DE69838345D1 - Abscheidung von material - Google Patents

Abscheidung von material

Info

Publication number
DE69838345D1
DE69838345D1 DE69838345T DE69838345T DE69838345D1 DE 69838345 D1 DE69838345 D1 DE 69838345D1 DE 69838345 T DE69838345 T DE 69838345T DE 69838345 T DE69838345 T DE 69838345T DE 69838345 D1 DE69838345 D1 DE 69838345D1
Authority
DE
Germany
Prior art keywords
deposition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69838345T
Other languages
English (en)
Other versions
DE69838345T2 (de
Inventor
Kwang-Leong Choy
Isaac Tsz Chang
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Imperial College of Science Technology and Medicine
Original Assignee
Imperial College of Science Technology and Medicine
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Imperial College of Science Technology and Medicine filed Critical Imperial College of Science Technology and Medicine
Publication of DE69838345D1 publication Critical patent/DE69838345D1/de
Application granted granted Critical
Publication of DE69838345T2 publication Critical patent/DE69838345T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00—Other methods of shaping glass
    • C03B19/14—Other methods of shaping glass by gas- or vapour- phase reaction processes
    • C03B19/1415—Reactant delivery systems
    • C03B19/1423—Reactant deposition burners
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/453—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating passing the reaction gases through burners or torches, e.g. atmospheric pressure CVD
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/04—Multi-nested ports
    • C03B2207/06—Concentric circular ports
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/20—Specific substances in specified ports, e.g. all gas flows specified
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/30—For glass precursor of non-standard type, e.g. solid SiH3F
    • C03B2207/34—Liquid, e.g. mist or aerosol
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/46—Comprising performance enhancing means, e.g. electrostatic charge or built-in heater

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Chemical Vapour Deposition (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
  • Oxygen, Ozone, And Oxides In General (AREA)
  • Chemically Coating (AREA)
DE69838345T 1997-12-05 1998-12-07 Abscheidung von material Expired - Lifetime DE69838345T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB9725878 1997-12-05
GBGB9725878.4A GB9725878D0 (en) 1997-12-05 1997-12-05 Vapour deposition
PCT/GB1998/003636 WO1999029917A2 (en) 1997-12-05 1998-12-07 Material deposition

Publications (2)

Publication Number Publication Date
DE69838345D1 true DE69838345D1 (de) 2007-10-11
DE69838345T2 DE69838345T2 (de) 2008-05-21

Family

ID=10823241

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69838345T Expired - Lifetime DE69838345T2 (de) 1997-12-05 1998-12-07 Abscheidung von material

Country Status (8)

Country Link
US (1) US7784306B1 (de)
EP (1) EP1042531B1 (de)
JP (1) JP2001526321A (de)
AU (1) AU1442199A (de)
CA (1) CA2312725A1 (de)
DE (1) DE69838345T2 (de)
GB (1) GB9725878D0 (de)
WO (1) WO1999029917A2 (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU5783600A (en) * 1999-07-02 2001-01-22 Microcoating Technologies, Inc. Method of coating ceramics using ccvd
JP2002316037A (ja) * 2001-04-11 2002-10-29 Fukukoku Ko 火焔析出と非真空物理蒸着

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS565337A (en) * 1979-06-20 1981-01-20 Hitachi Ltd Manufacture of optical fiber mother material
JPS5767038A (en) * 1980-10-07 1982-04-23 Nippon Telegr & Teleph Corp <Ntt> Manufacture of base material for optical fiber
JPS6465040A (en) * 1987-09-04 1989-03-10 Sumitomo Electric Industries Production of porous optical fiber preform
JPH0255241A (ja) * 1988-08-19 1990-02-23 Hitachi Cable Ltd 光ファィバ母材の製造方法
US4934595A (en) * 1988-08-19 1990-06-19 Plastic Flamecoat Systems, Inc. Method and aparatus for spray coating
GR1001255B (el) * 1990-10-15 1993-06-30 Glaverbel Παρασκεύασμα υαλωδών βερνικιών και κατασκευή σωμάτων βερνικιών.
US5211990A (en) * 1991-08-01 1993-05-18 The Dow Chemical Company Polyolefin flame spraying method
US5699183A (en) * 1993-02-10 1997-12-16 Nikon Corporation Silica glass member for UV-lithography, method for silica glass production, and method for silica glass member production
US5599371A (en) * 1994-12-30 1997-02-04 Corning Incorporated Method of using precision burners for oxidizing halide-free, silicon-containing compounds
DE19527451C2 (de) * 1995-07-27 1998-06-04 Heraeus Quarzglas Verfahren zur Herstellung eines Quarzglasrohlings und dafür geeigneter Brenner
EP0870075B1 (de) 1995-12-14 2002-06-12 Imperial College Of Science, Technology & Medicine Film- oder schicht-abscheidung und pulver herstellung
US6312656B1 (en) * 1995-12-19 2001-11-06 Corning Incorporated Method for forming silica by combustion of liquid reactants using oxygen
JP3310159B2 (ja) * 1996-03-01 2002-07-29 昭和電線電纜株式会社 Ｃｏドープ光減衰器用透明ガラス体の製造方法
US5979185A (en) * 1997-07-16 1999-11-09 Corning Incorporated Method and apparatus for forming silica by combustion of liquid reactants using a heater
US20010032482A1 (en) * 2000-03-08 2001-10-25 Hawtof Daniel W. Method and apparatus for constructing optical waveguide components using electrostatic gun
US6374642B1 (en) * 2000-03-15 2002-04-23 Corning Incorporated Method and apparatus for combustion-enhanced vaporization
US6363746B1 (en) * 2000-03-15 2002-04-02 Corning Incorporated Method and apparatus for making multi-component glass soot

Also Published As

Publication number Publication date
CA2312725A1 (en) 1999-06-17
US7784306B1 (en) 2010-08-31
EP1042531A2 (de) 2000-10-11
AU1442199A (en) 1999-06-28
EP1042531B1 (de) 2007-08-29
WO1999029917A3 (en) 1999-07-22
WO1999029917A2 (en) 1999-06-17
JP2001526321A (ja) 2001-12-18
GB9725878D0 (en) 1998-02-04
DE69838345T2 (de) 2008-05-21

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