DE69708839T2 - Optisches bauelement zur polarisationsmodulation, und dessen verwendung in einem polarimeter oder ellipsometer - Google Patents

Optisches bauelement zur polarisationsmodulation, und dessen verwendung in einem polarimeter oder ellipsometer

Info

Publication number
DE69708839T2
DE69708839T2 DE69708839T DE69708839T DE69708839T2 DE 69708839 T2 DE69708839 T2 DE 69708839T2 DE 69708839 T DE69708839 T DE 69708839T DE 69708839 T DE69708839 T DE 69708839T DE 69708839 T2 DE69708839 T2 DE 69708839T2
Authority
DE
Germany
Prior art keywords
optical component
polarimeter
ellipsometer
polarization
modulations
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69708839T
Other languages
English (en)
Other versions
DE69708839D1 (de
Inventor
Bernard Drevillon
Eric Compain
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centre National de la Recherche Scientifique CNRS
Original Assignee
Centre National de la Recherche Scientifique CNRS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centre National de la Recherche Scientifique CNRS filed Critical Centre National de la Recherche Scientifique CNRS
Application granted granted Critical
Publication of DE69708839D1 publication Critical patent/DE69708839D1/de
Publication of DE69708839T2 publication Critical patent/DE69708839T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G01N21/211—Ellipsometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J4/00—Measuring polarisation of light
    • G01J4/04—Polarimeters using electric detection means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J4/00—Measuring polarisation of light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
    • G02F1/0327—Operation of the cell; Circuit arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
    • G01J2009/006—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength using pulses for physical measurements

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Nonlinear Science (AREA)
  • General Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Optics & Photonics (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
DE69708839T 1996-10-25 1997-10-16 Optisches bauelement zur polarisationsmodulation, und dessen verwendung in einem polarimeter oder ellipsometer Expired - Fee Related DE69708839T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR9613081A FR2755254B1 (fr) 1996-10-25 1996-10-25 Composant optique de modulation, polarimetre et ellipsometre de mueller comprenant un tel composant optique, procede de calibrage de cet ellipsometre et procede de mesure ellipsometrique
PCT/FR1997/001849 WO1998019142A1 (fr) 1996-10-25 1997-10-16 Composant optique de modulation de polarisation, et son utilisation dans un polarimetre ou dans un ellipsometre

Publications (2)

Publication Number Publication Date
DE69708839D1 DE69708839D1 (de) 2002-01-17
DE69708839T2 true DE69708839T2 (de) 2002-10-31

Family

ID=9497060

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69708839T Expired - Fee Related DE69708839T2 (de) 1996-10-25 1997-10-16 Optisches bauelement zur polarisationsmodulation, und dessen verwendung in einem polarimeter oder ellipsometer

Country Status (8)

Country Link
US (1) US6175412B1 (de)
EP (1) EP0870180B1 (de)
JP (1) JP2000502461A (de)
KR (1) KR19990076790A (de)
AT (1) ATE210284T1 (de)
DE (1) DE69708839T2 (de)
FR (1) FR2755254B1 (de)
WO (1) WO1998019142A1 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102016117326A1 (de) 2016-09-06 2018-03-08 Novoptel GmbH Polarimeter für polarisationsmodulierte Signale

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FR2779825B1 (fr) * 1998-06-16 2000-09-01 Centre Nat Rech Scient Procede et dispositif de commande de la fabrication d'un composant en couche mince a partir d'une dissociation de gaz
HU226937B1 (en) * 2000-11-17 2010-03-29 Mta Szegedi Biolog Koezpont Method and apparatus for determining polarization amount of material by a laser scanning microscope
US6836327B1 (en) * 2001-03-16 2004-12-28 General Photonics Corporation In-line optical polarimeter based on integration of free-space optical elements
US6917428B2 (en) 2001-10-15 2005-07-12 The Regents Of The University Of California Methods and apparatus for measuring refractive index and optical absorption differences
DE60209672T2 (de) * 2002-10-15 2006-11-16 Centre National De La Recherche Scientifique (C.N.R.S.) Auf Flüssigkristallen basierendes polarimetrisches System, Verfahren zu seiner Kalibrierung, und polarimetrisches Messverfahren
US7495764B1 (en) 2002-11-07 2009-02-24 The United States Of America As Represented By The Secretary Of The Army Coherent radar and ladar polarimeter
US7411675B2 (en) 2003-03-28 2008-08-12 Citizen Holdings Co., Ltd. Optical rotation angle measuring apparatus
KR100605507B1 (ko) * 2004-11-08 2006-07-28 삼성전자주식회사 편광 상태 측정 장치 및 그 측정 방법
US7375799B2 (en) * 2005-02-25 2008-05-20 Asml Netherlands B.V. Lithographic apparatus
TW200710592A (en) * 2005-06-13 2007-03-16 Asml Netherlands Bv Lithographic device, and method
EP1738682B1 (de) * 2005-07-01 2008-02-13 Ecole Polytechnique Polarimetrisch elektronisches Abbildungssystem für eine kolposkopische Vorrichtung
KR100732118B1 (ko) * 2005-11-24 2007-06-25 안일신 회전 보상기형 외축 타원 해석기
JP4747304B2 (ja) 2006-01-13 2011-08-17 国立大学法人東京農工大学 計測装置及び計測方法、並びに、特性計測ユニット
EP1811287A1 (de) * 2006-01-20 2007-07-25 Ecole Polytechnique Polarimetrisches Ramansystem und Verfahren zur Analyse einer Probe
JPWO2007111159A1 (ja) * 2006-03-20 2009-08-13 国立大学法人東京農工大学 光学特性計測装置及び光学特性計測方法、並びに、光学特性計測ユニット
US7557918B1 (en) 2006-04-05 2009-07-07 Itt Manufacturing Enterprises, Inc. Spectral polarimetric image detection and analysis methods and apparatus
US7928390B1 (en) * 2007-09-06 2011-04-19 Kla-Tencor Corporation Infrared metrology
US7945130B2 (en) * 2007-11-15 2011-05-17 General Photonics Corporation Mode scrambling apparatus for multimode fiber
US20090141274A1 (en) * 2007-11-29 2009-06-04 Bogdan Szafraniec Polarization Dependent Loss Analyzer
FR2937732B1 (fr) 2008-10-29 2010-12-31 Horiba Jobin Yvon Sas Dispositif et procede de mesures polarimetriques spectroscopiques dans le domaine visible et proche infrarouge
JP2010145332A (ja) * 2008-12-22 2010-07-01 Tokyo Univ Of Agriculture & Technology 光学特性計測装置、光学特性計測方法、および光学特性計測装置の校正方法
US8780433B2 (en) 2011-09-28 2014-07-15 General Photonics Corporation Polarization scrambling based on cascaded optical polarization devices having modulated optical retardation
FR3018914B1 (fr) 2014-03-18 2016-05-06 Centre Nat Rech Scient Dispositif et methode de caracterisation polarimetrique deportee
WO2016057464A1 (en) 2014-10-06 2016-04-14 Applied Photophysics, Inc. Calibration device and uses thereof
JP6351893B1 (ja) * 2018-02-26 2018-07-04 日本分光株式会社 位相差制御装置
CN108871579B (zh) * 2018-04-27 2020-11-13 北京理工大学 一种偏振成像系统的标定方法
CN113631899A (zh) * 2019-04-03 2021-11-09 索尼集团公司 图像处理装置、信息生成装置及其方法
CN110261317B (zh) * 2019-06-17 2021-11-16 西安理工大学 一种Mueller矩阵光谱的测量系统及方法
CN111307722B (zh) * 2019-11-29 2021-04-16 北京理工大学 一种多功能Stokes-Mueller矩阵成像偏振仪的标定方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4306809A (en) * 1979-03-26 1981-12-22 The Board Of Regents Of The University Of Nebraska Polarimeter
US5956147A (en) * 1997-06-13 1999-09-21 Lockheed Martin Energy Research Corporation Two modulator generalized ellipsometer for complete mueller matrix measurement

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102016117326A1 (de) 2016-09-06 2018-03-08 Novoptel GmbH Polarimeter für polarisationsmodulierte Signale

Also Published As

Publication number Publication date
EP0870180A1 (de) 1998-10-14
FR2755254B1 (fr) 1999-01-15
DE69708839D1 (de) 2002-01-17
US6175412B1 (en) 2001-01-16
JP2000502461A (ja) 2000-02-29
FR2755254A1 (fr) 1998-04-30
EP0870180B1 (de) 2001-12-05
KR19990076790A (ko) 1999-10-15
ATE210284T1 (de) 2001-12-15
WO1998019142A1 (fr) 1998-05-07

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Legal Events

Date Code Title Description
8332 No legal effect for de
8370 Indication related to discontinuation of the patent is to be deleted
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee