DE69904338T2 - Vorricthung zum messen von translation,rotation oder geschwindigkeit durch interferenz von lichtstrahlen - Google Patents

Vorricthung zum messen von translation,rotation oder geschwindigkeit durch interferenz von lichtstrahlen

Info

Publication number
DE69904338T2
DE69904338T2 DE69904338T DE69904338T DE69904338T2 DE 69904338 T2 DE69904338 T2 DE 69904338T2 DE 69904338 T DE69904338 T DE 69904338T DE 69904338 T DE69904338 T DE 69904338T DE 69904338 T2 DE69904338 T2 DE 69904338T2
Authority
DE
Germany
Prior art keywords
grating
rotation
interference
speed
light beams
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69904338T
Other languages
English (en)
Other versions
DE69904338D1 (de
Inventor
Olivier M Parriaux
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of DE69904338D1 publication Critical patent/DE69904338D1/de
Application granted granted Critical
Publication of DE69904338T2 publication Critical patent/DE69904338T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
DE69904338T 1998-08-21 1999-08-19 Vorricthung zum messen von translation,rotation oder geschwindigkeit durch interferenz von lichtstrahlen Expired - Lifetime DE69904338T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP98115810 1998-08-21
PCT/EP1999/006057 WO2000011431A1 (en) 1998-08-21 1999-08-19 Device for measuring translation, rotation or velocity via light beam interference

Publications (2)

Publication Number Publication Date
DE69904338D1 DE69904338D1 (de) 2003-01-16
DE69904338T2 true DE69904338T2 (de) 2003-10-16

Family

ID=8232496

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69904338T Expired - Lifetime DE69904338T2 (de) 1998-08-21 1999-08-19 Vorricthung zum messen von translation,rotation oder geschwindigkeit durch interferenz von lichtstrahlen

Country Status (7)

Country Link
US (2) US6359691B2 (de)
EP (1) EP1104543B1 (de)
AT (1) ATE229169T1 (de)
CA (1) CA2341432C (de)
DE (1) DE69904338T2 (de)
IL (1) IL141536A (de)
WO (1) WO2000011431A1 (de)

Families Citing this family (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4381671B2 (ja) * 2002-10-23 2009-12-09 ソニーマニュファクチュアリングシステムズ株式会社 変位検出装置
EP1519158B1 (de) * 2003-09-23 2010-08-11 Dr. Johannes Heidenhain GmbH Positionsmesseinrichtung
FR2872899A1 (fr) * 2004-07-09 2006-01-13 Neviere Michel Capteur optique de deplacement de resolution nanometrique
FR2872898A1 (fr) * 2004-07-09 2006-01-13 Neviere Michel Capteur optique de deplacement de resolution nanometrique
DE102004035172A1 (de) * 2004-07-16 2006-02-09 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
US20090147265A1 (en) * 2004-11-22 2009-06-11 Koninklijke Philips Electronics, N.V. Detection system for detecting translations of a body
JP2008520997A (ja) * 2004-11-22 2008-06-19 コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ 物体の動きを検出する光学システム
US7961393B2 (en) 2004-12-06 2011-06-14 Moxtek, Inc. Selectively absorptive wire-grid polarizer
US7800823B2 (en) 2004-12-06 2010-09-21 Moxtek, Inc. Polarization device to polarize and further control light
US7570424B2 (en) 2004-12-06 2009-08-04 Moxtek, Inc. Multilayer wire-grid polarizer
US20080055719A1 (en) * 2006-08-31 2008-03-06 Perkins Raymond T Inorganic, Dielectric Grid Polarizer
DE102005043569A1 (de) * 2005-09-12 2007-03-22 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
US8755113B2 (en) 2006-08-31 2014-06-17 Moxtek, Inc. Durable, inorganic, absorptive, ultra-violet, grid polarizer
GB0621487D0 (en) * 2006-10-28 2006-12-06 Renishaw Plc Opto-electronic read head
EP2233892B1 (de) * 2009-03-27 2015-05-27 SICK STEGMANN GmbH Zylindrischer Gitterrotationssensor
US8611007B2 (en) 2010-09-21 2013-12-17 Moxtek, Inc. Fine pitch wire grid polarizer
US8913321B2 (en) 2010-09-21 2014-12-16 Moxtek, Inc. Fine pitch grid polarizer
DE102011050030B4 (de) * 2011-05-02 2013-03-28 Scanlab Ag Positionsdetektor und Lichtablenkvorrichtung mit Positionsdetektor
US8913320B2 (en) 2011-05-17 2014-12-16 Moxtek, Inc. Wire grid polarizer with bordered sections
US8873144B2 (en) 2011-05-17 2014-10-28 Moxtek, Inc. Wire grid polarizer with multiple functionality sections
US8922890B2 (en) 2012-03-21 2014-12-30 Moxtek, Inc. Polarizer edge rib modification
US9354374B2 (en) 2013-10-24 2016-05-31 Moxtek, Inc. Polarizer with wire pair over rib
JP6261380B2 (ja) * 2014-02-27 2018-01-17 株式会社東京精密 光学式エンコーダ
JP6386337B2 (ja) * 2014-10-23 2018-09-05 株式会社ミツトヨ 光学式エンコーダ
US9970845B2 (en) * 2016-02-10 2018-05-15 Apple Inc. Interrogating DOE integrity by reverse illumination
US11982521B2 (en) 2017-02-23 2024-05-14 Nikon Corporation Measurement of a change in a geometrical characteristic and/or position of a workpiece
US11740399B2 (en) * 2018-02-06 2023-08-29 Raytheon Company Low cost dispersive optical elements
US10901202B2 (en) * 2018-09-19 2021-01-26 Illumina, Inc. Structured illumination of a sample
WO2020179342A1 (ja) * 2019-03-01 2020-09-10 パナソニックＩｐマネジメント株式会社 光学装置
DE102019206937A1 (de) * 2019-05-14 2020-11-19 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung
RU201730U1 (ru) * 2020-10-29 2020-12-29 Федеральное государственное бюджетное учреждение "Петербургский институт ядерной физики им. Б.П. Константинова Национального исследовательского центра "Курчатовский институт" Датчик линейных перемещений
CN113758428B (zh) * 2021-09-27 2022-12-13 清华大学 光刻机掩模台六自由度位移测量系统

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3810165C1 (de) * 1988-03-25 1989-07-27 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut, De
DE4027024A1 (de) * 1990-08-27 1992-03-05 Standard Elektrik Lorenz Ag Faserkreisel
EP0590162B1 (de) * 1992-09-21 1996-01-03 Dr. Johannes Heidenhain GmbH Längen- oder Winkelmesseinrichtung
US5424833A (en) 1992-09-21 1995-06-13 Dr. Johannes Heidenhain Gmbh Interferential linear and angular displacement apparatus having scanning and scale grating respectively greater than and less than the source wavelength
JP3478567B2 (ja) * 1992-09-25 2003-12-15 キヤノン株式会社 回転情報検出装置
JP3210111B2 (ja) 1992-12-24 2001-09-17 キヤノン株式会社 変位検出装置
JP3005131B2 (ja) * 1992-12-28 2000-01-31 キヤノン株式会社 変位検出装置
JP3082516B2 (ja) * 1993-05-31 2000-08-28 キヤノン株式会社 光学式変位センサおよび該光学式変位センサを用いた駆動システム
JP3513251B2 (ja) * 1994-03-14 2004-03-31 キヤノン株式会社 光学式変位センサ
EP0741282A3 (de) * 1995-05-04 1998-06-17 CSEM Centre Suisse d'Electronique et de Microtechnique S.A. - Recherche et Développement Optische Vorrichtung zum Messen der relativen Verschiebung zwischen zwei Bauteilen
GB9522491D0 (en) * 1995-11-02 1996-01-03 Renishaw Plc Opto-electronic rotary encoder

Also Published As

Publication number Publication date
EP1104543B1 (de) 2002-12-04
US6359691B2 (en) 2002-03-19
IL141536A (en) 2005-07-25
CA2341432C (en) 2008-01-15
IL141536A0 (en) 2002-03-10
US20010006421A1 (en) 2001-07-05
WO2000011431A1 (en) 2000-03-02
USRE40551E1 (en) 2008-10-28
DE69904338D1 (de) 2003-01-16
ATE229169T1 (de) 2002-12-15
EP1104543A1 (de) 2001-06-06
CA2341432A1 (en) 2000-03-02

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