DE69806995D1 - Vorrichtung zur Materialbearbeitung, Datenaufzeichnung oder Datenwiedergabe mit Rastersondenmikroskop - Google Patents

Vorrichtung zur Materialbearbeitung, Datenaufzeichnung oder Datenwiedergabe mit Rastersondenmikroskop

Info

Publication number
DE69806995D1
DE69806995D1 DE69806995T DE69806995T DE69806995D1 DE 69806995 D1 DE69806995 D1 DE 69806995D1 DE 69806995 T DE69806995 T DE 69806995T DE 69806995 T DE69806995 T DE 69806995T DE 69806995 D1 DE69806995 D1 DE 69806995D1
Authority
DE
Germany
Prior art keywords
material processing
scanning probe
data
probe microscope
data recording
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69806995T
Other languages
English (en)
Other versions
DE69806995T2 (de
Inventor
Eisuke Tomita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi High Tech Science Corp
Original Assignee
Seiko Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP09121697A external-priority patent/JP3202646B2/ja
Application filed by Seiko Instruments Inc filed Critical Seiko Instruments Inc
Publication of DE69806995D1 publication Critical patent/DE69806995D1/de
Application granted granted Critical
Publication of DE69806995T2 publication Critical patent/DE69806995T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B9/00—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor
    • G11B9/12—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor
    • G11B9/14—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor using microscopic probe means, i.e. recording or reproducing by means directly associated with the tip of a microscopic electrical probe as used in Scanning Tunneling Microscopy [STM] or Atomic Force Microscopy [AFM] for inducing physical or electrical perturbations in a recording medium; Record carriers or media specially adapted for such transducing of information
    • G11B9/1418—Disposition or mounting of heads or record carriers
    • G11B9/1427—Disposition or mounting of heads or record carriers with provision for moving the heads or record carriers relatively to each other or for access to indexed parts without effectively imparting a relative movement
    • G11B9/1436—Disposition or mounting of heads or record carriers with provision for moving the heads or record carriers relatively to each other or for access to indexed parts without effectively imparting a relative movement with provision for moving the heads or record carriers relatively to each other
    • G11B9/1454—Positioning the head or record carrier into or out of operative position or across information tracks; Alignment of the head relative to the surface of the record carrier
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B9/00—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor
    • G11B9/12—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor
    • G11B9/14—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor using microscopic probe means, i.e. recording or reproducing by means directly associated with the tip of a microscopic electrical probe as used in Scanning Tunneling Microscopy [STM] or Atomic Force Microscopy [AFM] for inducing physical or electrical perturbations in a recording medium; Record carriers or media specially adapted for such transducing of information
    • G11B9/1418—Disposition or mounting of heads or record carriers
    • G11B9/1427—Disposition or mounting of heads or record carriers with provision for moving the heads or record carriers relatively to each other or for access to indexed parts without effectively imparting a relative movement
    • G11B9/1436—Disposition or mounting of heads or record carriers with provision for moving the heads or record carriers relatively to each other or for access to indexed parts without effectively imparting a relative movement with provision for moving the heads or record carriers relatively to each other
    • G11B9/1445—Disposition or mounting of heads or record carriers with provision for moving the heads or record carriers relatively to each other or for access to indexed parts without effectively imparting a relative movement with provision for moving the heads or record carriers relatively to each other switching at least one head in operating function; Controlling the relative spacing to keep the head operative, e.g. for allowing a tunnel current flow
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning
    • G01Q10/045—Self-actuating probes, i.e. wherein the actuating means for driving are part of the probe itself, e.g. piezoelectric means on a cantilever probe
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q80/00—Applications, other than SPM, of scanning-probe techniques
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/85—Scanning probe control process
    • Y10S977/851—Particular movement or positioning of scanning tip
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/872—Positioner
DE69806995T 1997-04-09 1998-04-09 Vorrichtung zur Materialbearbeitung, Datenaufzeichnung oder Datenwiedergabe mit Rastersondenmikroskop Expired - Fee Related DE69806995T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP09121697A JP3202646B2 (ja) 1997-04-09 1997-04-09 走査型プローブ顕微鏡
JP9092635A JPH10283972A (ja) 1997-04-10 1997-04-10 走査型プローブ顕微鏡を用いた加工、記録、再生装置
US09/057,809 US5990477A (en) 1997-04-10 1998-04-09 Apparatus for machining, recording, and reproducing, using scanning probe microscope

Publications (2)

Publication Number Publication Date
DE69806995D1 true DE69806995D1 (de) 2002-09-12
DE69806995T2 DE69806995T2 (de) 2002-11-28

Family

ID=41090395

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69806995T Expired - Fee Related DE69806995T2 (de) 1997-04-09 1998-04-09 Vorrichtung zur Materialbearbeitung, Datenaufzeichnung oder Datenwiedergabe mit Rastersondenmikroskop

Country Status (5)

