DE69708788T2 - Siliciumnitrid-Sinterwerkstoff und Verfahren zur Herstellung davon - Google Patents

Siliciumnitrid-Sinterwerkstoff und Verfahren zur Herstellung davon

Info

Publication number
DE69708788T2
DE69708788T2 DE69708788T DE69708788T DE69708788T2 DE 69708788 T2 DE69708788 T2 DE 69708788T2 DE 69708788 T DE69708788 T DE 69708788T DE 69708788 T DE69708788 T DE 69708788T DE 69708788 T2 DE69708788 T2 DE 69708788T2
Authority
DE
Germany
Prior art keywords
production
silicon nitride
sintered material
nitride sintered
silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69708788T
Other languages
English (en)
Other versions
DE69708788D1 (de
Inventor
Yasufumi Aihara
Katsuhiro Inoue
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NGK Insulators Ltd
Original Assignee
NGK Insulators Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NGK Insulators Ltd filed Critical NGK Insulators Ltd
Publication of DE69708788D1 publication Critical patent/DE69708788D1/de
Application granted granted Critical
Publication of DE69708788T2 publication Critical patent/DE69708788T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/009—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone characterised by the material treated
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
    • C04B35/584—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride
    • C04B35/593—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride obtained by pressure sintering
    • C04B35/5935—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride obtained by pressure sintering obtained by gas pressure sintering
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/0072—Heat treatment
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
    • C04B41/50—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials
    • C04B41/5025—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials with ceramic materials
    • C04B41/5035—Silica
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
    • C04B41/81—Coating or impregnation
    • C04B41/85—Coating or impregnation with inorganic materials
    • C04B41/87—Ceramics

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Ceramic Products (AREA)
DE69708788T 1996-08-20 1997-08-18 Siliciumnitrid-Sinterwerkstoff und Verfahren zur Herstellung davon Expired - Lifetime DE69708788T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8218809A JPH1059773A (ja) 1996-08-20 1996-08-20 窒化珪素焼結体及びその製造方法

Publications (2)

Publication Number Publication Date
DE69708788D1 DE69708788D1 (de) 2002-01-17
DE69708788T2 true DE69708788T2 (de) 2002-09-19

Family

ID=16725691

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69708788T Expired - Lifetime DE69708788T2 (de) 1996-08-20 1997-08-18 Siliciumnitrid-Sinterwerkstoff und Verfahren zur Herstellung davon

Country Status (4)

Country Link
US (2) US5945363A (de)
EP (1) EP0825162B1 (de)
JP (1) JPH1059773A (de)
DE (1) DE69708788T2 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6617272B2 (en) 1998-03-05 2003-09-09 Sumitomo Electric Industries, Ltd. Si3N4 sintered body with high thermal conductivity and method for producing the same
WO2001024216A2 (en) * 1999-09-30 2001-04-05 Lam Research Corporation Pretreated gas distribution plate
KR102209383B1 (ko) * 2018-12-31 2021-02-01 (주)단단 이터븀과 이트륨이 공도핑된 사이알론 및 그 제조방법

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2631104B2 (ja) * 1987-08-31 1997-07-16 京セラ株式会社 窒化珪素質焼結体
JPS6456368A (en) * 1987-08-27 1989-03-03 Kyocera Corp Silicon nitride sintered body
JP2631105B2 (ja) * 1987-08-31 1997-07-16 京セラ株式会社 窒化珪素質焼結体
US5316856A (en) * 1988-12-03 1994-05-31 Ngk Spark Plug Co., Ltd. Silicon nitride base sintered body
JPH0729855B2 (ja) * 1989-05-10 1995-04-05 日本碍子株式会社 窒化珪素焼結体およびその製造法
JPH0733290B2 (ja) * 1990-02-09 1995-04-12 日本碍子株式会社 窒化珪素焼結体およびその製造法
US5096859A (en) * 1990-02-09 1992-03-17 Ngk Insulators, Ltd. Silicon nitride sintered body and method of producing the same
JPH08733B2 (ja) * 1990-05-17 1996-01-10 日本碍子株式会社 耐熱衝撃性窒化珪素焼結体及びその製造方法
JPH0672054B2 (ja) * 1991-03-20 1994-09-14 日本碍子株式会社 窒化珪素焼結体およびその製造法
JP2670221B2 (ja) * 1993-01-22 1997-10-29 日本碍子株式会社 窒化珪素焼結体及びその製造方法
JP2670222B2 (ja) * 1993-02-02 1997-10-29 日本碍子株式会社 窒化珪素焼結体及びその製造方法
US5518673A (en) * 1993-10-14 1996-05-21 Saint-Gobain/Norton Industrial Ceramics Corp. Silicon nitride ceramic having high fatigue life and high toughness
JPH092878A (ja) * 1995-02-08 1997-01-07 Sumitomo Electric Ind Ltd 窒化ケイ素系焼結体及びその製造方法

Also Published As

Publication number Publication date
EP0825162B1 (de) 2001-12-05
EP0825162A1 (de) 1998-02-25
JPH1059773A (ja) 1998-03-03
DE69708788D1 (de) 2002-01-17
US6099794A (en) 2000-08-08
US5945363A (en) 1999-08-31

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Legal Events

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