DE69702272T2 - Verfahren zum Belichten der Randbereiche eines Halbleiterwafers, und Gerät zur Ausführung des Verfahrens - Google Patents
Verfahren zum Belichten der Randbereiche eines Halbleiterwafers, und Gerät zur Ausführung des VerfahrensInfo
- Publication number
- DE69702272T2 DE69702272T2 DE69702272T DE69702272T DE69702272T2 DE 69702272 T2 DE69702272 T2 DE 69702272T2 DE 69702272 T DE69702272 T DE 69702272T DE 69702272 T DE69702272 T DE 69702272T DE 69702272 T2 DE69702272 T2 DE 69702272T2
- Authority
- DE
- Germany
- Prior art keywords
- exposing
- carrying
- semiconductor wafer
- edge areas
- areas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2022—Multi-step exposure, e.g. hybrid; backside exposure; blanket exposure, e.g. for image reversal; edge exposure, e.g. for edge bead removal; corrective exposure
- G03F7/2026—Multi-step exposure, e.g. hybrid; backside exposure; blanket exposure, e.g. for image reversal; edge exposure, e.g. for edge bead removal; corrective exposure for the removal of unwanted material, e.g. image or background correction
- G03F7/2028—Multi-step exposure, e.g. hybrid; backside exposure; blanket exposure, e.g. for image reversal; edge exposure, e.g. for edge bead removal; corrective exposure for the removal of unwanted material, e.g. image or background correction of an edge bead on wafers
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1862596 | 1996-02-05 | ||
JP16144396A JP3237522B2 (ja) | 1996-02-05 | 1996-06-21 | ウエハ周辺露光方法および装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69702272D1 DE69702272D1 (de) | 2000-07-20 |
DE69702272T2 true DE69702272T2 (de) | 2000-12-21 |
Family
ID=26355329
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69702272T Expired - Lifetime DE69702272T2 (de) | 1996-02-05 | 1997-02-04 | Verfahren zum Belichten der Randbereiche eines Halbleiterwafers, und Gerät zur Ausführung des Verfahrens |
Country Status (6)
Country | Link |
---|---|
US (1) | US5929976A (de) |
EP (1) | EP0788032B1 (de) |
JP (1) | JP3237522B2 (de) |
KR (1) | KR100434826B1 (de) |
DE (1) | DE69702272T2 (de) |
TW (1) | TW326552B (de) |
Families Citing this family (42)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0951054B1 (de) | 1996-11-28 | 2008-08-13 | Nikon Corporation | Ausrichtvorrichtung und belichtungsverfahren |
JPH10209039A (ja) | 1997-01-27 | 1998-08-07 | Nikon Corp | 投影露光方法及び投影露光装置 |
KR19990031795A (ko) * | 1997-10-14 | 1999-05-06 | 윤종용 | 노광장치 및 이를 이용한 노광방법 |
JP3356047B2 (ja) * | 1997-11-26 | 2002-12-09 | ウシオ電機株式会社 | ウエハ周辺露光装置 |
WO2001082001A1 (en) * | 2000-04-26 | 2001-11-01 | Advanced Micro Devices, Inc. | Lithography system with device for exposing the periphery of a wafer |
TW527526B (en) | 2000-08-24 | 2003-04-11 | Asml Netherlands Bv | Lithographic apparatus, device manufacturing method, and device manufactured thereby |
US7561270B2 (en) | 2000-08-24 | 2009-07-14 | Asml Netherlands B.V. | Lithographic apparatus, device manufacturing method and device manufactured thereby |
US7289212B2 (en) * | 2000-08-24 | 2007-10-30 | Asml Netherlands B.V. | Lithographic apparatus, device manufacturing method and device manufacturing thereby |
US6509577B1 (en) * | 2000-11-10 | 2003-01-21 | Asml Us, Inc. | Systems and methods for exposing substrate periphery |
KR100724623B1 (ko) * | 2000-12-22 | 2007-06-04 | 주식회사 하이닉스반도체 | 노광장비내에서의 웨이퍼엣지 노광방법 |
US6495312B1 (en) * | 2001-02-01 | 2002-12-17 | Lsi Logic Corporation | Method and apparatus for removing photoresist edge beads from thin film substrates |
KR100512006B1 (ko) | 2001-03-06 | 2005-09-02 | 삼성전자주식회사 | 웨이퍼 주연 부위의 노광 방법 및 이를 수행하기 위한 장치 |
EP1256848A3 (de) * | 2001-05-08 | 2003-01-02 | ASML Netherlands B.V. | Optisches Belichtungsverfahren und lithographischer Projektionsapparat |
US6618118B2 (en) | 2001-05-08 | 2003-09-09 | Asml Netherlands B.V. | Optical exposure method, device manufacturing method and lithographic projection apparatus |
JP4019651B2 (ja) * | 2001-05-21 | 2007-12-12 | ウシオ電機株式会社 | 周辺露光装置 |
JP3820946B2 (ja) * | 2001-09-17 | 2006-09-13 | ウシオ電機株式会社 | 周辺露光装置 |
WO2003032081A1 (en) * | 2001-10-09 | 2003-04-17 | Ultratech Stepper, Inc. | Method and apparatus for optically defining an exposure exclusion region on a photosensitive workpiece |
JP3823805B2 (ja) * | 2001-10-30 | 2006-09-20 | ウシオ電機株式会社 | 露光装置 |
JP4258828B2 (ja) * | 2002-06-06 | 2009-04-30 | 株式会社安川電機 | ウエハプリアライメント装置および方法 |
JP4302373B2 (ja) * | 2002-07-25 | 2009-07-22 | 浜松ホトニクス株式会社 | 導光装置 |
KR100478730B1 (ko) * | 2002-07-30 | 2005-03-24 | 주식회사 제일 | 기판 주변 노광 장치 |
JP2004200495A (ja) * | 2002-12-19 | 2004-07-15 | Dainippon Screen Mfg Co Ltd | 反射防止膜改質装置および反射防止膜改質方法 |
AU2004247737B2 (en) * | 2003-06-11 | 2009-04-23 | Wyeth | Platelet glycoprotein IB alpha variant fusion polypeptides and methods of use thereof |
JP4083100B2 (ja) * | 2003-09-22 | 2008-04-30 | 株式会社Sokudo | 周縁部露光装置 |
KR100550352B1 (ko) * | 2004-07-02 | 2006-02-08 | 삼성전자주식회사 | 반도체 기판의 노광방법 및 이를 이용하는 노광 장치 |
KR100585170B1 (ko) * | 2004-12-27 | 2006-06-02 | 삼성전자주식회사 | 트윈 기판 스테이지를 구비한 스캐너 장치, 이를 포함하는반도체 사진 설비 및 상기 설비를 이용한 반도체 소자의제조방법 |
JP4642543B2 (ja) * | 2005-05-09 | 2011-03-02 | 東京エレクトロン株式会社 | 周縁露光装置、塗布、現像装置及び周縁露光方法 |
US7342642B2 (en) * | 2005-06-20 | 2008-03-11 | Asml Netherlands B.V. | Pre-aligning a substrate in a lithographic apparatus, device manufacturing method, and device manufactured by the manufacturing method |
KR100733137B1 (ko) * | 2006-06-14 | 2007-06-28 | 삼성전자주식회사 | 웨이퍼 에지 노광 장치 |
TW200916696A (en) * | 2007-10-11 | 2009-04-16 | Hannspree Inc | Flat-panel display with illumination function |
TWI454851B (zh) * | 2007-12-28 | 2014-10-01 | 尼康股份有限公司 | An exposure apparatus, a moving body driving system, a pattern forming apparatus, and an exposure method, and an element manufacturing method |
CN103034062B (zh) * | 2011-09-29 | 2014-11-26 | 中芯国际集成电路制造(北京)有限公司 | 用于晶片边缘曝光的方法、光学模块和自动聚焦系统 |
US9891529B2 (en) * | 2014-03-28 | 2018-02-13 | Taiwan Semiconductor Manufacturing Co., Ltd | Light transmission device and method for semiconductor manufacturing process |
US9841299B2 (en) * | 2014-11-28 | 2017-12-12 | Canon Kabushiki Kaisha | Position determining device, position determining method, lithographic apparatus, and method for manufacturing object |
JP6308958B2 (ja) * | 2015-02-25 | 2018-04-11 | 東京エレクトロン株式会社 | 基板処理装置、基板処理方法、プログラム及びコンピュータ記憶媒体 |
JP7124277B2 (ja) * | 2016-12-13 | 2022-08-24 | 東京エレクトロン株式会社 | 光処理装置及び基板処理装置 |
US10747121B2 (en) * | 2016-12-13 | 2020-08-18 | Tokyo Electron Limited | Optical processing apparatus and substrate processing apparatus |
JP7469924B2 (ja) * | 2020-03-18 | 2024-04-17 | キヤノン株式会社 | インプリント装置及び物品の製造方法 |
US11402761B2 (en) * | 2020-05-22 | 2022-08-02 | Taiwan Semiconductor Manufacturing Company Limited | Semiconductor lithography system and/or method |
TWI792281B (zh) * | 2020-05-22 | 2023-02-11 | 台灣積體電路製造股份有限公司 | 半導體光刻技術及/或方法 |
US11378888B1 (en) * | 2021-01-07 | 2022-07-05 | Taiwan Semiconductor Manufacturing Company, Ltd. | Lens adjustment for an edge exposure tool |
CN112965343A (zh) * | 2021-02-08 | 2021-06-15 | 上海度宁科技有限公司 | 工件台结构及包含该结构的光刻系统及其曝光方法 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0795516B2 (ja) | 1988-01-29 | 1995-10-11 | ウシオ電機株式会社 | ウエハ周辺露光方法及び装置 |
US4899195A (en) | 1988-01-29 | 1990-02-06 | Ushio Denki | Method of exposing a peripheral part of wafer |
JPH0750680B2 (ja) * | 1988-12-28 | 1995-05-31 | ウシオ電機株式会社 | ウエハ周辺露光装置 |
US5289263A (en) * | 1989-04-28 | 1994-02-22 | Dainippon Screen Mfg. Co., Ltd. | Apparatus for exposing periphery of an object |
US5168021A (en) * | 1989-09-21 | 1992-12-01 | Ushio Denki | Method for exposing predetermined area of peripheral part of wafer |
US5249016A (en) * | 1989-12-15 | 1993-09-28 | Canon Kabushiki Kaisha | Semiconductor device manufacturing system |
US5229811A (en) * | 1990-06-15 | 1993-07-20 | Nikon Corporation | Apparatus for exposing peripheral portion of substrate |
JP2862385B2 (ja) * | 1991-03-13 | 1999-03-03 | キヤノン株式会社 | 露光装置 |
JP2593831B2 (ja) | 1991-03-20 | 1997-03-26 | ウシオ電機株式会社 | ウエハ上の不要レジスト露光装置および露光方法 |
JPH0775220B2 (ja) * | 1991-03-20 | 1995-08-09 | ウシオ電機株式会社 | ウエハ上の不要レジスト露光方法 |
JPH04293224A (ja) * | 1991-03-22 | 1992-10-16 | Tokyo Electron Ltd | 露光装置 |
US5420663A (en) * | 1993-03-19 | 1995-05-30 | Nikon Corporation | Apparatus for exposing peripheral portion of substrate |
-
1996
- 1996-06-21 JP JP16144396A patent/JP3237522B2/ja not_active Expired - Fee Related
- 1996-12-23 TW TW085115888A patent/TW326552B/zh active
-
1997
- 1997-02-04 EP EP97101723A patent/EP0788032B1/de not_active Expired - Lifetime
- 1997-02-04 DE DE69702272T patent/DE69702272T2/de not_active Expired - Lifetime
- 1997-02-05 US US08/794,829 patent/US5929976A/en not_active Expired - Fee Related
- 1997-02-05 KR KR1019970003597A patent/KR100434826B1/ko not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
KR100434826B1 (ko) | 2004-09-13 |
EP0788032A1 (de) | 1997-08-06 |
DE69702272D1 (de) | 2000-07-20 |
KR970063424A (ko) | 1997-09-12 |
EP0788032B1 (de) | 2000-06-14 |
US5929976A (en) | 1999-07-27 |
TW326552B (en) | 1998-02-11 |
JPH09275073A (ja) | 1997-10-21 |
JP3237522B2 (ja) | 2001-12-10 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |