DE69829643T2 - Polymere organische elektroluminezente Pixel-Vorrichtung und Verfahren zur Herstellung - Google Patents
Polymere organische elektroluminezente Pixel-Vorrichtung und Verfahren zur Herstellung Download PDFInfo
- Publication number
- DE69829643T2 DE69829643T2 DE69829643T DE69829643T DE69829643T2 DE 69829643 T2 DE69829643 T2 DE 69829643T2 DE 69829643 T DE69829643 T DE 69829643T DE 69829643 T DE69829643 T DE 69829643T DE 69829643 T2 DE69829643 T2 DE 69829643T2
- Authority
- DE
- Germany
- Prior art keywords
- layer
- photoresist
- display
- row electrodes
- depositing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000000034 method Methods 0.000 title claims description 28
- 238000004519 manufacturing process Methods 0.000 title description 5
- 229920000642 polymer Polymers 0.000 claims description 61
- 229920002120 photoresistant polymer Polymers 0.000 claims description 38
- 238000000151 deposition Methods 0.000 claims description 28
- 238000009413 insulation Methods 0.000 claims description 25
- 230000008021 deposition Effects 0.000 claims description 16
- 239000000463 material Substances 0.000 claims description 13
- 239000000758 substrate Substances 0.000 claims description 7
- 238000000059 patterning Methods 0.000 claims description 5
- 230000005525 hole transport Effects 0.000 claims description 4
- 239000011810 insulating material Substances 0.000 claims description 4
- 239000004020 conductor Substances 0.000 claims description 3
- 238000004132 cross linking Methods 0.000 claims 1
- 239000010410 layer Substances 0.000 description 142
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 9
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 6
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- 238000010276 construction Methods 0.000 description 3
- 238000011161 development Methods 0.000 description 3
- 238000002955 isolation Methods 0.000 description 3
- 229920000553 poly(phenylenevinylene) Polymers 0.000 description 3
- 229920002098 polyfluorene Polymers 0.000 description 3
- 239000002904 solvent Substances 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
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- 230000015572 biosynthetic process Effects 0.000 description 2
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
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- 230000000873 masking effect Effects 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229920000620 organic polymer Polymers 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 229920006254 polymer film Polymers 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 239000008096 xylene Substances 0.000 description 2
- IWGVQIFPYAOBMF-UHFFFAOYSA-N 2,5-dioxa-8-thiabicyclo[4.2.1]nona-1(9),6-diene Chemical compound O1CCOC2=CC1=CS2 IWGVQIFPYAOBMF-UHFFFAOYSA-N 0.000 description 1
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical class N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 1
- 239000012670 alkaline solution Substances 0.000 description 1
- 239000010405 anode material Substances 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 239000002800 charge carrier Substances 0.000 description 1
- 238000012993 chemical processing Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 238000001723 curing Methods 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- SWXVUIWOUIDPGS-UHFFFAOYSA-N diacetone alcohol Natural products CC(=O)CC(C)(C)O SWXVUIWOUIDPGS-UHFFFAOYSA-N 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000001393 microlithography Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 229920002959 polymer blend Polymers 0.000 description 1
- -1 polyphenylenevinylene Polymers 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/17—Passive-matrix OLED displays
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/805—Electrodes
- H10K50/82—Cathodes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/10—OLEDs or polymer light-emitting diodes [PLED]
- H10K50/14—Carrier transporting layers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/17—Passive-matrix OLED displays
- H10K59/173—Passive-matrix OLED displays comprising banks or shadow masks
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Electroluminescent Light Sources (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US09/059,608 US6111356A (en) | 1998-04-13 | 1998-04-13 | Method for fabricating pixelated polymer organic light emitting devices |
| US59608 | 1998-04-13 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE69829643D1 DE69829643D1 (de) | 2005-05-12 |
| DE69829643T2 true DE69829643T2 (de) | 2006-03-09 |
Family
ID=22024074
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE69829643T Expired - Lifetime DE69829643T2 (de) | 1998-04-13 | 1998-11-04 | Polymere organische elektroluminezente Pixel-Vorrichtung und Verfahren zur Herstellung |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US6111356A (enExample) |
| EP (1) | EP0951073B1 (enExample) |
| JP (1) | JP4421694B2 (enExample) |
| DE (1) | DE69829643T2 (enExample) |
Families Citing this family (33)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11121178A (ja) * | 1997-10-14 | 1999-04-30 | Matsushita Electric Ind Co Ltd | 有機エレクトロルミネセンス素子及びその製造方法 |
| JP3692844B2 (ja) * | 1998-07-24 | 2005-09-07 | セイコーエプソン株式会社 | 電界発光素子、及び電子機器 |
| US6221563B1 (en) * | 1999-08-12 | 2001-04-24 | Eastman Kodak Company | Method of making an organic electroluminescent device |
| US6452330B1 (en) * | 1999-09-23 | 2002-09-17 | Rockwell Collins, Inc. | Interconnect bump for flat panel displays |
| US7376191B2 (en) * | 2000-10-27 | 2008-05-20 | Lightwaves Systems, Inc. | High bandwidth data transport system |
| DE69908194T2 (de) * | 1999-12-17 | 2004-02-05 | Osram Opto Semiconductors Gmbh | Kapselung für organische leds |
| US7394153B2 (en) * | 1999-12-17 | 2008-07-01 | Osram Opto Semiconductors Gmbh | Encapsulation of electronic devices |
| WO2002021883A1 (en) * | 2000-09-06 | 2002-03-14 | Osram Opto Semiconductors Gmbh | Patterning of electrodes in oled devices |
| US6699728B2 (en) * | 2000-09-06 | 2004-03-02 | Osram Opto Semiconductors Gmbh | Patterning of electrodes in oled devices |
| US6518709B2 (en) * | 2000-10-16 | 2003-02-11 | Nec Corporation | Color organic EL display and method for driving the same |
| US8270452B2 (en) * | 2002-04-30 | 2012-09-18 | Lightwaves Systems, Inc. | Method and apparatus for multi-band UWB communications |
| US6680570B2 (en) * | 2001-03-21 | 2004-01-20 | Agilent Technologies, Inc. | Polymer organic light emitting device with improved color control |
| DE10133684A1 (de) | 2001-07-11 | 2003-02-13 | Osram Opto Semiconductors Gmbh | Organisches, farbiges, elektrolumineszierendes Display und dessen Herstellung |
| DE10133685B4 (de) | 2001-07-11 | 2006-05-18 | Osram Opto Semiconductors Gmbh | Organisches, elektrolumineszierendes Display und dessen Herstellung |
| DE10133686C2 (de) | 2001-07-11 | 2003-07-17 | Osram Opto Semiconductors Gmbh | Organisches, elektrolumineszierendes Display und dessen Herstellung |
| US6656611B2 (en) | 2001-07-20 | 2003-12-02 | Osram Opto Semiconductors Gmbh | Structure-defining material for OLEDs |
| KR100478521B1 (ko) * | 2001-10-29 | 2005-03-28 | 삼성에스디아이 주식회사 | 유기 전계 발광 소자용 고분자 발광 혼합 조성물 및 그를이용한 유기 전계 발광 소자 |
| US7221093B2 (en) * | 2002-06-10 | 2007-05-22 | Institute Of Materials Research And Engineering | Patterning of electrodes in OLED devices |
| US6855636B2 (en) | 2002-10-31 | 2005-02-15 | 3M Innovative Properties Company | Electrode fabrication methods for organic electroluminscent devices |
| US7961705B2 (en) * | 2003-04-30 | 2011-06-14 | Lightwaves Systems, Inc. | High bandwidth data transport system |
| US20050136285A1 (en) * | 2003-12-23 | 2005-06-23 | General Electric Company | Multi-layered device and method for making the same |
| US7629061B2 (en) * | 2004-01-16 | 2009-12-08 | Osram Opto Semiconductors Gmbh | Heterostructure devices using cross-linkable polymers |
| US8025831B2 (en) * | 2004-05-24 | 2011-09-27 | Agency For Science, Technology And Research | Imprinting of supported and free-standing 3-D micro- or nano-structures |
| JP2007013626A (ja) * | 2005-06-30 | 2007-01-18 | Canon Inc | 色処理方法および装置 |
| US8345778B2 (en) * | 2007-10-29 | 2013-01-01 | Lightwaves Systems, Inc. | High bandwidth data transport system |
| JP5192828B2 (ja) * | 2008-01-08 | 2013-05-08 | 住友化学株式会社 | 有機エレクトロルミネッセンス表示素子及びその製造方法 |
| JP5402472B2 (ja) * | 2008-09-30 | 2014-01-29 | 三菱化学株式会社 | 有機薄膜パターニング用基板、有機電界発光素子およびその製造方法、並びに有機ｅｌ表示装置および有機ｅｌ照明 |
| WO2010038181A1 (en) * | 2008-10-02 | 2010-04-08 | Philips Intellectual Property & Standards Gmbh | Oled device with covered shunt line |
| US8574934B2 (en) | 2011-09-19 | 2013-11-05 | The Regents Of The University Of Michigan | OVJP patterning of electronic devices |
| EP3896740A4 (en) * | 2018-12-29 | 2022-03-02 | Guangdong Oppo Mobile Telecommunications Corp., Ltd. | OLED PIXEL STRUCTURE, OLED DISPLAY AND ELECTRONIC DEVICE |
| US11526079B2 (en) | 2020-04-14 | 2022-12-13 | Tcl China Star Optoelectronics Technology Co., Ltd. | Backplane unit and its manufacturing method and display device |
| CN111326082B (zh) * | 2020-04-14 | 2021-08-03 | Tcl华星光电技术有限公司 | 背板单元及其制造方法、显示装置 |
| JP2022185322A (ja) * | 2021-06-02 | 2022-12-14 | 株式会社ジャパンディスプレイ | 電子機器及びその製造方法 |
Family Cites Families (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3371578D1 (en) * | 1982-05-19 | 1987-06-19 | Matsushita Electric Industrial Co Ltd | Electroluminescent display unit |
| US5189549A (en) * | 1990-02-26 | 1993-02-23 | Molecular Displays, Inc. | Electrochromic, electroluminescent and electrochemiluminescent displays |
| JPH088148B2 (ja) * | 1990-12-18 | 1996-01-29 | 富士ゼロックス株式会社 | Ｅｌ発光素子 |
| DE4325885A1 (de) * | 1993-08-02 | 1995-02-09 | Basf Ag | Elektrolumineszierende Anordnung |
| US5701055A (en) * | 1994-03-13 | 1997-12-23 | Pioneer Electronic Corporation | Organic electoluminescent display panel and method for manufacturing the same |
| JP3813217B2 (ja) * | 1995-03-13 | 2006-08-23 | パイオニア株式会社 | 有機エレクトロルミネッセンスディスプレイパネルの製造方法 |
| JP3401356B2 (ja) * | 1995-02-21 | 2003-04-28 | パイオニア株式会社 | 有機エレクトロルミネッセンスディスプレイパネルとその製造方法 |
| US5663573A (en) * | 1995-03-17 | 1997-09-02 | The Ohio State University | Bipolar electroluminescent device |
| US5719467A (en) * | 1995-07-27 | 1998-02-17 | Hewlett-Packard Company | Organic electroluminescent device |
| US5780174A (en) * | 1995-10-27 | 1998-07-14 | Kabushiki Kaisha Toyota Chuo Kenkyusho | Micro-optical resonator type organic electroluminescent device |
| JP3302262B2 (ja) * | 1996-06-10 | 2002-07-15 | ティーディーケイ株式会社 | 有機エレクトロ・ルミネッセンス表示装置及びその製造方法 |
| US6037712A (en) * | 1996-06-10 | 2000-03-14 | Tdk Corporation | Organic electroluminescence display device and producing method thereof |
| US5965281A (en) * | 1997-02-04 | 1999-10-12 | Uniax Corporation | Electrically active polymer compositions and their use in efficient, low operating voltage, polymer light-emitting diodes with air-stable cathodes |
| US5965280A (en) * | 1997-03-03 | 1999-10-12 | Hewlett-Packard Company | Patterned polymer electroluminescent devices based on microlithographic processes |
-
1998
- 1998-04-13 US US09/059,608 patent/US6111356A/en not_active Expired - Lifetime
- 1998-11-04 EP EP98120666A patent/EP0951073B1/en not_active Expired - Lifetime
- 1998-11-04 DE DE69829643T patent/DE69829643T2/de not_active Expired - Lifetime
-
1999
- 1999-04-13 JP JP10534799A patent/JP4421694B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| DE69829643D1 (de) | 2005-05-12 |
| EP0951073A2 (en) | 1999-10-20 |
| JP4421694B2 (ja) | 2010-02-24 |
| EP0951073B1 (en) | 2005-04-06 |
| US6111356A (en) | 2000-08-29 |
| JPH11329744A (ja) | 1999-11-30 |
| EP0951073A3 (en) | 2001-03-14 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8364 | No opposition during term of opposition | ||
| 8327 | Change in the person/name/address of the patent owner |
Owner name: AVAGO TECHNOLOGIES ECBU IP (SINGAPORE) PTE. LTD., |
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| R082 | Change of representative |
Ref document number: 951073 Country of ref document: EP Representative=s name: 2K PATENTANWAELTE BLASBERG KEWITZ & REICHEL, PARTN |
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