DE69712128T2 - Optische Halbleiterkomponente sowie Verfahren zu ihrer Herstellung - Google Patents
Optische Halbleiterkomponente sowie Verfahren zu ihrer HerstellungInfo
- Publication number
- DE69712128T2 DE69712128T2 DE69712128T DE69712128T DE69712128T2 DE 69712128 T2 DE69712128 T2 DE 69712128T2 DE 69712128 T DE69712128 T DE 69712128T DE 69712128 T DE69712128 T DE 69712128T DE 69712128 T2 DE69712128 T2 DE 69712128T2
- Authority
- DE
- Germany
- Prior art keywords
- production
- optical semiconductor
- semiconductor component
- optical
- component
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000003287 optical effect Effects 0.000 title 1
- 239000004065 semiconductor Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/84—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by variation of applied mechanical force, e.g. of pressure
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/093—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by photoelectric pick-up
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P1/00—Details of instruments
- G01P1/02—Housings
- G01P1/023—Housings for acceleration measuring devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/0802—Details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0808—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate
- G01P2015/0811—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass
- G01P2015/0814—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass for translational movement of the mass, e.g. shuttle type
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Pressure Sensors (AREA)
- Light Receiving Elements (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/654,514 US5936294A (en) | 1996-05-28 | 1996-05-28 | Optical semiconductor component and method of fabrication |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69712128D1 DE69712128D1 (de) | 2002-05-29 |
DE69712128T2 true DE69712128T2 (de) | 2002-10-02 |
Family
ID=24625183
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69712128T Expired - Fee Related DE69712128T2 (de) | 1996-05-28 | 1997-05-12 | Optische Halbleiterkomponente sowie Verfahren zu ihrer Herstellung |
Country Status (5)
Country | Link |
---|---|
US (1) | US5936294A (de) |
EP (1) | EP0810440B1 (de) |
JP (1) | JP4579352B2 (de) |
KR (1) | KR100528553B1 (de) |
DE (1) | DE69712128T2 (de) |
Families Citing this family (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
IL122947A (en) * | 1998-01-15 | 2001-03-19 | Armament Dev Authority State O | Micro-electro-opto-mechanical inertial sensor with integrative optical sensing |
DE19825298C2 (de) * | 1998-06-05 | 2003-02-13 | Fraunhofer Ges Forschung | Verfahren zur Herstellung einer Sensoranordnung und Sensoranordnung |
US6710348B1 (en) | 1998-06-30 | 2004-03-23 | Robert Bosch Gmbh | Apparatus for sensing electromagnetic radiation |
DE19923606A1 (de) * | 1998-06-30 | 2000-01-13 | Bosch Gmbh Robert | Vorrichtung zur Erfassung elektromagnetischer Strahlung |
US6494095B1 (en) * | 2000-03-28 | 2002-12-17 | Opticnet, Inc. | Micro electromechanical switch for detecting acceleration or decelaration |
JP3453557B2 (ja) * | 2000-12-11 | 2003-10-06 | キヤノン株式会社 | 通信ネットワークを用いた光半導体素子の品質信頼性情報提供システム |
US6550330B1 (en) * | 2001-03-14 | 2003-04-22 | The United States Of America As Represented By The Secretary Of The Navy | Differential amplification for micro-electro-mechanical ultra-sensitive accelerometer |
US6581465B1 (en) * | 2001-03-14 | 2003-06-24 | The United States Of America As Represented By The Secretary Of The Navy | Micro-electro-mechanical systems ultra-sensitive accelerometer |
US7222534B2 (en) * | 2005-03-31 | 2007-05-29 | Pgs Americas, Inc. | Optical accelerometer, optical inclinometer and seismic sensor system using such accelerometer and inclinometer |
US7516659B2 (en) * | 2006-05-11 | 2009-04-14 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Inertial force sensor |
US7808618B1 (en) * | 2008-01-09 | 2010-10-05 | The Charles Stark Draper Laboratory, Inc. | Methods and apparatus for providing a semiconductor optical flexured mass accelerometer |
CN101545921B (zh) * | 2008-03-25 | 2011-12-14 | 鸿富锦精密工业(深圳)有限公司 | 加速度计 |
US20090308158A1 (en) * | 2008-06-13 | 2009-12-17 | Bard Arnold D | Optical Accelerometer |
US8205497B1 (en) * | 2009-03-05 | 2012-06-26 | Sandia Corporation | Microelectromechanical inertial sensor |
TWI451089B (zh) * | 2009-11-12 | 2014-09-01 | Pixart Imaging Inc | 光學式偵測方法、光學式微機電偵測計、及其製法 |
WO2012143408A2 (de) * | 2011-04-18 | 2012-10-26 | Österreichische Akademie der Wissenschaften | Verfahren zur optomechanischen erfassung und wandlung eines mechanischen, elektrostatischen, magnetostatischen oder elektrodynamischen eingangssignales in amplitudenmodulierte elektromagnetische strahlungs-ausgangssignale und daraus strahlungs-sensorisch gebildete elektrische ausgangssignale mithilfe einer opto-mechanisch gebildeten übertragungsfunktion sowie vorrichtung zur durchführung dieses verfahrens |
US8783106B1 (en) | 2011-12-13 | 2014-07-22 | Sandia Corporation | Micromachined force-balance feedback accelerometer with optical displacement detection |
US20150323379A1 (en) * | 2014-05-07 | 2015-11-12 | Mao-Jen Wu | Optical Inertial Sensing Module |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4322829A (en) * | 1980-09-11 | 1982-03-30 | Dynamic Systems, Inc. | Fiber optic accelerometer and method of measuring inertial force |
GB2094974B (en) * | 1981-03-12 | 1984-11-14 | Mitutoyo Mfg Co Ltd | Photoelectric encoder device |
US4428234A (en) * | 1982-03-25 | 1984-01-31 | Walker Clifford G | Phase detection laser accelerometer |
JPH0664084B2 (ja) * | 1985-04-16 | 1994-08-22 | シュルンベルジェ オーバーシーズ エス.エイ. | 光感震器 |
DE3518383C1 (de) * | 1985-05-22 | 1986-12-04 | Boge Gmbh, 5208 Eitorf | Beschleunigungsmesser |
US4879470A (en) * | 1987-01-16 | 1989-11-07 | Canon Kabushiki Kaisha | Photoelectric converting apparatus having carrier eliminating means |
US5428996A (en) * | 1990-12-24 | 1995-07-04 | Litton Systems, Inc. | Hinge assembly for integrated accelerometer |
JP3300060B2 (ja) * | 1992-10-22 | 2002-07-08 | キヤノン株式会社 | 加速度センサー及びその製造方法 |
US5559358A (en) * | 1993-05-25 | 1996-09-24 | Honeywell Inc. | Opto-electro-mechanical device or filter, process for making, and sensors made therefrom |
US5488864A (en) * | 1994-12-19 | 1996-02-06 | Ford Motor Company | Torsion beam accelerometer with slotted tilt plate |
-
1996
- 1996-05-28 US US08/654,514 patent/US5936294A/en not_active Expired - Fee Related
-
1997
- 1997-05-12 EP EP97107711A patent/EP0810440B1/de not_active Expired - Lifetime
- 1997-05-12 DE DE69712128T patent/DE69712128T2/de not_active Expired - Fee Related
- 1997-05-19 JP JP14474297A patent/JP4579352B2/ja not_active Expired - Fee Related
- 1997-05-28 KR KR1019970022722A patent/KR100528553B1/ko not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
US5936294A (en) | 1999-08-10 |
KR970077750A (ko) | 1997-12-12 |
EP0810440A3 (de) | 1997-12-10 |
JPH1090298A (ja) | 1998-04-10 |
EP0810440B1 (de) | 2002-04-24 |
KR100528553B1 (ko) | 2006-01-27 |
DE69712128D1 (de) | 2002-05-29 |
JP4579352B2 (ja) | 2010-11-10 |
EP0810440A2 (de) | 1997-12-03 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8328 | Change in the person/name/address of the agent |
Free format text: SCHUMACHER & WILLSAU, PATENTANWALTSSOZIETAET, 80335 MUENCHEN |
|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |