DE69722598D1 - Ablagerung von diamantfilm - Google Patents

Ablagerung von diamantfilm

Info

Publication number
DE69722598D1
DE69722598D1 DE69722598T DE69722598T DE69722598D1 DE 69722598 D1 DE69722598 D1 DE 69722598D1 DE 69722598 T DE69722598 T DE 69722598T DE 69722598 T DE69722598 T DE 69722598T DE 69722598 D1 DE69722598 D1 DE 69722598D1
Authority
DE
Germany
Prior art keywords
deposit
diamond film
diamond
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69722598T
Other languages
English (en)
Other versions
DE69722598T2 (de
Inventor
Gregory Bak-Boychuk
G Bradley
K Mack
M Jaffe
Matthew Simpson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Celestech Inc
Saint Gobain Ceramics and Plastics Inc
Original Assignee
Celestech Inc
Saint Gobain Ceramics and Plastics Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US08/798,839 external-priority patent/US5863605A/en
Application filed by Celestech Inc, Saint Gobain Ceramics and Plastics Inc filed Critical Celestech Inc
Application granted granted Critical
Publication of DE69722598D1 publication Critical patent/DE69722598D1/de
Publication of DE69722598T2 publication Critical patent/DE69722598T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only
    • C23C16/27—Diamond only
    • C23C16/276—Diamond only using plasma jets
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02—Pretreatment of the material to be coated
    • C23C16/0272—Deposition of sub-layers, e.g. to promote the adhesion of the main coating
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/25—Web or sheet containing structurally defined element or component and including a second component containing structurally defined particles
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/30—Self-sustaining carbon mass or layer with impregnant or other layer
DE69722598T 1996-03-18 1997-03-14 Ablagerung von diamantfilm Expired - Fee Related DE69722598T2 (de)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US618428 1990-11-27
US61842896A 1996-03-18 1996-03-18
US798839 1997-02-12
US08/798,839 US5863605A (en) 1996-03-18 1997-02-12 Diamond film deposition
PCT/US1997/004511 WO1997048552A1 (en) 1996-03-18 1997-03-14 Diamond film deposition

Publications (2)

Publication Number Publication Date
DE69722598D1 true DE69722598D1 (de) 2003-07-10
DE69722598T2 DE69722598T2 (de) 2004-04-29

Family

ID=27088234

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69722598T Expired - Fee Related DE69722598T2 (de) 1996-03-18 1997-03-14 Ablagerung von diamantfilm

Country Status (6)

Country Link
US (1) US6099966A (de)
EP (1) EP0888213B1 (de)
JP (1) JP2001526735A (de)
CA (1) CA2249288A1 (de)
DE (1) DE69722598T2 (de)
WO (1) WO1997048552A1 (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2878648B1 (fr) * 2004-11-30 2007-02-02 Commissariat Energie Atomique Support semi-conducteur rectangulaire pour la microelectronique et procede de realisation d'un tel support
EP2077344B1 (de) * 2007-12-21 2010-11-03 Condias Gmbh Verfahren zur Aufbringung einer Diamantschicht auf ein Graphitsubstrat

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4471003A (en) * 1980-11-25 1984-09-11 Cann Gordon L Magnetoplasmadynamic apparatus and process for the separation and deposition of materials
US4487162A (en) * 1980-11-25 1984-12-11 Cann Gordon L Magnetoplasmadynamic apparatus for the separation and deposition of materials
JPH0623430B2 (ja) * 1987-07-13 1994-03-30 株式会社半導体エネルギ−研究所 炭素作製方法
JPH0757039B2 (ja) * 1988-05-09 1995-06-14 株式会社ケンウッド 音響用振動板及びその製造法
US4925701A (en) * 1988-05-27 1990-05-15 Xerox Corporation Processes for the preparation of polycrystalline diamond films
EP0459425A1 (de) * 1990-05-30 1991-12-04 Idemitsu Petrochemical Company Limited Verfahren zur Herstellung von Diamanten
US5264071A (en) * 1990-06-13 1993-11-23 General Electric Company Free standing diamond sheet and method and apparatus for making same
US5204210A (en) * 1990-12-07 1993-04-20 Xerox Corporation Method for the direct patterning of diamond films
US5204144A (en) * 1991-05-10 1993-04-20 Celestech, Inc. Method for plasma deposition on apertured substrates
US5342660A (en) * 1991-05-10 1994-08-30 Celestech, Inc. Method for plasma jet deposition
US5270077A (en) * 1991-12-13 1993-12-14 General Electric Company Method for producing flat CVD diamond film
US5298286A (en) * 1992-11-09 1994-03-29 North Carolina State University Method for fabricating diamond films on nondiamond substrates and related structures
US5474808A (en) * 1994-01-07 1995-12-12 Michigan State University Method of seeding diamond
US5654044A (en) * 1995-08-29 1997-08-05 The United States Of America As Represented By The Secretary Of The Navy Diamond film deposition on graphite

Also Published As

Publication number Publication date
JP2001526735A (ja) 2001-12-18
EP0888213B1 (de) 2003-06-04
US6099966A (en) 2000-08-08
EP0888213A4 (de) 2002-04-03
DE69722598T2 (de) 2004-04-29
WO1997048552A1 (en) 1997-12-24
CA2249288A1 (en) 1997-12-24
EP0888213A1 (de) 1999-01-07

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee