DE69700339D1 - Beschichtungsabschirmung für PVD-Vorrichtung - Google Patents

Beschichtungsabschirmung für PVD-Vorrichtung

Info

Publication number
DE69700339D1
DE69700339D1 DE69700339T DE69700339T DE69700339D1 DE 69700339 D1 DE69700339 D1 DE 69700339D1 DE 69700339 T DE69700339 T DE 69700339T DE 69700339 T DE69700339 T DE 69700339T DE 69700339 D1 DE69700339 D1 DE 69700339D1
Authority
DE
Germany
Prior art keywords
pvd device
coating shield
shield
coating
pvd
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69700339T
Other languages
English (en)
Inventor
Naoki Uchiyama
Munenori Mashima
Makoto Kinoshita
Yorishige Hashimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Materials Corp
Original Assignee
Mitsubishi Materials Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Materials Corp filed Critical Mitsubishi Materials Corp
Application granted granted Critical
Publication of DE69700339D1 publication Critical patent/DE69700339D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/042—Coating on selected surface areas, e.g. using masks using masks
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/26—Apparatus or processes specially adapted for the manufacture of record carriers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
DE69700339T 1996-02-15 1997-02-12 Beschichtungsabschirmung für PVD-Vorrichtung Expired - Lifetime DE69700339D1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2758496 1996-02-15
JP6812396 1996-03-25
JP8180739A JPH09316643A (ja) 1996-02-15 1996-07-10 物理蒸着装置の防着部品

Publications (1)

Publication Number Publication Date
DE69700339D1 true DE69700339D1 (de) 1999-09-02

Family

ID=27285858

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69700339T Expired - Lifetime DE69700339D1 (de) 1996-02-15 1997-02-12 Beschichtungsabschirmung für PVD-Vorrichtung

Country Status (6)

Country Link
US (1) US5954929A (de)
EP (1) EP0790327B1 (de)
JP (1) JPH09316643A (de)
DE (1) DE69700339D1 (de)
SG (1) SG77122A1 (de)
TW (1) TW402647B (de)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9051641B2 (en) 2001-07-25 2015-06-09 Applied Materials, Inc. Cobalt deposition on barrier surfaces
US8110489B2 (en) 2001-07-25 2012-02-07 Applied Materials, Inc. Process for forming cobalt-containing materials
WO2003030224A2 (en) 2001-07-25 2003-04-10 Applied Materials, Inc. Barrier formation using novel sputter-deposition method
US20090004850A1 (en) 2001-07-25 2009-01-01 Seshadri Ganguli Process for forming cobalt and cobalt silicide materials in tungsten contact applications
US20030029715A1 (en) 2001-07-25 2003-02-13 Applied Materials, Inc. An Apparatus For Annealing Substrates In Physical Vapor Deposition Systems
JP3982284B2 (ja) * 2002-03-06 2007-09-26 住友電気工業株式会社 サブマウントおよび半導体装置
US6776887B2 (en) * 2002-03-29 2004-08-17 Imation Corp. Method and apparatus for thin film center shielding
TW200404484A (en) * 2002-09-02 2004-03-16 Furukawa Circuit Foil Copper foil for soft circuit board package module, for plasma display, or for radio-frequency printed circuit board
KR100591433B1 (ko) * 2004-12-29 2006-06-22 동부일렉트로닉스 주식회사 질화 티타늄(ＴｉＮ) 스퍼터링 공정용 실드 및 코팅방법
US7938252B2 (en) 2007-12-21 2011-05-10 Cinetic Sorting Corp. Unstacking conveyor with floating surface
CN107109619A (zh) * 2014-12-29 2017-08-29 应用材料公司 用于沉积处理期间掩蔽基板的掩蔽布置、用于在基板上的层沉积的沉积设备、和用于清洁掩蔽布置的方法
JP7129581B1 (ja) * 2022-06-01 2022-09-01 田中貴金属工業株式会社 成膜装置用部材
JP7175420B1 (ja) * 2022-06-01 2022-11-18 田中貴金属工業株式会社 成膜装置用部材の製造方法、堆積物除去方法、有価金属回収方法、および成膜装置用部材の再生方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5659234A (en) * 1979-10-19 1981-05-22 Fujitsu Ltd Mask reinforcing method
JPS6024360A (ja) * 1983-07-20 1985-02-07 Sumitomo Electric Ind Ltd 金属帯板用連続めつき方法
JPS60174874A (ja) * 1984-02-13 1985-09-09 Nippon Telegr & Teleph Corp <Ntt> メタルマスク
JPH0744352B2 (ja) * 1991-03-08 1995-05-15 株式会社フジタ 電波シールドテープの製造方法
JPH0629298A (ja) * 1992-07-07 1994-02-04 Fujitsu Ltd 半田バンプ形成方法

Also Published As

Publication number Publication date
SG77122A1 (en) 2000-12-19
EP0790327B1 (de) 1999-07-28
JPH09316643A (ja) 1997-12-09
TW402647B (en) 2000-08-21
EP0790327A1 (de) 1997-08-20
US5954929A (en) 1999-09-21

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Legal Events

Date Code Title Description
8332 No legal effect for de