DE69731231D1 - Strukturen, anordnungen und vorrichtungen mit vakuum-feldemissions-mikrospitzen und verfahren zu deren herstellung - Google Patents

Strukturen, anordnungen und vorrichtungen mit vakuum-feldemissions-mikrospitzen und verfahren zu deren herstellung

Info

Publication number
DE69731231D1
DE69731231D1 DE1997631231 DE69731231T DE69731231D1 DE 69731231 D1 DE69731231 D1 DE 69731231D1 DE 1997631231 DE1997631231 DE 1997631231 DE 69731231 T DE69731231 T DE 69731231T DE 69731231 D1 DE69731231 D1 DE 69731231D1
Authority
DE
Germany
Prior art keywords
diamond
devices
structures
emitters
arrangements
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE1997631231
Other languages
English (en)
Other versions
DE69731231T2 (de
Inventor
Poo Kang
Lee Davidson
V Kerns
Mickey E Howell
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Vanderbilt University
Original Assignee
Vanderbilt University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vanderbilt University filed Critical Vanderbilt University
Application granted granted Critical
Publication of DE69731231D1 publication Critical patent/DE69731231D1/de
Publication of DE69731231T2 publication Critical patent/DE69731231T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/022—Manufacture of electrodes or electrode systems of cold cathodes
    • H01J9/025—Manufacture of electrodes or electrode systems of cold cathodes of field emission cathodes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
    • G01L9/0047—Diaphragm with non uniform thickness, e.g. with grooves, bosses or continuously varying thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0894—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by non-contact electron transfer, i.e. electron tunneling
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/30—Cold cathodes, e.g. field-emissive cathode
    • H01J1/304—Field-emissive cathodes
    • H01J1/3042—Field-emissive cathodes microengineered, e.g. Spindt-type
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/30—Cold cathodes, e.g. field-emissive cathode
    • H01J1/304—Field-emissive cathodes
    • H01J1/3042—Field-emissive cathodes microengineered, e.g. Spindt-type
    • H01J1/3044—Point emitters
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
    • H01J3/02—Electron guns
    • H01J3/021—Electron guns using a field emission, photo emission, or secondary emission electron source
    • H01J3/022—Electron guns using a field emission, photo emission, or secondary emission electron source with microengineered cathode, e.g. Spindt-type
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J31/00—Cathode ray tubes; Electron beam tubes
    • H01J31/08—Cathode ray tubes; Electron beam tubes having a screen on or from which an image or pattern is formed, picked up, converted, or stored
    • H01J31/10—Image or pattern display tubes, i.e. having electrical input and optical output; Flying-spot tubes for scanning purposes
    • H01J31/12—Image or pattern display tubes, i.e. having electrical input and optical output; Flying-spot tubes for scanning purposes with luminescent screen
    • H01J31/123—Flat display tubes
    • H01J31/125—Flat display tubes provided with control means permitting the electron beam to reach selected parts of the screen, e.g. digital selection
    • H01J31/127—Flat display tubes provided with control means permitting the electron beam to reach selected parts of the screen, e.g. digital selection using large area or array sources, i.e. essentially a source for each pixel group
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2201/00—Electrodes common to discharge tubes
    • H01J2201/30—Cold cathodes
    • H01J2201/304—Field emission cathodes
    • H01J2201/30403—Field emission cathodes characterised by the emitter shape
    • H01J2201/30407—Microengineered point emitters
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2201/00—Electrodes common to discharge tubes
    • H01J2201/30—Cold cathodes
    • H01J2201/304—Field emission cathodes
    • H01J2201/30446—Field emission cathodes characterised by the emitter material
    • H01J2201/30453—Carbon types
    • H01J2201/30457—Diamond
DE69731231T 1996-06-25 1997-06-25 Strukturen, anordnungen und vorrichtungen mit vakuum-feldemissions-mikrospitzen und verfahren zu deren herstellung Expired - Fee Related DE69731231T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US2042896P 1996-06-25 1996-06-25
US20428P 1996-06-25
PCT/US1997/012760 WO1998044529A1 (en) 1996-06-25 1997-06-25 Microtip vacuum field emitter structures, arrays, and devices, and methods of fabrication

Publications (2)

Publication Number Publication Date
DE69731231D1 true DE69731231D1 (de) 2004-11-18
DE69731231T2 DE69731231T2 (de) 2005-03-03

Family

ID=21798570

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69731231T Expired - Fee Related DE69731231T2 (de) 1996-06-25 1997-06-25 Strukturen, anordnungen und vorrichtungen mit vakuum-feldemissions-mikrospitzen und verfahren zu deren herstellung

Country Status (6)

Country Link
US (3) US6132278A (de)
EP (1) EP0974156B1 (de)
AT (1) ATE279782T1 (de)
AU (1) AU3735697A (de)
DE (1) DE69731231T2 (de)
WO (1) WO1998044529A1 (de)

Families Citing this family (71)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE9700205D0 (sv) * 1997-01-24 1997-01-24 Peter Lindberg Integrated microfluidic element
US6344378B1 (en) * 1999-03-01 2002-02-05 Micron Technology, Inc. Field effect transistors, field emission apparatuses, thin film transistors, and methods of forming field effect transistors
SE9902118D0 (sv) * 1999-06-04 1999-06-04 Radi Medical Systems Miniature X-ray source
KR100312694B1 (ko) * 1999-07-16 2001-11-03 김순택 카본 나노튜브 필름을 전자 방출원으로 사용하는 전계 방출 표시 장치
US7045049B1 (en) 1999-10-01 2006-05-16 Nanoplex Technologies, Inc. Method of manufacture of colloidal rod particles as nanobar codes
US20040178076A1 (en) * 1999-10-01 2004-09-16 Stonas Walter J. Method of manufacture of colloidal rod particles as nanobarcodes
US7225082B1 (en) * 1999-10-01 2007-05-29 Oxonica, Inc. Colloidal rod particles as nanobar codes
US20040209376A1 (en) * 1999-10-01 2004-10-21 Surromed, Inc. Assemblies of differentiable segmented particles
US6919009B2 (en) * 1999-10-01 2005-07-19 Nanoplex Technologies, Inc. Method of manufacture of colloidal rod particles as nanobarcodes
AU2573801A (en) * 1999-11-02 2001-05-14 University Of Hawaii Method for fabricating arrays of micro-needles
TW483945B (en) * 1999-11-10 2002-04-21 Nat Science Council Field emission device film deposition manufacture process
US6422077B1 (en) * 2000-04-06 2002-07-23 The University Of Chicago Ultrananocrystalline diamond cantilever wide dynamic range acceleration/vibration/pressure sensor
US6333968B1 (en) 2000-05-05 2001-12-25 The United States Of America As Represented By The Secretary Of The Navy Transmission cathode for X-ray production
US6607673B2 (en) 2000-05-17 2003-08-19 The University Of Tokyo Method for manufacturing a diamond cylinder array having dents therein
JP3385364B2 (ja) * 2000-05-17 2003-03-10 東京大学長 凹部を有するダイヤモンドシリンダ配列体の製造方法
US7259510B1 (en) 2000-08-30 2007-08-21 Agere Systems Inc. On-chip vacuum tube device and process for making device
JP4792625B2 (ja) 2000-08-31 2011-10-12 住友電気工業株式会社 電子放出素子の製造方法及び電子デバイス
US7149282B2 (en) 2000-09-07 2006-12-12 Radi Medical Technologies Ab X-ray tube electrodes
US6649431B2 (en) * 2001-02-27 2003-11-18 Ut. Battelle, Llc Carbon tips with expanded bases grown with simultaneous application of carbon source and etchant gases
US20020146745A1 (en) * 2001-04-03 2002-10-10 Surromed, Inc. Methods and reagents for multiplexed analyte capture, surface array self-assembly, and analysis of complex biological samples
US20020186017A1 (en) * 2001-06-11 2002-12-12 John Liebeskind Micro high-vacuum pressure sensor
US20030034721A1 (en) * 2001-08-20 2003-02-20 Henry Windischmann Method for improving field emission uniformity from a carbon-based array
US6949873B2 (en) * 2002-03-08 2005-09-27 Chien-Min Sung Amorphous diamond materials and associated methods for the use and manufacture thereof
US6806629B2 (en) * 2002-03-08 2004-10-19 Chien-Min Sung Amorphous diamond materials and associated methods for the use and manufacture thereof
US7235912B2 (en) * 2002-03-08 2007-06-26 Chien-Min Sung Diamond-like carbon thermoelectric conversion devices and methods for the use and manufacture thereof
US20070126312A1 (en) * 2002-03-08 2007-06-07 Chien-Min Sung DLC field emission with nano-diamond impregnated metals
US7358658B2 (en) * 2002-03-08 2008-04-15 Chien-Min Sung Amorphous diamond materials and associated methods for the use and manufacture thereof
US20080029145A1 (en) * 2002-03-08 2008-02-07 Chien-Min Sung Diamond-like carbon thermoelectric conversion devices and methods for the use and manufacture thereof
US6979947B2 (en) * 2002-07-09 2005-12-27 Si Diamond Technology, Inc. Nanotriode utilizing carbon nanotubes and fibers
US7002609B2 (en) * 2002-11-07 2006-02-21 Brother International Corporation Nano-structure based system and method for charging a photoconductive surface
US7001013B2 (en) * 2002-12-12 2006-02-21 Brother International Corporation Nanostructure based microfluidic pumping apparatus, method and printing device including same
US20040125733A1 (en) * 2002-12-31 2004-07-01 Industrial Technology Research Institute Data storage device utilizing carbon nanotubes and method for operating
US7037370B2 (en) * 2003-02-06 2006-05-02 Mearini Gerald T Free-standing diamond structures and methods
JPWO2004088703A1 (ja) * 2003-03-28 2006-07-06 住友電気工業株式会社 冷極電子源と、これを用いたマイクロ波管及びその製造方法
JP2005310724A (ja) * 2003-05-12 2005-11-04 Sumitomo Electric Ind Ltd 電界放射型電子源およびその製造方法
US20050016575A1 (en) * 2003-06-13 2005-01-27 Nalin Kumar Field emission based thermoelectric device
WO2004113869A2 (en) * 2003-06-17 2004-12-29 Surromed, Inc. Labeling and authentication of metal objects
DE10327839A1 (de) * 2003-06-20 2005-01-05 Arvinmeritor Gmbh Fahrzeugdachmodul
WO2005020890A2 (en) * 2003-07-11 2005-03-10 Surromed, Inc. Multiplexed molecular beacon assay for detection of pathogens
WO2005008711A2 (en) * 2003-07-22 2005-01-27 Yeda Research And Development Company Ltd. Electron emission device
AU2003269814A1 (en) * 2003-09-22 2005-05-05 Brother International Corporation A method and apparatus for sensing applied forces
JP4857769B2 (ja) 2003-09-30 2012-01-18 住友電気工業株式会社 電子放出素子
JPWO2005031781A1 (ja) 2003-09-30 2006-12-07 住友電気工業株式会社 ダイヤモンド電子放出素子の製造方法ならびに電子放出素子
FR2868411B1 (fr) * 2004-04-01 2006-06-16 Commissariat Energie Atomique Membrane souple comportant des entailles
US20080012461A1 (en) * 2004-11-09 2008-01-17 Nano-Proprietary, Inc. Carbon nanotube cold cathode
US7122837B2 (en) * 2005-01-11 2006-10-17 Apollo Diamond, Inc Structures formed in diamond
US7829377B2 (en) * 2005-01-11 2010-11-09 Apollo Diamond, Inc Diamond medical devices
WO2006135092A1 (ja) * 2005-06-17 2006-12-21 Sumitomo Electric Industries, Ltd. ダイヤモンド電子放射陰極、電子放射源、電子顕微鏡及び電子ビーム露光機
KR20070011803A (ko) * 2005-07-21 2007-01-25 삼성에스디아이 주식회사 전자 방출 소자 및 이를 구비한 평판 디스플레이 장치
US7443090B2 (en) * 2005-09-28 2008-10-28 The Massachusetts Institute Of Technology Surface-emission cathodes having cantilevered electrodes
JPWO2007037170A1 (ja) * 2005-09-29 2009-04-09 住友電気工業株式会社 電子放出素子及び電子放出素子の製造方法
DE102005060883B4 (de) * 2005-10-21 2014-04-30 Universität of California Verwendung von Hohlkugeln mit einer Umhüllung sowie Vorrichtung zu ihrer Herstellung
JPWO2008001805A1 (ja) * 2006-06-28 2009-11-26 住友電気工業株式会社 ダイヤモンド電子放射陰極、電子源、電子顕微鏡及び電子ビーム露光機
WO2008008504A2 (en) 2006-07-13 2008-01-17 Manhattan Technologies, Llc Apparatus and method for producing electromagnetic oscillations
JP5034804B2 (ja) * 2006-09-19 2012-09-26 住友電気工業株式会社 ダイヤモンド電子源及びその製造方法
EP2137773A4 (de) 2006-09-20 2014-07-09 Allan Jerome Stromerzeugungssystem
AU2008239489A1 (en) 2007-02-21 2008-10-23 Manhattan Technologies Ltd. High frequency helical amplifier and oscillator
EP2139019A1 (de) * 2008-06-27 2009-12-30 Paul Scherrer Institut Verfahren zur Herstellung einer Feldsenderanordnung mit gesteuerter Spitzenschärfe
DE102008049654A1 (de) 2008-09-30 2010-04-08 Carl Zeiss Nts Gmbh Elektronenstrahlquelle und Verfahren zur Herstellung derselben
US20110086207A1 (en) * 2009-06-08 2011-04-14 Martin Heidi B Diamond apparatus and method of manufacture
WO2010144504A1 (en) * 2009-06-08 2010-12-16 Case Western Reserve University Diamond apparatus and method of manufacture
DE102009058320B4 (de) 2009-12-15 2017-04-06 Airbus Defence and Space GmbH Drucksensor und Druckmessverfahren
US20120119315A1 (en) * 2010-01-29 2012-05-17 Fung Suong Ou Sensing devices
WO2012048160A2 (en) * 2010-10-07 2012-04-12 Advanced Magnet Lab, Inc. System incorporating current path between conductive members
US8536773B2 (en) * 2011-03-30 2013-09-17 Carl Zeiss Microscopy Gmbh Electron beam source and method of manufacturing the same
WO2012177900A1 (en) 2011-06-22 2012-12-27 Research Triangle Institute, International Bipolar microelectronic device
US9711392B2 (en) * 2012-07-25 2017-07-18 Infineon Technologies Ag Field emission devices and methods of making thereof
CN104584179B (zh) * 2012-08-16 2017-10-13 纳欧克斯影像有限公司 图像捕捉装置
CN102956573A (zh) * 2012-11-19 2013-03-06 无锡九条龙汽车设备有限公司 一种稳固结构三极管
US10388496B2 (en) 2017-12-14 2019-08-20 Space Charge, LLC Thermionic wave generator (TWG)
RU2763046C1 (ru) * 2021-02-15 2021-12-27 Российская Федерация, от имени которой выступает Государственная корпорация по атомной энергии "Росатом" Автоэмиссионный эмиттер с нанокристаллической алмазной пленкой

Family Cites Families (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4164680A (en) * 1975-08-27 1979-08-14 Villalobos Humberto F Polycrystalline diamond emitter
US4307507A (en) * 1980-09-10 1981-12-29 The United States Of America As Represented By The Secretary Of The Navy Method of manufacturing a field-emission cathode structure
US4851254A (en) * 1987-01-13 1989-07-25 Nippon Soken, Inc. Method and device for forming diamond film
US5580827A (en) * 1989-10-10 1996-12-03 The Board Of Trustees Of The Leland Stanford Junior University Casting sharpened microminiature tips
US5038070A (en) * 1989-12-26 1991-08-06 Hughes Aircraft Company Field emitter structure and fabrication process
JPH03222232A (ja) * 1990-01-25 1991-10-01 Mitsubishi Electric Corp 電子放出装置の製造方法
US4964946A (en) * 1990-02-02 1990-10-23 The United States Of America As Represented By The Secretary Of The Navy Process for fabricating self-aligned field emitter arrays
US5126287A (en) * 1990-06-07 1992-06-30 Mcnc Self-aligned electron emitter fabrication method and devices formed thereby
JP2918637B2 (ja) * 1990-06-27 1999-07-12 三菱電機株式会社 微小真空管及びその製造方法
US5202571A (en) * 1990-07-06 1993-04-13 Canon Kabushiki Kaisha Electron emitting device with diamond
US5249340A (en) * 1991-06-24 1993-10-05 Motorola, Inc. Field emission device employing a selective electrode deposition method
US5283501A (en) * 1991-07-18 1994-02-01 Motorola, Inc. Electron device employing a low/negative electron affinity electron source
US5270574A (en) * 1991-08-01 1993-12-14 Texas Instruments Incorporated Vacuum micro-chamber for encapsulating a microelectronics device
US5138237A (en) * 1991-08-20 1992-08-11 Motorola, Inc. Field emission electron device employing a modulatable diamond semiconductor emitter
US5129850A (en) * 1991-08-20 1992-07-14 Motorola, Inc. Method of making a molded field emission electron emitter employing a diamond coating
JP3255960B2 (ja) * 1991-09-30 2002-02-12 株式会社神戸製鋼所 冷陰極エミッタ素子
US5399238A (en) * 1991-11-07 1995-03-21 Microelectronics And Computer Technology Corporation Method of making field emission tips using physical vapor deposition of random nuclei as etch mask
US5199918A (en) * 1991-11-07 1993-04-06 Microelectronics And Computer Technology Corporation Method of forming field emitter device with diamond emission tips
US5180951A (en) * 1992-02-05 1993-01-19 Motorola, Inc. Electron device electron source including a polycrystalline diamond
US5289086A (en) * 1992-05-04 1994-02-22 Motorola, Inc. Electron device employing a diamond film electron source
US5278475A (en) * 1992-06-01 1994-01-11 Motorola, Inc. Cathodoluminescent display apparatus and method for realization using diamond crystallites
US5499938A (en) * 1992-07-14 1996-03-19 Kabushiki Kaisha Toshiba Field emission cathode structure, method for production thereof, and flat panel display device using same
US5438343A (en) * 1992-07-28 1995-08-01 Philips Electronics North America Corporation Gas discharge displays and methodology for fabricating same by micromachining technology
US5449435A (en) * 1992-11-02 1995-09-12 Motorola, Inc. Field emission device and method of making the same
US5345141A (en) * 1993-03-29 1994-09-06 Motorola, Inc. Single substrate, vacuum fluorescent display
JP3269065B2 (ja) * 1993-09-24 2002-03-25 住友電気工業株式会社 電子デバイス
US5602439A (en) 1994-02-14 1997-02-11 The Regents Of The University Of California, Office Of Technology Transfer Diamond-graphite field emitters
US5439753A (en) * 1994-10-03 1995-08-08 Motorola, Inc. Electron emissive film
FR2726689B1 (fr) * 1994-11-08 1996-11-29 Commissariat Energie Atomique Source d'electrons a effet de champ et procede de fabrication de cette source, application aux dispositifs de visualisation par cathodoluminescence
US5679895A (en) * 1995-05-01 1997-10-21 Kobe Steel Usa, Inc. Diamond field emission acceleration sensor
JP3745844B2 (ja) * 1996-10-14 2006-02-15 浜松ホトニクス株式会社 電子管
DE69817642T2 (de) * 1997-03-10 2004-08-05 Sumitomo Electric Industries, Ltd. Elektronen-emittierendes Element, Herstellungsverfahren desselben, und Elektronenvorrichtung

Also Published As

Publication number Publication date
DE69731231T2 (de) 2005-03-03
US6762543B1 (en) 2004-07-13
EP0974156A4 (de) 2000-01-26
AU3735697A (en) 1998-10-22
EP0974156A1 (de) 2000-01-26
ATE279782T1 (de) 2004-10-15
US6132278A (en) 2000-10-17
EP0974156B1 (de) 2004-10-13
WO1998044529A1 (en) 1998-10-08
US7256535B2 (en) 2007-08-14
US20050062389A1 (en) 2005-03-24

Similar Documents

Publication Publication Date Title
DE69731231D1 (de) Strukturen, anordnungen und vorrichtungen mit vakuum-feldemissions-mikrospitzen und verfahren zu deren herstellung
ATE402118T1 (de) Verfahren und vorrichtung zum ecr plasma aufbringen von einwandigen kohlenstoffnanoröhren sowie erhaltene nanoröhren
US8247024B2 (en) Method for manufacturing field emission cathode
Matsumoto et al. Ultralow biased field emitter using single-wall carbon nanotube directly grown onto silicon tip by thermal chemical vapor deposition
AU2001283323A1 (en) Field emission devices having carbon containing tips
ATE85729T1 (de) Verfahren zur herstellung einer kalten kathode, einer vorrichtung zur feldemission und eine nach diesem verfahren hergestellte feldemissionseinrichtung.
EP0802555A3 (de) Feldemissionselektronenquelle und seine Herstellungsverfahren
US5804910A (en) Field emission displays with low function emitters and method of making low work function emitters
KR970063343A (ko) 침상의 다이아몬드 팁 제조방법
JPH0594762A (ja) 電界放出型電子源及びその製造方法
CA2085982A1 (en) Structures and processes for fabricating field emission cathodes
US7799374B2 (en) Method for manufacturing field emission cathode
KR930017055A (ko) 함침형 캐소드의 제조방법
KR100411522B1 (ko) 요부를 갖는 다이아몬드 실린더 배열체의 제조방법
EP0372931A3 (de) Kontinuierliche Kohlenstoffasern mit sehr hohem Modul
JP2000220039A (ja) 両端の鋭角な炭素質繊維及びその製造方法
KR970023598A (ko) 전계 방출용 마이크로-팁 및 그 제조방법
Hunt et al. Application of vitreous and graphitic large-area carbon surfaces as field-emission cathodes
Okuyama Electron microscopic observation of the shape of field emission cathode tips
US8445056B2 (en) Method for manufacturing field emission cathode
KR100280880B1 (ko) 다이아몬드박막 패턴 제조방법
Wisitsora-At et al. Diamond emitter arrays with uniform self-aligned gate built from silicon-on-insulator wafer
KR100246254B1 (ko) 실리사이드를 에미터와 게이트로 갖는 전계 방출 소자의 제조방법
EP0270876A3 (de) Oberflächen für elektrische Entladungen
JP3431414B2 (ja) 微小冷陰極の製造方法

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee