DE69734103D1 - Ein feldeffekttransistor aus sic und verfahren zu dessen herstellung - Google Patents

Ein feldeffekttransistor aus sic und verfahren zu dessen herstellung

Info

Publication number
DE69734103D1
DE69734103D1 DE69734103T DE69734103T DE69734103D1 DE 69734103 D1 DE69734103 D1 DE 69734103D1 DE 69734103 T DE69734103 T DE 69734103T DE 69734103 T DE69734103 T DE 69734103T DE 69734103 D1 DE69734103 D1 DE 69734103D1
Authority
DE
Germany
Prior art keywords
sic
field effect
effect transistor
making same
making
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69734103T
Other languages
English (en)
Other versions
DE69734103T2 (de
Inventor
Christopher Harris
Mietek Bakowski
Ulf Gustafsson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Wolfspeed Inc
Original Assignee
Cree Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cree Inc filed Critical Cree Inc
Application granted granted Critical
Publication of DE69734103D1 publication Critical patent/DE69734103D1/de
Publication of DE69734103T2 publication Critical patent/DE69734103T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76—Unipolar devices, e.g. field effect transistors
    • H01L29/772—Field effect transistors
    • H01L29/78—Field effect transistors with field effect produced by an insulated gate
    • H01L29/7801—DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
    • H01L29/7802—Vertical DMOS transistors, i.e. VDMOS transistors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
    • H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
    • H01L29/16—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only elements of Group IV of the Periodic Table
    • H01L29/1608—Silicon carbide
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/66007—Multistep manufacturing processes
    • H01L29/66053—Multistep manufacturing processes of devices having a semiconductor body comprising crystalline silicon carbide
    • H01L29/66068—Multistep manufacturing processes of devices having a semiconductor body comprising crystalline silicon carbide the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/40—Electrodes ; Multistep manufacturing processes therefor
    • H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
    • H01L29/417—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions carrying the current to be rectified, amplified or switched
    • H01L29/41725—Source or drain electrodes for field effect devices
    • H01L29/41766—Source or drain electrodes for field effect devices with at least part of the source or drain electrode having contact below the semiconductor surface, e.g. the source or drain electrode formed at least partially in a groove or with inclusions of conductor inside the semiconductor

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Ceramic Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Insulated Gate Type Field-Effect Transistor (AREA)
  • Junction Field-Effect Transistors (AREA)
DE69734103T 1996-03-27 1997-03-18 Ein feldeffekttransistor aus sic und verfahren zu dessen herstellung Expired - Lifetime DE69734103T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
SE9601173 1996-03-27
SE9601173A SE9601173D0 (sv) 1996-03-27 1996-03-27 A field effect transistor of SiC and a method for production thereof
PCT/SE1997/000449 WO1997036314A2 (en) 1996-03-27 1997-03-18 A FIELD EFFECT TRANSISTOR OF SiC AND A METHOD FOR PRODUCTION THEREOF

Publications (2)

Publication Number Publication Date
DE69734103D1 true DE69734103D1 (de) 2005-10-06
DE69734103T2 DE69734103T2 (de) 2006-06-29

Family

ID=20401965

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69734103T Expired - Lifetime DE69734103T2 (de) 1996-03-27 1997-03-18 Ein feldeffekttransistor aus sic und verfahren zu dessen herstellung

Country Status (4)

Country Link
EP (1) EP0890183B1 (de)
DE (1) DE69734103T2 (de)
SE (1) SE9601173D0 (de)
WO (1) WO1997036314A2 (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102610500B (zh) * 2012-03-22 2014-07-09 西安电子科技大学 N型重掺杂碳化硅薄膜外延制备方法
FR3086101B1 (fr) * 2018-09-17 2022-07-08 Ion Beam Services Dispositif d'amelioration de la mobilite des porteurs dans un canal de mosfet sur carbure de silicium

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5397717A (en) * 1993-07-12 1995-03-14 Motorola, Inc. Method of fabricating a silicon carbide vertical MOSFET

Also Published As

Publication number Publication date
EP0890183A2 (de) 1999-01-13
EP0890183B1 (de) 2005-08-31
WO1997036314A3 (en) 1997-11-20
SE9601173D0 (sv) 1996-03-27
DE69734103T2 (de) 2006-06-29
WO1997036314A2 (en) 1997-10-02

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition