DE69826800D1 - Integriert-optischer Wellenleiter und Verfahren zu seiner Herstellung - Google Patents

Integriert-optischer Wellenleiter und Verfahren zu seiner Herstellung

Info

Publication number
DE69826800D1
DE69826800D1 DE69826800T DE69826800T DE69826800D1 DE 69826800 D1 DE69826800 D1 DE 69826800D1 DE 69826800 T DE69826800 T DE 69826800T DE 69826800 T DE69826800 T DE 69826800T DE 69826800 D1 DE69826800 D1 DE 69826800D1
Authority
DE
Germany
Prior art keywords
production
optical waveguide
integrated optical
integrated
waveguide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69826800T
Other languages
English (en)
Other versions
DE69826800T2 (de
Inventor
Sureschandra Mishrilal Ojha
Terry Bricheno
Clifford Graham Cureton
Stephen Day
David John Moule
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nortel Networks Ltd
Original Assignee
Northern Telecom Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Northern Telecom Ltd filed Critical Northern Telecom Ltd
Publication of DE69826800D1 publication Critical patent/DE69826800D1/de
Application granted granted Critical
Publication of DE69826800T2 publication Critical patent/DE69826800T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/12007—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
    • G02B6/12009—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides
    • G02B6/12026—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides characterised by means for reducing the temperature dependence
    • G02B6/1203—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides characterised by means for reducing the temperature dependence using mounting means, e.g. by using a combination of materials having different thermal expansion coefficients
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G02B6/132—Integrated optical circuits characterised by the manufacturing method by deposition of thin films
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12035—Materials
    • G02B2006/12038—Glass (SiO2 based materials)
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12035—Materials
    • G02B2006/12061—Silicon
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12166—Manufacturing methods
    • G02B2006/12169—Annealing
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/12007—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
    • G02B6/12009—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides
    • G02B6/12023—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides characterised by means for reducing the polarisation dependence, e.g. reduced birefringence

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Optical Integrated Circuits (AREA)
DE69826800T 1997-10-01 1998-07-30 Integriert-optischer Wellenleiter und Verfahren zu seiner Herstellung Expired - Lifetime DE69826800T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US942189 1997-10-01
US08/942,189 US5930439A (en) 1997-10-01 1997-10-01 Planar optical waveguide

Publications (2)

Publication Number Publication Date
DE69826800D1 true DE69826800D1 (de) 2004-11-11
DE69826800T2 DE69826800T2 (de) 2005-02-17

Family

ID=25477693

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69826800T Expired - Lifetime DE69826800T2 (de) 1997-10-01 1998-07-30 Integriert-optischer Wellenleiter und Verfahren zu seiner Herstellung

Country Status (6)

Country Link
US (1) US5930439A (de)
EP (1) EP0907090B1 (de)
JP (1) JPH11174246A (de)
CA (1) CA2245409C (de)
DE (1) DE69826800T2 (de)
GB (1) GB2334787A (de)

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US6952504B2 (en) * 2001-12-21 2005-10-04 Neophotonics Corporation Three dimensional engineering of planar optical structures
JP2000206348A (ja) 1999-01-13 2000-07-28 Furukawa Electric Co Ltd:The 光導波路回路の光透過波長の補償方法
JP2000275449A (ja) * 1999-03-25 2000-10-06 Minolta Co Ltd 光導波路
US6240221B1 (en) 1999-03-29 2001-05-29 Nortel Networks Limited Integrated optical mach zehnder structures
JP2001194541A (ja) * 1999-05-31 2001-07-19 Furukawa Electric Co Ltd:The 光導波回路
US6389209B1 (en) * 1999-09-07 2002-05-14 Agere Systems Optoelectronics Guardian Corp. Strain free planar optical waveguides
US6418261B1 (en) * 2000-07-24 2002-07-09 Corning Incorporated Method to reduce warpage and polarization sensitivity of planar devices
GB2366394A (en) * 2000-08-11 2002-03-06 Kymata Ltd Integrated optical device with cladding having mesa formation
JP2004510196A (ja) * 2000-09-26 2004-04-02 ブックハム　テクノロジー　ピーエルシー 光導波路及びアレイ導波路格子における複屈折の制御
ATE527104T1 (de) * 2000-10-26 2011-10-15 Neophotonics Corp Mehrschichtige optische strukturen
US7087179B2 (en) * 2000-12-11 2006-08-08 Applied Materials, Inc. Optical integrated circuits (ICs)
US6697552B2 (en) 2001-02-23 2004-02-24 Lightwave Microsystems Corporation Dendritic taper for an integrated optical wavelength router
WO2002073257A1 (en) * 2001-03-13 2002-09-19 Redfern Integrated Optics Pty Ltd Silica-based optical device fabrication
AUPR368201A0 (en) * 2001-03-13 2001-04-12 Redfern Integrated Optics Pty Ltd Silica-based optical device fabrication
US6853769B2 (en) * 2001-03-16 2005-02-08 Lightwave Microsystems Corporation Arrayed waveguide grating with waveguides of unequal widths
US6850670B2 (en) * 2001-06-28 2005-02-01 Lightwave Microsytstems Corporation Method and apparatus for controlling waveguide birefringence by selection of a waveguide core width for a top clad
JP2003014959A (ja) * 2001-07-03 2003-01-15 Furukawa Electric Co Ltd:The 光導波路
US6580864B1 (en) * 2002-01-14 2003-06-17 Applied Wdm, Inc. Birefringence free optical waveguide structures
US7095933B2 (en) * 2002-04-09 2006-08-22 Barth Phillip W Systems and methods for designing and fabricating multi-layer structures having thermal expansion properties
JP3852409B2 (ja) 2003-02-04 2006-11-29 富士通株式会社 光機能デバイス
US6990283B2 (en) * 2003-02-15 2006-01-24 Electronics And Telecommnications Research Institute Polymeric optical device having low polarization dependence and method of fabricating the same
JP3936665B2 (ja) 2003-02-17 2007-06-27 Ｔｄｋ株式会社 光導波路
US7079740B2 (en) * 2004-03-12 2006-07-18 Applied Materials, Inc. Use of amorphous carbon film as a hardmask in the fabrication of optical waveguides
US7359597B1 (en) * 2004-08-23 2008-04-15 Lightsmyth Technologies Inc Birefringence control in planar optical waveguides
KR100679229B1 (ko) * 2004-12-09 2007-02-05 한국전자통신연구원 평면형 광도파로 및 그의 제조 방법
US7609917B2 (en) * 2005-10-11 2009-10-27 Lightwave Microsystems Corporation Method and apparatus for controlling waveguide birefringence by selection of a waveguide core width for a top cladding
US9110232B2 (en) 2011-06-03 2015-08-18 Neophotonics Corporation Thermally compensated arrayed waveguide grating assemblies
US8538212B2 (en) 2011-06-03 2013-09-17 Neophotonics Corporation Thermally compensated arrayed waveguide grating assemblies

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2585332B2 (ja) * 1987-12-25 1997-02-26 株式会社日立製作所 導波路型光デバイス
JPH05181031A (ja) * 1992-01-06 1993-07-23 Hitachi Cable Ltd 光導波路及びその製造方法
GB9202463D0 (en) * 1992-02-05 1992-03-18 British Telecomm Silica waveguide structure
JPH05257021A (ja) * 1992-03-12 1993-10-08 Furukawa Electric Co Ltd:The 光導波路の製造方法
US5235659A (en) * 1992-05-05 1993-08-10 At&T Bell Laboratories Method of making an article comprising an optical waveguide
TW263566B (de) * 1993-01-14 1995-11-21 Sumitomo Electric Industries
JP2637891B2 (ja) * 1993-03-26 1997-08-06 日本電気株式会社 光導波路の製造方法
JPH07140336A (ja) * 1993-09-22 1995-06-02 Shin Etsu Chem Co Ltd 光導波路
US5467415A (en) * 1994-04-22 1995-11-14 At&T Corp. Method for making polarization independent silica optical circuits
US5483613A (en) * 1994-08-16 1996-01-09 At&T Corp. Optical device with substrate and waveguide structure having thermal matching interfaces
DE4433738B4 (de) * 1994-09-21 2006-04-06 Infineon Technologies Ag Doppelbrechungsarmer planarer optischer Wellenleiter und Verfahren zu seiner Herstellung
CA2199513C (en) * 1994-09-23 2002-08-27 Graeme Douglas Maxwell Planar waveguides
US5622750A (en) * 1994-10-31 1997-04-22 Lucent Technologies Inc. Aerosol process for the manufacture of planar waveguides
US5800860A (en) * 1995-06-28 1998-09-01 Lucent Technologies Inc. Method of manufacturing planar optical waveguides
US5649045A (en) * 1995-12-13 1997-07-15 Amoco Corporation Polymide optical waveguide structures
GB2309096A (en) * 1996-01-09 1997-07-16 Northern Telecom Ltd Optical waveguide pair with cladding on buffered substrate
US5896484A (en) * 1996-02-15 1999-04-20 Corning Incorporated Method of making a symmetrical optical waveguide
US5682455A (en) * 1996-02-29 1997-10-28 Northern Telecom Limited Semiconductor optical waveguide
GB2312525A (en) * 1996-04-24 1997-10-29 Northern Telecom Ltd Providing cladding on planar optical waveguide by heating to flow

Also Published As

Publication number Publication date
EP0907090A2 (de) 1999-04-07
EP0907090A3 (de) 2000-06-14
US5930439A (en) 1999-07-27
GB2334787A (en) 1999-09-01
JPH11174246A (ja) 1999-07-02
CA2245409C (en) 2007-02-13
EP0907090B1 (de) 2004-10-06
CA2245409A1 (en) 1999-04-01
DE69826800T2 (de) 2005-02-17
GB9802928D0 (en) 1998-04-08

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Legal Events

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8364 No opposition during term of opposition