DE69720330D1 - Gassensor - Google Patents

Gassensor

Info

Publication number
DE69720330D1
DE69720330D1 DE69720330T DE69720330T DE69720330D1 DE 69720330 D1 DE69720330 D1 DE 69720330D1 DE 69720330 T DE69720330 T DE 69720330T DE 69720330 T DE69720330 T DE 69720330T DE 69720330 D1 DE69720330 D1 DE 69720330D1
Authority
DE
Germany
Prior art keywords
gas sensor
sensor
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69720330T
Other languages
English (en)
Other versions
DE69720330T2 (de
Inventor
Shiro Yamauchi
Tadao Minagawa
Satoshi Higashinakagawa
Hiroshi Maekawa
Mitsuhito Kamei
Chieko Nishida
Shigemitsu Okabe
Takahiro Ohno
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Application granted granted Critical
Publication of DE69720330D1 publication Critical patent/DE69720330D1/de
Publication of DE69720330T2 publication Critical patent/DE69720330T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403—Cells and electrode assemblies
    • G01N27/406—Cells and probes with solid electrolytes
    • G01N27/407—Cells and probes with solid electrolytes for investigating or analysing gases
    • G01N27/4073—Composition or fabrication of the solid electrolyte
    • G01N27/4074—Composition or fabrication of the solid electrolyte for detection of gases other than oxygen

Landscapes

  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Molecular Biology (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Measuring Oxygen Concentration In Cells (AREA)
DE69720330T 1996-07-12 1997-07-07 Gassensor Expired - Lifetime DE69720330T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18321996A JP3340028B2 (ja) 1996-07-12 1996-07-12 ガスセンサ

Publications (2)

Publication Number Publication Date
DE69720330D1 true DE69720330D1 (de) 2003-05-08
DE69720330T2 DE69720330T2 (de) 2003-12-11

Family

ID=16131879

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69720330T Expired - Lifetime DE69720330T2 (de) 1996-07-12 1997-07-07 Gassensor

Country Status (5)

Country Link
US (1) US5876578A (de)
EP (1) EP0818677B1 (de)
JP (1) JP3340028B2 (de)
CN (1) CN1080885C (de)
DE (1) DE69720330T2 (de)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SG111012A1 (en) 2000-02-28 2005-05-30 Mitsubishi Electric Corp Failure determining apparatus of gas-insulated electrical appliance
US7374636B2 (en) * 2001-07-06 2008-05-20 Applied Materials, Inc. Method and apparatus for providing uniform plasma in a magnetic field enhanced plasma reactor
CN1720633A (zh) * 2002-10-04 2006-01-11 加利福尼亚大学董事会 氟分离和生成装置
GB0308939D0 (en) * 2003-04-17 2003-05-28 Boc Group Plc Electrochemical sensor for the detection of oxygen,hydrocarbons and moisture in vacuum environments
JP4781205B2 (ja) * 2006-09-05 2011-09-28 三菱電機株式会社 被検ガス蓄積型ガスセンサ
CN101149354B (zh) * 2007-10-26 2010-12-29 华中科技大学 气体敏感阵列传感器及其制备方法
DE102014007136B4 (de) * 2014-05-16 2018-06-21 Dräger Safety AG & Co. KGaA Elektronischer Gassensor und dessen Verwendung
JP6591182B2 (ja) * 2015-03-18 2019-10-16 株式会社トクヤマ フッ化物結晶及び光学部品
US10545114B2 (en) 2017-06-21 2020-01-28 Electronics And Telecommunications Research Institute Chemical sensor and a method for manufacturing the same
DE102019204311A1 (de) * 2019-03-28 2020-10-01 Siemens Aktiengesellschaft Sensoranordnung sowie Verfahren

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3431182A (en) * 1966-02-04 1969-03-04 Orion Research Fluoride sensitive electrode and method of using same
US3727058A (en) * 1971-02-16 1973-04-10 Hughes Aircraft Co Hydrogen ion device
US3719564A (en) * 1971-05-10 1973-03-06 Philip Morris Inc Method of determining a reducible gas concentration and sensor therefor
US3764269A (en) * 1971-12-28 1973-10-09 North American Rockwell Sensor for fluid components
US3821090A (en) * 1973-06-14 1974-06-28 Rockwell International Corp Method for directly measuring no2 in air
JPS6029066B2 (ja) * 1979-07-28 1985-07-08 日産自動車株式会社 空燃比制御信号発生装置
FR2486244A1 (fr) * 1980-07-01 1982-01-08 Centre Nat Rech Scient Dispositif potentiometrique utilisable comme capteur pour determiner la pression d'un gaz
US4428800A (en) * 1982-09-15 1984-01-31 Aluminum Company Of America Measurement of gaseous fluoride concentration using an internal reference solution
JPH0623727B2 (ja) * 1985-08-30 1994-03-30 日本碍子株式会社 電気化学的素子及びその製造方法
JPS62172257A (ja) * 1986-01-27 1987-07-29 Figaro Eng Inc プロトン導電体ガスセンサ
JPS62207952A (ja) * 1986-03-10 1987-09-12 Mitsubishi Electric Corp ガスセンサ−
US4707224A (en) * 1986-10-30 1987-11-17 The Dow Chemical Company Device and method for fluorinating compounds
JPS63218852A (ja) * 1987-03-09 1988-09-12 Yokogawa Electric Corp 排ガス中のｏ↓２及び可燃ガス濃度測定装置
US4900405A (en) * 1987-07-15 1990-02-13 Sri International Surface type microelectronic gas and vapor sensor
JPH01131034A (ja) * 1987-11-12 1989-05-23 Jun Kuwano センサー用固体電解質
JPH02114168A (ja) * 1988-10-24 1990-04-26 Mitsubishi Electric Corp ガスセンサー
JP2938514B2 (ja) * 1990-04-25 1999-08-23 三菱電機株式会社 ガスセンサー
US5556534A (en) * 1995-03-14 1996-09-17 The University Of Notre Dame Electrochemical oxygen and PH sensors employing fluoride based solid-state electrolytes

Also Published As

Publication number Publication date
DE69720330T2 (de) 2003-12-11
JPH1026602A (ja) 1998-01-27
US5876578A (en) 1999-03-02
EP0818677A1 (de) 1998-01-14
CN1080885C (zh) 2002-03-13
JP3340028B2 (ja) 2002-10-28
EP0818677B1 (de) 2003-04-02
CN1174993A (zh) 1998-03-04

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8320 Willingness to grant licences declared (paragraph 23)