DE69736457D1 - Interatomares messverfahren - Google Patents

Interatomares messverfahren

Info

Publication number
DE69736457D1
DE69736457D1 DE69736457T DE69736457T DE69736457D1 DE 69736457 D1 DE69736457 D1 DE 69736457D1 DE 69736457 T DE69736457 T DE 69736457T DE 69736457 T DE69736457 T DE 69736457T DE 69736457 D1 DE69736457 D1 DE 69736457D1
Authority
DE
Germany
Prior art keywords
interatomic
measuring procedure
procedure
measuring
interatomic measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69736457T
Other languages
English (en)
Other versions
DE69736457T2 (de
Inventor
Tetsuo Ohara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Application granted granted Critical
Publication of DE69736457D1 publication Critical patent/DE69736457D1/de
Publication of DE69736457T2 publication Critical patent/DE69736457T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning
    • G01Q10/06—Circuits or algorithms therefor
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B9/00—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor
    • G11B9/12—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor
    • G11B9/14—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor using microscopic probe means, i.e. recording or reproducing by means directly associated with the tip of a microscopic electrical probe as used in Scanning Tunneling Microscopy [STM] or Atomic Force Microscopy [AFM] for inducing physical or electrical perturbations in a recording medium; Record carriers or media specially adapted for such transducing of information
    • G11B9/1418—Disposition or mounting of heads or record carriers
    • G11B9/1427—Disposition or mounting of heads or record carriers with provision for moving the heads or record carriers relatively to each other or for access to indexed parts without effectively imparting a relative movement
    • G11B9/1436—Disposition or mounting of heads or record carriers with provision for moving the heads or record carriers relatively to each other or for access to indexed parts without effectively imparting a relative movement with provision for moving the heads or record carriers relatively to each other
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/85—Scanning probe control process
    • Y10S977/851—Particular movement or positioning of scanning tip
DE69736457T 1996-05-20 1997-05-20 Interatomare Messtechnik Expired - Lifetime DE69736457T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US650168 1985-06-14
US08/650,168 US5744799A (en) 1996-05-20 1996-05-20 Apparatus for and method of real-time nanometer-scale position measurement of the sensor of a scanning tunneling microscope or other sensor scanning atomic or other undulating surfaces
PCT/IB1997/000580 WO1997044631A1 (en) 1996-05-20 1997-05-20 Inter-atomic measurement technique

Publications (2)

Publication Number Publication Date
DE69736457D1 true DE69736457D1 (de) 2006-09-21
DE69736457T2 DE69736457T2 (de) 2007-04-05

Family

ID=24607778

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69736457T Expired - Lifetime DE69736457T2 (de) 1996-05-20 1997-05-20 Interatomare Messtechnik

Country Status (7)

Country Link
US (1) US5744799A (de)
EP (1) EP0839311B1 (de)
KR (1) KR100540027B1 (de)
AU (1) AU2785397A (de)
DE (1) DE69736457T2 (de)
TW (1) TW348260B (de)
WO (1) WO1997044631A1 (de)

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2960013B2 (ja) * 1996-07-29 1999-10-06 慧 清野 移動物体の検出用目盛及びこれを用いた移動物体の検出装置
US6246054B1 (en) * 1997-06-10 2001-06-12 Olympus Optical Co., Ltd. Scanning probe microscope suitable for observing the sidewalls of steps in a specimen and measuring the tilt angle of the sidewalls
JP3278046B2 (ja) * 1997-07-29 2002-04-30 セイコーインスツルメンツ株式会社 ３次元走査プローブ顕微鏡
US6079254A (en) * 1998-05-04 2000-06-27 International Business Machines Corporation Scanning force microscope with automatic surface engagement and improved amplitude demodulation
US6121611A (en) * 1998-05-20 2000-09-19 Molecular Imaging Corporation Force sensing probe for scanning probe microscopy
US6323483B1 (en) * 1999-09-20 2001-11-27 Veeco Instruments Inc. High bandwidth recoiless microactuator
US6384518B1 (en) * 2000-09-18 2002-05-07 Jean A. Van Poppel Piezoelectric coupler for variably coupling two bodies and joint incorporating the coupler
KR100421375B1 (ko) * 2001-01-15 2004-03-09 제원호 고속 주사탐침 현미경용 고주파 진동 탐침
EP1237161B1 (de) * 2001-02-28 2014-05-14 Imec Verfahren und Vorrichtung zur Durchführung von Rasterkraftmikroskop-Messungen
DE50201770D1 (de) 2002-03-20 2005-01-20 Nanoworld Ag Neuchatel Verfahren zur Herstellung eines SPM-Sensors
DK1359593T3 (da) 2002-03-20 2004-08-09 Nanoworld Ag SPM-sensor og fremgangsmåde til dens fremstilling
US6608307B1 (en) * 2002-06-27 2003-08-19 Zyvex Corporation System and method for accurate positioning of a scanning probe microscope
US7687767B2 (en) * 2002-12-20 2010-03-30 Agilent Technologies, Inc. Fast scanning stage for a scanning probe microscope
TWI353341B (en) * 2004-10-14 2011-12-01 Ibm Programmable molecular manipulating processes
US7211789B2 (en) * 2004-10-14 2007-05-01 International Business Machines Corporation Programmable molecular manipulating processes
JP5339109B2 (ja) * 2005-11-04 2013-11-13 株式会社ニコン ロータリーエンコーダ
US7430484B2 (en) * 2006-03-31 2008-09-30 Tetsuo Ohara Signal processing method and apparatus for use in real-time subnanometer scale position measurements with the aid of probing sensors and beams scanning periodically undulating surfaces such as gratings and diffraction patterns generated thereby, and the like
US20070121477A1 (en) * 2006-06-15 2007-05-31 Nanochip, Inc. Cantilever with control of vertical and lateral position of contact probe tip
US20070290282A1 (en) * 2006-06-15 2007-12-20 Nanochip, Inc. Bonded chip assembly with a micro-mover for microelectromechanical systems
US20070291623A1 (en) * 2006-06-15 2007-12-20 Nanochip, Inc. Cantilever with control of vertical and lateral position of contact probe tip
US20080074792A1 (en) * 2006-09-21 2008-03-27 Nanochip, Inc. Control scheme for a memory device
US20080074984A1 (en) * 2006-09-21 2008-03-27 Nanochip, Inc. Architecture for a Memory Device
US7995216B2 (en) * 2008-07-02 2011-08-09 Ut-Battelle, Llc Control of the positional relationship between a sample collection instrument and a surface to be analyzed during a sampling procedure with image analysis
DE102009039840A1 (de) * 2009-09-03 2011-03-24 Forschungszentrum Jülich GmbH Verfahren zur Messung der Kraftwechselwirkung, welche durch eine Probe hervorgerufen wird
EP2548306B1 (de) * 2010-03-19 2016-03-16 RHK Technology Inc. Frequenzmessungs- und -regelungsvorrichtung mit integrierten parallelen und synchronisierten oszillatoren
US9995763B2 (en) 2014-02-24 2018-06-12 Bruker Nano, Inc. Precise probe placement in automated scanning probe microscopy systems
TWI582429B (zh) * 2015-01-09 2017-05-11 國立臺灣大學 原子力顯微鏡掃描方法

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH643397A5 (de) * 1979-09-20 1984-05-30 Ibm Raster-tunnelmikroskop.
DE3854173T2 (de) * 1987-08-25 1995-11-30 Canon Kk Codiereinrichtung.
JP2686645B2 (ja) * 1989-05-08 1997-12-08 キヤノン株式会社 走査型トンネル電流検出装置
JP2624873B2 (ja) * 1990-05-16 1997-06-25 松下電器産業株式会社 原子間力顕微鏡用探針およびその製造方法
EP0487003B1 (de) * 1990-11-20 1997-07-09 Canon Kabushiki Kaisha Neigungswinkelbestimmungsverfahren sowie Informationsbestimmungsschreibvorrichtung dafür
JP2825973B2 (ja) * 1990-11-29 1998-11-18 工業技術院長 原子間力顕微鏡用カンチレバーの製造方法
JP3010318B2 (ja) * 1991-02-26 2000-02-21 キヤノン株式会社 微小プローブ、その製造方法、該プローブを用いた表面観察装置及び情報処理装置
NL9101169A (nl) * 1991-07-05 1993-02-01 Drukker Int Bv Elektronische tastnaald en werkwijze voor het vervaardigen ervan.
US5537372A (en) * 1991-11-15 1996-07-16 International Business Machines Corporation High density data storage system with topographic contact sensor
DE69309318T2 (de) * 1992-01-10 1997-10-30 Hitachi Ltd Verfahren und Vorrichtung zum Beobachten einer Fläche
US5376790A (en) * 1992-03-13 1994-12-27 Park Scientific Instruments Scanning probe microscope
US5356218A (en) * 1993-05-04 1994-10-18 Motorola, Inc. Probe for providing surface images
US5406832A (en) * 1993-07-02 1995-04-18 Topometrix Corporation Synchronous sampling scanning force microscope
JP2983876B2 (ja) * 1994-03-22 1999-11-29 徹雄 大原 リアルタイムかつナノメータスケールの位置測定方法および装置
JP3581421B2 (ja) * 1995-02-23 2004-10-27 キヤノン株式会社 情報処理装置
US5966053A (en) * 1995-04-10 1999-10-12 International Business Machines Corporation Apparatus and method for controlling a mechanical oscillator

Also Published As

Publication number Publication date
KR100540027B1 (ko) 2006-07-06
DE69736457T2 (de) 2007-04-05
AU2785397A (en) 1997-12-09
US5744799A (en) 1998-04-28
TW348260B (en) 1998-12-21
EP0839311A1 (de) 1998-05-06
WO1997044631A1 (en) 1997-11-27
EP0839311B1 (de) 2006-08-09
KR19990029072A (ko) 1999-04-15

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