JP2000504836A - 静電容量型間隙測定装置 - Google Patents
静電容量型間隙測定装置Info
- Publication number
- JP2000504836A JP2000504836A JP9529096A JP52909697A JP2000504836A JP 2000504836 A JP2000504836 A JP 2000504836A JP 9529096 A JP9529096 A JP 9529096A JP 52909697 A JP52909697 A JP 52909697A JP 2000504836 A JP2000504836 A JP 2000504836A
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- shielding material
- insulator
- probe
- deposited
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/14—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring distance or clearance between spaced objects or spaced apertures
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Abstract
Description
Claims (1)
- 【特許請求の範囲】 1.対象物に静電結合すべき電極、電極の周囲に配置されかつ絶縁体により電 極から電気的に絶縁される遮蔽材、及び遮蔽材の周囲を囲む絶縁層を有し、対象 物との距離を静電容量によって測定するための装置であって、電極と遮蔽材との 間の絶縁体、及び遮蔽材の周囲を囲む絶縁体が蒸着によって形成される装置。 2.予め形成された部品として遮蔽材を含み、電極と遮蔽材の間の絶縁体、及 び遮蔽材を囲む絶縁体が共に蒸着によって遮蔽材上に形成される請求の範囲第1 項に記載の装置。 3.電極と遮蔽材との間に配置される絶縁体が電極上に蒸着された請求の範囲 第1項に記載の装置。 4.遮蔽材が電極と遮蔽材との間の絶縁体上に蒸着によって形成された請求の 範囲第3項に記載の装置。 5.遮蔽材を囲む絶縁体が遮蔽材上に蒸着によって形成された請求の範囲第4 項に記載の装置。 6.電極が金属の固体として形成される請求の範囲第3項から第5項までのい ずれか1項に記載の装置。 7.電極が導電層の蒸着されたセラミックの固体を有する請求の範囲第3項か ら第5項までのいずれか1項に記載の装置。 8.タービンの羽根に面する電極の部分が少なくとも0.5mmの厚さを有す る蒸着された導電層から成る請求の範囲第7項に記載の装置。 9.蒸着された絶縁層が金属の酸化物または窒化物、またはメタロイドから成 る請求の範囲第1項から第8項までのいずれか1項に記載の装置。 10.いずれの蒸着層も真空蒸着法によって蒸着された請求の範囲第1項から 第9項までのいずれか1項に記載の装置。 11.いずれの蒸着層も化学蒸着法、スパッタリング法、またはプラズマ蒸着 法によって形成される請求の範囲第10項に記載の装置。 12.固体の対象物までの距離を測定するための装置を形成する方法であって 、対象物と静電結合すべき電極を形成し、少なくとも電極の一部に絶縁層を蒸着 し て電極の周囲を絶縁体で囲み、絶縁体に金属層を蒸着して遮蔽材を形成し、そし て遮蔽材の上に第2の絶縁層を蒸着する方法。 13.絶縁層と遮蔽材とが真空蒸着法により蒸着される請求の範囲第12項に 記載の方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/615,372 US5760593A (en) | 1996-02-14 | 1996-02-14 | Gap measurement device |
US08/615,372 | 1996-02-14 | ||
PCT/GB1997/000403 WO1997030326A1 (en) | 1996-02-14 | 1997-02-13 | Capacitive gap measurement device |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2000504836A true JP2000504836A (ja) | 2000-04-18 |
JP2000504836A5 JP2000504836A5 (ja) | 2004-11-18 |
JP4173915B2 JP4173915B2 (ja) | 2008-10-29 |
Family
ID=24465075
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP52909697A Expired - Fee Related JP4173915B2 (ja) | 1996-02-14 | 1997-02-13 | 静電容量型間隙測定装置 |
Country Status (7)
Country | Link |
---|---|
US (1) | US5760593A (ja) |
EP (1) | EP0880672B1 (ja) |
JP (1) | JP4173915B2 (ja) |
AU (1) | AU1801197A (ja) |
CA (1) | CA2244886C (ja) |
DE (1) | DE69715156T2 (ja) |
WO (1) | WO1997030326A1 (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007506958A (ja) * | 2003-09-27 | 2007-03-22 | フューチャー・テクノロジー(アール・アンド・ディー)・リミテッド | 目的物までの距離を静電的に測定する感知器 |
JP2007332964A (ja) * | 2006-06-13 | 2007-12-27 | General Electric Co <Ge> | タービンブレードの変位を監視するためのシステム |
JP2014500479A (ja) * | 2010-10-12 | 2014-01-09 | フューチャー テクノロジー(センサーズ)リミテッド | センサアセンブリ |
Families Citing this family (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2750489B1 (fr) * | 1996-06-26 | 1998-08-28 | Philips Electronics Nv | Dispositif du type capteur capacitif composite |
PL336486A1 (en) * | 1997-04-28 | 2000-06-19 | Siemens Ag | Apparatus for thermally insulating a steam turbine |
FR2811422B1 (fr) * | 2000-07-06 | 2002-08-30 | Snecma Moteurs | Capteur de mesure de jeux par abrasion multiprofondeur |
US6400162B1 (en) * | 2000-07-21 | 2002-06-04 | Ade Corporation | Capacitive displacement sensor for measuring thin targets |
US6575011B1 (en) | 2001-04-19 | 2003-06-10 | The United States Of America As Represented By The Secretary Of The Navy | Blade tip clearance probe and method for measuring blade tip clearance |
US7582359B2 (en) * | 2002-09-23 | 2009-09-01 | Siemens Energy, Inc. | Apparatus and method of monitoring operating parameters of a gas turbine |
US7618712B2 (en) * | 2002-09-23 | 2009-11-17 | Siemens Energy, Inc. | Apparatus and method of detecting wear in an abradable coating system |
US8151623B2 (en) | 2002-09-23 | 2012-04-10 | Siemens Energy, Inc. | Sensor for quantifying widening reduction wear on a surface |
US8742944B2 (en) * | 2004-06-21 | 2014-06-03 | Siemens Energy, Inc. | Apparatus and method of monitoring operating parameters of a gas turbine |
GB2449709A (en) * | 2007-06-02 | 2008-12-03 | Rolls Royce Plc | Method and apparatus for determining a clearance between relatively movable components |
DE102008006833A1 (de) * | 2008-01-30 | 2009-08-06 | Mtu Aero Engines Gmbh | Sonde für eine kapazitive Sensoreinrichtung und Spaltmesssystem |
US8344741B2 (en) * | 2008-10-16 | 2013-01-01 | General Electric Company | Systems, methods, and apparatus for monitoring clearance in a rotary machine |
US8056606B2 (en) * | 2009-10-26 | 2011-11-15 | General Electric Company | Methods of making and using ceramic metallic interlocked components |
US8571813B2 (en) * | 2010-03-16 | 2013-10-29 | Siemens Energy, Inc. | Fiber optic sensor system for detecting surface wear |
US9279336B2 (en) * | 2012-09-05 | 2016-03-08 | United Technologies Corporation | High temperature split-face probe |
US9417048B2 (en) | 2012-10-31 | 2016-08-16 | General Electric Company | Capacitive sensor device and method of manufacture |
CN105982650B (zh) | 2015-03-04 | 2019-02-15 | 百略医学科技股份有限公司 | 红外线温度计 |
GB2544751B (en) * | 2015-11-24 | 2017-11-22 | Future Tech (Sensors) Ltd | Multi-Layer Electrically Conductive Sensors |
US10619998B2 (en) * | 2016-05-26 | 2020-04-14 | Rolls-Royce Corporation | Method of measuring clearance between rotating and static components |
US10551220B2 (en) | 2016-06-27 | 2020-02-04 | Rolls-Royce Corporation | Capacitive measurement device |
GB2566053A (en) | 2017-08-31 | 2019-03-06 | Weston Aerospace Ltd | Sensor and method of manufacturing same |
US10641595B2 (en) * | 2018-04-09 | 2020-05-05 | United Technologies Corporation | Low profile triaxial blade tip clearance probe assembly with driven guard |
GB2579671B (en) * | 2018-12-12 | 2022-12-14 | Weston Aerospace Ltd | A probe for monitoring a moving engine element |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3706919A (en) * | 1970-08-17 | 1972-12-19 | Ade Corp | Capacitive gauge |
JPS5735320A (en) * | 1980-08-11 | 1982-02-25 | Telmec Co Ltd | Structure of mask for baking of semiconductor integrated circuit |
GB2131176B (en) * | 1982-10-07 | 1986-02-19 | Rolls Royce | Method of manufacturing a capacitance distance measuring probe |
JPS6020552A (ja) * | 1983-07-14 | 1985-02-01 | Seiko Epson Corp | 半導体装置 |
JPS6425555A (en) * | 1987-07-22 | 1989-01-27 | Matsushita Electronics Corp | Trench forming method |
JPH0437106A (ja) * | 1990-06-01 | 1992-02-07 | Matsushita Electric Ind Co Ltd | 薄膜コンデンサ |
DE69412769T2 (de) * | 1993-12-07 | 1999-01-14 | Matsushita Electric Ind Co Ltd | Kapazitiver Sensor und Verfahren zur Herstellung |
-
1996
- 1996-02-14 US US08/615,372 patent/US5760593A/en not_active Expired - Lifetime
-
1997
- 1997-02-13 AU AU18011/97A patent/AU1801197A/en not_active Abandoned
- 1997-02-13 JP JP52909697A patent/JP4173915B2/ja not_active Expired - Fee Related
- 1997-02-13 WO PCT/GB1997/000403 patent/WO1997030326A1/en active IP Right Grant
- 1997-02-13 CA CA002244886A patent/CA2244886C/en not_active Expired - Fee Related
- 1997-02-13 EP EP97903454A patent/EP0880672B1/en not_active Expired - Lifetime
- 1997-02-13 DE DE69715156T patent/DE69715156T2/de not_active Expired - Lifetime
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007506958A (ja) * | 2003-09-27 | 2007-03-22 | フューチャー・テクノロジー(アール・アンド・ディー)・リミテッド | 目的物までの距離を静電的に測定する感知器 |
JP2007332964A (ja) * | 2006-06-13 | 2007-12-27 | General Electric Co <Ge> | タービンブレードの変位を監視するためのシステム |
JP2014500479A (ja) * | 2010-10-12 | 2014-01-09 | フューチャー テクノロジー(センサーズ)リミテッド | センサアセンブリ |
Also Published As
Publication number | Publication date |
---|---|
JP4173915B2 (ja) | 2008-10-29 |
AU1801197A (en) | 1997-09-02 |
EP0880672A1 (en) | 1998-12-02 |
DE69715156T2 (de) | 2003-04-17 |
CA2244886A1 (en) | 1997-08-21 |
US5760593A (en) | 1998-06-02 |
EP0880672B1 (en) | 2002-09-04 |
WO1997030326A1 (en) | 1997-08-21 |
CA2244886C (en) | 2005-12-20 |
DE69715156D1 (de) | 2002-10-10 |
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