DE69728885D1 - Detektorvorrichtungen - Google Patents
DetektorvorrichtungenInfo
- Publication number
- DE69728885D1 DE69728885D1 DE69728885T DE69728885T DE69728885D1 DE 69728885 D1 DE69728885 D1 DE 69728885D1 DE 69728885 T DE69728885 T DE 69728885T DE 69728885 T DE69728885 T DE 69728885T DE 69728885 D1 DE69728885 D1 DE 69728885D1
- Authority
- DE
- Germany
- Prior art keywords
- layer
- light
- electrons
- guide
- pmt
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/244—Detectors; Associated components or circuits therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/244—Detection characterized by the detecting means
- H01J2237/2443—Scintillation detectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/244—Detection characterized by the detecting means
- H01J2237/2445—Photon detectors for X-rays, light, e.g. photomultipliers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/248—Components associated with the control of the tube
- H01J2237/2482—Optical means
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Measurement Of Radiation (AREA)
- Spectrometry And Color Measurement (AREA)
- Glass Compositions (AREA)
- Protection Of Generators And Motors (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB9613728 | 1996-07-01 | ||
GB9613728A GB2314926B (en) | 1996-07-01 | 1996-07-01 | Detector devices |
PCT/GB1997/001731 WO1998000853A1 (en) | 1996-07-01 | 1997-06-30 | Detector devices |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69728885D1 true DE69728885D1 (de) | 2004-06-03 |
DE69728885T2 DE69728885T2 (de) | 2005-04-07 |
Family
ID=10796133
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69728885T Expired - Fee Related DE69728885T2 (de) | 1996-07-01 | 1997-06-30 | Detektorvorrichtungen |
Country Status (8)
Country | Link |
---|---|
US (1) | US6211525B1 (de) |
EP (1) | EP0914669B1 (de) |
JP (1) | JP3822911B2 (de) |
AT (1) | ATE265741T1 (de) |
AU (1) | AU714501B2 (de) |
DE (1) | DE69728885T2 (de) |
GB (1) | GB2314926B (de) |
WO (1) | WO1998000853A1 (de) |
Families Citing this family (26)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6545277B1 (en) * | 2000-08-15 | 2003-04-08 | Applied Materials, Inc. | High efficiency, enhanced detecting in-lens light guide scintillator detector for SEM |
US6775452B2 (en) * | 2001-05-18 | 2004-08-10 | Applied Materials, Inc. | Phosphor coated waveguide for efficient collection of electron-generated photons |
US6768836B2 (en) * | 2001-11-02 | 2004-07-27 | Applied Materials, Inc. | Phosphor coated waveguide for the efficient collection of electron-generated photons |
US7016030B2 (en) * | 2003-10-20 | 2006-03-21 | Euv Llc | Extended surface parallel coating inspection method |
US20060022142A1 (en) * | 2004-07-12 | 2006-02-02 | Etp Semra Pty. Ltd. | Detector surface for low-energy radiation particles |
ES2253118B1 (es) * | 2004-11-11 | 2007-02-16 | Universidad De Cadiz | Sistema de catadoluminiscencia para microscopio electronico de barrido. |
US7560703B1 (en) * | 2007-05-21 | 2009-07-14 | Kla-Tencor Corporation | Integrated segmented scintillation detector |
DE102009046211B4 (de) | 2009-10-30 | 2017-08-24 | Carl Zeiss Microscopy Gmbh | Detektionsvorrichtung und Teilchenstrahlgerät mit Detektionsvorrichtung |
FR2960698B1 (fr) * | 2010-05-27 | 2013-05-10 | Centre Nat Rech Scient | Systeme de detection de cathodoluminescence reglable et microscope mettant en oeuvre un tel systeme. |
DE102010026169B4 (de) * | 2010-07-06 | 2014-09-04 | Carl Zeiss Microscopy Gmbh | Partikelstrahlsystem |
CZ307557B6 (cs) * | 2010-10-07 | 2018-12-05 | Tescan Orsay Holding, A.S. | Scintilační detekční jednotka pro detekci zpětně odražených elektronů pro elektronové nebo iontové mikroskopy |
JP2012199052A (ja) * | 2011-03-22 | 2012-10-18 | Jeol Ltd | 電子検出機構及びそれを備えた荷電粒子線装置 |
EP2573796B1 (de) * | 2011-09-22 | 2014-05-07 | Carl Zeiss Microscopy Limited | Teilchenstrahlsystem mit hohlem Lichtleiter |
US8410443B1 (en) * | 2011-10-25 | 2013-04-02 | Gatan, Inc. | Integrated backscattered electron detector with cathodoluminescence collection optics |
US9190241B2 (en) | 2013-03-25 | 2015-11-17 | Hermes-Microvision, Inc. | Charged particle beam apparatus |
US9257260B2 (en) * | 2013-04-27 | 2016-02-09 | Kla-Tencor Corporation | Method and system for adaptively scanning a sample during electron beam inspection |
US10236156B2 (en) | 2015-03-25 | 2019-03-19 | Hermes Microvision Inc. | Apparatus of plural charged-particle beams |
WO2018020626A1 (ja) * | 2016-07-28 | 2018-02-01 | 株式会社 日立ハイテクノロジーズ | 荷電粒子線装置 |
WO2018081404A1 (en) * | 2016-10-28 | 2018-05-03 | Arizona Board Of Regents On Behalf Of The University Of Arizona | Scintillation detector and associated scintillation detector ring and method |
JP6857511B2 (ja) * | 2017-02-23 | 2021-04-14 | 日本電子株式会社 | 走査電子顕微鏡 |
CN106981411B (zh) * | 2017-05-03 | 2018-02-13 | 中国地质大学(北京) | 一种聚光系统及其聚光方法 |
JP6984035B2 (ja) * | 2018-09-21 | 2021-12-17 | 株式会社日立ハイテク | 荷電粒子線装置 |
US11239048B2 (en) * | 2020-03-09 | 2022-02-01 | Kla Corporation | Arrayed column detector |
CN113675061B (zh) * | 2020-05-13 | 2024-09-06 | 聚束科技(北京)有限公司 | 一种扫描电子显微镜 |
DE102023106029A1 (de) | 2023-03-10 | 2024-09-12 | Carl Zeiss Microscopy Gmbh | Teilchenstrahlmikroskop |
DE102023106027A1 (de) | 2023-03-10 | 2024-09-12 | Carl Zeiss Microscopy Gmbh | Teilchenstrahlmikroskop |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3783281A (en) * | 1972-02-03 | 1974-01-01 | Perkin Elmer Corp | Electron microscope |
US4217495A (en) * | 1978-04-18 | 1980-08-12 | Robinson Vivian N E | Electron microscope backscattered electron detectors |
JPS59197881A (ja) * | 1983-04-25 | 1984-11-09 | Jeol Ltd | エネルギ−選択機能を有する反射電子検出装置 |
DE3500903A1 (de) * | 1985-01-12 | 1986-07-17 | Fa. Carl Zeiss, 7920 Heidenheim | Detektor fuer rueckstreuelektronen |
DE3729846A1 (de) * | 1987-09-05 | 1989-03-23 | Zeiss Carl Fa | Kathodolumineszenzdetektor |
GB2229854B (en) | 1989-03-28 | 1993-10-27 | Robinson Vivian N E | Backscattered electron detector |
DE3938660A1 (de) * | 1989-11-21 | 1991-05-23 | Integrated Circuit Testing | Korpuskularstrahlgeraet |
JPH04249843A (ja) * | 1990-11-30 | 1992-09-04 | Topcon Corp | 反射電子検出器 |
JP2919170B2 (ja) * | 1992-03-19 | 1999-07-12 | 株式会社日立製作所 | 走査電子顕微鏡 |
US5393976A (en) * | 1992-11-26 | 1995-02-28 | Kabushiki Kaisha Topcon | Apparatus for displaying a sample image |
JP3413264B2 (ja) * | 1993-12-28 | 2003-06-03 | 株式会社トプコン | 反射電子検出器 |
JP3719794B2 (ja) * | 1996-11-11 | 2005-11-24 | 株式会社トプコン | 反射電子検出装置及びそれを有する走査型電子顕微鏡装置 |
-
1996
- 1996-07-01 GB GB9613728A patent/GB2314926B/en not_active Expired - Fee Related
-
1997
- 1997-06-30 AT AT97928378T patent/ATE265741T1/de not_active IP Right Cessation
- 1997-06-30 DE DE69728885T patent/DE69728885T2/de not_active Expired - Fee Related
- 1997-06-30 WO PCT/GB1997/001731 patent/WO1998000853A1/en active IP Right Grant
- 1997-06-30 EP EP97928378A patent/EP0914669B1/de not_active Expired - Lifetime
- 1997-06-30 AU AU32696/97A patent/AU714501B2/en not_active Ceased
- 1997-06-30 JP JP50391498A patent/JP3822911B2/ja not_active Expired - Fee Related
- 1997-06-30 US US09/214,007 patent/US6211525B1/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JP3822911B2 (ja) | 2006-09-20 |
EP0914669B1 (de) | 2004-04-28 |
JP2000513487A (ja) | 2000-10-10 |
AU714501B2 (en) | 2000-01-06 |
GB9613728D0 (en) | 1996-09-04 |
DE69728885T2 (de) | 2005-04-07 |
AU3269697A (en) | 1998-01-21 |
WO1998000853A1 (en) | 1998-01-08 |
EP0914669A1 (de) | 1999-05-12 |
GB2314926A (en) | 1998-01-14 |
ATE265741T1 (de) | 2004-05-15 |
GB2314926B (en) | 1999-08-25 |
US6211525B1 (en) | 2001-04-03 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |