DE69611189D1 - Planarer Wellenleiter und Verfahren zu seiner Herstellung - Google Patents

Planarer Wellenleiter und Verfahren zu seiner Herstellung

Info

Publication number
DE69611189D1
DE69611189D1 DE69611189T DE69611189T DE69611189D1 DE 69611189 D1 DE69611189 D1 DE 69611189D1 DE 69611189 T DE69611189 T DE 69611189T DE 69611189 T DE69611189 T DE 69611189T DE 69611189 D1 DE69611189 D1 DE 69611189D1
Authority
DE
Germany
Prior art keywords
manufacture
planar waveguide
waveguide
planar
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69611189T
Other languages
English (en)
Other versions
DE69611189T2 (de
Inventor
Christoph J Buchal
Theo Siegrist
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AT&T Corp
Original Assignee
AT&T Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by AT&T Corp filed Critical AT&T Corp
Publication of DE69611189D1 publication Critical patent/DE69611189D1/de
Application granted granted Critical
Publication of DE69611189T2 publication Critical patent/DE69611189T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P1/00—Auxiliary devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/06—Construction or shape of active medium
    • H01S3/063—Waveguide lasers, i.e. whereby the dimensions of the waveguide are of the order of the light wavelength
    • H01S3/0632—Thin film lasers in which light propagates in the plane of the thin film
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S2302/00—Amplification / lasing wavelength
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
    • H01S3/16—Solid materials
    • H01S3/1601—Solid materials characterised by an active (lasing) ion
    • H01S3/1603—Solid materials characterised by an active (lasing) ion rare earth
    • H01S3/1608—Solid materials characterised by an active (lasing) ion rare earth erbium
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
    • H01S3/16—Solid materials
    • H01S3/163—Solid materials characterised by a crystal matrix
    • H01S3/1645—Solid materials characterised by a crystal matrix halide
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10S117/918—Single-crystal waveguide

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Optical Integrated Circuits (AREA)
  • Lasers (AREA)
DE69611189T 1995-01-17 1996-01-10 Planarer Wellenleiter und Verfahren zu seiner Herstellung Expired - Lifetime DE69611189T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/373,346 US5555342A (en) 1995-01-17 1995-01-17 Planar waveguide and a process for its fabrication

Publications (2)

Publication Number Publication Date
DE69611189D1 true DE69611189D1 (de) 2001-01-18
DE69611189T2 DE69611189T2 (de) 2001-05-31

Family

ID=23472021

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69611189T Expired - Lifetime DE69611189T2 (de) 1995-01-17 1996-01-10 Planarer Wellenleiter und Verfahren zu seiner Herstellung

Country Status (5)

Country Link
US (2) US5555342A (de)
EP (1) EP0723319B1 (de)
JP (1) JPH08240821A (de)
KR (1) KR100358267B1 (de)
DE (1) DE69611189T2 (de)

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* Cited by examiner, † Cited by third party
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DE4420287A1 (de) * 1994-06-10 1995-12-14 Sel Alcatel Ag Lichtwellenleiter für faseroptische Verstärker für den Wellenlängenbereich um 1550 nm
US6538805B1 (en) 1999-02-19 2003-03-25 Photon-X, Inc. Codopant polymers for efficient optical amplification
US20040201000A1 (en) * 1999-02-19 2004-10-14 Photon-X, Inc. Polymer blends for optical amplification
US6292292B1 (en) 2000-02-18 2001-09-18 Photon-X Rare earth polymers, optical amplifiers and optical fibers
JP5054874B2 (ja) * 1999-12-02 2012-10-24 ティーガル コーポレイション リアクタ内でプラチナエッチングを行う方法
KR100335368B1 (ko) * 1999-12-21 2002-05-06 오길록 이중 도파로 구조를 구비하는 도파로형 광증폭기 및 그제조 방법
US6506289B2 (en) 2000-08-07 2003-01-14 Symmorphix, Inc. Planar optical devices and methods for their manufacture
US6533907B2 (en) 2001-01-19 2003-03-18 Symmorphix, Inc. Method of producing amorphous silicon for hard mask and waveguide applications
US7469558B2 (en) * 2001-07-10 2008-12-30 Springworks, Llc As-deposited planar optical waveguides with low scattering loss and methods for their manufacture
US7404877B2 (en) * 2001-11-09 2008-07-29 Springworks, Llc Low temperature zirconia based thermal barrier layer by PVD
US7290407B1 (en) 2001-12-19 2007-11-06 Jesse Chienhua Shan Triangle-shaped planar optical waveguide having reduced scattering loss
US7378356B2 (en) * 2002-03-16 2008-05-27 Springworks, Llc Biased pulse DC reactive sputtering of oxide films
US6884327B2 (en) * 2002-03-16 2005-04-26 Tao Pan Mode size converter for a planar waveguide
US8431264B2 (en) 2002-08-09 2013-04-30 Infinite Power Solutions, Inc. Hybrid thin-film battery
US8236443B2 (en) 2002-08-09 2012-08-07 Infinite Power Solutions, Inc. Metal film encapsulation
US20070264564A1 (en) 2006-03-16 2007-11-15 Infinite Power Solutions, Inc. Thin film battery on an integrated circuit or circuit board and method thereof
US8394522B2 (en) 2002-08-09 2013-03-12 Infinite Power Solutions, Inc. Robust metal film encapsulation
US9793523B2 (en) 2002-08-09 2017-10-17 Sapurast Research Llc Electrochemical apparatus with barrier layer protected substrate
US8445130B2 (en) 2002-08-09 2013-05-21 Infinite Power Solutions, Inc. Hybrid thin-film battery
US8404376B2 (en) 2002-08-09 2013-03-26 Infinite Power Solutions, Inc. Metal film encapsulation
US8021778B2 (en) 2002-08-09 2011-09-20 Infinite Power Solutions, Inc. Electrochemical apparatus with barrier layer protected substrate
TWI274199B (en) * 2002-08-27 2007-02-21 Symmorphix Inc Optically coupling into highly uniform waveguides
CN1756856B (zh) 2003-02-27 2011-10-12 希莫菲克斯公司 电介质阻挡层膜
US20040188379A1 (en) * 2003-03-28 2004-09-30 Cabot Microelectronics Corporation Dielectric-in-dielectric damascene process for manufacturing planar waveguides
US7238628B2 (en) * 2003-05-23 2007-07-03 Symmorphix, Inc. Energy conversion and storage films and devices by physical vapor deposition of titanium and titanium oxides and sub-oxides
US8728285B2 (en) 2003-05-23 2014-05-20 Demaray, Llc Transparent conductive oxides
CN1316700C (zh) * 2003-08-22 2007-05-16 南京大学 SiO2衬底上Nd:YVO4光波导薄膜器件及制备方法
US7959769B2 (en) 2004-12-08 2011-06-14 Infinite Power Solutions, Inc. Deposition of LiCoO2
TWI331634B (en) 2004-12-08 2010-10-11 Infinite Power Solutions Inc Deposition of licoo2
US7838133B2 (en) * 2005-09-02 2010-11-23 Springworks, Llc Deposition of perovskite and other compound ceramic films for dielectric applications
US20080232761A1 (en) * 2006-09-20 2008-09-25 Raveen Kumaran Methods of making optical waveguide structures by way of molecular beam epitaxy
EP2067163A4 (de) 2006-09-29 2009-12-02 Infinite Power Solutions Inc Maskierung von flexiblen substraten und materialbeschränkung zum aufbringen von batterieschichten auf diese
US8197781B2 (en) 2006-11-07 2012-06-12 Infinite Power Solutions, Inc. Sputtering target of Li3PO4 and method for producing same
US9334557B2 (en) 2007-12-21 2016-05-10 Sapurast Research Llc Method for sputter targets for electrolyte films
US8268488B2 (en) 2007-12-21 2012-09-18 Infinite Power Solutions, Inc. Thin film electrolyte for thin film batteries
WO2009089417A1 (en) 2008-01-11 2009-07-16 Infinite Power Solutions, Inc. Thin film encapsulation for thin film batteries and other devices
WO2009124191A2 (en) 2008-04-02 2009-10-08 Infinite Power Solutions, Inc. Passive over/under voltage control and protection for energy storage devices associated with energy harvesting
CN102119454B (zh) 2008-08-11 2014-07-30 无穷动力解决方案股份有限公司 具有用于电磁能量收集的一体收集器表面的能量设备及其方法
KR101613671B1 (ko) 2008-09-12 2016-04-19 사푸라스트 리써치 엘엘씨 전자기 에너지에 의해 데이터 통신을 하는 통합 도전성 표면을 가진 에너지 장치 및 그 통신 방법
WO2010042594A1 (en) 2008-10-08 2010-04-15 Infinite Power Solutions, Inc. Environmentally-powered wireless sensor module
WO2011028825A1 (en) 2009-09-01 2011-03-10 Infinite Power Solutions, Inc. Printed circuit board with integrated thin film battery
EP2577777B1 (de) 2010-06-07 2016-12-28 Sapurast Research LLC Wiederaufladbare elektrochemische vorrichtung von hoher dichte
US9711928B2 (en) * 2012-06-22 2017-07-18 Clemson University Research Foundation Single crystals with internal doping with laser ions prepared by a hydrothermal method
US10156025B2 (en) 2015-05-04 2018-12-18 University Of South Carolina Monolithic heterogeneous single crystals with multiple regimes for solid state laser applications
US20170137684A1 (en) * 2015-11-13 2017-05-18 University Of Washington Crystals for cooling solutions and related methods
FR3087958B1 (fr) * 2018-10-31 2023-02-10 Commissariat Energie Atomique Cristal laser avec au moins deux co-dopants.
US11913683B2 (en) 2020-01-17 2024-02-27 University Of Washington Solid-state laser refrigeration of composite optomechanical resonators
US11757245B2 (en) 2020-01-27 2023-09-12 University Of Washington Radiation-balanced fiber laser

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5248890A (en) * 1989-05-13 1993-09-28 Forschungszentrum Julich Gmbh Valance specific lanthanide doped optoelectronic metal fluoride semiconductor device
US5119460A (en) * 1991-04-25 1992-06-02 At&T Bell Laboratories Erbium-doped planar optical device
US5140658A (en) * 1991-04-26 1992-08-18 At&T Bell Laboratories Optical amplifiers involving single crystal waveguides
US5290730A (en) * 1992-09-10 1994-03-01 Hughes Aircraft Company Wavelength conversion waveguide and fabrication method
US5240885A (en) * 1992-09-21 1993-08-31 Corning Incorporated Rare earth-doped, stabilized cadmium halide glasses

Also Published As

Publication number Publication date
EP0723319A2 (de) 1996-07-24
KR100358267B1 (ko) 2003-01-14
US5900057A (en) 1999-05-04
DE69611189T2 (de) 2001-05-31
EP0723319B1 (de) 2000-12-13
KR960030474A (ko) 1996-08-17
US5555342A (en) 1996-09-10
EP0723319A3 (de) 1997-09-24
JPH08240821A (ja) 1996-09-17

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Legal Events

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8364 No opposition during term of opposition