DE69611189D1 - Planarer Wellenleiter und Verfahren zu seiner Herstellung - Google Patents
Planarer Wellenleiter und Verfahren zu seiner HerstellungInfo
- Publication number
- DE69611189D1 DE69611189D1 DE69611189T DE69611189T DE69611189D1 DE 69611189 D1 DE69611189 D1 DE 69611189D1 DE 69611189 T DE69611189 T DE 69611189T DE 69611189 T DE69611189 T DE 69611189T DE 69611189 D1 DE69611189 D1 DE 69611189D1
- Authority
- DE
- Germany
- Prior art keywords
- manufacture
- planar waveguide
- waveguide
- planar
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
- H01P1/00—Auxiliary devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/06—Construction or shape of active medium
- H01S3/063—Waveguide lasers, i.e. whereby the dimensions of the waveguide are of the order of the light wavelength
- H01S3/0632—Thin film lasers in which light propagates in the plane of the thin film
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S2302/00—Amplification / lasing wavelength
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
- H01S3/16—Solid materials
- H01S3/1601—Solid materials characterised by an active (lasing) ion
- H01S3/1603—Solid materials characterised by an active (lasing) ion rare earth
- H01S3/1608—Solid materials characterised by an active (lasing) ion rare earth erbium
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
- H01S3/16—Solid materials
- H01S3/163—Solid materials characterised by a crystal matrix
- H01S3/1645—Solid materials characterised by a crystal matrix halide
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10S117/918—Single-crystal waveguide
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Optical Integrated Circuits (AREA)
- Lasers (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/373,346 US5555342A (en) | 1995-01-17 | 1995-01-17 | Planar waveguide and a process for its fabrication |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69611189D1 true DE69611189D1 (de) | 2001-01-18 |
DE69611189T2 DE69611189T2 (de) | 2001-05-31 |
Family
ID=23472021
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69611189T Expired - Lifetime DE69611189T2 (de) | 1995-01-17 | 1996-01-10 | Planarer Wellenleiter und Verfahren zu seiner Herstellung |
Country Status (5)
Country | Link |
---|---|
US (2) | US5555342A (de) |
EP (1) | EP0723319B1 (de) |
JP (1) | JPH08240821A (de) |
KR (1) | KR100358267B1 (de) |
DE (1) | DE69611189T2 (de) |
Families Citing this family (48)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4420287A1 (de) * | 1994-06-10 | 1995-12-14 | Sel Alcatel Ag | Lichtwellenleiter für faseroptische Verstärker für den Wellenlängenbereich um 1550 nm |
US6538805B1 (en) | 1999-02-19 | 2003-03-25 | Photon-X, Inc. | Codopant polymers for efficient optical amplification |
US20040201000A1 (en) * | 1999-02-19 | 2004-10-14 | Photon-X, Inc. | Polymer blends for optical amplification |
US6292292B1 (en) | 2000-02-18 | 2001-09-18 | Photon-X | Rare earth polymers, optical amplifiers and optical fibers |
JP5054874B2 (ja) * | 1999-12-02 | 2012-10-24 | ティーガル コーポレイション | リアクタ内でプラチナエッチングを行う方法 |
KR100335368B1 (ko) * | 1999-12-21 | 2002-05-06 | 오길록 | 이중 도파로 구조를 구비하는 도파로형 광증폭기 및 그제조 방법 |
US6506289B2 (en) | 2000-08-07 | 2003-01-14 | Symmorphix, Inc. | Planar optical devices and methods for their manufacture |
US6533907B2 (en) | 2001-01-19 | 2003-03-18 | Symmorphix, Inc. | Method of producing amorphous silicon for hard mask and waveguide applications |
US7469558B2 (en) * | 2001-07-10 | 2008-12-30 | Springworks, Llc | As-deposited planar optical waveguides with low scattering loss and methods for their manufacture |
US7404877B2 (en) * | 2001-11-09 | 2008-07-29 | Springworks, Llc | Low temperature zirconia based thermal barrier layer by PVD |
US7290407B1 (en) | 2001-12-19 | 2007-11-06 | Jesse Chienhua Shan | Triangle-shaped planar optical waveguide having reduced scattering loss |
US7378356B2 (en) * | 2002-03-16 | 2008-05-27 | Springworks, Llc | Biased pulse DC reactive sputtering of oxide films |
US6884327B2 (en) * | 2002-03-16 | 2005-04-26 | Tao Pan | Mode size converter for a planar waveguide |
US8431264B2 (en) | 2002-08-09 | 2013-04-30 | Infinite Power Solutions, Inc. | Hybrid thin-film battery |
US8236443B2 (en) | 2002-08-09 | 2012-08-07 | Infinite Power Solutions, Inc. | Metal film encapsulation |
US20070264564A1 (en) | 2006-03-16 | 2007-11-15 | Infinite Power Solutions, Inc. | Thin film battery on an integrated circuit or circuit board and method thereof |
US8394522B2 (en) | 2002-08-09 | 2013-03-12 | Infinite Power Solutions, Inc. | Robust metal film encapsulation |
US9793523B2 (en) | 2002-08-09 | 2017-10-17 | Sapurast Research Llc | Electrochemical apparatus with barrier layer protected substrate |
US8445130B2 (en) | 2002-08-09 | 2013-05-21 | Infinite Power Solutions, Inc. | Hybrid thin-film battery |
US8404376B2 (en) | 2002-08-09 | 2013-03-26 | Infinite Power Solutions, Inc. | Metal film encapsulation |
US8021778B2 (en) | 2002-08-09 | 2011-09-20 | Infinite Power Solutions, Inc. | Electrochemical apparatus with barrier layer protected substrate |
TWI274199B (en) * | 2002-08-27 | 2007-02-21 | Symmorphix Inc | Optically coupling into highly uniform waveguides |
CN1756856B (zh) | 2003-02-27 | 2011-10-12 | 希莫菲克斯公司 | 电介质阻挡层膜 |
US20040188379A1 (en) * | 2003-03-28 | 2004-09-30 | Cabot Microelectronics Corporation | Dielectric-in-dielectric damascene process for manufacturing planar waveguides |
US7238628B2 (en) * | 2003-05-23 | 2007-07-03 | Symmorphix, Inc. | Energy conversion and storage films and devices by physical vapor deposition of titanium and titanium oxides and sub-oxides |
US8728285B2 (en) | 2003-05-23 | 2014-05-20 | Demaray, Llc | Transparent conductive oxides |
CN1316700C (zh) * | 2003-08-22 | 2007-05-16 | 南京大学 | SiO2衬底上Nd:YVO4光波导薄膜器件及制备方法 |
US7959769B2 (en) | 2004-12-08 | 2011-06-14 | Infinite Power Solutions, Inc. | Deposition of LiCoO2 |
TWI331634B (en) | 2004-12-08 | 2010-10-11 | Infinite Power Solutions Inc | Deposition of licoo2 |
US7838133B2 (en) * | 2005-09-02 | 2010-11-23 | Springworks, Llc | Deposition of perovskite and other compound ceramic films for dielectric applications |
US20080232761A1 (en) * | 2006-09-20 | 2008-09-25 | Raveen Kumaran | Methods of making optical waveguide structures by way of molecular beam epitaxy |
EP2067163A4 (de) | 2006-09-29 | 2009-12-02 | Infinite Power Solutions Inc | Maskierung von flexiblen substraten und materialbeschränkung zum aufbringen von batterieschichten auf diese |
US8197781B2 (en) | 2006-11-07 | 2012-06-12 | Infinite Power Solutions, Inc. | Sputtering target of Li3PO4 and method for producing same |
US9334557B2 (en) | 2007-12-21 | 2016-05-10 | Sapurast Research Llc | Method for sputter targets for electrolyte films |
US8268488B2 (en) | 2007-12-21 | 2012-09-18 | Infinite Power Solutions, Inc. | Thin film electrolyte for thin film batteries |
WO2009089417A1 (en) | 2008-01-11 | 2009-07-16 | Infinite Power Solutions, Inc. | Thin film encapsulation for thin film batteries and other devices |
WO2009124191A2 (en) | 2008-04-02 | 2009-10-08 | Infinite Power Solutions, Inc. | Passive over/under voltage control and protection for energy storage devices associated with energy harvesting |
CN102119454B (zh) | 2008-08-11 | 2014-07-30 | 无穷动力解决方案股份有限公司 | 具有用于电磁能量收集的一体收集器表面的能量设备及其方法 |
KR101613671B1 (ko) | 2008-09-12 | 2016-04-19 | 사푸라스트 리써치 엘엘씨 | 전자기 에너지에 의해 데이터 통신을 하는 통합 도전성 표면을 가진 에너지 장치 및 그 통신 방법 |
WO2010042594A1 (en) | 2008-10-08 | 2010-04-15 | Infinite Power Solutions, Inc. | Environmentally-powered wireless sensor module |
WO2011028825A1 (en) | 2009-09-01 | 2011-03-10 | Infinite Power Solutions, Inc. | Printed circuit board with integrated thin film battery |
EP2577777B1 (de) | 2010-06-07 | 2016-12-28 | Sapurast Research LLC | Wiederaufladbare elektrochemische vorrichtung von hoher dichte |
US9711928B2 (en) * | 2012-06-22 | 2017-07-18 | Clemson University Research Foundation | Single crystals with internal doping with laser ions prepared by a hydrothermal method |
US10156025B2 (en) | 2015-05-04 | 2018-12-18 | University Of South Carolina | Monolithic heterogeneous single crystals with multiple regimes for solid state laser applications |
US20170137684A1 (en) * | 2015-11-13 | 2017-05-18 | University Of Washington | Crystals for cooling solutions and related methods |
FR3087958B1 (fr) * | 2018-10-31 | 2023-02-10 | Commissariat Energie Atomique | Cristal laser avec au moins deux co-dopants. |
US11913683B2 (en) | 2020-01-17 | 2024-02-27 | University Of Washington | Solid-state laser refrigeration of composite optomechanical resonators |
US11757245B2 (en) | 2020-01-27 | 2023-09-12 | University Of Washington | Radiation-balanced fiber laser |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5248890A (en) * | 1989-05-13 | 1993-09-28 | Forschungszentrum Julich Gmbh | Valance specific lanthanide doped optoelectronic metal fluoride semiconductor device |
US5119460A (en) * | 1991-04-25 | 1992-06-02 | At&T Bell Laboratories | Erbium-doped planar optical device |
US5140658A (en) * | 1991-04-26 | 1992-08-18 | At&T Bell Laboratories | Optical amplifiers involving single crystal waveguides |
US5290730A (en) * | 1992-09-10 | 1994-03-01 | Hughes Aircraft Company | Wavelength conversion waveguide and fabrication method |
US5240885A (en) * | 1992-09-21 | 1993-08-31 | Corning Incorporated | Rare earth-doped, stabilized cadmium halide glasses |
-
1995
- 1995-01-17 US US08/373,346 patent/US5555342A/en not_active Expired - Lifetime
-
1996
- 1996-01-10 EP EP96300182A patent/EP0723319B1/de not_active Expired - Lifetime
- 1996-01-10 DE DE69611189T patent/DE69611189T2/de not_active Expired - Lifetime
- 1996-01-17 KR KR1019960000765A patent/KR100358267B1/ko not_active IP Right Cessation
- 1996-01-17 JP JP8005688A patent/JPH08240821A/ja active Pending
- 1996-06-05 US US08/658,419 patent/US5900057A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0723319A2 (de) | 1996-07-24 |
KR100358267B1 (ko) | 2003-01-14 |
US5900057A (en) | 1999-05-04 |
DE69611189T2 (de) | 2001-05-31 |
EP0723319B1 (de) | 2000-12-13 |
KR960030474A (ko) | 1996-08-17 |
US5555342A (en) | 1996-09-10 |
EP0723319A3 (de) | 1997-09-24 |
JPH08240821A (ja) | 1996-09-17 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE69611189D1 (de) | Planarer Wellenleiter und Verfahren zu seiner Herstellung | |
DE69520702D1 (de) | Optischer Wellenleiter und Verfahren zu seiner Herstellung | |
DE59606535D1 (de) | Furnacerusse und Verfahren zu ihrer Herstellung | |
DE69604333D1 (de) | Optisches Wellenleitermodul und Verfahren zu seiner Herstellung | |
DE69618434D1 (de) | Gekrümmter optischer Wellenleiter und Verfahren zu dessen Herstellung | |
DE69607560D1 (de) | Schleifblatt und Verfahren zu seiner Herstellung | |
DE69628090D1 (de) | Veredelungsmittel und Verfahren zu seiner Herstellung | |
DE69624632D1 (de) | Filterelement und Verfahren zu seiner Herstellung | |
DE69610232D1 (de) | Deodorisierende Fasern und Verfahren zu ihrer Herstellung | |
DE69420383D1 (de) | Schwingungsdämpfendes Material und Verfahren zu seiner Herstellung | |
DE69618862D1 (de) | Struktureller Wabenkörper und Verfahren zu seiner Herstellung | |
DE59609639D1 (de) | Sicherheitsdokument und Verfahren zu seiner Herstellung | |
DE69624024D1 (de) | Formvorrichtung und Verfahren zu ihrer Herstellung | |
DE69826800D1 (de) | Integriert-optischer Wellenleiter und Verfahren zu seiner Herstellung | |
DE69720391D1 (de) | Cholesterinsensor und Verfahren zu seiner Herstellung | |
DE69509312D1 (de) | Beschleunigungsmesser sowie Verfahren zu seiner Herstellung | |
DE69411694D1 (de) | Durchsichtiger Gegenstand und Verfahren zu seiner Herstellung | |
DE69719284D1 (de) | Gegossener Artikel und Verfahren zu seiner Herstellung | |
DE69631739D1 (de) | Poröser Film und Verfahren zu seiner Herstellung | |
DE69510300D1 (de) | Epitaktisches Plättchen und Verfahren zu seiner Herstellung | |
DE69613323D1 (de) | Gleitwerkstoff und Verfahren zu seiner Herstellung | |
DE69602860D1 (de) | Schreibgerät und Verfahren zu seiner Herstellung | |
DE69805254D1 (de) | Quarzglas und Verfahren zu seiner Herstellung | |
DE69527738D1 (de) | Bimetallische Geldmünze und Verfahren zu deren Herstellung | |
DE69616947D1 (de) | Pumpengehäuse und Verfahren zu seiner Herstellung |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |