DE69736168D1 - Lichtabsorbierendes polymer, verfahren zu dessen synthese und filmbildende zusammensetzung und antireflektionsfilm der unter verwendung dieses polymers hergestellt wird - Google Patents

Lichtabsorbierendes polymer, verfahren zu dessen synthese und filmbildende zusammensetzung und antireflektionsfilm der unter verwendung dieses polymers hergestellt wird

Info

Publication number
DE69736168D1
DE69736168D1 DE69736168T DE69736168T DE69736168D1 DE 69736168 D1 DE69736168 D1 DE 69736168D1 DE 69736168 T DE69736168 T DE 69736168T DE 69736168 T DE69736168 T DE 69736168T DE 69736168 D1 DE69736168 D1 DE 69736168D1
Authority
DE
Germany
Prior art keywords
polymer
synthesis
light absorbing
forming composition
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69736168T
Other languages
English (en)
Other versions
DE69736168T2 (de
Inventor
Wen-Bing Kang
Akihiko Tokida
Kayo Aramaki
Hatsuyuki Tanaka
Ken Kimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
EMD Performance Materials Corp
Original Assignee
AZ Electronic Materials USA Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by AZ Electronic Materials USA Corp filed Critical AZ Electronic Materials USA Corp
Application granted granted Critical
Publication of DE69736168D1 publication Critical patent/DE69736168D1/de
Publication of DE69736168T2 publication Critical patent/DE69736168T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F222/00—Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a carboxyl radical and containing at least one other carboxyl radical in the molecule; Salts, anhydrides, esters, amides, imides, or nitriles thereof
    • C08F222/04—Anhydrides, e.g. cyclic anhydrides
    • C08F222/06—Maleic anhydride
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F216/00—Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by an alcohol, ether, aldehydo, ketonic, acetal or ketal radical
    • C08F216/12—Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by an alcohol, ether, aldehydo, ketonic, acetal or ketal radical by an ether radical
    • C08F216/14—Monomers containing only one unsaturated aliphatic radical
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F8/00—Chemical modification by after-treatment
    • C08F8/30—Introducing nitrogen atoms or nitrogen-containing groups
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F8/00—Chemical modification by after-treatment
    • C08F8/34—Introducing sulfur atoms or sulfur-containing groups
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D129/00—Coating compositions based on homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by an alcohol, ether, aldehydo, ketonic, acetal, or ketal radical; Coating compositions based on hydrolysed polymers of esters of unsaturated alcohols with saturated carboxylic acids; Coating compositions based on derivatives of such polymers
    • C09D129/10—Homopolymers or copolymers of unsaturated ethers
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D135/00—Coating compositions based on homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a carboxyl radical, and containing at least another carboxyl radical in the molecule, or of salts, anhydrides, esters, amides, imides or nitriles thereof; Coating compositions based on derivatives of such polymers
    • C09D135/02—Homopolymers or copolymers of esters
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D5/00—Coating compositions, e.g. paints, varnishes or lacquers, characterised by their physical nature or the effects produced; Filling pastes
    • C09D5/32—Radiation-absorbing paints
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
    • G03F7/091—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers characterised by antireflection means or light filtering or absorbing means, e.g. anti-halation, contrast enhancement

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Health & Medical Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Materials Engineering (AREA)
  • Wood Science & Technology (AREA)
  • Architecture (AREA)
  • Structural Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
  • Materials For Photolithography (AREA)
  • Paints Or Removers (AREA)
DE69736168T 1996-09-18 1997-09-16 Lichtabsorbierendes polymer, verfahren zu dessen synthese und filmbildende zusammensetzung und antireflektionsfilm der unter verwendung dieses polymers hergestellt wird Expired - Lifetime DE69736168T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP26790796 1996-09-18
JP26790796 1996-09-18
PCT/JP1997/003255 WO1998012238A1 (fr) 1996-09-18 1997-09-16 Polymer absorbant la lumiere, procede de synthese de ce polymere, et composition filmogene et film antireflexion prepares au moye n de ce polymere

Publications (2)

Publication Number Publication Date
DE69736168D1 true DE69736168D1 (de) 2006-08-03
DE69736168T2 DE69736168T2 (de) 2007-05-03

Family

ID=17451282

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69736168T Expired - Lifetime DE69736168T2 (de) 1996-09-18 1997-09-16 Lichtabsorbierendes polymer, verfahren zu dessen synthese und filmbildende zusammensetzung und antireflektionsfilm der unter verwendung dieses polymers hergestellt wird

Country Status (8)

Country Link
US (1) US6184305B1 (de)
EP (1) EP0861855B1 (de)
JP (1) JP4145959B2 (de)
KR (1) KR100491198B1 (de)
CN (1) CN1150219C (de)
DE (1) DE69736168T2 (de)
TW (1) TW446719B (de)
WO (1) WO1998012238A1 (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4165922B2 (ja) * 1998-03-17 2008-10-15 Ａｚエレクトロニックマテリアルズ株式会社 光吸収性ポリマーおよびその反射防止膜への応用
TW457403B (en) 1998-07-03 2001-10-01 Clariant Int Ltd Composition for forming a radiation absorbing coating containing blocked isocyanate compound and anti-reflective coating formed therefrom
US6316165B1 (en) * 1999-03-08 2001-11-13 Shipley Company, L.L.C. Planarizing antireflective coating compositions
US7018779B2 (en) * 2003-01-07 2006-03-28 International Business Machines Corporation Apparatus and method to improve resist line roughness in semiconductor wafer processing
IT1392389B1 (it) * 2008-12-19 2012-03-02 Eni Spa Polimeri immidizzati contenenti gruppi luminescenti e metodo per il loro ottenimento
JP6244907B2 (ja) * 2013-01-15 2017-12-13 株式会社リコー 水性インク、インクカートリッジ
KR101718102B1 (ko) * 2014-12-12 2017-04-04 최상준 새로운 반사방지막(Bottom anti-reflective coating)용 고분자 및 이를 이용한 조성물
CN108709549B (zh) * 2018-05-29 2020-11-03 东南大学 一种基于纳米光栅的单片集成陀螺仪及其加工方法

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3597468A (en) * 1965-09-06 1971-08-03 Oreal Colored amine reacted polymers
DE2150691C2 (de) * 1971-10-12 1982-09-09 Basf Ag, 6700 Ludwigshafen Lichtempfindliches Gemisch und Verwendung eines lichtempfindlichen Gemisches zur Herstellung einer Flachdruckplatte
US4910122A (en) 1982-09-30 1990-03-20 Brewer Science, Inc. Anti-reflective coating
FR2596400B1 (fr) * 1986-03-28 1988-08-26 Oreal Nouveaux polymeres capables d'absorber le rayonnement ultraviolet, leur preparation et leur application notamment en cosmetologie
JPH06828B2 (ja) * 1986-10-15 1994-01-05 宇部興産株式会社 光硬化性組成物
JPS63314205A (ja) * 1987-06-16 1988-12-22 Ube Ind Ltd 光硬化性組成物
DE3733158A1 (de) * 1987-10-01 1989-04-20 Basf Ag Verfahren zur herstellung von copolymerisaten aus maleinsaeuremonoalkylestern und vinylalkylethern
US5147968A (en) * 1988-05-13 1992-09-15 The Ohio State University Research Foundation Electromagnetic radiation absorbers and modulators comprising polyaniline
US4963160A (en) * 1989-03-14 1990-10-16 Ciba-Geigy Corporation Reactive uv absorbing compositions and method of preparing lenses therefrom
US5057399A (en) 1989-03-31 1991-10-15 Tony Flaim Method for making polyimide microlithographic compositions soluble in alkaline media
JP2657266B2 (ja) * 1989-04-28 1997-09-24 直哉 緒方 有機非線形光学材料
FR2690453B1 (fr) 1992-04-25 1995-11-03 Sandoz Sa Nouveaux composes polymeres ayant des proprietes optiques non lineaires.
JPH05320227A (ja) * 1992-05-22 1993-12-03 Seiko Epson Corp 感光性高分子製造方法
US5294680A (en) * 1992-07-24 1994-03-15 International Business Machines Corporation Polymeric dyes for antireflective coatings
WO1994012912A1 (en) 1992-11-25 1994-06-09 Hoechst Celanese Corporation Metal ion reduction in bottom anti-reflective coatings for photoresists
US5731385A (en) * 1993-12-16 1998-03-24 International Business Machines Corporation Polymeric dyes for antireflective coatings
TW290558B (de) * 1994-04-28 1996-11-11 Nissan Chemical Ind Ltd
US5525457A (en) 1994-12-09 1996-06-11 Japan Synthetic Rubber Co., Ltd. Reflection preventing film and process for forming resist pattern using the same

Also Published As

Publication number Publication date
CN1150219C (zh) 2004-05-19
DE69736168T2 (de) 2007-05-03
KR19990067617A (ko) 1999-08-25
US6184305B1 (en) 2001-02-06
EP0861855A1 (de) 1998-09-02
WO1998012238A1 (fr) 1998-03-26
TW446719B (en) 2001-07-21
EP0861855B1 (de) 2006-06-21
JP4145959B2 (ja) 2008-09-03
KR100491198B1 (ko) 2005-10-12
EP0861855A4 (de) 2004-12-01
CN1205013A (zh) 1999-01-13

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