BR9906059A - Comutador micromecânico de aceleração e comutador de aceleração monolìtico biaxial - Google Patents

Comutador micromecânico de aceleração e comutador de aceleração monolìtico biaxial

Info

Publication number
BR9906059A
BR9906059A BR9906059-0A BR9906059A BR9906059A BR 9906059 A BR9906059 A BR 9906059A BR 9906059 A BR9906059 A BR 9906059A BR 9906059 A BR9906059 A BR 9906059A
Authority
BR
Brazil
Prior art keywords
electrode element
switch
acceleration switch
acceleration
mass
Prior art date
Application number
BR9906059-0A
Other languages
English (en)
Inventor
Terje Kvisteroey
Henrik Jakobsen
Gjermund Kittilsland
Asgeir Nord
Original Assignee
Sensomor Asa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sensomor Asa filed Critical Sensomor Asa
Publication of BR9906059A publication Critical patent/BR9906059A/pt

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/135Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by making use of contacts which are actuated by a movable inertial mass
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01HELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00Contacts
    • H01H1/0036Switches making use of microelectromechanical systems [MEMS]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01HELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00Contacts
    • H01H1/12Contacts characterised by the manner in which co-operating contacts engage
    • H01H1/14Contacts characterised by the manner in which co-operating contacts engage by abutting
    • H01H1/20Bridging contacts
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01HELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H35/00Switches operated by change of a physical condition
    • H01H35/14Switches operated by change of acceleration, e.g. by shock or vibration, inertia switch

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Switches Operated By Changes In Physical Conditions (AREA)
  • Micromachines (AREA)

Abstract

Patente de Invenção: COMUTADOR MICROMECâNICO DE ACELERAçãO E COMUTADOR DE ACELERAçãO MONOLìTICO BIAXIAL. é descrito um comutador micromecânico de aceleração de silício ou materiais similares, compreendendo um elemento de eletrodo resiliente, uma massa de prova, um estojo ou alojamento e um elemento de mola conectando o elemento de eletrodo e a massa de prova ao estojo. O elemento de eletrodo é conectado mecanicamente adjacente à massa de prova. A massa de prova possui seu centro de gravidade localizado a uma dada distância do eixo geométrico através do elemento de mola, de modo que quando a massa de prova esteja pivotando em torno do eixo geométrico do elemento de mola em resposta a uma aceleração externamente aplicada, com um componente em uma direção paralela ao primeiro eixo goemétrico o elemento de eletrodo também pivota em torno deste eixo geométrico, o ângulo de pivoteamento sendo essencialmente proporcional à magnitude deste componente da aceleração. O elemento de eletrodo resiliente possui uma massa consideravelmente menor que a massa de prova e está provido com pelo menos um ponto de contato elétrico propiciando contato elétrico e cooperando com áreas de contato correspondentes no estojo de comutador em um dado ângulo de pivoteamento do elemento de eletrodo.
BR9906059-0A 1998-10-29 1999-10-28 Comutador micromecânico de aceleração e comutador de aceleração monolìtico biaxial BR9906059A (pt)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP98308875A EP0997920B1 (en) 1998-10-29 1998-10-29 Micromechanical acceleration switch

Publications (1)

Publication Number Publication Date
BR9906059A true BR9906059A (pt) 2000-09-26

Family

ID=8235134

Family Applications (1)

Application Number Title Priority Date Filing Date
BR9906059-0A BR9906059A (pt) 1998-10-29 1999-10-28 Comutador micromecânico de aceleração e comutador de aceleração monolìtico biaxial

Country Status (7)

Country Link
US (1) US6236005B1 (pt)
EP (1) EP0997920B1 (pt)
JP (1) JP2000155127A (pt)
KR (1) KR20000029348A (pt)
CN (1) CN1123027C (pt)
BR (1) BR9906059A (pt)
DE (1) DE69806010T2 (pt)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000088878A (ja) * 1998-09-09 2000-03-31 Tokai Rika Co Ltd 加速度スイッチ及びその製造方法
US6367786B1 (en) * 1999-06-07 2002-04-09 California Institute Of Technology Micromachined double resonator
JP2001337108A (ja) * 2000-05-29 2001-12-07 Tokai Rika Co Ltd 加速度スイッチ
AU2001275514A1 (en) * 2000-06-06 2001-12-17 Iolon, Inc. Micromechanical device with damped microactuator
US6795605B1 (en) * 2000-08-01 2004-09-21 Cheetah Omni, Llc Micromechanical optical switch
US6556741B1 (en) 2000-10-25 2003-04-29 Omm, Inc. MEMS optical switch with torsional hinge and method of fabrication thereof
US6619123B2 (en) * 2001-06-04 2003-09-16 Wisconsin Alumni Research Foundation Micromachined shock sensor
US6737979B1 (en) * 2001-12-04 2004-05-18 The United States Of America As Represented By The Secretary Of The Navy Micromechanical shock sensor
US6829937B2 (en) * 2002-06-17 2004-12-14 Vti Holding Oy Monolithic silicon acceleration sensor
JP2005116371A (ja) * 2003-10-08 2005-04-28 Mitsubishi Electric Corp 加速度検知装置
US20050132803A1 (en) * 2003-12-23 2005-06-23 Baldwin David J. Low cost integrated MEMS hybrid
US7284432B2 (en) * 2005-03-29 2007-10-23 Agency For Science, Technology & Research Acceleration sensitive switch
US7038150B1 (en) * 2004-07-06 2006-05-02 Sandia Corporation Micro environmental sensing device
US7194889B1 (en) 2005-08-04 2007-03-27 The United States Of America As Represented By The Secretary Of The Navy MEMS multi-directional shock sensor with multiple masses
US8677802B2 (en) * 2006-02-04 2014-03-25 Evigia Systems, Inc. Sensing modules and methods of using
JP4231062B2 (ja) * 2006-05-12 2009-02-25 株式会社東芝 Mems素子
CN101303366B (zh) * 2007-05-11 2012-08-29 中国科学院上海微系统与信息技术研究所 硅基带锁止功能的阈值可调加速度开关传感器及制作方法
US8136400B2 (en) * 2007-11-15 2012-03-20 Physical Logic Ag Accelerometer
US7999201B2 (en) * 2008-11-06 2011-08-16 Shandong Gettop Acoustic Co. Ltd. MEMS G-switch device
CN102122590B (zh) * 2010-12-12 2015-10-14 郑超 机械滑块式角超加速开关装置
KR101785548B1 (ko) 2016-02-16 2017-10-17 화인계기주식회사 회전 다이얼을 이용한 디지털 멀티미터
KR101772087B1 (ko) * 2016-03-25 2017-08-28 국방과학연구소 로켓 점화안전장치용 mems 스위치 조립체

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5195371A (en) * 1988-01-13 1993-03-23 The Charles Stark Draper Laboratory, Inc. Semiconductor chip transducer
JPH03210478A (ja) * 1990-01-12 1991-09-13 Nissan Motor Co Ltd 半導体加速度センサ
US5177331A (en) * 1991-07-05 1993-01-05 Delco Electronics Corporation Impact detector
US5220835A (en) * 1991-09-12 1993-06-22 Ford Motor Company Torsion beam accelerometer
US5591910A (en) * 1994-06-03 1997-01-07 Texas Instruments Incorporated Accelerometer
CA2149933A1 (en) * 1994-06-29 1995-12-30 Robert M. Boysel Micro-mechanical accelerometers with improved detection circuitry
KR0139506B1 (ko) * 1994-10-07 1998-07-15 전성원 자체진단 기능을 구비한 대칭질량형 가속도계 및 그 제조방법
US5804783A (en) * 1995-06-07 1998-09-08 Automotive Technologies International, Inc. Air damped crash sensor and construction method thereof
DE19541388A1 (de) * 1995-11-07 1997-05-15 Telefunken Microelectron Mikromechanischer Beschleunigungssensor
US5990427A (en) * 1998-10-23 1999-11-23 Trw Inc. Movable acceleration switch responsive to acceleration parallel to plane of substrate upon which the switch is fabricated and methods

Also Published As

Publication number Publication date
DE69806010T2 (de) 2003-01-02
EP0997920B1 (en) 2002-06-12
DE69806010D1 (de) 2002-07-18
KR20000029348A (ko) 2000-05-25
US6236005B1 (en) 2001-05-22
CN1253370A (zh) 2000-05-17
EP0997920A1 (en) 2000-05-03
CN1123027C (zh) 2003-10-01
JP2000155127A (ja) 2000-06-06

Similar Documents

Publication Publication Date Title
BR9906059A (pt) Comutador micromecânico de aceleração e comutador de aceleração monolìtico biaxial
US4694703A (en) Circumferentially oriented flexure suspension
US4679434A (en) Integrated force balanced accelerometer
JP2001066321A (ja) マイクロマシニング型の構成エレメント
WO1989012830A3 (en) Micro-machined accelerometer
KR960001756A (ko) 개선된 검출 회로를 갖는 마이크로 메캐니컬 가속도계
WO2007021399A3 (en) Multi-axis micromachined accelerometer
KR860002351A (ko) 외력 검출장치
JP2014153363A (ja) スティクション耐性memsデバイスおよび動作方法
WO2000057233A3 (en) Cantilevered microstructure methods and apparatus
EP0773560A3 (en) Electronic device comprising thermistor element
WO1998005973A8 (en) Tunneling sensor with linear force rebalance
KR900005522A (ko) 고장-폐쇄 능력이 향상된 스위치 접점
KR970078798A (ko) 납단자를 수지로 도포한 전자 부품
US3545283A (en) Non-linear accelerometer
BRPI0400487A (pt) Parte ativa para descarregador de surtos
BR9803580A (pt) Dispositivo de recobrimento variável para conduto de fiação elétrica
US4706505A (en) Force and torque sensor
US1025310A (en) Automatic air-current-actuated alarm.
US5471021A (en) Acceleration sensor with laterally-supported beam contacts
US4581505A (en) Impact switch
JPH11133051A (ja) 環状剪断形圧電素子及びこれを用いた加速度計
KR20150046631A (ko) 압저항 감지모듈 및 이를 포함하는 mems 센서
US7040140B2 (en) Device for suspension of a sample body
ITRM990223A1 (it) Sensore di accelerazione piezoelettrico.

Legal Events

Date Code Title Description
B08F Application fees: application dismissed [chapter 8.6 patent gazette]

Free format text: REFERENTE A 6A, 7A E 8A ANUIDADES

B08K Patent lapsed as no evidence of payment of the annual fee has been furnished to inpi [chapter 8.11 patent gazette]

Free format text: REFERENTE AO DESPACHO 8.6 PUBLICADO NA RPI 1910 DE 14/08/2007.