DE69817453D1 - Piezoelektrischer Beschleunigungssensor - Google Patents

Piezoelektrischer Beschleunigungssensor

Info

Publication number
DE69817453D1
DE69817453D1 DE69817453T DE69817453T DE69817453D1 DE 69817453 D1 DE69817453 D1 DE 69817453D1 DE 69817453 T DE69817453 T DE 69817453T DE 69817453 T DE69817453 T DE 69817453T DE 69817453 D1 DE69817453 D1 DE 69817453D1
Authority
DE
Germany
Prior art keywords
acceleration sensor
piezoelectric acceleration
piezoelectric
sensor
acceleration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69817453T
Other languages
English (en)
Other versions
DE69817453T2 (de
Inventor
Tetsuro Otsuchi
Katsu Takeda
Katsunori Moritoki
Osamu Kawasaki
Junichi Kato
Kouji Kawakita
Hiroshi Kagata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Publication of DE69817453D1 publication Critical patent/DE69817453D1/de
Application granted granted Critical
Publication of DE69817453T2 publication Critical patent/DE69817453T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/09—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up
    • G01P15/0922—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up of the bending or flexing mode type
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P21/00—Testing or calibrating of apparatus or devices covered by the preceding groups

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)
  • Pressure Sensors (AREA)
DE69817453T 1997-06-04 1998-06-04 Piezoelektrischer Beschleunigungssensor Expired - Fee Related DE69817453T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP14670697 1997-06-04
JP14670697 1997-06-04

Publications (2)

Publication Number Publication Date
DE69817453D1 true DE69817453D1 (de) 2003-10-02
DE69817453T2 DE69817453T2 (de) 2004-03-18

Family

ID=15413711

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69817453T Expired - Fee Related DE69817453T2 (de) 1997-06-04 1998-06-04 Piezoelektrischer Beschleunigungssensor

Country Status (3)

Country Link
US (2) US6050144A (de)
EP (1) EP0882987B1 (de)
DE (1) DE69817453T2 (de)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3339425B2 (ja) * 1998-10-19 2002-10-28 株式会社村田製作所 加速度センサ及び加速度検出装置
JP2000346865A (ja) * 1999-03-26 2000-12-15 Ngk Insulators Ltd 加速度センサ素子の感度調整方法
DE10042185B4 (de) * 2000-07-10 2006-02-16 Murata Mfg. Co., Ltd., Nagaokakyo Piezoelektrischer elektroakustischer Wandler
JP3642026B2 (ja) * 2001-01-12 2005-04-27 株式会社村田製作所 加速度センサおよびその製造方法
JP3966025B2 (ja) * 2002-03-05 2007-08-29 株式会社村田製作所 加速度センサ
JP4272177B2 (ja) * 2005-03-24 2009-06-03 株式会社日立製作所 衝撃検知用センサノード、及び衝撃検知用センサネットワークシステム
WO2007062532A1 (en) * 2005-10-18 2007-06-07 Kistler Holding Ag Sensor
US7869867B2 (en) * 2006-10-27 2011-01-11 Cyberonics, Inc. Implantable neurostimulator with refractory stimulation
US20080211353A1 (en) * 2007-03-02 2008-09-04 Charles Erklin Seeley High temperature bimorph actuator
JP2010008128A (ja) * 2008-06-25 2010-01-14 Yamaha Corp Ｍｅｍｓ
CN101634662B (zh) * 2009-08-07 2011-01-26 北京大学 微加速度计及其制备方法
JP5665836B2 (ja) * 2011-12-20 2015-02-04 太陽誘電株式会社 圧電発音体及びそれを利用した電子機器
US9470806B2 (en) * 2013-08-29 2016-10-18 Pgs Geophysical As Piezoelectric accelerometer
US10008659B2 (en) * 2014-12-09 2018-06-26 Lg Innotek Co., Ltd. Fingerprint sensor

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3285074A (en) * 1964-09-08 1966-11-15 Cons Electrodynamics Corp Amplitude damped transducer
JPS6066882A (ja) * 1983-09-22 1985-04-17 Murata Mfg Co Ltd 圧電変位素子およびその分極方法
US4950914A (en) * 1987-03-30 1990-08-21 Honda Giken Kogyo Kabushiki Kaisha Collision detection system for a vehicle
JPH077011B2 (ja) * 1987-10-16 1995-01-30 本田技研工業株式会社 圧電型加速度センサ
JPH0711533B2 (ja) * 1987-03-30 1995-02-08 本田技研工業株式会社 車両の衝突検出装置
JPH0715485B2 (ja) * 1987-05-21 1995-02-22 日産自動車株式会社 圧電型力学量センサ
JP2524518B2 (ja) * 1988-09-30 1996-08-14 松下電器産業株式会社 加速度センサ
JPH0310163A (ja) * 1989-06-08 1991-01-17 Fujikura Ltd 圧電型加速度センサ
DE4135369A1 (de) * 1991-10-26 1993-05-13 Bosch Gmbh Robert Testbarer piezoelektrischer beschleunigungssensor
AU3421593A (en) * 1991-12-23 1993-07-28 Elf Atochem North America, Inc. Multi-mode accelerometer
JP3203523B2 (ja) * 1992-08-13 2001-08-27 株式会社トーキン 加速度センサ
DE69403252T2 (de) * 1993-03-19 1997-09-25 Murata Manufacturing Co Beschleunigungsmessaufnehmer
DE4428124B4 (de) * 1994-08-09 2005-08-18 Robert Bosch Gmbh Beschleunigungssensor
JP3114538B2 (ja) * 1994-12-12 2000-12-04 株式会社村田製作所 圧電体素子及びその製造方法
JPH08101060A (ja) * 1994-09-30 1996-04-16 Tokin Corp 加速度センサ
DE4439297A1 (de) * 1994-11-07 1996-05-09 Pi Ceramic Gmbh Piezoelektrischer Sensor
DE4440078A1 (de) * 1994-11-10 1996-05-15 Telefunken Microelectron Piezoelektrischer Beschleunigungsaufnehmer
JP3141745B2 (ja) * 1995-07-25 2001-03-05 松下電器産業株式会社 加速度センサ
JPH09159690A (ja) * 1995-12-05 1997-06-20 Matsushita Electric Ind Co Ltd 加速度センサ
JP3183177B2 (ja) * 1996-08-13 2001-07-03 株式会社村田製作所 加速度センサ

Also Published As

Publication number Publication date
EP0882987B1 (de) 2003-08-27
US6227051B1 (en) 2001-05-08
US6050144A (en) 2000-04-18
EP0882987A1 (de) 1998-12-09
DE69817453T2 (de) 2004-03-18

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: PANASONIC CORP., KADOMA, OSAKA, JP

8339 Ceased/non-payment of the annual fee