DE69724331D1 - Verfahren zur Herstellung eines Düsenkörpers und Arbeitsgerät - Google Patents

Verfahren zur Herstellung eines Düsenkörpers und Arbeitsgerät

Info

Publication number
DE69724331D1
DE69724331D1 DE69724331T DE69724331T DE69724331D1 DE 69724331 D1 DE69724331 D1 DE 69724331D1 DE 69724331 T DE69724331 T DE 69724331T DE 69724331 T DE69724331 T DE 69724331T DE 69724331 D1 DE69724331 D1 DE 69724331D1
Authority
DE
Germany
Prior art keywords
producing
nozzle body
working device
working
nozzle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69724331T
Other languages
English (en)
Other versions
DE69724331T2 (de
Inventor
Masayuki Nishiwaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Application granted granted Critical
Publication of DE69724331D1 publication Critical patent/DE69724331D1/de
Publication of DE69724331T2 publication Critical patent/DE69724331T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B41J2/1634—Manufacturing processes machining laser machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/066—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms by using masks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/067—Dividing the beam into multiple beams, e.g. multifocusing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/38—Removing material by boring or cutting
    • B23K26/382—Removing material by boring or cutting by boring
    • B23K26/389—Removing material by boring or cutting by boring of fluid openings, e.g. nozzles, jets
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/162—Manufacturing of the nozzle plates
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49401—Fluid pattern dispersing device making, e.g., ink jet

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Laser Beam Processing (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • Lenses (AREA)
DE69724331T 1996-06-07 1997-06-06 Verfahren zur Herstellung eines Düsenkörpers und Arbeitsgerät Expired - Lifetime DE69724331T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP16833296 1996-06-07
JP16833296A JP3689490B2 (ja) 1996-06-07 1996-06-07 ノズル部材の製造方法及びそれを用いた加工装置

Publications (2)

Publication Number Publication Date
DE69724331D1 true DE69724331D1 (de) 2003-10-02
DE69724331T2 DE69724331T2 (de) 2004-06-09

Family

ID=15866095

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69724331T Expired - Lifetime DE69724331T2 (de) 1996-06-07 1997-06-06 Verfahren zur Herstellung eines Düsenkörpers und Arbeitsgerät

Country Status (4)

Country Link
US (3) US6218081B1 (de)
EP (1) EP0811499B1 (de)
JP (1) JP3689490B2 (de)
DE (1) DE69724331T2 (de)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6039059A (en) * 1996-09-30 2000-03-21 Verteq, Inc. Wafer cleaning system
JP3094933B2 (ja) * 1997-01-17 2000-10-03 キヤノン株式会社 光加工機及びそれを用いたオリフィスプレートの製造方法
US6252197B1 (en) 1998-12-01 2001-06-26 Accudyne Display And Semiconductor Systems, Inc. Method and apparatus for separating non-metallic substrates utilizing a supplemental mechanical force applicator
US6259058B1 (en) * 1998-12-01 2001-07-10 Accudyne Display And Semiconductor Systems, Inc. Apparatus for separating non-metallic substrates
JP2001010067A (ja) * 1999-06-29 2001-01-16 Canon Inc 液体噴射記録ヘッドの吐出ノズル加工方法および液体噴射記録ヘッドの製造方法
US7006141B1 (en) 1999-11-23 2006-02-28 Panavision, Inc. Method and objective lens for spectrally modifying light for an electronic camera
US6970201B1 (en) * 2000-09-15 2005-11-29 Panavision, Inc. Method and lens system for modifying the modulation transfer function of light for a camera
NL1016735C2 (nl) * 2000-11-29 2002-05-31 Ocu Technologies B V Werkwijze voor het vormen van een nozzle in een orgaan voor een inkjet printkop, een nozzle-orgaan, een inkjet printkop voorzien van dit nozzle-orgaan en een inkjet printer voorzien van een dergelijke printkop.
EP1280007B1 (de) * 2001-07-24 2008-06-18 ASML Netherlands B.V. Bilderzeugungsapparat
TW529172B (en) 2001-07-24 2003-04-21 Asml Netherlands Bv Imaging apparatus
JP2003114401A (ja) * 2001-10-05 2003-04-18 Fuji Photo Film Co Ltd アレイ屈折素子及び露光装置
US20040001256A1 (en) * 2002-06-27 2004-01-01 Fuji Photo Film Co., Ltd Array refracting element, array diffracting element and exposure apparatus
JP4337059B2 (ja) * 2003-03-21 2009-09-30 ローツェ システムズ コーポレーション ガラス板切断装置
US6947454B2 (en) * 2003-06-30 2005-09-20 Electro Scientific Industries, Inc. Laser pulse picking employing controlled AOM loading
US20060114948A1 (en) * 2004-11-29 2006-06-01 Lo Ho W Workpiece processing system using a common imaged optical assembly to shape the spatial distributions of light energy of multiple laser beams
JP2007054992A (ja) * 2005-08-23 2007-03-08 Sii Printek Inc インクジェットヘッド用ノズルプレートの製造方法、インクジェットヘッド用ノズルプレートの製造装置、インクジェットヘッド用ノズルプレート、インクジェットヘッド、およびインクジェット記録装置
JP5505685B2 (ja) * 2009-01-29 2014-05-28 株式会社ニコン 投影光学系、並びに露光方法及び装置
EP2792488B1 (de) * 2011-12-13 2019-09-04 Canon Kabushiki Kaisha Verfahren zur herstellung von düsenköpfen
DE102012111098B4 (de) * 2012-11-19 2016-03-03 Scanlab Ag Divergenzänderungsvorrichtung
JP6604085B2 (ja) * 2015-08-17 2019-11-13 富士ゼロックス株式会社 液滴乾燥装置、液滴乾燥プログラム及び画像形成装置

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4496216A (en) * 1982-12-30 1985-01-29 Polaroid Corporation Method and apparatus for exposing photosensitive material
JPH0786647B2 (ja) * 1986-12-24 1995-09-20 株式会社ニコン 照明装置
JPS63177982A (ja) * 1987-01-20 1988-07-22 Toshiba Corp レ−ザマ−キング用光学系
JP2765162B2 (ja) 1990-03-01 1998-06-11 キヤノン株式会社 照明装置
US5153773A (en) * 1989-06-08 1992-10-06 Canon Kabushiki Kaisha Illumination device including amplitude-division and beam movements
JP2657957B2 (ja) 1990-04-27 1997-09-30 キヤノン株式会社 投影装置及び光照射方法
US5389954A (en) * 1990-11-21 1995-02-14 Canon Kabushiki Kaisha Laser process apparatus for forming holes in a workpiece
GB9202434D0 (en) 1992-02-05 1992-03-18 Xaar Ltd Method of and apparatus for forming nozzles
JP3211525B2 (ja) * 1993-04-22 2001-09-25 オムロン株式会社 薄材メッシュ、その製造方法及びその製造装置
EP0660158B1 (de) 1993-12-22 2000-10-04 Canon Kabushiki Kaisha Vorrichtung zur optischen Beleuchtung
DE19513354A1 (de) * 1994-04-14 1995-12-14 Zeiss Carl Materialbearbeitungseinrichtung
US5674414A (en) * 1994-11-11 1997-10-07 Carl-Zeiss Stiftung Method and apparatus of irradiating a surface of a workpiece with a plurality of beams
JP3082652B2 (ja) 1994-12-27 2000-08-28 キヤノン株式会社 照明装置及びそれを用いたデバイスの製造方法
JP3239661B2 (ja) 1994-12-27 2001-12-17 キヤノン株式会社 ノズルプレートの製造方法及び照明光学系

Also Published As

Publication number Publication date
EP0811499A3 (de) 1999-06-16
EP0811499A2 (de) 1997-12-10
DE69724331T2 (de) 2004-06-09
US6218081B1 (en) 2001-04-17
JP3689490B2 (ja) 2005-08-31
JPH09327925A (ja) 1997-12-22
US6239914B1 (en) 2001-05-29
US6114654A (en) 2000-09-05
EP0811499B1 (de) 2003-08-27

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