DE69736792D1 - Mikromechanischer optischer Modulator und Verfahren zu seiner Herstellung - Google Patents

Mikromechanischer optischer Modulator und Verfahren zu seiner Herstellung

Info

Publication number
DE69736792D1
DE69736792D1 DE69736792T DE69736792T DE69736792D1 DE 69736792 D1 DE69736792 D1 DE 69736792D1 DE 69736792 T DE69736792 T DE 69736792T DE 69736792 T DE69736792 T DE 69736792T DE 69736792 D1 DE69736792 D1 DE 69736792D1
Authority
DE
Germany
Prior art keywords
production
optical modulator
micromechanical optical
micromechanical
modulator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69736792T
Other languages
English (en)
Other versions
DE69736792T2 (de
Inventor
Susanne C Arney
James A Walker
Dennis Stanley Greywall
Bernard Yurke
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AT&T Corp
Original Assignee
AT&T Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by AT&T Corp filed Critical AT&T Corp
Application granted granted Critical
Publication of DE69736792D1 publication Critical patent/DE69736792D1/de
Publication of DE69736792T2 publication Critical patent/DE69736792T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/02Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the intensity of light
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/001Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Optical Integrated Circuits (AREA)
DE69736792T 1996-02-01 1997-01-21 Mikromechanischer optischer Modulator und Verfahren zu seiner Herstellung Expired - Lifetime DE69736792T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US565453 1996-02-01
US08/565,453 US5751469A (en) 1996-02-01 1996-02-01 Method and apparatus for an improved micromechanical modulator

Publications (2)

Publication Number Publication Date
DE69736792D1 true DE69736792D1 (de) 2006-11-23
DE69736792T2 DE69736792T2 (de) 2007-08-09

Family

ID=24258673

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69736792T Expired - Lifetime DE69736792T2 (de) 1996-02-01 1997-01-21 Mikromechanischer optischer Modulator und Verfahren zu seiner Herstellung

Country Status (4)

Country Link
US (2) US5751469A (de)
EP (1) EP0788005B1 (de)
JP (1) JP3784484B2 (de)
DE (1) DE69736792T2 (de)

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Also Published As

Publication number Publication date
EP0788005B1 (de) 2006-10-11
EP0788005A2 (de) 1997-08-06
US5751469A (en) 1998-05-12
JPH09236760A (ja) 1997-09-09
JP3784484B2 (ja) 2006-06-14
DE69736792T2 (de) 2007-08-09
US5808781A (en) 1998-09-15
EP0788005A3 (de) 1998-01-28

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