DE69825219D1 - Magnetowiderstandseffektfilm und Magnetowiderstandseffekttmagnetkopf - Google Patents

Magnetowiderstandseffektfilm und Magnetowiderstandseffekttmagnetkopf

Info

Publication number
DE69825219D1
DE69825219D1 DE69825219T DE69825219T DE69825219D1 DE 69825219 D1 DE69825219 D1 DE 69825219D1 DE 69825219 T DE69825219 T DE 69825219T DE 69825219 T DE69825219 T DE 69825219T DE 69825219 D1 DE69825219 D1 DE 69825219D1
Authority
DE
Germany
Prior art keywords
magnetoresistance
magnetic head
effect film
effects magnetic
magnetoresistance effect
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69825219T
Other languages
English (en)
Other versions
DE69825219T2 (de
Inventor
Satoru Araki
Kiyoshi Noguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TDK Corp
Original Assignee
TDK Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TDK Corp filed Critical TDK Corp
Publication of DE69825219D1 publication Critical patent/DE69825219D1/de
Application granted granted Critical
Publication of DE69825219T2 publication Critical patent/DE69825219T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127Structure or manufacture of heads, e.g. inductive
    • G11B5/33Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
    • G11B5/39Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
    • G11B5/3903Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
    • G11B5/3906Details related to the use of magnetic thin film layers or to their effects
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127Structure or manufacture of heads, e.g. inductive
    • G11B5/33Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
    • G11B5/39Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
    • G11B5/3903Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y25/00Nanomagnetism, e.g. magnetoimpedance, anisotropic magnetoresistance, giant magnetoresistance or tunneling magnetoresistance
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127Structure or manufacture of heads, e.g. inductive
    • G11B5/33Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
    • G11B5/39Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
    • G11B5/3903Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
    • G11B5/3967Composite structural arrangements of transducers, e.g. inductive write and magnetoresistive read
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F10/00Thin magnetic films, e.g. of one-domain structure
    • H01F10/32Spin-exchange-coupled multilayers, e.g. nanostructured superlattices
    • H01F10/324Exchange coupling of magnetic film pairs via a very thin non-magnetic spacer, e.g. by exchange with conduction electrons of the spacer
    • H01F10/3268Exchange coupling of magnetic film pairs via a very thin non-magnetic spacer, e.g. by exchange with conduction electrons of the spacer the exchange coupling being asymmetric, e.g. by use of additional pinning, by using antiferromagnetic or ferromagnetic coupling interface, i.e. so-called spin-valve [SV] structure, e.g. NiFe/Cu/NiFe/FeMn
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N50/00Galvanomagnetic devices
    • H10N50/80Constructional details
    • H10N50/85Magnetic active materials
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/015Ink jet characterised by the jet generation process
    • B41J2/04Ink jet characterised by the jet generation process generating single droplets or particles on demand
    • B41J2002/041Electromagnetic transducer
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127Structure or manufacture of heads, e.g. inductive
    • G11B5/33Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
    • G11B5/39Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
    • G11B2005/3996Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects large or giant magnetoresistive effects [GMR], e.g. as generated in spin-valve [SV] devices
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127Structure or manufacture of heads, e.g. inductive
    • G11B5/31Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3163Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S428/00Stock material or miscellaneous articles
    • Y10S428/90Magnetic feature
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/11Magnetic recording head
    • Y10T428/1107Magnetoresistive

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Mathematical Physics (AREA)
  • Theoretical Computer Science (AREA)
  • Thin Magnetic Films (AREA)
  • Hall/Mr Elements (AREA)
  • Magnetic Heads (AREA)
DE69825219T 1997-06-05 1998-01-14 Magnetowiderstandseffektfilm und Magnetowiderstandseffekttmagnetkopf Expired - Lifetime DE69825219T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP16326297 1997-06-05
JP16326297A JP3225496B2 (ja) 1997-06-05 1997-06-05 磁気抵抗効果膜および磁気抵抗効果型ヘッド

Publications (2)

Publication Number Publication Date
DE69825219D1 true DE69825219D1 (de) 2004-09-02
DE69825219T2 DE69825219T2 (de) 2005-07-21

Family

ID=15770472

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69825219T Expired - Lifetime DE69825219T2 (de) 1997-06-05 1998-01-14 Magnetowiderstandseffektfilm und Magnetowiderstandseffekttmagnetkopf

Country Status (5)

Country Link
US (1) US5968676A (de)
EP (1) EP0883196B1 (de)
JP (1) JP3225496B2 (de)
KR (1) KR100307777B1 (de)
DE (1) DE69825219T2 (de)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000251223A (ja) * 1999-02-23 2000-09-14 Read Rite Smi Kk スピンバルブ磁気抵抗センサ及び薄膜磁気ヘッド
US6498707B1 (en) * 1999-04-20 2002-12-24 Seagate Technology, Llc Giant magnetoresistive sensor with a CrMnPt pinning layer and a NiFeCr seed layer
GB2363671B (en) * 1999-04-28 2003-12-24 Seagate Technology Llc Giant magnetoresistive sensor with pinning layer
JP2000331316A (ja) 1999-05-20 2000-11-30 Tdk Corp 磁気抵抗効果型ヘッド
JP2001006127A (ja) 1999-06-18 2001-01-12 Tdk Corp トンネル磁気抵抗効果型ヘッド
JP2001006130A (ja) 1999-06-24 2001-01-12 Tdk Corp トンネル磁気抵抗効果型ヘッド
JP3592140B2 (ja) 1999-07-02 2004-11-24 Tdk株式会社 トンネル磁気抵抗効果型ヘッド
JP3331397B2 (ja) 1999-07-23 2002-10-07 ティーディーケイ株式会社 トンネル磁気抵抗効果素子
JP3321768B2 (ja) 1999-07-23 2002-09-09 ティーディーケイ株式会社 トンネル磁気抵抗効果素子
JP3400750B2 (ja) 1999-07-23 2003-04-28 ティーディーケイ株式会社 トンネル磁気抵抗効果型ヘッドの製造方法
US6661622B1 (en) * 2000-07-17 2003-12-09 International Business Machines Corporation Method to achieve low and stable ferromagnetic coupling field
US6759149B1 (en) 2000-07-25 2004-07-06 Seagate Technology Llc Laminated medium with antiferromagnetic stabilization layers
JP2002076472A (ja) 2000-08-31 2002-03-15 Alps Electric Co Ltd スピンバルブ型薄膜磁気素子およびこのスピンバルブ型薄膜磁気素子を備えた薄膜磁気ヘッド
US6738237B2 (en) 2001-01-04 2004-05-18 Hitachi Global Storage Technologies Netherlands B.V. AP-pinned spin valve design using very thin Pt-Mn AFM layer
US6700754B2 (en) 2001-04-30 2004-03-02 International Business Machines Corporation Oxidized copper (Cu) spacer between free and pinned layer for high performance spin valve applications
US6954342B2 (en) * 2001-04-30 2005-10-11 Hitachi Global Storage Technologies Netherlands B.V. Underlayer for high amplitude spin valve sensors
US6628484B2 (en) * 2001-06-05 2003-09-30 International Business Machines Corporation Planar gap pre-fill process for read heads
US6876525B2 (en) * 2002-08-27 2005-04-05 International Business Machines Corporation Giant magnetoresistance sensor with stitched longitudinal bias stacks and its fabrication process
US7256971B2 (en) 2004-03-09 2007-08-14 Headway Technologies, Inc. Process and structure to fabricate CPP spin valve heads for ultra-high recording density
WO2008123445A1 (ja) * 2007-03-30 2008-10-16 Hoya Corporation 垂直磁気記録媒体およびその製造方法
TWI449067B (zh) * 2011-06-01 2014-08-11 Voltafield Technology Corp 自旋閥磁阻感測器
CN112366228B (zh) * 2020-10-26 2024-02-20 苏州科技大学 一种自激励电阻计时器及其制备方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63142689A (ja) * 1986-12-05 1988-06-15 Hitachi Ltd 磁気抵抗効果膜形成用材料
EP0587181B1 (de) * 1992-09-11 1998-12-23 Hitachi, Ltd. Hochkorrosionsbeständiges Metall, Verfahren und Vorrichtung zu seiner Herstellung und seine Verwendung
US5549978A (en) * 1992-10-30 1996-08-27 Kabushiki Kaisha Toshiba Magnetoresistance effect element
JP2669357B2 (ja) * 1994-08-29 1997-10-27 日本電気株式会社 磁気抵抗効果ヘッドおよびその製造方法
WO1997005664A1 (fr) * 1995-07-28 1997-02-13 Migaku Takahashi Element magnetoresistant et sa fabrication

Also Published As

Publication number Publication date
US5968676A (en) 1999-10-19
KR19990006334A (ko) 1999-01-25
KR100307777B1 (ko) 2001-10-19
JPH10340813A (ja) 1998-12-22
EP0883196B1 (de) 2004-07-28
EP0883196A3 (de) 2000-01-12
JP3225496B2 (ja) 2001-11-05
DE69825219T2 (de) 2005-07-21
EP0883196A2 (de) 1998-12-09

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Legal Events

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8320 Willingness to grant licences declared (paragraph 23)