Country Link
US (1) US5990477A (de)
EP (1) EP0871166B1 (de)
JP (1) JPH10283972A (de)
CA (1) CA2231224A1 (de)
DE (1) DE69806995T2 (de)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3202646B2 (ja) * 1997-04-09 2001-08-27 セイコーインスツルメンツ株式会社 走査型プローブ顕微鏡
US6200022B1 (en) * 1997-04-21 2001-03-13 Ta Instruments, Inc. Method and apparatus for localized dynamic mechano-thermal analysis with scanning probe microscopy
US6223591B1 (en) * 1997-11-28 2001-05-01 Nikon Corporation Probe needle arrangement and movement method for use in an atomic force microscope
JP3905254B2 (ja) * 1998-06-22 2007-04-18 エスアイアイ・ナノテクノロジー株式会社 走査型プローブ顕微鏡
US7370102B1 (en) 1998-12-15 2008-05-06 Cisco Technology, Inc. Managing recovery of service components and notification of service errors and failures
US6718376B1 (en) 1998-12-15 2004-04-06 Cisco Technology, Inc. Managing recovery of service components and notification of service errors and failures
JP3387846B2 (ja) * 1999-03-04 2003-03-17 セイコーインスツルメンツ株式会社 走査型プローブ顕微鏡
TW424155B (en) * 1999-05-03 2001-03-01 Ind Tech Res Inst Beating mode near-field optical microscope
JP4044241B2 (ja) * 1999-05-24 2008-02-06 日本分光株式会社 プローブ顕微鏡
US6888135B2 (en) * 2000-10-18 2005-05-03 Nec Corporation Scanning probe microscope with probe formed by single conductive material
IL145136A0 (en) * 2001-08-27 2002-06-30 Multiple plate tip or sample scanning reconfigurable scanning probe microscope with transparent interfacing of far-field optical microscopes
US6953930B2 (en) * 2001-08-27 2005-10-11 Nippon Telegraph And Telephone Corporation Conductive transparent probe and probe control apparatus
US7057997B2 (en) 2003-04-23 2006-06-06 Hewlett-Packard Development Company, L.P. Class of electron beam based data storage devices and methods of use thereof
US7053351B2 (en) 2004-03-30 2006-05-30 Matsushita Electric Industrial, Co., Ltd Near-field scanning optical microscope for laser machining of micro- and nano- structures
JP2007003319A (ja) * 2005-06-23 2007-01-11 Seiko Instruments Inc 水晶振動子の特性測定装置および特性測定方法
JP5252389B2 (ja) * 2005-12-20 2013-07-31 国立大学法人金沢大学 走査型プローブ顕微鏡
JP2008173728A (ja) * 2007-01-19 2008-07-31 Sii Nanotechnology Inc 原子間力顕微鏡微細加工装置及び原子間力顕微鏡を用いた微細加工方法
JP4498368B2 (ja) * 2007-02-01 2010-07-07 エスアイアイ・ナノテクノロジー株式会社 微小接触式プローバー
JP5747129B2 (ja) * 2012-06-26 2015-07-08 株式会社日立ハイテクノロジーズ ステージ装置および試料観察装置
CN105527265B (zh) * 2016-01-22 2023-07-04 复旦大学 激光泵浦时间分辨上转换发光活体成像系统
EP3324193A1 (de) 2016-11-18 2018-05-23 Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO Hochgenaue abtastungsvorrichtung
CN106960531B (zh) * 2017-04-12 2019-05-14 常州富鸿达电子有限公司 一种医用报警器及其工作方法
KR102026832B1 (ko) * 2017-10-17 2019-09-30 세메스 주식회사 기판 처리 장치 및 기판 처리 방법
CN111811939B (zh) * 2020-07-21 2022-08-02 上海交通大学 超低温环境下的高精度纳米力学检测系统
CN113176424B (zh) * 2021-03-31 2024-07-16 西安交通大学 一种加工二维纳米结构的装置及方法

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02297003A (ja) * 1989-05-12 1990-12-07 Canon Inc 検出部位置決機構、圧電素子微動機構およびこれらを用いた走査型トンネル顕微鏡
CA2035996C (en) * 1990-02-09 1998-01-06 Hiroyasu Nose Position displacement detecting apparatus
JPH05180616A (ja) * 1992-01-08 1993-07-23 Canon Inc プローブ保持機構
JP3061955B2 (ja) * 1992-09-08 2000-07-10 キヤノン株式会社 走査型プローブ顕微鏡、メモリー装置及びリソグラフィー装置
JPH0696714A (ja) * 1992-09-14 1994-04-08 Hitachi Ltd 表面加工装置および記録装置
JPH06300515A (ja) * 1993-04-16 1994-10-28 Matsushita Electric Ind Co Ltd 走査プローブ顕微鏡用プローブと微細加工装置
JP3270617B2 (ja) * 1994-03-23 2002-04-02 キヤノン株式会社 走査型プローブ顕微鏡
GB2289759B (en) * 1994-05-11 1996-05-22 Khaled Karrau Coupled oscillator scanning imager
GB2290656B (en) * 1994-06-23 1998-03-25 Grongar Wynn Lloyd A scanning probe and an approach mechanism therefor
JPH08122341A (ja) * 1994-10-24 1996-05-17 Olympus Optical Co Ltd 走査型プローブ顕微鏡
JPH08248043A (ja) * 1995-03-07 1996-09-27 Nikon Corp 走査型近接場光学顕微鏡
DE19524907A1 (de) * 1995-07-08 1997-01-09 Frieder Mugele Rastersondenmikroskop

Also Published As

Publication number Publication date
EP0871166A1 (de) 1998-10-14
US5990477A (en) 1999-11-23
EP0871166B1 (de) 2002-08-07
DE69806995T2 (de) 2002-11-28
JPH10283972A (ja) 1998-10-23
CA2231224A1 (en) 1998-10-10

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: SII NANO TECHNOLOGY INC., CHIBA, JP

8339 Ceased/non-payment of the annual fee