DE69714114D1 - Tintenstrahlaufzeichnungskopf, sein Herstellungsverfahren und Tintenstrahlaufzeichnungsapparat - Google Patents

Tintenstrahlaufzeichnungskopf, sein Herstellungsverfahren und Tintenstrahlaufzeichnungsapparat

Info

Publication number
DE69714114D1
DE69714114D1 DE69714114T DE69714114T DE69714114D1 DE 69714114 D1 DE69714114 D1 DE 69714114D1 DE 69714114 T DE69714114 T DE 69714114T DE 69714114 T DE69714114 T DE 69714114T DE 69714114 D1 DE69714114 D1 DE 69714114D1
Authority
DE
Germany
Prior art keywords
ink jet
jet recording
manufacturing
recording apparatus
recording head
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69714114T
Other languages
English (en)
Other versions
DE69714114T2 (de
Inventor
Yutaka Furuhata
Yoshinao Miyata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Application granted granted Critical
Publication of DE69714114D1 publication Critical patent/DE69714114D1/de
Publication of DE69714114T2 publication Critical patent/DE69714114T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14387—Front shooter
DE69714114T 1996-04-05 1997-04-07 Tintenstrahlaufzeichnungskopf, sein Herstellungsverfahren und Tintenstrahlaufzeichnungsapparat Expired - Lifetime DE69714114T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP8364496 1996-04-05
JP07625197A JP3601239B2 (ja) 1996-04-05 1997-03-27 インクジェット式記録ヘッド及びそれを用いたインクジェット式記録装置

Publications (2)

Publication Number Publication Date
DE69714114D1 true DE69714114D1 (de) 2002-08-29
DE69714114T2 DE69714114T2 (de) 2002-11-07

Family

ID=26417409

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69714114T Expired - Lifetime DE69714114T2 (de) 1996-04-05 1997-04-07 Tintenstrahlaufzeichnungskopf, sein Herstellungsverfahren und Tintenstrahlaufzeichnungsapparat

Country Status (4)

Country Link
US (1) US6137511A (de)
EP (1) EP0799700B1 (de)
JP (1) JP3601239B2 (de)
DE (1) DE69714114T2 (de)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0839654B1 (de) * 1996-10-18 2002-02-13 Seiko Epson Corporation Tintenstrahldruckkopf und Verfahren zu seiner Herstellung
US6322203B1 (en) * 1998-02-19 2001-11-27 Seiko Epson Corporation Ink jet recording head and ink jet recorder
CN1094835C (zh) * 1998-03-04 2002-11-27 大霸电子股份有限公司 振动片溢铸量的修正方法
ATE303250T1 (de) 1998-06-08 2005-09-15 Seiko Epson Corp Tintenstrahlaufzeichnungskopf und tintenstrahlaufzeichnungsvorrichtung
JP3652150B2 (ja) * 1998-12-10 2005-05-25 株式会社リコー インクジェットヘッド
JP2001026106A (ja) * 1999-07-15 2001-01-30 Fujitsu Ltd インクジェットヘッドおよびインクジェットプリンタ
KR100474836B1 (ko) * 2000-08-05 2005-03-08 삼성전자주식회사 액적 분사 장치의 제조 방법
JP3833070B2 (ja) * 2001-02-09 2006-10-11 キヤノン株式会社 液体噴射ヘッドおよび製造方法
TW480621B (en) 2001-03-02 2002-03-21 Acer Comm & Multimedia Inc Method for producing high density chip
US7085695B2 (en) 2002-03-22 2006-08-01 Seiko Epson Corporation Slipping contact line model and the mass-conservative level set implementation for ink-jet simulation
JP3998254B2 (ja) * 2003-02-07 2007-10-24 キヤノン株式会社 インクジェットヘッドの製造方法
JP4522086B2 (ja) * 2003-12-15 2010-08-11 キヤノン株式会社 梁、梁の製造方法、梁を備えたインクジェット記録ヘッド、および該インクジェット記録ヘッドの製造方法
US7921001B2 (en) 2005-08-17 2011-04-05 Seiko Epson Corporation Coupled algorithms on quadrilateral grids for generalized axi-symmetric viscoelastic fluid flows
JP6358963B2 (ja) * 2012-03-05 2018-07-18 フジフィルム ディマティックス， インコーポレイテッド インクの再循環
JP2014117819A (ja) * 2012-12-13 2014-06-30 Sii Printek Inc 液体噴射ヘッド、液体噴射装置及び液体噴射ヘッドの製造方法
JP6061088B2 (ja) * 2013-03-28 2017-01-18 セイコーエプソン株式会社 液体噴射ヘッド及び液体噴射装置

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2587922B2 (ja) * 1986-07-02 1997-03-05 キヤノン株式会社 インクジエツト記録装置
US5265315A (en) * 1990-11-20 1993-11-30 Spectra, Inc. Method of making a thin-film transducer ink jet head
JP3067354B2 (ja) * 1991-12-10 2000-07-17 セイコーエプソン株式会社 インクジェットヘッドの製造方法
JPH05286131A (ja) * 1992-04-15 1993-11-02 Rohm Co Ltd インクジェットプリントヘッドの製造方法及びインクジェットプリントヘッド
JPH0631914A (ja) * 1992-07-14 1994-02-08 Seiko Epson Corp インクジェットヘッドおよびその製造方法
JP3168713B2 (ja) * 1992-08-06 2001-05-21 セイコーエプソン株式会社 インクジェットヘッド及びその製造方法
JPH06143571A (ja) * 1992-11-02 1994-05-24 Fuji Electric Co Ltd インクジェット記録ヘッド
US5896150A (en) * 1992-11-25 1999-04-20 Seiko Epson Corporation Ink-jet type recording head
JPH06183008A (ja) * 1992-12-19 1994-07-05 Fuji Xerox Co Ltd サーマルインクジェット記録ヘッド及びその製造方法
JP3230017B2 (ja) * 1993-01-11 2001-11-19 富士通株式会社 インクジェットヘッドの製造方法
DE69506306T2 (de) * 1994-04-20 1999-06-10 Seiko Epson Corp Tintenstrahlaufzeichungsgerät und Verfahren zur Herstellung eines Tintenstrahlkopfes

Also Published As

Publication number Publication date
JP3601239B2 (ja) 2004-12-15
EP0799700A3 (de) 1998-12-23
EP0799700A2 (de) 1997-10-08
DE69714114T2 (de) 2002-11-07
EP0799700B1 (de) 2002-07-24
JPH09323431A (ja) 1997-12-16
US6137511A (en) 2000-10-24

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