DE69838420D1 - Verfahren zur modifizierung von oberflächen - Google Patents

Verfahren zur modifizierung von oberflächen

Info

Publication number
DE69838420D1
DE69838420D1 DE69838420T DE69838420T DE69838420D1 DE 69838420 D1 DE69838420 D1 DE 69838420D1 DE 69838420 T DE69838420 T DE 69838420T DE 69838420 T DE69838420 T DE 69838420T DE 69838420 D1 DE69838420 D1 DE 69838420D1
Authority
DE
Germany
Prior art keywords
thereafter
conducting substrate
monomers
non conducting
pattern
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69838420T
Other languages
English (en)
Other versions
DE69838420T2 (de
Inventor
Karl-Gunnar Larsson
Alf Lage Pettersson
Stig Tomas Hedlund
Willis Rudolf Forsling
Lars Anders Gunneriusson
Mats Einar Lindberg
Anna Selling
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Linea Tergi Ltd
Original Assignee
Linea Tergi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Linea Tergi Ltd filed Critical Linea Tergi Ltd
Application granted granted Critical
Publication of DE69838420D1 publication Critical patent/DE69838420D1/de
Publication of DE69838420T2 publication Critical patent/DE69838420T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
    • H05K3/18—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material
    • H05K3/181—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material by electroless plating
    • H05K3/182—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material by electroless plating characterised by the patterning method
    • H05K3/185—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material by electroless plating characterised by the patterning method by making a catalytic pattern by photo-imaging
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/1601—Process or apparatus
    • C23C18/1603—Process or apparatus coating on selected surface areas
    • C23C18/1607—Process or apparatus coating on selected surface areas by direct patterning
    • C23C18/1608—Process or apparatus coating on selected surface areas by direct patterning from pretreatment step, i.e. selective pre-treatment
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/1601—Process or apparatus
    • C23C18/1603—Process or apparatus coating on selected surface areas
    • C23C18/1607—Process or apparatus coating on selected surface areas by direct patterning
    • C23C18/1612—Process or apparatus coating on selected surface areas by direct patterning through irradiation means
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/1601—Process or apparatus
    • C23C18/1633—Process of electroless plating
    • C23C18/1635—Composition of the substrate
    • C23C18/1639—Substrates other than metallic, e.g. inorganic or organic or non-conductive
    • C23C18/1641—Organic substrates, e.g. resin, plastic
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/18—Pretreatment of the material to be coated
    • C23C18/20—Pretreatment of the material to be coated of organic surfaces, e.g. resins
    • C23C18/2006—Pretreatment of the material to be coated of organic surfaces, e.g. resins by other methods than those of C23C18/22 - C23C18/30
    • C23C18/2026—Pretreatment of the material to be coated of organic surfaces, e.g. resins by other methods than those of C23C18/22 - C23C18/30 by radiant energy
    • C23C18/204—Radiation, e.g. UV, laser
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/11—Treatments characterised by their effect, e.g. heating, cooling, roughening
    • H05K2203/1168—Graft-polymerization

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Manufacturing & Machinery (AREA)
  • Inorganic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing Of Printed Wiring (AREA)
  • Chemically Coating (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
  • Chemical Treatment Of Metals (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Polymerisation Methods In General (AREA)
DE69838420T 1997-01-31 1998-01-27 Verfahren zur modifizierung von oberflächen Expired - Lifetime DE69838420T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
SE9700307 1997-01-31
SE9700307A SE508280C2 (sv) 1997-01-31 1997-01-31 Förfarande för att öka vidhäftningsförmågan hos ledande material till ytskikt av polymermaterial
PCT/SE1998/000111 WO1998034446A1 (en) 1997-01-31 1998-01-27 New process for modification of surfaces

Publications (2)

Publication Number Publication Date
DE69838420D1 true DE69838420D1 (de) 2007-10-25
DE69838420T2 DE69838420T2 (de) 2008-07-03

Family

ID=20405596

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69838420T Expired - Lifetime DE69838420T2 (de) 1997-01-31 1998-01-27 Verfahren zur modifizierung von oberflächen

Country Status (10)

Country Link
EP (1) EP0985333B1 (de)
JP (1) JP2001509213A (de)
AT (1) ATE373411T1 (de)
AU (1) AU5888798A (de)
DE (1) DE69838420T2 (de)
DK (1) DK0985333T3 (de)
ES (1) ES2293674T3 (de)
PT (1) PT985333E (de)
SE (1) SE508280C2 (de)
WO (1) WO1998034446A1 (de)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005347424A (ja) 2004-06-01 2005-12-15 Fuji Photo Film Co Ltd 多層配線板及びその製造方法
JP2007169763A (ja) * 2005-12-26 2007-07-05 Osaka Univ 二種以上の金属からなる金属ナノ粒子及びその形成方法
DE602007001344D1 (de) * 2006-04-10 2009-07-30 Linea Tergi Ltd Verfahren zur applizierung eines metalls auf ein substrat
SE0900936A1 (sv) * 2009-07-06 2010-12-28 Cathprint Ab Kateter och metod för tillverkning av sådan kateter
JP2014505160A (ja) 2010-11-16 2014-02-27 キュプトロニック テクノロジー リミテッド プラズマ重合を用いる物体の金属コーティング
EP2645830B1 (de) 2012-03-29 2014-10-08 Atotech Deutschland GmbH Herstellungsverfahren für Schaltungen mit feinen Linien
JP6185986B2 (ja) * 2012-05-07 2017-08-23 キュプトロニック テクノロジー リミテッド 金属を塗布するための方法
WO2014086844A2 (en) 2012-12-05 2014-06-12 Cuptronic Technology Ltd. Metalization of polymeric cavity filters
WO2015149825A1 (en) 2014-03-31 2015-10-08 Abb Technology Ltd Electric power cable and process for the production of electric power cable
EP3137649B1 (de) 2014-04-28 2024-02-21 Cuptronic Technology Ltd. Metallisierung von oberflächen
EP3354629A1 (de) * 2017-01-31 2018-08-01 Centre National De La Recherche Scientifique Material mit einer metallschicht und verfahren zur herstellung dieses materials
WO2022018136A1 (en) 2020-07-21 2022-01-27 Ncapt Ab METHOD FOR SURFACE TREATMENT PRIOR TO COATING and GLUING
SE545002C2 (en) 2020-07-24 2023-02-21 Cuptronic Tech Ltd Method for surface treatment prior to metallization

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52117985A (en) * 1976-03-30 1977-10-03 Hitachi Chem Co Ltd Photosensitive polymer composition
JP2605010B2 (ja) * 1985-01-11 1997-04-30 インターナショナル・ビジネス・マシーンズ・コーポレーション 有機基板への金属付着方法
US4810326A (en) * 1987-08-31 1989-03-07 International Business Machines Corporation Interlaminate adhesion between polymeric materials and electrolytic copper surfaces
US5114757A (en) * 1990-10-26 1992-05-19 Linde Harold G Enhancement of polyimide adhesion on reactive metals
US5225495A (en) * 1991-07-10 1993-07-06 Richard C. Stewart, II Conductive polymer film formation using initiator pretreatment

Also Published As

Publication number Publication date
DE69838420T2 (de) 2008-07-03
SE9700307D0 (sv) 1997-01-31
PT985333E (pt) 2007-12-17
EP0985333B1 (de) 2007-09-12
DK0985333T3 (da) 2008-01-21
EP0985333A1 (de) 2000-03-15
JP2001509213A (ja) 2001-07-10
ATE373411T1 (de) 2007-09-15
SE9700307L (sv) 1998-08-01
WO1998034446A1 (en) 1998-08-06
ES2293674T3 (es) 2008-03-16
AU5888798A (en) 1998-08-25
SE508280C2 (sv) 1998-09-21

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