DE69718383D1 - Ventilverteiler - Google Patents

Ventilverteiler

Info

Publication number
DE69718383D1
DE69718383D1 DE69718383T DE69718383T DE69718383D1 DE 69718383 D1 DE69718383 D1 DE 69718383D1 DE 69718383 T DE69718383 T DE 69718383T DE 69718383 T DE69718383 T DE 69718383T DE 69718383 D1 DE69718383 D1 DE 69718383D1
Authority
DE
Germany
Prior art keywords
valve manifold
manifold
valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69718383T
Other languages
English (en)
Other versions
DE69718383T2 (de
Inventor
Tadahiro Ohmi
Michio Yamaji
Nobukazu Ikeda
Masajuki Hatano
Kusuke Yokoyama
Shigeaki Tanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujikin Inc
Original Assignee
Fujikin Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujikin Inc filed Critical Fujikin Inc
Application granted granted Critical
Publication of DE69718383D1 publication Critical patent/DE69718383D1/de
Publication of DE69718383T2 publication Critical patent/DE69718383T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B13/00—Details of servomotor systems ; Valves for servomotor systems
    • F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
    • F15B13/06—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
    • F15B13/08—Assemblies of units, each for the control of a single servomotor only
    • F15B13/0803—Modular units
    • F15B13/0807—Manifolds
    • F15B13/0814—Monoblock manifolds
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B13/00—Details of servomotor systems ; Valves for servomotor systems
    • F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
    • F15B13/06—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
    • F15B13/08—Assemblies of units, each for the control of a single servomotor only
    • F15B13/0803—Modular units
    • F15B13/0821—Attachment or sealing of modular units to each other
    • F15B13/0825—Attachment or sealing of modular units to each other the modular elements being mounted on a common member, e.g. on a rail
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B13/00—Details of servomotor systems ; Valves for servomotor systems
    • F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
    • F15B13/06—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
    • F15B13/08—Assemblies of units, each for the control of a single servomotor only
    • F15B13/0803—Modular units
    • F15B13/0832—Modular valves
    • F15B13/0835—Cartridge type valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B13/00—Details of servomotor systems ; Valves for servomotor systems
    • F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
    • F15B13/06—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
    • F15B13/08—Assemblies of units, each for the control of a single servomotor only
    • F15B13/0803—Modular units
    • F15B13/0871—Channels for fluid
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B13/00—Details of servomotor systems ; Valves for servomotor systems
    • F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
    • F15B13/06—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
    • F15B13/08—Assemblies of units, each for the control of a single servomotor only
    • F15B13/0803—Modular units
    • F15B13/0878—Assembly of modular units
    • F15B13/0885—Assembly of modular units using valves combined with other components
    • F15B13/0892—Valves combined with fluid components
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/003—Housing formed from a plurality of the same valve elements
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/87249—Multiple inlet with multiple outlet
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/87571—Multiple inlet with single outlet
    • Y10T137/87676—With flow control
    • Y10T137/87684—Valve in each inlet
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/877—With flow control means for branched passages
    • Y10T137/87877—Single inlet with multiple distinctly valved outlets
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/877—With flow control means for branched passages
    • Y10T137/87885—Sectional block structure

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Valve Housings (AREA)
  • Lift Valve (AREA)
  • Flow Control (AREA)
  • Fluid-Pressure Circuits (AREA)
  • Multiple-Way Valves (AREA)
  • Fluid-Driven Valves (AREA)
DE69718383T 1996-06-25 1997-06-23 Ventilverteiler Expired - Fee Related DE69718383T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16467396A JP3650859B2 (ja) 1996-06-25 1996-06-25 遮断開放器およびこれを備えた流体制御装置

Publications (2)

Publication Number Publication Date
DE69718383D1 true DE69718383D1 (de) 2003-02-20
DE69718383T2 DE69718383T2 (de) 2003-08-28

Family

ID=15797670

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69718383T Expired - Fee Related DE69718383T2 (de) 1996-06-25 1997-06-23 Ventilverteiler

Country Status (7)

Country Link
US (1) US6035893A (de)
EP (1) EP0816731B1 (de)
JP (1) JP3650859B2 (de)
CA (1) CA2208765C (de)
DE (1) DE69718383T2 (de)
IL (1) IL121158A (de)
TW (1) TW354819B (de)

Families Citing this family (85)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3726168B2 (ja) 1996-05-10 2005-12-14 忠弘 大見 流体制御装置
JP3737869B2 (ja) * 1997-05-13 2006-01-25 シーケーディ株式会社 プロセスガス供給ユニット
JP4235759B2 (ja) * 1997-08-05 2009-03-11 忠弘 大見 流体制御装置
US7048007B2 (en) 1998-03-05 2006-05-23 Swagelok Company Modular surface mount manifold assemblies
CN1107830C (zh) 1998-03-05 2003-05-07 斯瓦戈洛克公司 按标准形式设计的表面安装歧管
US6629546B2 (en) 1998-03-05 2003-10-07 Swagelok Company Modular surface mount manifold assemblies
US7036528B2 (en) 1998-05-18 2006-05-02 Swagelok Company Modular surface mount manifold assemblies
JP4110304B2 (ja) * 1998-06-30 2008-07-02 株式会社フジキン 流体制御装置および流体制御装置組立て方法
US6345642B1 (en) * 1999-02-19 2002-02-12 Applied Materials, Inc. Method and apparatus for removing processing liquid from a processing liquid path
US6186177B1 (en) * 1999-06-23 2001-02-13 Mks Instruments, Inc. Integrated gas delivery system
FR2795460B1 (fr) * 1999-06-28 2002-04-26 Defontaine Sa Dispositif d'assemblage d'au moins deux elements de commande par fluide sous pression
US6817381B2 (en) 1999-08-24 2004-11-16 Tokyo Electron Limited Gas processing apparatus, gas processing method and integrated valve unit for gas processing apparatus
JP4570748B2 (ja) * 1999-08-24 2010-10-27 東京エレクトロン株式会社 ガス処理装置およびそれに用いられる集合バルブ
JP2001147722A (ja) * 1999-11-22 2001-05-29 Ace:Kk ガス流量制御装置
US6349744B1 (en) 2000-10-13 2002-02-26 Mks Instruments, Inc. Manifold for modular gas box system
KR20040015152A (ko) * 2001-04-26 2004-02-18 스와겔로크 컴패니 스냅식 연결구를 구비한 밸브
US6644348B2 (en) * 2001-11-28 2003-11-11 Eastman Kodak Company Purgable multiport valve
CN100396980C (zh) * 2002-08-27 2008-06-25 迅捷公司 在公共平面中有歧管连接的模块式衬底配气板
US20060060253A1 (en) * 2002-10-21 2006-03-23 Ckd Corporation Integrated gas valve
US7258139B2 (en) 2002-11-26 2007-08-21 Swagelok Company Modular surface mount fluid system
US20040182281A1 (en) * 2003-02-13 2004-09-23 Vincent Kwan Dry erase ink
DE10349706B4 (de) * 2003-10-24 2007-06-28 Bosch Rexroth Ag Pneumatische Ventilanordnung mit einem Kanaltrennelement
US7048008B2 (en) 2004-04-13 2006-05-23 Ultra Clean Holdings, Inc. Gas-panel assembly
US7299825B2 (en) 2005-06-02 2007-11-27 Ultra Clean Holdings, Inc. Gas-panel assembly
US7320339B2 (en) 2005-06-02 2008-01-22 Ultra Clean Holdings, Inc. Gas-panel assembly
US7643753B2 (en) * 2005-09-29 2010-01-05 Broadlight Ltd. Enhanced passive optical network (PON) processor
JP5096696B2 (ja) * 2006-03-02 2012-12-12 サーパス工業株式会社 流体機器ユニット構造
US7607426B2 (en) * 2006-05-17 2009-10-27 David Deng Dual fuel heater
US20070277803A1 (en) * 2006-05-17 2007-12-06 David Deng Heater
US7434447B2 (en) * 2006-05-17 2008-10-14 David Deng Oxygen depletion sensor
US7677236B2 (en) 2006-05-17 2010-03-16 David Deng Heater configured to operate with a first or second fuel
US8152515B2 (en) * 2007-03-15 2012-04-10 Continental Appliances Inc Fuel selectable heating devices
US8241034B2 (en) 2007-03-14 2012-08-14 Continental Appliances Inc. Fuel selection valve assemblies
US8011920B2 (en) * 2006-12-22 2011-09-06 David Deng Valve assemblies for heating devices
JP2007327542A (ja) * 2006-06-07 2007-12-20 Surpass Kogyo Kk 流体機器ユニット構造
US7654820B2 (en) * 2006-12-22 2010-02-02 David Deng Control valves for heaters and fireplace devices
US8545216B2 (en) * 2006-12-22 2013-10-01 Continental Appliances, Inc. Valve assemblies for heating devices
US8403661B2 (en) 2007-03-09 2013-03-26 Coprecitec, S.L. Dual fuel heater
US8118590B1 (en) 2007-03-09 2012-02-21 Coprecitec, S.L. Dual fuel vent free gas heater
US8057219B1 (en) 2007-03-09 2011-11-15 Coprecitec, S.L. Dual fuel vent free gas heater
US7766006B1 (en) * 2007-03-09 2010-08-03 Coprecitec, S.L. Dual fuel vent free gas heater
JP2008291941A (ja) * 2007-05-25 2008-12-04 Surpass Kogyo Kk 流体機器ユニット構造
JP5150628B2 (ja) * 2007-05-31 2013-02-20 東京エレクトロン株式会社 流体制御装置
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US7784496B2 (en) * 2007-06-11 2010-08-31 Lam Research Corporation Triple valve inlet assembly
JP5096864B2 (ja) * 2007-10-11 2012-12-12 サーパス工業株式会社 流体機器ユニット構造
US8307854B1 (en) 2009-05-14 2012-11-13 Vistadeltek, Inc. Fluid delivery substrates for building removable standard fluid delivery sticks
WO2010144541A2 (en) * 2009-06-10 2010-12-16 Vistadeltek, Llc Extreme flow rate and/or high temperature fluid delivery substrates
US8506290B2 (en) * 2009-06-29 2013-08-13 David Deng Heating apparatus with air shutter adjustment
US8517718B2 (en) 2009-06-29 2013-08-27 David Deng Dual fuel heating source
US9829195B2 (en) 2009-12-14 2017-11-28 David Deng Dual fuel heating source with nozzle
US10073071B2 (en) 2010-06-07 2018-09-11 David Deng Heating system
US8752541B2 (en) 2010-06-07 2014-06-17 David Deng Heating system
CN202328495U (zh) 2011-11-16 2012-07-11 普鲁卡姆电器（上海）有限公司 带有360度风门调节装置的多气源平衡式燃气取暖器
US8899971B2 (en) 2010-08-20 2014-12-02 Coprecitec, S.L. Dual fuel gas heater
US9222670B2 (en) 2010-12-09 2015-12-29 David Deng Heating system with pressure regulator
US9739389B2 (en) 2011-04-08 2017-08-22 David Deng Heating system
US9523497B2 (en) 2012-07-04 2016-12-20 David Deng Dual fuel heater with selector valve
US8985094B2 (en) 2011-04-08 2015-03-24 David Deng Heating system
US9200802B2 (en) * 2011-04-08 2015-12-01 David Deng Dual fuel heater with selector valve
US10222057B2 (en) 2011-04-08 2019-03-05 David Deng Dual fuel heater with selector valve
US8950433B2 (en) 2011-05-02 2015-02-10 Advantage Group International Inc. Manifold system for gas and fluid delivery
US9188990B2 (en) * 2011-10-05 2015-11-17 Horiba Stec, Co., Ltd. Fluid mechanism, support member constituting fluid mechanism and fluid control system
CN102506198B (zh) 2011-10-20 2013-05-22 南京普鲁卡姆电器有限公司 双气源燃气自适应主控阀
US9170016B2 (en) 2012-08-22 2015-10-27 David Deng Dual fuel heater with selector valve
US9175848B2 (en) * 2011-12-05 2015-11-03 David Deng Dual fuel heater with selector valve
JP5425260B2 (ja) * 2012-04-27 2014-02-26 サーパス工業株式会社 流体機器ユニット構造
US9022064B2 (en) 2012-05-10 2015-05-05 David Deng Dual fuel control device with auxiliary backline pressure regulator
US9091431B2 (en) 2012-09-13 2015-07-28 David Deng Dual fuel valve with air shutter adjustment
US9752779B2 (en) 2013-03-02 2017-09-05 David Deng Heating assembly
US9423123B2 (en) 2013-03-02 2016-08-23 David Deng Safety pressure switch
US10240789B2 (en) 2014-05-16 2019-03-26 David Deng Dual fuel heating assembly with reset switch
US10429074B2 (en) 2014-05-16 2019-10-01 David Deng Dual fuel heating assembly with selector switch
JP1528532S (de) * 2014-09-30 2015-07-13
TWI614434B (zh) * 2014-11-15 2018-02-11 慧盛材料美國責任有限公司 具有最小的滯流的改良閥體
JP6671299B2 (ja) * 2015-01-16 2020-03-25 株式会社キッツエスシーティー ブロック弁と原料容器用ブロック弁
JP1539278S (de) * 2015-03-31 2015-11-30
JP6539482B2 (ja) * 2015-04-15 2019-07-03 株式会社フジキン 遮断開放器
US10221721B2 (en) * 2015-06-19 2019-03-05 Hamilton Sundstrand Corporation Hydraulic line routing plate
CN106640815B (zh) * 2016-12-27 2019-11-29 重庆智神科技有限公司 气密性测漏系统的压力切换装置
US11067184B2 (en) 2017-06-05 2021-07-20 Robertshaw Controls Company Triple icemaker valve with multiple configurations
CN115244323A (zh) 2020-03-09 2022-10-25 弗萨姆材料美国有限责任公司 有限容积的同轴阀体
US11976740B2 (en) 2020-03-09 2024-05-07 Versum Materials Us, Llc Limited volume coaxial valve block
TW202138950A (zh) * 2020-04-09 2021-10-16 日商堀場Ｓｔｅｃ股份有限公司 流體控制裝置
US20220372997A1 (en) * 2021-05-24 2022-11-24 Festo Se & Co. Kg Fluid control system

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Also Published As

Publication number Publication date
DE69718383T2 (de) 2003-08-28
IL121158A0 (en) 1997-11-20
EP0816731A3 (de) 1998-07-08
IL121158A (en) 2001-11-25
US6035893A (en) 2000-03-14
TW354819B (en) 1999-03-21
CA2208765C (en) 2005-09-06
JPH1011147A (ja) 1998-01-16
CA2208765A1 (en) 1997-12-25
EP0816731B1 (de) 2003-01-15
EP0816731A2 (de) 1998-01-07
JP3650859B2 (ja) 2005-05-25

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee