ATE210284T1 - Optisches bauelement zur polarisationsmodulation, und dessen verwendung in einem polarimeter oder ellipsometer - Google Patents
Optisches bauelement zur polarisationsmodulation, und dessen verwendung in einem polarimeter oder ellipsometerInfo
- Publication number
- ATE210284T1 ATE210284T1 AT97910494T AT97910494T ATE210284T1 AT E210284 T1 ATE210284 T1 AT E210284T1 AT 97910494 T AT97910494 T AT 97910494T AT 97910494 T AT97910494 T AT 97910494T AT E210284 T1 ATE210284 T1 AT E210284T1
- Authority
- AT
- Austria
- Prior art keywords
- optical component
- polarimeter
- ellipsometer
- polarization
- modulations
- Prior art date
Links
- 230000003287 optical effect Effects 0.000 title abstract 4
- 230000010287 polarization Effects 0.000 title abstract 4
- 238000001514 detection method Methods 0.000 abstract 2
- 230000008878 coupling Effects 0.000 abstract 1
- 238000010168 coupling process Methods 0.000 abstract 1
- 238000005859 coupling reaction Methods 0.000 abstract 1
- 239000011159 matrix material Substances 0.000 abstract 1
- 238000005259 measurement Methods 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J4/00—Measuring polarisation of light
- G01J4/04—Polarimeters using electric detection means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/21—Polarisation-affecting properties
- G01N21/211—Ellipsometry
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J4/00—Measuring polarisation of light
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
- G02F1/0327—Operation of the cell; Circuit arrangements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
- G01J2009/006—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength using pulses for physical measurements
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Chemical & Material Sciences (AREA)
- Nonlinear Science (AREA)
- General Health & Medical Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Crystallography & Structural Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Optics & Photonics (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR9613081A FR2755254B1 (fr) | 1996-10-25 | 1996-10-25 | Composant optique de modulation, polarimetre et ellipsometre de mueller comprenant un tel composant optique, procede de calibrage de cet ellipsometre et procede de mesure ellipsometrique |
PCT/FR1997/001849 WO1998019142A1 (fr) | 1996-10-25 | 1997-10-16 | Composant optique de modulation de polarisation, et son utilisation dans un polarimetre ou dans un ellipsometre |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE210284T1 true ATE210284T1 (de) | 2001-12-15 |
Family
ID=9497060
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT97910494T ATE210284T1 (de) | 1996-10-25 | 1997-10-16 | Optisches bauelement zur polarisationsmodulation, und dessen verwendung in einem polarimeter oder ellipsometer |
Country Status (8)
Country | Link |
---|---|
US (1) | US6175412B1 (de) |
EP (1) | EP0870180B1 (de) |
JP (1) | JP2000502461A (de) |
KR (1) | KR19990076790A (de) |
AT (1) | ATE210284T1 (de) |
DE (1) | DE69708839T2 (de) |
FR (1) | FR2755254B1 (de) |
WO (1) | WO1998019142A1 (de) |
Families Citing this family (30)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2779825B1 (fr) * | 1998-06-16 | 2000-09-01 | Centre Nat Rech Scient | Procede et dispositif de commande de la fabrication d'un composant en couche mince a partir d'une dissociation de gaz |
HU226937B1 (en) * | 2000-11-17 | 2010-03-29 | Mta Szegedi Biolog Koezpont | Method and apparatus for determining polarization amount of material by a laser scanning microscope |
US6836327B1 (en) * | 2001-03-16 | 2004-12-28 | General Photonics Corporation | In-line optical polarimeter based on integration of free-space optical elements |
US6917428B2 (en) | 2001-10-15 | 2005-07-12 | The Regents Of The University Of California | Methods and apparatus for measuring refractive index and optical absorption differences |
EP1411333B1 (de) | 2002-10-15 | 2006-03-08 | Centre National De La Recherche Scientifique (Cnrs) | Auf Flüssigkristallen basierendes polarimetrisches System, Verfahren zu seiner Kalibrierung, und polarimetrisches Messverfahren |
US7495764B1 (en) | 2002-11-07 | 2009-02-24 | The United States Of America As Represented By The Secretary Of The Army | Coherent radar and ladar polarimeter |
US7411675B2 (en) | 2003-03-28 | 2008-08-12 | Citizen Holdings Co., Ltd. | Optical rotation angle measuring apparatus |
KR100605507B1 (ko) * | 2004-11-08 | 2006-07-28 | 삼성전자주식회사 | 편광 상태 측정 장치 및 그 측정 방법 |
US7375799B2 (en) | 2005-02-25 | 2008-05-20 | Asml Netherlands B.V. | Lithographic apparatus |
JP4717112B2 (ja) * | 2005-06-13 | 2011-07-06 | エーエスエムエル ネザーランズ ビー.ブイ. | 偏光アナライザ、偏光センサおよびリソグラフィ装置の偏光特性を判定するための方法 |
EP1738682B1 (de) * | 2005-07-01 | 2008-02-13 | Ecole Polytechnique | Polarimetrisch elektronisches Abbildungssystem für eine kolposkopische Vorrichtung |
KR100732118B1 (ko) * | 2005-11-24 | 2007-06-25 | 안일신 | 회전 보상기형 외축 타원 해석기 |
WO2007080790A1 (ja) * | 2006-01-13 | 2007-07-19 | National University Corporation Tokyo University Of Agriculture And Technology | 計測装置及び計測方法、並びに、特性計測ユニット |
EP1811287A1 (de) * | 2006-01-20 | 2007-07-25 | Ecole Polytechnique | Polarimetrisches Ramansystem und Verfahren zur Analyse einer Probe |
US20100103417A1 (en) * | 2006-03-20 | 2010-04-29 | Yukitoshi Otani | Optical Characteristic Measuring Apparatus, Optical Characteristic Measuring Method, and Optical Characteristic Measuring Unit |
US7557918B1 (en) | 2006-04-05 | 2009-07-07 | Itt Manufacturing Enterprises, Inc. | Spectral polarimetric image detection and analysis methods and apparatus |
US7928390B1 (en) * | 2007-09-06 | 2011-04-19 | Kla-Tencor Corporation | Infrared metrology |
US7945130B2 (en) * | 2007-11-15 | 2011-05-17 | General Photonics Corporation | Mode scrambling apparatus for multimode fiber |
US20090141274A1 (en) * | 2007-11-29 | 2009-06-04 | Bogdan Szafraniec | Polarization Dependent Loss Analyzer |
FR2937732B1 (fr) | 2008-10-29 | 2010-12-31 | Horiba Jobin Yvon Sas | Dispositif et procede de mesures polarimetriques spectroscopiques dans le domaine visible et proche infrarouge |
JP2010145332A (ja) * | 2008-12-22 | 2010-07-01 | Tokyo Univ Of Agriculture & Technology | 光学特性計測装置、光学特性計測方法、および光学特性計測装置の校正方法 |
US8780433B2 (en) | 2011-09-28 | 2014-07-15 | General Photonics Corporation | Polarization scrambling based on cascaded optical polarization devices having modulated optical retardation |
FR3018914B1 (fr) | 2014-03-18 | 2016-05-06 | Centre Nat Rech Scient | Dispositif et methode de caracterisation polarimetrique deportee |
CN107430063B (zh) | 2014-10-06 | 2023-07-14 | 应用光物理公司 | 校准装置及其使用 |
DE102016117326A1 (de) | 2016-09-06 | 2018-03-08 | Novoptel GmbH | Polarimeter für polarisationsmodulierte Signale |
JP6351893B1 (ja) * | 2018-02-26 | 2018-07-04 | 日本分光株式会社 | 位相差制御装置 |
CN108871579B (zh) * | 2018-04-27 | 2020-11-13 | 北京理工大学 | 一种偏振成像系统的标定方法 |
US20220146434A1 (en) * | 2019-04-03 | 2022-05-12 | Sony Group Corporation | Image processing apparatus, information generation apparatus, and method thereof |
CN110261317B (zh) * | 2019-06-17 | 2021-11-16 | 西安理工大学 | 一种Mueller矩阵光谱的测量系统及方法 |
CN111307722B (zh) * | 2019-11-29 | 2021-04-16 | 北京理工大学 | 一种多功能Stokes-Mueller矩阵成像偏振仪的标定方法 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4306809A (en) * | 1979-03-26 | 1981-12-22 | The Board Of Regents Of The University Of Nebraska | Polarimeter |
US5956147A (en) * | 1997-06-13 | 1999-09-21 | Lockheed Martin Energy Research Corporation | Two modulator generalized ellipsometer for complete mueller matrix measurement |
-
1996
- 1996-10-25 FR FR9613081A patent/FR2755254B1/fr not_active Expired - Fee Related
-
1997
- 1997-10-16 WO PCT/FR1997/001849 patent/WO1998019142A1/fr not_active Application Discontinuation
- 1997-10-16 JP JP10520100A patent/JP2000502461A/ja not_active Ceased
- 1997-10-16 KR KR1019980704915A patent/KR19990076790A/ko not_active Application Discontinuation
- 1997-10-16 DE DE69708839T patent/DE69708839T2/de not_active Expired - Fee Related
- 1997-10-16 US US09/091,400 patent/US6175412B1/en not_active Expired - Fee Related
- 1997-10-16 EP EP97910494A patent/EP0870180B1/de not_active Expired - Lifetime
- 1997-10-16 AT AT97910494T patent/ATE210284T1/de not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
EP0870180B1 (de) | 2001-12-05 |
EP0870180A1 (de) | 1998-10-14 |
DE69708839D1 (de) | 2002-01-17 |
FR2755254A1 (fr) | 1998-04-30 |
WO1998019142A1 (fr) | 1998-05-07 |
DE69708839T2 (de) | 2002-10-31 |
FR2755254B1 (fr) | 1999-01-15 |
JP2000502461A (ja) | 2000-02-29 |
US6175412B1 (en) | 2001-01-16 |
KR19990076790A (ko) | 1999-10-15 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |