DE69806010T2 - Mikromechanischer Beschleunigungsschalter - Google Patents

Mikromechanischer Beschleunigungsschalter

Info

Publication number
DE69806010T2
DE69806010T2 DE69806010T DE69806010T DE69806010T2 DE 69806010 T2 DE69806010 T2 DE 69806010T2 DE 69806010 T DE69806010 T DE 69806010T DE 69806010 T DE69806010 T DE 69806010T DE 69806010 T2 DE69806010 T2 DE 69806010T2
Authority
DE
Germany
Prior art keywords
acceleration switch
micromechanical acceleration
micromechanical
switch
acceleration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69806010T
Other languages
English (en)
Other versions
DE69806010D1 (de
Inventor
Terje Kvisteroey
Henrik Jakobsen
Gjermund Kittilsland
Asgeir Nord
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Infineon Technologies Sensonor AS
Original Assignee
Sensonor ASA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sensonor ASA filed Critical Sensonor ASA
Application granted granted Critical
Publication of DE69806010D1 publication Critical patent/DE69806010D1/de
Publication of DE69806010T2 publication Critical patent/DE69806010T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/135—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by making use of contacts which are actuated by a movable inertial mass
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/12—Contacts characterised by the manner in which co-operating contacts engage
    • H01H1/14—Contacts characterised by the manner in which co-operating contacts engage by abutting
    • H01H1/20—Bridging contacts
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H35/00—Switches operated by change of a physical condition
    • H01H35/14—Switches operated by change of acceleration, e.g. by shock or vibration, inertia switch

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Switches Operated By Changes In Physical Conditions (AREA)
  • Micromachines (AREA)
DE69806010T 1998-10-29 1998-10-29 Mikromechanischer Beschleunigungsschalter Expired - Lifetime DE69806010T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP98308875A EP0997920B1 (de) 1998-10-29 1998-10-29 Mikromechanischer Beschleunigungsschalter

Publications (2)

Publication Number Publication Date
DE69806010D1 DE69806010D1 (de) 2002-07-18
DE69806010T2 true DE69806010T2 (de) 2003-01-02

Family

ID=8235134

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69806010T Expired - Lifetime DE69806010T2 (de) 1998-10-29 1998-10-29 Mikromechanischer Beschleunigungsschalter

Country Status (7)

Country Link
US (1) US6236005B1 (de)
EP (1) EP0997920B1 (de)
JP (1) JP2000155127A (de)
KR (1) KR20000029348A (de)
CN (1) CN1123027C (de)
BR (1) BR9906059A (de)
DE (1) DE69806010T2 (de)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000088878A (ja) * 1998-09-09 2000-03-31 Tokai Rika Co Ltd 加速度スイッチ及びその製造方法
US6367786B1 (en) * 1999-06-07 2002-04-09 California Institute Of Technology Micromachined double resonator
JP2001337108A (ja) * 2000-05-29 2001-12-07 Tokai Rika Co Ltd 加速度スイッチ
US6787969B2 (en) * 2000-06-06 2004-09-07 Iolon, Inc. Damped micromechanical device
US6795605B1 (en) * 2000-08-01 2004-09-21 Cheetah Omni, Llc Micromechanical optical switch
US6556741B1 (en) 2000-10-25 2003-04-29 Omm, Inc. MEMS optical switch with torsional hinge and method of fabrication thereof
US6619123B2 (en) * 2001-06-04 2003-09-16 Wisconsin Alumni Research Foundation Micromachined shock sensor
US6737979B1 (en) * 2001-12-04 2004-05-18 The United States Of America As Represented By The Secretary Of The Navy Micromechanical shock sensor
US6829937B2 (en) * 2002-06-17 2004-12-14 Vti Holding Oy Monolithic silicon acceleration sensor
JP2005116371A (ja) * 2003-10-08 2005-04-28 Mitsubishi Electric Corp 加速度検知装置
US20050132803A1 (en) * 2003-12-23 2005-06-23 Baldwin David J. Low cost integrated MEMS hybrid
US7284432B2 (en) * 2005-03-29 2007-10-23 Agency For Science, Technology & Research Acceleration sensitive switch
US7038150B1 (en) * 2004-07-06 2006-05-02 Sandia Corporation Micro environmental sensing device
US7194889B1 (en) 2005-08-04 2007-03-27 The United States Of America As Represented By The Secretary Of The Navy MEMS multi-directional shock sensor with multiple masses
US8677802B2 (en) * 2006-02-04 2014-03-25 Evigia Systems, Inc. Sensing modules and methods of using
JP4231062B2 (ja) * 2006-05-12 2009-02-25 株式会社東芝 Ｍｅｍｓ素子
CN101303366B (zh) * 2007-05-11 2012-08-29 中国科学院上海微系统与信息技术研究所 硅基带锁止功能的阈值可调加速度开关传感器及制作方法
US8136400B2 (en) * 2007-11-15 2012-03-20 Physical Logic Ag Accelerometer
US7999201B2 (en) * 2008-11-06 2011-08-16 Shandong Gettop Acoustic Co. Ltd. MEMS G-switch device
CN102122590B (zh) * 2010-12-12 2015-10-14 郑超 机械滑块式角超加速开关装置
KR101785548B1 (ko) 2016-02-16 2017-10-17 화인계기주식회사 회전 다이얼을 이용한 디지털 멀티미터
KR101772087B1 (ko) * 2016-03-25 2017-08-28 국방과학연구소 로켓 점화안전장치용 mems 스위치 조립체

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5195371A (en) * 1988-01-13 1993-03-23 The Charles Stark Draper Laboratory, Inc. Semiconductor chip transducer
JPH03210478A (ja) * 1990-01-12 1991-09-13 Nissan Motor Co Ltd 半導体加速度センサ
US5177331A (en) * 1991-07-05 1993-01-05 Delco Electronics Corporation Impact detector
US5220835A (en) * 1991-09-12 1993-06-22 Ford Motor Company Torsion beam accelerometer
US5591910A (en) * 1994-06-03 1997-01-07 Texas Instruments Incorporated Accelerometer
CA2149933A1 (en) * 1994-06-29 1995-12-30 Robert M. Boysel Micro-mechanical accelerometers with improved detection circuitry
KR0139506B1 (ko) * 1994-10-07 1998-07-15 전성원 자체진단 기능을 구비한 대칭질량형 가속도계 및 그 제조방법
US5804783A (en) * 1995-06-07 1998-09-08 Automotive Technologies International, Inc. Air damped crash sensor and construction method thereof
DE19541388A1 (de) * 1995-11-07 1997-05-15 Telefunken Microelectron Mikromechanischer Beschleunigungssensor
US5990427A (en) * 1998-10-23 1999-11-23 Trw Inc. Movable acceleration switch responsive to acceleration parallel to plane of substrate upon which the switch is fabricated and methods

Also Published As

Publication number Publication date
EP0997920A1 (de) 2000-05-03
CN1123027C (zh) 2003-10-01
BR9906059A (pt) 2000-09-26
JP2000155127A (ja) 2000-06-06
CN1253370A (zh) 2000-05-17
EP0997920B1 (de) 2002-06-12
US6236005B1 (en) 2001-05-22
DE69806010D1 (de) 2002-07-18
KR20000029348A (ko) 2000-05-25

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Legal Events

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