DE69836714D1 - Substrat mit Matrix und Flüssigkristallanzeigevorrichtung die dieses verwendet - Google Patents

Substrat mit Matrix und Flüssigkristallanzeigevorrichtung die dieses verwendet

Info

Publication number
DE69836714D1
DE69836714D1 DE69836714T DE69836714T DE69836714D1 DE 69836714 D1 DE69836714 D1 DE 69836714D1 DE 69836714 T DE69836714 T DE 69836714T DE 69836714 T DE69836714 T DE 69836714T DE 69836714 D1 DE69836714 D1 DE 69836714D1
Authority
DE
Germany
Prior art keywords
matrix
substrate
liquid crystal
display device
crystal display
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69836714T
Other languages
English (en)
Other versions
DE69836714T2 (de
Inventor
Takeshi Ichikawa
Katsumi Kurematsu
Osamu Koyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Publication of DE69836714D1 publication Critical patent/DE69836714D1/de
Application granted granted Critical
Publication of DE69836714T2 publication Critical patent/DE69836714T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362—Active matrix addressed cells
    • G02F1/136227—Through-hole connection of the pixel electrode to the active element through an insulation layer
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/133357—Planarisation layers
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G02F1/133526—Lenses, e.g. microlenses or Fresnel lenses
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G02F1/1336—Illuminating devices
    • G02F1/133621—Illuminating devices providing coloured light
    • G02F1/133623—Inclined coloured light beams
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362—Active matrix addressed cells
    • G02F1/136277—Active matrix addressed cells formed on a semiconductor substrate, e.g. of silicon

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Mathematical Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Liquid Crystal (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
DE69836714T 1997-10-24 1998-10-19 Substrat mit Matrix und Flüssigkristallanzeigevorrichtung die dieses verwendet Expired - Lifetime DE69836714T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP29246397A JP3249079B2 (ja) 1997-10-24 1997-10-24 マトリクス基板と液晶表示装置と投写型液晶表示装置
JP29246397 1997-10-24

Publications (2)

Publication Number Publication Date
DE69836714D1 true DE69836714D1 (de) 2007-02-08
DE69836714T2 DE69836714T2 (de) 2007-10-04

Family

ID=17782142

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69836714T Expired - Lifetime DE69836714T2 (de) 1997-10-24 1998-10-19 Substrat mit Matrix und Flüssigkristallanzeigevorrichtung die dieses verwendet

Country Status (4)

Country Link
US (1) US6356332B1 (de)
EP (1) EP0911682B1 (de)
JP (1) JP3249079B2 (de)
DE (1) DE69836714T2 (de)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6563482B1 (en) 1999-07-21 2003-05-13 Semiconductor Energy Laboratory Co., Ltd. Display device
US7893435B2 (en) * 2000-04-18 2011-02-22 E Ink Corporation Flexible electronic circuits and displays including a backplane comprising a patterned metal foil having a plurality of apertures extending therethrough
US6636287B1 (en) * 2001-02-28 2003-10-21 Three-Five Systems, Inc. Display systems with pixel electrodes at different distances from a control electrode
WO2003050607A1 (en) * 2001-12-13 2003-06-19 E Ink Corporation Electrophoretic electronic displays with films having a low index of refraction
KR100488956B1 (ko) * 2002-01-29 2005-05-11 비오이 하이디스 테크놀로지 주식회사 액정표시장치 및 그 제조방법
US7123336B2 (en) * 2002-09-30 2006-10-17 Sony Corporation Twisted nematic liquid crystal material with certain values for dielectric constant anisotropy, twisted elasticity modulus and refractive index anisotropy
KR20050109068A (ko) * 2003-02-20 2005-11-17 코닌클리케 필립스 일렉트로닉스 엔.브이. 전기 영동 다중 칼라 디스플레이 디바이스
WO2005036244A1 (ja) * 2003-10-09 2005-04-21 Fujitsu Limited 反射型液晶表示装置用モジュールとその製造方法、及び反射型液晶表示装置
US7414595B1 (en) 2003-12-07 2008-08-19 Advanced Simulation Displays Co. Virtual mosaic wide field of view display system
JP4869985B2 (ja) * 2006-03-06 2012-02-08 株式会社Ｊｖｃケンウッド 液晶表示装置及びその製造方法
JP5016850B2 (ja) * 2006-05-30 2012-09-05 キヤノン株式会社 液晶表示装置及び液晶プロジェクター装置
JP5262973B2 (ja) * 2009-05-11 2013-08-14 セイコーエプソン株式会社 電気光学装置及び電子機器
US11881539B2 (en) 2020-11-20 2024-01-23 Applied Materials, Inc. Structure and method of advanced LCoS back-plane having highly reflective pixel via metallization
US11573452B2 (en) 2020-11-20 2023-02-07 Applied Materials, Inc. Method for LCoS DBR multilayer stack protection via sacrificial hardmask for RIE and CMP processes
US12055821B2 (en) 2020-11-20 2024-08-06 Applied Materials, Inc. Structure and method of bi-layer pixel isolation in advanced LCOS back-plane
US11880052B2 (en) 2020-11-20 2024-01-23 Applied Materials, Inc. Structure and method of mirror grounding in LCoS devices
US11586067B2 (en) * 2020-11-20 2023-02-21 Applied Materials, Inc. Structure and method of advanced LCoS back-plane having robust pixel via metallization
US11908678B2 (en) 2021-01-14 2024-02-20 Applied Materials, Inc. Method of CMP integration for improved optical uniformity in advanced LCOS back-plane
KR102679897B1 (ko) * 2021-12-16 2024-07-01 주식회사 셀코스 LCoS 기반 마이크로디스플레이 및 그의 제조방법
WO2023176550A1 (ja) * 2022-03-15 2023-09-21 ソニーセミコンダクタソリューションズ株式会社 半導体装置および表示装置

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0112417A1 (de) 1982-12-22 1984-07-04 International Business Machines Corporation Integrierte Anzeigevorrichtung mit Halbleiterschaltung und Verfahren zur Herstellung einer solchen Vorrichtung
JPH03248125A (ja) * 1990-02-26 1991-11-06 Sharp Corp 液晶表示素子
US5552911A (en) * 1992-10-19 1996-09-03 Canon Kabushiki Kaisha Color liquid crystal display device having varying cell thickness and varying pixel areas
US5355251A (en) * 1993-04-28 1994-10-11 Dell U.S.A. L.P. Liquid crystal display device with octagonal cell providing increased wiring density
JP2860226B2 (ja) * 1993-06-07 1999-02-24 シャープ株式会社 液晶表示装置およびその製造方法
US5852479A (en) * 1994-09-07 1998-12-22 Sharp Kabushiki Kaisha Color liquid crystal projector device
JPH08201757A (ja) * 1995-01-30 1996-08-09 A G Technol Kk 投射型カラー表示装置
JP3108861B2 (ja) * 1995-06-30 2000-11-13 キヤノン株式会社 アクティブマトリクス基板、該基板を用いた表示装置、及びこれらの製造方法
JP3571887B2 (ja) * 1996-10-18 2004-09-29 キヤノン株式会社 アクティブマトリクス基板及び液晶装置
US6078371A (en) * 1998-10-05 2000-06-20 Canon Kabushiki Kaisha Liquid crystal device and liquid crystal display apparatus

Also Published As

Publication number Publication date
US6356332B1 (en) 2002-03-12
JP3249079B2 (ja) 2002-01-21
EP0911682A3 (de) 2000-05-03
EP0911682A2 (de) 1999-04-28
JPH11125833A (ja) 1999-05-11
EP0911682B1 (de) 2006-12-27
DE69836714T2 (de) 2007-10-04

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