DE69715156T2 - Vorrichtung zur kapazitiven messung von spalten - Google Patents

Vorrichtung zur kapazitiven messung von spalten

Info

Publication number
DE69715156T2
DE69715156T2 DE69715156T DE69715156T DE69715156T2 DE 69715156 T2 DE69715156 T2 DE 69715156T2 DE 69715156 T DE69715156 T DE 69715156T DE 69715156 T DE69715156 T DE 69715156T DE 69715156 T2 DE69715156 T2 DE 69715156T2
Authority
DE
Germany
Prior art keywords
electrode
shield
insulation
deposited
probe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69715156T
Other languages
German (de)
English (en)
Other versions
DE69715156D1 (de
Inventor
Charles Lawrence
Geoffrey Sheard
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Chemelex UK Ltd
Original Assignee
Tyco Thermal Control UK Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tyco Thermal Control UK Ltd filed Critical Tyco Thermal Control UK Ltd
Application granted granted Critical
Publication of DE69715156D1 publication Critical patent/DE69715156D1/de
Publication of DE69715156T2 publication Critical patent/DE69715156T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/14—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring distance or clearance between spaced objects or spaced apertures

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
DE69715156T 1996-02-14 1997-02-13 Vorrichtung zur kapazitiven messung von spalten Expired - Lifetime DE69715156T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/615,372 US5760593A (en) 1996-02-14 1996-02-14 Gap measurement device
PCT/GB1997/000403 WO1997030326A1 (en) 1996-02-14 1997-02-13 Capacitive gap measurement device

Publications (2)

Publication Number Publication Date
DE69715156D1 DE69715156D1 (de) 2002-10-10
DE69715156T2 true DE69715156T2 (de) 2003-04-17

Family

ID=24465075

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69715156T Expired - Lifetime DE69715156T2 (de) 1996-02-14 1997-02-13 Vorrichtung zur kapazitiven messung von spalten

Country Status (7)

Country Link
US (1) US5760593A (enExample)
EP (1) EP0880672B1 (enExample)
JP (1) JP4173915B2 (enExample)
AU (1) AU1801197A (enExample)
CA (1) CA2244886C (enExample)
DE (1) DE69715156T2 (enExample)
WO (1) WO1997030326A1 (enExample)

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2750489B1 (fr) * 1996-06-26 1998-08-28 Philips Electronics Nv Dispositif du type capteur capacitif composite
WO1998049427A1 (de) * 1997-04-28 1998-11-05 Siemens Aktiengesellschaft Vorrichtung zur wärmeisolierung für eine dampfturbine
FR2811422B1 (fr) * 2000-07-06 2002-08-30 Snecma Moteurs Capteur de mesure de jeux par abrasion multiprofondeur
US6400162B1 (en) * 2000-07-21 2002-06-04 Ade Corporation Capacitive displacement sensor for measuring thin targets
US6575011B1 (en) 2001-04-19 2003-06-10 The United States Of America As Represented By The Secretary Of The Navy Blade tip clearance probe and method for measuring blade tip clearance
US7618712B2 (en) * 2002-09-23 2009-11-17 Siemens Energy, Inc. Apparatus and method of detecting wear in an abradable coating system
US8151623B2 (en) 2002-09-23 2012-04-10 Siemens Energy, Inc. Sensor for quantifying widening reduction wear on a surface
US7582359B2 (en) * 2002-09-23 2009-09-01 Siemens Energy, Inc. Apparatus and method of monitoring operating parameters of a gas turbine
GB2406381B (en) * 2003-09-27 2005-10-12 Future Technology Sensors
US8742944B2 (en) * 2004-06-21 2014-06-03 Siemens Energy, Inc. Apparatus and method of monitoring operating parameters of a gas turbine
US7511516B2 (en) * 2006-06-13 2009-03-31 General Electric Company Methods and systems for monitoring the displacement of turbine blades
GB2449709A (en) * 2007-06-02 2008-12-03 Rolls Royce Plc Method and apparatus for determining a clearance between relatively movable components
DE102008006833A1 (de) * 2008-01-30 2009-08-06 Mtu Aero Engines Gmbh Sonde für eine kapazitive Sensoreinrichtung und Spaltmesssystem
US8344741B2 (en) * 2008-10-16 2013-01-01 General Electric Company Systems, methods, and apparatus for monitoring clearance in a rotary machine
US8056606B2 (en) 2009-10-26 2011-11-15 General Electric Company Methods of making and using ceramic metallic interlocked components
US8571813B2 (en) * 2010-03-16 2013-10-29 Siemens Energy, Inc. Fiber optic sensor system for detecting surface wear
EP2442077A1 (en) * 2010-10-12 2012-04-18 Future Technology (Sensors) Ltd Sensor assemblies
US9279336B2 (en) * 2012-09-05 2016-03-08 United Technologies Corporation High temperature split-face probe
US9417048B2 (en) 2012-10-31 2016-08-16 General Electric Company Capacitive sensor device and method of manufacture
CN105982650B (zh) 2015-03-04 2019-02-15 百略医学科技股份有限公司 红外线温度计
GB2544751B (en) * 2015-11-24 2017-11-22 Future Tech (Sensors) Ltd Multi-Layer Electrically Conductive Sensors
US10619998B2 (en) * 2016-05-26 2020-04-14 Rolls-Royce Corporation Method of measuring clearance between rotating and static components
US10551220B2 (en) 2016-06-27 2020-02-04 Rolls-Royce Corporation Capacitive measurement device
GB2566053A (en) 2017-08-31 2019-03-06 Weston Aerospace Ltd Sensor and method of manufacturing same
US10641595B2 (en) * 2018-04-09 2020-05-05 United Technologies Corporation Low profile triaxial blade tip clearance probe assembly with driven guard
GB2579671B (en) * 2018-12-12 2022-12-14 Weston Aerospace Ltd A probe for monitoring a moving engine element

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3706919A (en) * 1970-08-17 1972-12-19 Ade Corp Capacitive gauge
JPS5735320A (en) * 1980-08-11 1982-02-25 Telmec Co Ltd Structure of mask for baking of semiconductor integrated circuit
GB2131176B (en) * 1982-10-07 1986-02-19 Rolls Royce Method of manufacturing a capacitance distance measuring probe
JPS6020552A (ja) * 1983-07-14 1985-02-01 Seiko Epson Corp 半導体装置
JPS6425555A (en) * 1987-07-22 1989-01-27 Matsushita Electronics Corp Trench forming method
JPH0437106A (ja) * 1990-06-01 1992-02-07 Matsushita Electric Ind Co Ltd 薄膜コンデンサ
EP0657718B1 (en) * 1993-12-07 1998-08-26 Matsushita Electric Industrial Co., Ltd. Capacitance sensor and method of manufacturing the same

Also Published As

Publication number Publication date
EP0880672B1 (en) 2002-09-04
EP0880672A1 (en) 1998-12-02
WO1997030326A1 (en) 1997-08-21
JP4173915B2 (ja) 2008-10-29
JP2000504836A (ja) 2000-04-18
CA2244886C (en) 2005-12-20
AU1801197A (en) 1997-09-02
DE69715156D1 (de) 2002-10-10
CA2244886A1 (en) 1997-08-21
US5760593A (en) 1998-06-02

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Sheard et al. Gap Measurement Device

Legal Events

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