DE69818531D1 - Verfahren zur Herstellung eines Körpers mit ultrafeinen Nuten - Google Patents

Verfahren zur Herstellung eines Körpers mit ultrafeinen Nuten

Info

Publication number
DE69818531D1
DE69818531D1 DE69818531T DE69818531T DE69818531D1 DE 69818531 D1 DE69818531 D1 DE 69818531D1 DE 69818531 T DE69818531 T DE 69818531T DE 69818531 T DE69818531 T DE 69818531T DE 69818531 D1 DE69818531 D1 DE 69818531D1
Authority
DE
Germany
Prior art keywords
ultra
producing
fine grooves
grooves
fine
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69818531T
Other languages
English (en)
Other versions
DE69818531T2 (de
Inventor
Toshikazu Kishino
Kazunori Soroi
Keisuke Itoh
C O Kagoshimakokubu Fact Okubo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kyocera Corp
Original Assignee
Kyocera Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP11954697A external-priority patent/JPH10305574A/ja
Application filed by Kyocera Corp filed Critical Kyocera Corp
Application granted granted Critical
Publication of DE69818531D1 publication Critical patent/DE69818531D1/de
Publication of DE69818531T2 publication Critical patent/DE69818531T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1637—Manufacturing processes molding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B41J2002/14258—Multi layer thin film type piezoelectric element
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/03—Specific materials used
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49401—Fluid pattern dispersing device making, e.g., ink jet

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
DE69818531T 1997-01-31 1998-01-30 Verfahren zur Herstellung eines Körpers mit ultrafeinen Nuten Expired - Fee Related DE69818531T2 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP1934997 1997-01-31
JP1934997 1997-01-31
JP11954697A JPH10305574A (ja) 1997-05-09 1997-05-09 インクジェットプリンタヘッド
JP11954697 1997-05-09

Publications (2)

Publication Number Publication Date
DE69818531D1 true DE69818531D1 (de) 2003-11-06
DE69818531T2 DE69818531T2 (de) 2004-08-05

Family

ID=26356182

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69818531T Expired - Fee Related DE69818531T2 (de) 1997-01-31 1998-01-30 Verfahren zur Herstellung eines Körpers mit ultrafeinen Nuten

Country Status (3)

Country Link
US (1) US6494566B1 (de)
EP (1) EP0858894B1 (de)
DE (1) DE69818531T2 (de)

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Publication number Priority date Publication date Assignee Title
JPH11191645A (ja) * 1997-12-25 1999-07-13 Kyocera Corp 圧電／電歪膜型アクチュエータ
US20050260930A1 (en) * 1999-06-15 2005-11-24 Yuji Okuda Table of wafer of polishing apparatus, method for polishing semiconductor wafer, and method for manufacturing semiconductor wafer
DE19983994T5 (de) * 1999-12-13 2004-07-08 Fujitsu Ltd., Kawasaki Tintenstrahlkopf und Herstellungsverfahren dafür
WO2002073710A1 (fr) * 2001-03-12 2002-09-19 Ngk Insulators,Ltd. Actionneur a films piezo-electriques/electrostrictifs et son procede de fabrication
TW506908B (en) * 2001-09-06 2002-10-21 Nanodynamics Inc Piezoelectric ink jet print head and the manufacturing process thereof
US6698092B2 (en) * 2001-10-31 2004-03-02 Hewlett-Packard Development Company, L.P. Methods and systems for forming a die package
US6617178B1 (en) * 2002-07-02 2003-09-09 Agilent Technologies, Inc Test system for ferroelectric materials and noble metal electrodes in semiconductor capacitors
US7052117B2 (en) 2002-07-03 2006-05-30 Dimatix, Inc. Printhead having a thin pre-fired piezoelectric layer
JP2005035013A (ja) * 2003-07-15 2005-02-10 Brother Ind Ltd 液体移送装置の製造方法
EP2269826A3 (de) * 2003-10-10 2012-09-26 Dimatix, Inc. Druckkopf mit dünner Membrane
US7281778B2 (en) 2004-03-15 2007-10-16 Fujifilm Dimatix, Inc. High frequency droplet ejection device and method
US8491076B2 (en) 2004-03-15 2013-07-23 Fujifilm Dimatix, Inc. Fluid droplet ejection devices and methods
US7739777B2 (en) * 2004-08-31 2010-06-22 Brother Kogyo Kabushiki Kaisha Method of manufacturing a liquid transporting apparatus
US8708441B2 (en) 2004-12-30 2014-04-29 Fujifilm Dimatix, Inc. Ink jet printing
JP4038734B2 (ja) * 2005-03-01 2008-01-30 富士フイルム株式会社 液体吐出ヘッドの製造方法
KR100682964B1 (ko) * 2006-02-09 2007-02-15 삼성전자주식회사 잉크젯 헤드의 압전 액츄에이터 형성 방법
US7766455B2 (en) * 2006-03-29 2010-08-03 Lexmark International, Inc. Flexible adhesive materials for micro-fluid ejection heads and methods relating thereto
US7988247B2 (en) 2007-01-11 2011-08-02 Fujifilm Dimatix, Inc. Ejection of drops having variable drop size from an ink jet printer
US7766462B2 (en) * 2007-02-21 2010-08-03 Hewlett-Packard Development Company, L.P. Method for forming a fluid ejection device
US20080259134A1 (en) * 2007-04-20 2008-10-23 Hewlett-Packard Development Company Lp Print head laminate
US8154575B2 (en) * 2007-10-23 2012-04-10 Seiko Instruments Inc. Heating resistor element, manufacturing method for the same, thermal head, and printer
JP2010052149A (ja) * 2008-08-26 2010-03-11 Canon Inc 記録ヘッドの製造方法
US8793873B2 (en) * 2010-06-07 2014-08-05 Memjet Technology Ltd. Method of providing printhead assembly having complementary hydrophilic and hydrophobic surfaces
JP5903769B2 (ja) 2011-03-29 2016-04-13 セイコーエプソン株式会社 液体噴射ヘッドおよび液体噴射装置
JP2012206294A (ja) 2011-03-29 2012-10-25 Seiko Epson Corp 液体噴射ヘッドおよび液体噴射装置
JP6061457B2 (ja) * 2011-10-21 2017-01-18 キヤノン株式会社 インクジェット記録ヘッドの製造方法
JP6493655B2 (ja) 2014-08-12 2019-04-03 セイコーエプソン株式会社 インクジェット記録装置
JP2016040088A (ja) * 2014-08-12 2016-03-24 セイコーエプソン株式会社 インクジェット記録装置
WO2017082049A1 (ja) * 2015-11-11 2017-05-18 コニカミノルタ株式会社 インクジェットヘッドおよびその製造方法、ならびにインクジェット記録装置
CN111016432A (zh) * 2019-12-19 2020-04-17 西安增材制造国家研究院有限公司 一种压电式打印头及其制作方法

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5271887A (en) * 1980-08-04 1993-12-21 Witec Cayman Patents, Ltd. Method of fabricating complex micro-circuit boards, substrates and microcircuits and the substrates and microcircuits
US4766671A (en) * 1985-10-29 1988-08-30 Nec Corporation Method of manufacturing ceramic electronic device
JPH03151258A (ja) * 1989-11-09 1991-06-27 Sekisui Chem Co Ltd 異方導電性セラミックス複合体の製造方法
JPH03261565A (ja) * 1990-03-12 1991-11-21 Ngk Spark Plug Co Ltd サーマルヘッド用基板
JP2591233B2 (ja) * 1990-03-16 1997-03-19 松下電器産業株式会社 サーマルヘッドの製造法
JPH07108102B2 (ja) 1990-05-01 1995-11-15 日本碍子株式会社 圧電／電歪膜型アクチュエータの製造方法
JPH04168052A (ja) * 1990-10-31 1992-06-16 Seikosha Co Ltd インクジェットヘッドの製造方法
JP3006157B2 (ja) * 1991-05-31 2000-02-07 ブラザー工業株式会社 パルス滴付着装置用圧電素子の製造方法
JP3144948B2 (ja) 1992-05-27 2001-03-12 日本碍子株式会社 インクジェットプリントヘッド
US5650810A (en) * 1992-12-03 1997-07-22 Brother Kogyo Kabushiki Kaisha Ink jet print head having a manifold wall portion and method of producing the same by injection molding
JP3106044B2 (ja) 1992-12-04 2000-11-06 日本碍子株式会社 アクチュエータ及びそれを用いたインクジェットプリントヘッド
US5359760A (en) * 1993-04-16 1994-11-01 The Curators Of The University Of Missouri On Behalf Of The University Of Missouri-Rolla Method of manufacture of multiple-element piezoelectric transducer
IT1268870B1 (it) * 1993-08-23 1997-03-13 Seiko Epson Corp Testa di registrazione a getto d'inchiostro e procedimento per la sua fabbricazione.
US5545461A (en) * 1994-02-14 1996-08-13 Ngk Insulators, Ltd. Ceramic diaphragm structure having convex diaphragm portion and method of producing the same
JPH08187848A (ja) * 1995-01-12 1996-07-23 Brother Ind Ltd 積層式圧電素子およびその製造方法
JP2819495B2 (ja) * 1995-06-30 1998-10-30 株式会社トーキン サーマルスタンプヘッド及びその製造方法
US5844349A (en) * 1997-02-11 1998-12-01 Tetrad Corporation Composite autoclavable ultrasonic transducers and methods of making

Also Published As

Publication number Publication date
EP0858894A2 (de) 1998-08-19
DE69818531T2 (de) 2004-08-05
EP0858894A3 (de) 1999-10-13
EP0858894B1 (de) 2003-10-01
US6494566B1 (en) 2002-12-17

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee