DE69728885D1 - Detektorvorrichtungen - Google Patents

Detektorvorrichtungen

Info

Publication number
DE69728885D1
DE69728885D1 DE69728885T DE69728885T DE69728885D1 DE 69728885 D1 DE69728885 D1 DE 69728885D1 DE 69728885 T DE69728885 T DE 69728885T DE 69728885 T DE69728885 T DE 69728885T DE 69728885 D1 DE69728885 D1 DE 69728885D1
Authority
DE
Germany
Prior art keywords
layer
light
electrons
guide
pmt
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69728885T
Other languages
English (en)
Other versions
DE69728885T2 (de
Inventor
John Cowham
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
K E DEVELOPMENTS Ltd
Original Assignee
K E DEVELOPMENTS Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=10796133&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE69728885(D1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by K E DEVELOPMENTS Ltd filed Critical K E DEVELOPMENTS Ltd
Application granted granted Critical
Publication of DE69728885D1 publication Critical patent/DE69728885D1/de
Publication of DE69728885T2 publication Critical patent/DE69728885T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2443—Scintillation detectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2445—Photon detectors for X-rays, light, e.g. photomultipliers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/248—Components associated with the control of the tube
    • H01J2237/2482—Optical means

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measurement Of Radiation (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Glass Compositions (AREA)
  • Protection Of Generators And Motors (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
DE69728885T 1996-07-01 1997-06-30 Detektorvorrichtungen Expired - Fee Related DE69728885T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB9613728 1996-07-01
GB9613728A GB2314926B (en) 1996-07-01 1996-07-01 Detector devices
PCT/GB1997/001731 WO1998000853A1 (en) 1996-07-01 1997-06-30 Detector devices

Publications (2)

Publication Number Publication Date
DE69728885D1 true DE69728885D1 (de) 2004-06-03
DE69728885T2 DE69728885T2 (de) 2005-04-07

Family

ID=10796133

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69728885T Expired - Fee Related DE69728885T2 (de) 1996-07-01 1997-06-30 Detektorvorrichtungen

Country Status (8)

Country Link
US (1) US6211525B1 (de)
EP (1) EP0914669B1 (de)
JP (1) JP3822911B2 (de)
AT (1) ATE265741T1 (de)
AU (1) AU714501B2 (de)
DE (1) DE69728885T2 (de)
GB (1) GB2314926B (de)
WO (1) WO1998000853A1 (de)

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6545277B1 (en) * 2000-08-15 2003-04-08 Applied Materials, Inc. High efficiency, enhanced detecting in-lens light guide scintillator detector for SEM
US6775452B2 (en) * 2001-05-18 2004-08-10 Applied Materials, Inc. Phosphor coated waveguide for efficient collection of electron-generated photons
US6768836B2 (en) * 2001-11-02 2004-07-27 Applied Materials, Inc. Phosphor coated waveguide for the efficient collection of electron-generated photons
US7016030B2 (en) * 2003-10-20 2006-03-21 Euv Llc Extended surface parallel coating inspection method
US20060022142A1 (en) * 2004-07-12 2006-02-02 Etp Semra Pty. Ltd. Detector surface for low-energy radiation particles
ES2253118B1 (es) * 2004-11-11 2007-02-16 Universidad De Cadiz Sistema de catadoluminiscencia para microscopio electronico de barrido.
US7560703B1 (en) * 2007-05-21 2009-07-14 Kla-Tencor Corporation Integrated segmented scintillation detector
DE102009046211B4 (de) 2009-10-30 2017-08-24 Carl Zeiss Microscopy Gmbh Detektionsvorrichtung und Teilchenstrahlgerät mit Detektionsvorrichtung
FR2960698B1 (fr) * 2010-05-27 2013-05-10 Centre Nat Rech Scient Systeme de detection de cathodoluminescence reglable et microscope mettant en oeuvre un tel systeme.
DE102010026169B4 (de) * 2010-07-06 2014-09-04 Carl Zeiss Microscopy Gmbh Partikelstrahlsystem
CZ307557B6 (cs) * 2010-10-07 2018-12-05 Tescan Orsay Holding, A.S. Scintilační detekční jednotka pro detekci zpětně odražených elektronů pro elektronové nebo iontové mikroskopy
JP2012199052A (ja) * 2011-03-22 2012-10-18 Jeol Ltd 電子検出機構及びそれを備えた荷電粒子線装置
EP2573796B1 (de) * 2011-09-22 2014-05-07 Carl Zeiss Microscopy Limited Teilchenstrahlsystem mit hohlem Lichtleiter
US8410443B1 (en) * 2011-10-25 2013-04-02 Gatan, Inc. Integrated backscattered electron detector with cathodoluminescence collection optics
US9190241B2 (en) 2013-03-25 2015-11-17 Hermes-Microvision, Inc. Charged particle beam apparatus
US9257260B2 (en) * 2013-04-27 2016-02-09 Kla-Tencor Corporation Method and system for adaptively scanning a sample during electron beam inspection
US10236156B2 (en) 2015-03-25 2019-03-19 Hermes Microvision Inc. Apparatus of plural charged-particle beams
WO2018020626A1 (ja) * 2016-07-28 2018-02-01 株式会社 日立ハイテクノロジーズ 荷電粒子線装置
WO2018081404A1 (en) * 2016-10-28 2018-05-03 Arizona Board Of Regents On Behalf Of The University Of Arizona Scintillation detector and associated scintillation detector ring and method
JP6857511B2 (ja) * 2017-02-23 2021-04-14 日本電子株式会社 走査電子顕微鏡
CN106981411B (zh) * 2017-05-03 2018-02-13 中国地质大学（北京） 一种聚光系统及其聚光方法
JP6984035B2 (ja) * 2018-09-21 2021-12-17 株式会社日立ハイテク 荷電粒子線装置
US11239048B2 (en) * 2020-03-09 2022-02-01 Kla Corporation Arrayed column detector
CN113675061B (zh) * 2020-05-13 2024-09-06 聚束科技（北京）有限公司 一种扫描电子显微镜
DE102023106029A1 (de) 2023-03-10 2024-09-12 Carl Zeiss Microscopy Gmbh Teilchenstrahlmikroskop
DE102023106027A1 (de) 2023-03-10 2024-09-12 Carl Zeiss Microscopy Gmbh Teilchenstrahlmikroskop

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3783281A (en) * 1972-02-03 1974-01-01 Perkin Elmer Corp Electron microscope
US4217495A (en) * 1978-04-18 1980-08-12 Robinson Vivian N E Electron microscope backscattered electron detectors
JPS59197881A (ja) * 1983-04-25 1984-11-09 Jeol Ltd エネルギ−選択機能を有する反射電子検出装置
DE3500903A1 (de) * 1985-01-12 1986-07-17 Fa. Carl Zeiss, 7920 Heidenheim Detektor fuer rueckstreuelektronen
DE3729846A1 (de) * 1987-09-05 1989-03-23 Zeiss Carl Fa Kathodolumineszenzdetektor
GB2229854B (en) 1989-03-28 1993-10-27 Robinson Vivian N E Backscattered electron detector
DE3938660A1 (de) * 1989-11-21 1991-05-23 Integrated Circuit Testing Korpuskularstrahlgeraet
JPH04249843A (ja) * 1990-11-30 1992-09-04 Topcon Corp 反射電子検出器
JP2919170B2 (ja) * 1992-03-19 1999-07-12 株式会社日立製作所 走査電子顕微鏡
US5393976A (en) * 1992-11-26 1995-02-28 Kabushiki Kaisha Topcon Apparatus for displaying a sample image
JP3413264B2 (ja) * 1993-12-28 2003-06-03 株式会社トプコン 反射電子検出器
JP3719794B2 (ja) * 1996-11-11 2005-11-24 株式会社トプコン 反射電子検出装置及びそれを有する走査型電子顕微鏡装置

Also Published As

Publication number Publication date
JP3822911B2 (ja) 2006-09-20
EP0914669B1 (de) 2004-04-28
JP2000513487A (ja) 2000-10-10
AU714501B2 (en) 2000-01-06
GB9613728D0 (en) 1996-09-04
DE69728885T2 (de) 2005-04-07
AU3269697A (en) 1998-01-21
WO1998000853A1 (en) 1998-01-08
EP0914669A1 (de) 1999-05-12
GB2314926A (en) 1998-01-14
ATE265741T1 (de) 2004-05-15
GB2314926B (en) 1999-08-25
US6211525B1 (en) 2001-04-03

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee