Ntt> ガラス光導波膜の製造方法および製造装置
JP2599488B2 (ja) * 1990-02-26 1997-04-09 日本電信電話株式会社 光導波回路の特性調整方法およびその方法に使われる光導波回路
JP2855832B2 (ja) * 1990-09-20 1999-02-10 住友電気工業株式会社 石英系光導波路の製造方法
CA2084461A1 (en) * 1991-12-06 1993-06-07 Hiroo Kanamori Method for fabricating an optical waveguide
AU657845B2 (en) * 1992-03-17 1995-03-23 Sumitomo Electric Industries, Ltd. Method and apparatus for producing glass thin film

Also Published As

Publication number Publication date
DE69512557T2 (de) 2000-02-17
US5693116A (en) 1997-12-02
ES2138676T3 (es) 2000-01-16
EP0678763B1 (de) 1999-10-06
JPH07294760A (ja) 1995-11-10
EP0678763A1 (de) 1995-10-25

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee