DE69904558T2 - Multi-spalt bilderzeugender spektrometer - Google Patents
Multi-spalt bilderzeugender spektrometerInfo
- Publication number
- DE69904558T2 DE69904558T2 DE69904558T DE69904558T DE69904558T2 DE 69904558 T2 DE69904558 T2 DE 69904558T2 DE 69904558 T DE69904558 T DE 69904558T DE 69904558 T DE69904558 T DE 69904558T DE 69904558 T2 DE69904558 T2 DE 69904558T2
- Authority
- DE
- Germany
- Prior art keywords
- imaging spectrometer
- split imaging
- split
- spectrometer
- imaging
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000003384 imaging method Methods 0.000 title 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
- G01J3/0208—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using focussing or collimating elements, e.g. lenses or mirrors; performing aberration correction
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0294—Multi-channel spectroscopy
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/04—Slit arrangements slit adjustment
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/2823—Imaging spectrometer
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/090,712 US6122051A (en) | 1998-06-04 | 1998-06-04 | Multi-slit spectrometer |
PCT/US1999/010154 WO1999063311A1 (en) | 1998-06-04 | 1999-05-10 | Multi-slit imaging spectrometer |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69904558D1 DE69904558D1 (de) | 2003-01-30 |
DE69904558T2 true DE69904558T2 (de) | 2003-11-20 |
Family
ID=22223953
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69904558T Expired - Lifetime DE69904558T2 (de) | 1998-06-04 | 1999-05-10 | Multi-spalt bilderzeugender spektrometer |
Country Status (4)
Country | Link |
---|---|
US (1) | US6122051A (de) |
EP (1) | EP1002220B1 (de) |
DE (1) | DE69904558T2 (de) |
WO (1) | WO1999063311A1 (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE112009004828B4 (de) * | 2009-05-29 | 2016-02-18 | Toyota Jidosha Kabushiki Kaisha | Spektrum-messvorrichtung |
Families Citing this family (54)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6954271B2 (en) | 2001-10-10 | 2005-10-11 | Analytical Spectral Devices, Inc. | System and method for multiplexing inputs into a single spectrometer |
US20060072109A1 (en) * | 2004-09-03 | 2006-04-06 | Andrew Bodkin | Hyperspectral imaging systems |
DE10207742B4 (de) * | 2002-02-22 | 2008-11-20 | Berthold Gmbh & Co. Kg | Atomabsorptionsspektroskopieverfahren und Atomabsorptionsspektrometer |
US6886953B2 (en) * | 2002-03-22 | 2005-05-03 | Raytheon Company | High-resolution, all-reflective imaging spectrometer |
US6734966B2 (en) * | 2002-04-02 | 2004-05-11 | Northrop Grumman Corporation | Space borne high resolution hyperspectral imaging instrument optimized for the study of atmospheric constituents |
US7391388B2 (en) * | 2002-10-28 | 2008-06-24 | Raytheon Company | Segmented spectrum imaging system and method |
US6922240B2 (en) * | 2003-08-21 | 2005-07-26 | The Regents Of The University Of California | Compact refractive imaging spectrometer utilizing immersed gratings |
US7041979B2 (en) * | 2003-09-09 | 2006-05-09 | The Regents Of The University Of California | Compact reflective imaging spectrometer utilizing immersed gratings |
US7006217B2 (en) * | 2003-09-09 | 2006-02-28 | The Regents Of The University Of California | Compact catadioptric imaging spectrometer utilizing immersed gratings |
US6980295B2 (en) * | 2003-10-06 | 2005-12-27 | The Regents Of The University Of California | Compact catadioptric imaging spectrometer utilizing reflective grating |
US6977727B2 (en) * | 2003-10-06 | 2005-12-20 | The Regents Of The University Of California | Compact imaging spectrometer utilizing immersed gratings |
IL162290A (en) * | 2004-06-01 | 2013-06-27 | Nova Measuring Instr Ltd | Optical measurement system |
US7336357B2 (en) * | 2004-08-13 | 2008-02-26 | University Of Pittsburgh | Multi-channel dual phase lock-in optical spectrometer |
US7791727B2 (en) | 2004-08-16 | 2010-09-07 | Asml Netherlands B.V. | Method and apparatus for angular-resolved spectroscopic lithography characterization |
US20080144036A1 (en) | 2006-12-19 | 2008-06-19 | Asml Netherlands B.V. | Method of measurement, an inspection apparatus and a lithographic apparatus |
US7016038B2 (en) * | 2004-08-17 | 2006-03-21 | The Regents Of The University Of California | Compact imaging spectrometer utilizing immersed gratings |
US7239386B2 (en) * | 2004-08-17 | 2007-07-03 | The Regents Of The University Of California | Compact imaging spectrometer utilizing immersed gratings |
TWI245114B (en) * | 2004-10-11 | 2005-12-11 | Ind Tech Res Inst | Apparatus for measuring imaging spectrograph |
US7414719B2 (en) * | 2006-01-26 | 2008-08-19 | Lawrence Livermore National Security, Llc | Imaging spectrometer wide field catadioptric design |
JP2009527953A (ja) * | 2006-02-22 | 2009-07-30 | アイトレス リサーチ リミテッド | 光多重化撮像システムおよび操作方法 |
US20080024871A1 (en) * | 2006-02-22 | 2008-01-31 | Itres Research Limited | Optically multiplexed imaging systems and methods of operation |
US7382498B1 (en) | 2007-04-30 | 2008-06-03 | Raytheon Company | Two-channel imaging spectrometer utilizing shared objective, collimating, and imaging optics |
US7817274B2 (en) | 2007-10-05 | 2010-10-19 | Jingyun Zhang | Compact spectrometer |
WO2009070459A1 (en) | 2007-11-30 | 2009-06-04 | Jingyun Zhang | Miniature spectrometers working with cellular phones and other portable electronic devices |
TWI425203B (zh) * | 2008-09-03 | 2014-02-01 | Univ Nat Central | 高頻譜掃描裝置及其方法 |
US8149400B2 (en) | 2009-04-07 | 2012-04-03 | Duke University | Coded aperture snapshot spectral imager and method therefor |
US8755048B2 (en) | 2009-05-29 | 2014-06-17 | Toyota Jidosha Kabushiki Kaisha | Spectrum measuring apparatus for mover |
JP5212544B2 (ja) * | 2009-05-29 | 2013-06-19 | トヨタ自動車株式会社 | 移動体用スペクトル測定装置 |
EP2264433A1 (de) | 2009-06-16 | 2010-12-22 | Nederlandse Organisatie voor toegepast -natuurwetenschappelijk onderzoek TNO | Verfahren und System zum quantitativen Fernnachweis von Verbindungen in der Atmosphäre |
CN101943602B (zh) * | 2010-07-28 | 2013-07-03 | 中国科学院长春光学精密机械与物理研究所 | 一种宽幅成像光谱仪视场分束器 |
US8740168B2 (en) * | 2011-03-14 | 2014-06-03 | Lawrence Livermore National Security, Llc. | Cryogenically cooled detector pin mount |
US20120250015A1 (en) * | 2011-03-28 | 2012-10-04 | Utah State University Research Foundation | High-Resolution Spectral Volume Sampling |
US8823932B2 (en) | 2011-04-04 | 2014-09-02 | Corning Incorporated | Multi field of view hyperspectral imaging device and method for using same |
US8436992B2 (en) | 2011-07-27 | 2013-05-07 | Raytheon Company | Low distortion spectrometer |
US8507866B2 (en) * | 2011-12-13 | 2013-08-13 | Raytheon Company | Cold-shielded infrared dispersive spectrometer with all ambient optics |
FR2991046B1 (fr) * | 2012-05-23 | 2014-12-12 | Centre Nat Etd Spatiales | Spectrophotometre hyperspectral large bande |
US9291501B2 (en) | 2012-07-26 | 2016-03-22 | Raytheon Company | High efficiency multi-channel spectrometer |
WO2014121039A1 (en) | 2013-01-31 | 2014-08-07 | Duke University | System for improved compressive tomography and method therefor |
WO2015023741A1 (en) | 2013-08-13 | 2015-02-19 | Duke University | Structured illumination for volumetric-molecular-imaging |
JP6251073B2 (ja) * | 2014-02-05 | 2017-12-20 | 浜松ホトニクス株式会社 | 分光器、及び分光器の製造方法 |
US9372115B2 (en) * | 2014-08-05 | 2016-06-21 | Bae Systems Information And Electronic Systems Integration Inc. | Airborne hyperspectral scanning system with reflective telecentric relay |
US9250136B1 (en) * | 2014-08-29 | 2016-02-02 | General Electric Company | Hyperspectral imaging system for pyrometry applications and method of operating the same |
US9940520B2 (en) * | 2015-05-01 | 2018-04-10 | Applied Research LLC. | Automatic target recognition system with online machine learning capability |
US9720243B1 (en) * | 2015-12-31 | 2017-08-01 | X Development Llc | Wavelength division monolithic optical device |
RU2624622C1 (ru) * | 2016-07-09 | 2017-07-04 | Акционерное общество "НПО "ЛЕПТОН" | Многощелевая гиперспектральная камера с комбинированным отслеживанием изображения |
CN106644074B (zh) * | 2016-11-16 | 2019-01-18 | 中国科学院光电研究院 | 一种三维立体光谱成像系统 |
CN106769898B (zh) * | 2016-12-29 | 2024-01-26 | 同方威视技术股份有限公司 | 多分辨率光谱仪 |
EP3574293A4 (de) | 2017-01-25 | 2020-10-14 | Testright Nanosystems PVT. LTD. | Spektrometer und verfahren zur messung der spektralen eigenschaften desselben |
EP3415882B1 (de) * | 2017-06-15 | 2022-03-02 | Airbus Defence and Space SAS | Abbildungsspektrophotometer und satellit damit |
US10620408B2 (en) | 2017-07-11 | 2020-04-14 | Bae Systems Information And Electronic Systems Integration Inc. | Compact orthoscopic VNIR/SWIR lens |
US10345144B2 (en) * | 2017-07-11 | 2019-07-09 | Bae Systems Information And Electronics Systems Integration Inc. | Compact and athermal VNIR/SWIR spectrometer |
US11268860B2 (en) | 2020-07-24 | 2022-03-08 | Raytheon Company | Radiometric calibration of detector |
CN114739905A (zh) * | 2022-04-06 | 2022-07-12 | 杭州佰腾电子科技有限公司 | 一种双光路光谱仪及测色装置与校准方法 |
CN116429959A (zh) * | 2023-06-14 | 2023-07-14 | 山东悟空仪器有限公司 | 检测器用多狭缝切换结构 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3279308A (en) * | 1963-12-02 | 1966-10-18 | Dow Chemical Co | Dispersive analyzer having means for segregating different wavelengths of radiation from a single source |
US3519816A (en) * | 1966-10-05 | 1970-07-07 | Dow Chemical Co | Stream analyzer for radiation absorption analysis of a plurality of components |
GB1184633A (en) * | 1968-02-16 | 1970-03-18 | Trw Inc | Image Spectrophotometer. |
JPH02275326A (ja) * | 1989-04-17 | 1990-11-09 | Kuraray Co Ltd | スペクトロメータ |
US5149959A (en) * | 1991-04-15 | 1992-09-22 | Geophysical & Environmental Research Corporation | Airborne multiband imaging spectrometer |
JPH06241897A (ja) * | 1993-02-12 | 1994-09-02 | Mitsubishi Heavy Ind Ltd | 分光装置 |
FR2709827B1 (fr) * | 1993-09-07 | 1995-10-06 | Thomson Csf | Dispositif optique d'imagerie permettant l'analyse spectrale d'une scène. |
US5627639A (en) * | 1995-06-06 | 1997-05-06 | Lockheed Missiles & Space Company, Inc. | Coded aperture imaging spectrometer |
US5768040A (en) * | 1995-10-06 | 1998-06-16 | Orbital Sciences Corporation | Wide field-of-view imaging spectrometer |
US5760899A (en) * | 1996-09-04 | 1998-06-02 | Erim International, Inc. | High-sensitivity multispectral sensor |
GB2317446B (en) * | 1996-09-20 | 2000-03-29 | Npl Management Ltd | Spectrometer apparatus |
-
1998
- 1998-06-04 US US09/090,712 patent/US6122051A/en not_active Expired - Lifetime
-
1999
- 1999-05-10 DE DE69904558T patent/DE69904558T2/de not_active Expired - Lifetime
- 1999-05-10 WO PCT/US1999/010154 patent/WO1999063311A1/en active IP Right Grant
- 1999-05-10 EP EP99920416A patent/EP1002220B1/de not_active Expired - Lifetime
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE112009004828B4 (de) * | 2009-05-29 | 2016-02-18 | Toyota Jidosha Kabushiki Kaisha | Spektrum-messvorrichtung |
Also Published As
Publication number | Publication date |
---|---|
US6122051A (en) | 2000-09-19 |
EP1002220A1 (de) | 2000-05-24 |
DE69904558D1 (de) | 2003-01-30 |
WO1999063311A1 (en) | 1999-12-09 |
EP1002220B1 (de) | 2002-12-18 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |