DE69710242D1 - Verfahren zur Herstellung eines mit Diamant beschichteten Verbundkörpers - Google Patents

Verfahren zur Herstellung eines mit Diamant beschichteten Verbundkörpers

Info

Publication number
DE69710242D1
DE69710242D1 DE69710242T DE69710242T DE69710242D1 DE 69710242 D1 DE69710242 D1 DE 69710242D1 DE 69710242 T DE69710242 T DE 69710242T DE 69710242 T DE69710242 T DE 69710242T DE 69710242 D1 DE69710242 D1 DE 69710242D1
Authority
DE
Germany
Prior art keywords
diamond
producing
composite body
body coated
coated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69710242T
Other languages
English (en)
Other versions
DE69710242T2 (de
Inventor
James M Olson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Saint Gobain Ceramics and Plastics Inc
Original Assignee
Saint Gobain Norton Industrial Ceramics Corp
Saint Gobain Industrial Ceramics Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Saint Gobain Norton Industrial Ceramics Corp, Saint Gobain Industrial Ceramics Inc filed Critical Saint Gobain Norton Industrial Ceramics Corp
Application granted granted Critical
Publication of DE69710242D1 publication Critical patent/DE69710242D1/de
Publication of DE69710242T2 publication Critical patent/DE69710242T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02—Pretreatment of the material to be coated
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02—Pretreatment of the material to be coated
    • C23C16/0209—Pretreatment of the material to be coated by heating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02—Pretreatment of the material to be coated
    • C23C16/0227—Pretreatment of the material to be coated by cleaning or etching
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02—Pretreatment of the material to be coated
    • C23C16/0227—Pretreatment of the material to be coated by cleaning or etching
    • C23C16/0245—Pretreatment of the material to be coated by cleaning or etching by etching with a plasma
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02—Pretreatment of the material to be coated
    • C23C16/0272—Deposition of sub-layers, e.g. to promote the adhesion of the main coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only
    • C23C16/27—Diamond only
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only
    • C23C16/27—Diamond only
    • C23C16/274—Diamond only using microwave discharges
DE69710242T 1996-04-17 1997-04-11 Verfahren zur Herstellung eines mit Diamant beschichteten Verbundkörpers Expired - Fee Related DE69710242T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/633,344 US5635256A (en) 1994-08-11 1996-04-17 Method of making a diamond-coated composite body

Publications (2)

Publication Number Publication Date
DE69710242D1 true DE69710242D1 (de) 2002-03-21
DE69710242T2 DE69710242T2 (de) 2002-11-14

Family

ID=24539267

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69710242T Expired - Fee Related DE69710242T2 (de) 1996-04-17 1997-04-11 Verfahren zur Herstellung eines mit Diamant beschichteten Verbundkörpers

Country Status (5)

Country Link
US (1) US5635256A (de)
EP (1) EP0802265B1 (de)
JP (1) JP3299139B2 (de)
CA (1) CA2202026C (de)
DE (1) DE69710242T2 (de)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69838006T2 (de) * 1997-02-05 2008-03-13 Cemecon Ag Beschichtungsvorrichtung
GB9801708D0 (en) * 1998-01-27 1998-03-25 De Beers Ind Diamond Bonding a diamond compact to a cemented carbide substrate
US6267867B1 (en) * 1998-05-26 2001-07-31 Saint-Gobain Industrial Ceramics, Inc. Composite article with adherent CVD diamond coating and method of making
US6344149B1 (en) * 1998-11-10 2002-02-05 Kennametal Pc Inc. Polycrystalline diamond member and method of making the same
US6220375B1 (en) 1999-01-13 2001-04-24 Baker Hughes Incorporated Polycrystalline diamond cutters having modified residual stresses
KR100305315B1 (ko) 1999-04-09 2001-09-13 박호군 다이아몬드 막이 코팅된 절삭공구 및 그 제조방법
AU761003B2 (en) * 1999-06-16 2003-05-29 Kennametal Inc. Substrate treatment method
JP4860834B2 (ja) * 2001-05-10 2012-01-25 株式会社熊防メタル ＷＣ−Ｃｏ基体へのダイヤモンド合成方法
KR100698041B1 (ko) * 2002-07-16 2007-03-23 엘지.필립스 엘시디 주식회사 도광판의 그루브 패턴 형성장치 및 이를 이용한 그루브패턴 형성방법
US9428822B2 (en) 2004-04-28 2016-08-30 Baker Hughes Incorporated Earth-boring tools and components thereof including material having hard phase in a metallic binder, and metallic binder compositions for use in forming such tools and components
US7581906B2 (en) * 2004-05-19 2009-09-01 Tdy Industries, Inc. Al2O3 ceramic tools with diffusion bonding enhanced layer
JP2011105585A (ja) * 2009-10-21 2011-06-02 Tomei Diamond Co Ltd Ｃｖｄダイヤモンド析出用基体及び析出面の形成方法
WO2011146752A2 (en) 2010-05-20 2011-11-24 Baker Hughes Incorporated Methods of forming at least a portion of earth-boring tools, and articles formed by such methods
CN102140627B (zh) * 2011-01-27 2013-01-02 上海交通大学 特大孔径内孔金刚石平坦化涂层的制备方法
KR101751271B1 (ko) * 2015-06-16 2017-06-29 광주과학기술원 다층 그래핀의 제조방법
AT15415U1 (de) * 2016-07-18 2017-08-15 Ceratizit Austria Gmbh Verfahren zum Herstellen eines Hartmetallprodukts und Hartmetallprodukt
DE102017200543A1 (de) 2017-01-13 2018-07-19 Baden-Württemberg Stiftung Ggmbh Verfahren zur Behandlung einer Oberfläche eines Hartmetallkörpers und zur Beschichtung des behandelten Hartmetallkörpers mit einer Diamantschicht
GB201912659D0 (en) * 2019-09-03 2019-10-16 Univ Bristol Chemical vapor deposition process for producing diamond
CN112025231B (zh) * 2020-08-18 2022-08-23 南京军平机械制造有限公司 一种用于机械加工刀具的加工工艺

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5204167A (en) * 1989-02-23 1993-04-20 Toshiba Tungaloy Co., Ltd. Diamond-coated sintered body excellent in adhesion and process for preparing the same
US5236740A (en) * 1991-04-26 1993-08-17 National Center For Manufacturing Sciences Methods for coating adherent diamond films on cemented tungsten carbide substrates
US5342660A (en) * 1991-05-10 1994-08-30 Celestech, Inc. Method for plasma jet deposition
AT400041B (de) * 1993-03-26 1995-09-25 Plansee Tizit Gmbh Hartmetall-substrat mit diamantschicht hoher haftfestigkeit
US5674620A (en) * 1994-08-11 1997-10-07 Saint-Gobain/Norton Industrial Ceramics Corporation Diamond-coated composite cutting tool and method of making

Also Published As

Publication number Publication date
EP0802265A1 (de) 1997-10-22
EP0802265B1 (de) 2002-02-06
DE69710242T2 (de) 2002-11-14
US5635256A (en) 1997-06-03
CA2202026A1 (en) 1997-10-17
JPH1087399A (ja) 1998-04-07
JP3299139B2 (ja) 2002-07-08
CA2202026C (en) 2001-01-30

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Legal Events

Date Code Title Description
8327 Change in the person/name/address of the patent owner

Owner name: SAINT-GOBAIN CERAMICS & PLASTICS, INC., WORCESTER,

8339 Ceased/non-payment of the annual fee