DE69711764D1 - Magnetfelderzeugungsvorrichtung und ECR Ionenquelle dafür - Google Patents

Magnetfelderzeugungsvorrichtung und ECR Ionenquelle dafür

Info

Publication number
DE69711764D1
DE69711764D1 DE69711764T DE69711764T DE69711764D1 DE 69711764 D1 DE69711764 D1 DE 69711764D1 DE 69711764 T DE69711764 T DE 69711764T DE 69711764 T DE69711764 T DE 69711764T DE 69711764 D1 DE69711764 D1 DE 69711764D1
Authority
DE
Germany
Prior art keywords
magnetic field
generating device
ion source
field generating
ecr ion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69711764T
Other languages
English (en)
Other versions
DE69711764T2 (de
Inventor
Jean-Yves Pacquet
Renan Leroy
Nathalie Lecesne
Pascal Sortais
Antonio Villari
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centre National de la Recherche Scientifique CNRS
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Centre National de la Recherche Scientifique CNRS
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centre National de la Recherche Scientifique CNRS, Commissariat a lEnergie Atomique CEA filed Critical Centre National de la Recherche Scientifique CNRS
Publication of DE69711764D1 publication Critical patent/DE69711764D1/de
Application granted granted Critical
Publication of DE69711764T2 publication Critical patent/DE69711764T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/16—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation
    • H01J27/18—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation with an applied axial magnetic field

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Particle Accelerators (AREA)
DE1997611764 1996-06-11 1997-06-09 Magnetfelderzeugungsvorrichtung und ECR Ionenquelle dafür Expired - Lifetime DE69711764T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9607228A FR2749703B1 (fr) 1996-06-11 1996-06-11 Dispositif pour engendrer un champ magnetique et source ecr comportant ce dispositif

Publications (2)

Publication Number Publication Date
DE69711764D1 true DE69711764D1 (de) 2002-05-16
DE69711764T2 DE69711764T2 (de) 2002-11-14

Family

ID=9492934

Family Applications (1)

Application Number Title Priority Date Filing Date
DE1997611764 Expired - Lifetime DE69711764T2 (de) 1996-06-11 1997-06-09 Magnetfelderzeugungsvorrichtung und ECR Ionenquelle dafür

Country Status (3)

Country Link
EP (1) EP0813223B1 (de)
DE (1) DE69711764T2 (de)
FR (1) FR2749703B1 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19933762C2 (de) * 1999-07-19 2002-10-17 Juergen Andrae Gepulste magnetische Öffnung von Elektronen-Zyklotron-Resonanz-Jonenquellen zur Erzeugung kurzer, stromstarker Pulse hoch geladener Ionen oder von Elektronen
DE10306936B3 (de) * 2003-02-19 2004-06-24 Gesellschaft für Schwerionenforschung mbH Multi-Mode-Metall-Ionenquelle mit der Struktur einer Hohlkathoden-Sputter-Ionenquelle mit radialer Ionenextraktion
FR2947378A1 (fr) 2009-06-29 2010-12-31 Quertech Ingenierie Systeme magnetique formant des surfaces iso modules fermees a partir de structures magnetiques de type "cusp" et sources d'ions de type rce mettant en oeuvre un tel systeme

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2551302B1 (fr) * 1983-08-30 1986-03-14 Commissariat Energie Atomique Structure ferromagnetique d'une source d'ions creee par des aimants permanents et des solenoides

Also Published As

Publication number Publication date
EP0813223A1 (de) 1997-12-17
DE69711764T2 (de) 2002-11-14
EP0813223B1 (de) 2002-04-10
FR2749703A1 (fr) 1997-12-12
FR2749703B1 (fr) 1998-07-24

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition