DE69814815D1 - Membranventil - Google Patents

Membranventil

Info

Publication number
DE69814815D1
DE69814815D1 DE69814815T DE69814815T DE69814815D1 DE 69814815 D1 DE69814815 D1 DE 69814815D1 DE 69814815 T DE69814815 T DE 69814815T DE 69814815 T DE69814815 T DE 69814815T DE 69814815 D1 DE69814815 D1 DE 69814815D1
Authority
DE
Germany
Prior art keywords
reed valve
reed
valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69814815T
Other languages
English (en)
Other versions
DE69814815T2 (de
Inventor
E Gotch
J Kitchen
Maria Longo
N Rasanow
J Smith
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Swagelok Co
Original Assignee
Swagelok Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Swagelok Co filed Critical Swagelok Co
Publication of DE69814815D1 publication Critical patent/DE69814815D1/de
Application granted granted Critical
Publication of DE69814815T2 publication Critical patent/DE69814815T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat
    • F16K7/16—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat the diaphragm being mechanically actuated, e.g. by screw-spindle or cam
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K41/00—Spindle sealings
    • F16K41/10—Spindle sealings with diaphragm, e.g. shaped as bellows or tube
    • F16K41/12—Spindle sealings with diaphragm, e.g. shaped as bellows or tube with approximately flat diaphragm
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/6198—Non-valving motion of the valve or valve seat
    • Y10T137/6253—Rotary motion of a reciprocating valve
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/6851—With casing, support, protector or static constructional installations
    • Y10T137/6966—Static constructional installations
    • Y10T137/6991—Ground supporting enclosure
    • Y10T137/6995—Valve and meter wells
    • Y10T137/6999—With means to center well on valve

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Fluid-Driven Valves (AREA)
  • Lift Valve (AREA)
  • Indication Of The Valve Opening Or Closing Status (AREA)
  • Details Of Valves (AREA)
DE1998614815 1997-02-03 1998-01-30 Membranventil Expired - Fee Related DE69814815T2 (de)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US3769897P 1997-02-03 1997-02-03
US37698P 1997-02-03
US7299598P 1998-01-29 1998-01-29
US72995P 1998-01-29
PCT/US1998/001743 WO1998034056A2 (en) 1997-02-03 1998-01-30 Diaphragm valve

Publications (2)

Publication Number Publication Date
DE69814815D1 true DE69814815D1 (de) 2003-06-26
DE69814815T2 DE69814815T2 (de) 2004-04-08

Family

ID=26714394

Family Applications (1)

Application Number Title Priority Date Filing Date
DE1998614815 Expired - Fee Related DE69814815T2 (de) 1997-02-03 1998-01-30 Membranventil

Country Status (8)

Country Link
US (2) US6092550A (de)
EP (1) EP0941435B1 (de)
JP (2) JP2002513457A (de)
KR (1) KR100514761B1 (de)
CN (2) CN1107831C (de)
DE (1) DE69814815T2 (de)
IL (1) IL130567A (de)
WO (1) WO1998034056A2 (de)

Families Citing this family (51)

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PT1368587E (pt) 2001-02-20 2008-02-14 Nl Technologies Ltd Válvula de diafragma com vedação circunferencial
JP4700234B2 (ja) * 2001-07-31 2011-06-15 株式会社フジキン ダイヤフラム弁
DE10139815A1 (de) * 2001-08-14 2003-03-13 Friatec Sed Ventilsysteme Gmbh Membranventil
US20050224744A1 (en) * 2002-02-20 2005-10-13 Nl Technologies, Ltd. Circumferential sealing diaphragm valve
ITSV20020032A1 (it) * 2002-07-09 2004-01-09 Alberto Lodolo Valvola a membrana ed otturatore per detta valvola
JP4310532B2 (ja) * 2002-11-27 2009-08-12 Ｓｍｃ株式会社 流量調整弁
TW572164U (en) * 2002-12-06 2004-01-11 Ind Tech Res Inst Diaphragm valve
US7430833B2 (en) * 2003-03-28 2008-10-07 Pn Ii, Inc. Universal rake-ridge cap
US20070045587A1 (en) * 2003-04-14 2007-03-01 Terrence Kolenc Diaphragm valve seat
US6907897B2 (en) * 2003-06-26 2005-06-21 Planar Systems, Inc. Diaphragm valve for high-temperature precursor supply in atomic layer deposition
US7021330B2 (en) 2003-06-26 2006-04-04 Planar Systems, Inc. Diaphragm valve with reliability enhancements for atomic layer deposition
US6941963B2 (en) * 2003-06-26 2005-09-13 Planar Systems, Inc. High-speed diaphragm valve for atomic layer deposition
US20050092079A1 (en) * 2003-10-03 2005-05-05 Ales Richard A. Diaphragm monitoring for flow control devices
US20050109973A1 (en) * 2003-11-21 2005-05-26 Glime William H. Valve diaphragm
JP2005188672A (ja) * 2003-12-26 2005-07-14 Neriki:Kk バルブ装置
CN1906436A (zh) 2004-01-29 2007-01-31 旭有机材工业株式会社 阀
US6997440B2 (en) * 2004-03-29 2006-02-14 Tescom Corporation Packless valve apparatus
TWM276133U (en) * 2004-12-07 2005-09-21 Metal Ind Res & Dev Ct Pushing block applied in the valve
KR20080037018A (ko) * 2005-07-13 2008-04-29 스와겔로크 컴패니 작동 방법 및 작동 장치
CN101283212A (zh) * 2005-08-09 2008-10-08 斯瓦戈洛克公司 流体流动装置
DK1798458T3 (da) * 2005-12-13 2009-06-02 Pergola S R L Membranventil til komprimeret eller flydende gas
US7686280B2 (en) * 2005-12-28 2010-03-30 Circor Instrumentation Technologies, Inc. Removable valve seat member for diaphragm valve
CN101405528B (zh) * 2006-03-15 2011-12-14 诺格伦有限责任公司 隔膜阀及用于弹性加载隔膜阀的方法
US7971599B2 (en) * 2006-06-20 2011-07-05 Ckd Corporation Air-operated valve
US8172197B2 (en) * 2006-07-06 2012-05-08 Mks Instruments, Inc. Fast-acting pneumatic diaphragm valve
CN101855503A (zh) * 2007-11-13 2010-10-06 丹福斯有限公司 膨胀阀
WO2010045946A1 (en) * 2008-10-21 2010-04-29 Danfoss A/S A servo valve
JP5613420B2 (ja) * 2010-02-05 2014-10-22 株式会社フジキン 流体制御器
JP2013521454A (ja) * 2010-03-04 2013-06-10 バイオ−ラッド ラボラトリーズ インコーポレーティッド ダイヤフラムバルブ
US8960216B2 (en) * 2011-03-21 2015-02-24 Tescom Corporation Diaphragm control valve having a universal diaphragm mounting location
JP5779559B2 (ja) * 2012-08-31 2015-09-16 株式会社フジキン ダイヤフラム弁
US9863542B2 (en) 2013-02-01 2018-01-09 Swagelok Company Diaphragm valve with welded diaphragm seat carrier
CN105473915A (zh) * 2013-03-11 2016-04-06 滨特尔民用水处理有限责任公司 机械压力开关
CN104062057B (zh) * 2013-03-20 2019-06-11 费希尔久安输配设备(成都)有限公司 一种膜片紧固装置及包含所述膜片紧固装置的感应装置
JP6111862B2 (ja) * 2013-05-24 2017-04-12 日立金属株式会社 流量制御弁及びそれを用いたマスフローコントローラ
JP6218470B2 (ja) * 2013-07-18 2017-10-25 株式会社フジキン ダイヤフラム弁
JP6232224B2 (ja) * 2013-07-26 2017-11-15 株式会社フジキン ダイヤフラム弁
US9885421B2 (en) 2013-08-26 2018-02-06 Parker-Hannifin Corporation High cycle and speed valve
EP3074672A4 (de) 2013-11-28 2017-07-05 Ham-Let (Israel-Canada) Ltd. Ventilvorrichtung zur steuerung und regelung eines fluiddurchgangs
JP6564593B2 (ja) * 2015-03-25 2019-08-21 株式会社フジキン ダイヤフラム弁
JP6654020B2 (ja) * 2015-11-13 2020-02-26 株式会社フジキン ダイヤフラムバルブおよびその製造方法
US10352470B2 (en) * 2015-11-17 2019-07-16 Ge Aviation Systems Llc Control valve and air starting system
CN105382458B (zh) * 2015-11-24 2017-07-11 山西江淮重工有限责任公司 膜片与蒸汽球阀阀座组焊工装及其组焊工艺
US10584796B2 (en) * 2016-08-02 2020-03-10 GE AViation systems, ILC Seal, assembly, and retention method
US11047490B2 (en) * 2016-08-25 2021-06-29 Kitz Sct Corporation Diaphragm valve and flow rate control device for semiconductor manufacturing apparatus
KR102239202B1 (ko) * 2017-07-04 2021-04-09 가부시키가이샤 후지킨 액추에이터, 밸브, 유체 공급 시스템 및 반도체 제조 장치
US10774938B2 (en) 2017-11-09 2020-09-15 Swagelok Company Diaphragm valve with metal seat
JP7045839B2 (ja) * 2017-12-08 2022-04-01 株式会社キッツエスシーティー 流体制御バルブ
US20190323625A1 (en) 2018-04-23 2019-10-24 Rain Bird Corporation Valve With Reinforcement Ports And Manually Removable Scrubber
JP2018132194A (ja) * 2018-05-01 2018-08-23 株式会社フジキン ダイヤフラム弁、流体制御装置、半導体制御装置および半導体制御方法
US12117090B2 (en) * 2021-08-04 2024-10-15 Gemü Gebr. Müller Apparatebau Gmbh & Co. Kommanditgesellschaft Tensioning assembly for a process valve

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US2959392A (en) * 1957-11-08 1960-11-08 Platen Baltzar Carl Von Fluid-tight valve seat
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Also Published As

Publication number Publication date
EP0941435A2 (de) 1999-09-15
IL130567A (en) 2002-04-21
DE69814815T2 (de) 2004-04-08
EP0941435B1 (de) 2003-05-21
CN1447050A (zh) 2003-10-08
JP2008304067A (ja) 2008-12-18
CN1246915A (zh) 2000-03-08
KR100514761B1 (ko) 2005-09-15
IL130567A0 (en) 2000-06-01
JP2002513457A (ja) 2002-05-08
US6189861B1 (en) 2001-02-20
CN1107831C (zh) 2003-05-07
WO1998034056A2 (en) 1998-08-06
KR20000070604A (ko) 2000-11-25
WO1998034056A3 (en) 1998-11-12
US6092550A (en) 2000-07-25

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee