DE69834585T8 - Magnetischer Dünnfilm und denselben verwendende magnetische Vorrichtung - Google Patents

Magnetischer Dünnfilm und denselben verwendende magnetische Vorrichtung Download PDF

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Publication number
DE69834585T8
DE69834585T8 DE69834585T DE69834585T DE69834585T8 DE 69834585 T8 DE69834585 T8 DE 69834585T8 DE 69834585 T DE69834585 T DE 69834585T DE 69834585 T DE69834585 T DE 69834585T DE 69834585 T8 DE69834585 T8 DE 69834585T8
Authority
DE
Germany
Prior art keywords
magnetic
same
thin film
magnetic device
magnetic thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE69834585T
Other languages
English (en)
Other versions
DE69834585T2 (de
DE69834585D1 (de
Inventor
Masayoshi Ikoma-shi Hiramoto
Nozomu Matsukawa
Hiroshi Kyotanabe-shi Sakakima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP24006797A external-priority patent/JP3597976B2/ja
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Publication of DE69834585D1 publication Critical patent/DE69834585D1/de
Publication of DE69834585T2 publication Critical patent/DE69834585T2/de
Application granted granted Critical
Publication of DE69834585T8 publication Critical patent/DE69834585T8/de
Active legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/14—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates
    • H01F41/18—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates by cathode sputtering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F10/00—Thin magnetic films, e.g. of one-domain structure
    • H01F10/08—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers
    • H01F10/10—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F10/00—Thin magnetic films, e.g. of one-domain structure
    • H01F10/08—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers
    • H01F10/10—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition
    • H01F10/12—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition being metals or alloys
    • H01F10/13—Amorphous metallic alloys, e.g. glassy metals
    • H01F10/131—Amorphous metallic alloys, e.g. glassy metals containing iron or nickel
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F10/00—Thin magnetic films, e.g. of one-domain structure
    • H01F10/08—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers
    • H01F10/10—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition
    • H01F10/18—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition being compounds
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F10/00—Thin magnetic films, e.g. of one-domain structure
    • H01F10/08—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers
    • H01F10/10—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition
    • H01F10/18—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition being compounds
    • H01F10/187—Amorphous compounds
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S428/00—Stock material or miscellaneous articles
    • Y10S428/90—Magnetic feature
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/11—Magnetic recording head
    • Y10T428/1107—Magnetoresistive
    • Y10T428/1143—Magnetoresistive with defined structural feature
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
    • Y10T428/263—Coating layer not in excess of 5 mils thick or equivalent
    • Y10T428/264—Up to 3 mils
    • Y10T428/265—1 mil or less

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Thin Magnetic Films (AREA)
DE69834585T 1997-09-04 1998-06-02 Magnetischer Dünnfilm und denselben verwendende magnetische Vorrichtung Active DE69834585T8 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP24006797 1997-09-04
JP24006797A JP3597976B2 (ja) 1996-12-05 1997-09-04 磁性薄膜およびこれを用いた磁気デバイス

Publications (3)

Publication Number Publication Date
DE69834585D1 DE69834585D1 (de) 2006-06-22
DE69834585T2 DE69834585T2 (de) 2007-05-03
DE69834585T8 true DE69834585T8 (de) 2007-08-16

Family

ID=17054004

Family Applications (2)

Application Number Title Priority Date Filing Date
DE69812809T Expired - Lifetime DE69812809T2 (de) 1997-09-04 1998-06-02 Magnetischer dünner Film und Magnetelement unter Verwendung desselben
DE69834585T Active DE69834585T8 (de) 1997-09-04 1998-06-02 Magnetischer Dünnfilm und denselben verwendende magnetische Vorrichtung

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE69812809T Expired - Lifetime DE69812809T2 (de) 1997-09-04 1998-06-02 Magnetischer dünner Film und Magnetelement unter Verwendung desselben

Country Status (4)

Country Link
US (1) US6231968B1 (de)
EP (2) EP1170758B1 (de)
KR (1) KR100309544B1 (de)
DE (2) DE69812809T2 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000200410A (ja) * 1999-01-07 2000-07-18 Hitachi Ltd 磁気記録媒体、磁気記録媒体の製造方法及び磁気記録装置
JP2002541671A (ja) * 1999-03-30 2002-12-03 ドイッチェ テレコム アーゲー 制御キャビネット
US6730421B1 (en) * 1999-05-11 2004-05-04 Hitachi, Maxell, Ltd. Magnetic recording medium and its production method, and magnetic recorder
US6433958B1 (en) * 1999-07-27 2002-08-13 Matsushita Electric Industrial Co., Ltd. Magnetic head, method for producing the same, video recording and reproduction apparatus including the magnetic head, and video camera including the magnetic head
US6815096B2 (en) * 2001-05-16 2004-11-09 Tdk Corporation Soft magnetic thin film and thin film magnetic head using the same
JP2003294548A (ja) * 2002-03-29 2003-10-15 Japan Science & Technology Corp 応力インピーダンス効果素子の製造方法及びその素子

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA1235808A (en) * 1984-03-22 1988-04-26 Tetsuo Oka Vertical magnetic recording medium and process for preparation thereof
US4969962A (en) * 1988-08-20 1990-11-13 Victor Company Of Japan, Ltd. Magnetic alloys for magnetic head
JP2821627B2 (ja) 1989-09-20 1998-11-05 ソニー株式会社 軟磁性非晶質合金薄膜
US5154983A (en) * 1989-10-18 1992-10-13 Victor Company Of Japan, Ltd. Magnetic alloy
DE69101726T2 (de) 1990-02-16 1994-08-11 Matsushita Electric Ind Co Ltd Weichmagnetische Dünnschichten aus Legierung und Magnetköpfe daraus.
JPH07111221A (ja) 1993-10-12 1995-04-25 Toshiba Corp 磁性スパッタターゲットとそれを用いて形成した磁性薄膜、および薄膜磁気ヘッド
JPH0935935A (ja) 1995-07-13 1997-02-07 Japan Energy Corp 軟磁性膜の製造方法

Also Published As

Publication number Publication date
DE69812809D1 (de) 2003-05-08
DE69812809T2 (de) 2004-01-22
DE69834585T2 (de) 2007-05-03
KR100309544B1 (ko) 2002-01-17
US6231968B1 (en) 2001-05-15
DE69834585D1 (de) 2006-06-22
EP0901135A2 (de) 1999-03-10
EP0901135B1 (de) 2003-04-02
EP0901135A3 (de) 1999-04-14
EP1170758B1 (de) 2006-05-17
EP1170758A1 (de) 2002-01-09
KR19990029208A (ko) 1999-04-26

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: PANASONIC CORP., KADOMA, OSAKA, JP

8328 Change in the person/name/address of the agent

Representative=s name: KUDLEK & GRUNERT PATENTANWAELTE PARTNERSCHAFT, 803