DE69632691T2 - Flacher abtasttisch für rastersonden-mikroskopie - Google Patents
Flacher abtasttisch für rastersonden-mikroskopie Download PDFInfo
- Publication number
- DE69632691T2 DE69632691T2 DE69632691T DE69632691T DE69632691T2 DE 69632691 T2 DE69632691 T2 DE 69632691T2 DE 69632691 T DE69632691 T DE 69632691T DE 69632691 T DE69632691 T DE 69632691T DE 69632691 T2 DE69632691 T2 DE 69632691T2
- Authority
- DE
- Germany
- Prior art keywords
- scanning
- frame
- elements
- table according
- pair
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000000386 microscopy Methods 0.000 title description 7
- 239000000523 sample Substances 0.000 claims description 40
- 230000003287 optical effect Effects 0.000 claims description 12
- 230000033001 locomotion Effects 0.000 claims description 8
- 238000005070 sampling Methods 0.000 claims description 8
- 230000026058 directional locomotion Effects 0.000 claims 2
- 238000000034 method Methods 0.000 description 13
- 238000013519 translation Methods 0.000 description 11
- 230000007246 mechanism Effects 0.000 description 7
- 238000004630 atomic force microscopy Methods 0.000 description 4
- 230000008901 benefit Effects 0.000 description 4
- 238000013461 design Methods 0.000 description 4
- 238000005452 bending Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000004621 scanning probe microscopy Methods 0.000 description 3
- 230000008859 change Effects 0.000 description 2
- 238000010276 construction Methods 0.000 description 2
- 238000003384 imaging method Methods 0.000 description 2
- 238000004651 near-field scanning optical microscopy Methods 0.000 description 2
- 230000009102 absorption Effects 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 238000004624 confocal microscopy Methods 0.000 description 1
- 230000036461 convulsion Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000010348 incorporation Methods 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 238000000399 optical microscopy Methods 0.000 description 1
- 238000002559 palpation Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 230000005641 tunneling Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
- G01Q10/04—Fine scanning or positioning
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/028—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors along multiple or arbitrary translation directions, e.g. XYZ stages
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/84—Manufacture, treatment, or detection of nanostructure
- Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
- Y10S977/86—Scanning probe structure
- Y10S977/872—Positioner
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Radiology & Medical Imaging (AREA)
- Microscoopes, Condenser (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US08/564,018 US5705878A (en) | 1995-11-29 | 1995-11-29 | Flat scanning stage for scanned probe microscopy |
| US564018 | 1995-11-29 | ||
| PCT/US1996/018553 WO1997020354A1 (en) | 1995-11-29 | 1996-11-27 | Flat scanning stage for scanned probe microscopy |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE69632691D1 DE69632691D1 (de) | 2004-07-15 |
| DE69632691T2 true DE69632691T2 (de) | 2005-06-09 |
Family
ID=24252839
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE69632691T Expired - Lifetime DE69632691T2 (de) | 1995-11-29 | 1996-11-27 | Flacher abtasttisch für rastersonden-mikroskopie |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US5705878A (enExample) |
| EP (1) | EP0864181B1 (enExample) |
| JP (1) | JP4014054B2 (enExample) |
| DE (1) | DE69632691T2 (enExample) |
| WO (1) | WO1997020354A1 (enExample) |
Families Citing this family (35)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6359370B1 (en) * | 1995-02-28 | 2002-03-19 | New Jersey Institute Of Technology | Piezoelectric multiple degree of freedom actuator |
| JPH10105243A (ja) * | 1996-09-10 | 1998-04-24 | Hewlett Packard Co <Hp> | 位置決め機構、位置決め装置及び情報記録装置 |
| AT410718B (de) * | 1998-10-28 | 2003-07-25 | Schindler Hansgeorg Dr | Vorrichtung zur visualisierung von molekülen |
| KR100865598B1 (ko) * | 2000-05-29 | 2008-10-27 | 브이케이비 인코포레이티드 | 수문자 조합 및 다른 데이터의 입력을 위한 가상 데이터입력 장치 및 방법 |
| US6787773B1 (en) | 2000-06-07 | 2004-09-07 | Kla-Tencor Corporation | Film thickness measurement using electron-beam induced x-ray microanalysis |
| GB2369489B (en) * | 2000-11-23 | 2004-03-10 | Khaled Karrai | Inertial rotation device |
| US6801596B2 (en) * | 2001-10-01 | 2004-10-05 | Kla-Tencor Technologies Corporation | Methods and apparatus for void characterization |
| EP1438754B1 (de) * | 2001-10-22 | 2005-12-28 | miniswys SA | Piezoelektrischer antrieb |
| US6798120B1 (en) * | 2001-10-31 | 2004-09-28 | The Regents Of The University Of California | Apparatus and method for manipulation of an object |
| US6810105B2 (en) * | 2002-01-25 | 2004-10-26 | Kla-Tencor Technologies Corporation | Methods and apparatus for dishing and erosion characterization |
| GB2385196B (en) * | 2002-02-11 | 2005-08-17 | 1 Ltd | Amplified actuator |
| US6888289B2 (en) * | 2002-07-16 | 2005-05-03 | Baldor Electric Company | Multi-axes, sub-micron positioner |
| US7687767B2 (en) * | 2002-12-20 | 2010-03-30 | Agilent Technologies, Inc. | Fast scanning stage for a scanning probe microscope |
| US7180662B2 (en) * | 2004-04-12 | 2007-02-20 | Applied Scientific Instrumentation Inc. | Stage assembly and method for optical microscope including Z-axis stage and piezoelectric actuator for rectilinear translation of Z stage |
| WO2006090386A2 (en) * | 2005-02-24 | 2006-08-31 | Vkb Inc. | A virtual keyboard device |
| DE502005005160D1 (de) * | 2005-05-12 | 2008-10-02 | Physik Instr Pi Gmbh & Co Kg | Miniaturisierte zweiachsen-piezo-betätigungseinrichtung |
| CA2610466A1 (en) * | 2005-05-31 | 2006-12-07 | Emo Labs, Inc. | Optimized piezo design for a mechanical-to-acoustical transducer |
| EP1941315A1 (en) * | 2005-10-17 | 2008-07-09 | Koninklijke Philips Electronics N.V. | In-plane manipulator |
| JP2007158276A (ja) * | 2005-12-08 | 2007-06-21 | Ngk Insulators Ltd | 圧電／電歪デバイス及び圧電／電歪デバイスの駆動方法 |
| JP2007228782A (ja) * | 2006-01-24 | 2007-09-06 | Ngk Insulators Ltd | 圧電／電歪デバイス |
| JP4448099B2 (ja) * | 2006-02-01 | 2010-04-07 | キヤノン株式会社 | 走査型プローブ装置 |
| US8330329B2 (en) * | 2007-03-30 | 2012-12-11 | Pioneer Corporation | Scanning probe driver |
| DE102007023217B4 (de) * | 2007-05-18 | 2011-07-21 | Continental Automotive GmbH, 30165 | Elektromechanischer Motor, insbesondere piezoelektrischer Mikroschrittantrieb |
| WO2009067669A1 (en) * | 2007-11-21 | 2009-05-28 | Emo Labs, Inc.. | Wireless loudspeaker |
| JP5197101B2 (ja) * | 2008-03-31 | 2013-05-15 | 日本トムソン株式会社 | 可動テーブル装置 |
| WO2010080634A2 (en) * | 2008-12-18 | 2010-07-15 | Discovery Technology International, Lllp | Piezoelectric quasi-resonance motors based on acoustic standing waves with combined resonator |
| US8189851B2 (en) * | 2009-03-06 | 2012-05-29 | Emo Labs, Inc. | Optically clear diaphragm for an acoustic transducer and method for making same |
| US20110044476A1 (en) * | 2009-08-14 | 2011-02-24 | Emo Labs, Inc. | System to generate electrical signals for a loudspeaker |
| CN103293339A (zh) * | 2012-02-28 | 2013-09-11 | 中国科学院合肥物质科学研究院 | 一种嵌套双压电扫描管共同扫描的复合压电扫描管 |
| US20140270193A1 (en) | 2013-03-15 | 2014-09-18 | Emo Labs, Inc. | Acoustic transducers having a connector between an actuator and a diaphragm |
| USD733678S1 (en) | 2013-12-27 | 2015-07-07 | Emo Labs, Inc. | Audio speaker |
| USD741835S1 (en) | 2013-12-27 | 2015-10-27 | Emo Labs, Inc. | Speaker |
| USD748072S1 (en) | 2014-03-14 | 2016-01-26 | Emo Labs, Inc. | Sound bar audio speaker |
| CN103990998B (zh) * | 2014-05-20 | 2017-01-25 | 广东工业大学 | 基于应力刚化原理的刚度频率可调二维微动平台 |
| US10263173B2 (en) * | 2015-01-16 | 2019-04-16 | The Regents Of The University Of Michigan | Multi-axis piezoelectric transducer |
Family Cites Families (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SU497551A1 (ru) * | 1973-06-26 | 1975-12-30 | Московский институт электронной техники | Устройство дл ориентации |
| US4087715A (en) * | 1976-11-18 | 1978-05-02 | Hughes Aircraft Company | Piezoelectric electromechanical micropositioner |
| US4525852A (en) * | 1983-03-15 | 1985-06-25 | Micronix Partners | Alignment apparatus |
| US4523120A (en) * | 1984-06-04 | 1985-06-11 | The United States Of America As Represented By The Secretary Of The Navy | Precise bearing support ditherer with piezoelectric drive means |
| US4686440A (en) * | 1985-03-11 | 1987-08-11 | Yotaro Hatamura | Fine positioning device |
| DE3610540A1 (de) * | 1986-03-27 | 1987-10-01 | Kernforschungsanlage Juelich | Bewegungseinrichtung zur mikrobewegung von objekten |
| US4678955A (en) * | 1986-04-18 | 1987-07-07 | Rca Corporation | Piezoelectric positioning device |
| JPS63262066A (ja) * | 1987-04-20 | 1988-10-28 | Hitachi Ltd | 微動位置決め装置 |
| US4917462A (en) * | 1988-06-15 | 1990-04-17 | Cornell Research Foundation, Inc. | Near field scanning optical microscopy |
| US5323082A (en) * | 1989-05-03 | 1994-06-21 | Spectra Physics Lasers, Inc. | Piezoelectric actuator for planar alignment |
| US5079471A (en) * | 1990-06-04 | 1992-01-07 | Martin Marietta Corporation | High torque harmonic traction motor |
| JPH04259015A (ja) * | 1991-02-13 | 1992-09-14 | Canon Inc | 微動駆動装置 |
| DE69203280T2 (de) * | 1991-04-29 | 1996-03-07 | Philips Electronics Nv | Verschiebungsvorrichtung. |
| US5173605A (en) * | 1991-05-02 | 1992-12-22 | Wyko Corporation | Compact temperature-compensated tube-type scanning probe with large scan range and independent x, y, and z control |
| US5281884A (en) * | 1992-06-03 | 1994-01-25 | At&T Bell Laboratories | Adjustable X-Y stage |
| US5306919A (en) * | 1992-09-21 | 1994-04-26 | Digital Instruments, Inc. | Positioning device for scanning probe microscopes |
| US5332942A (en) * | 1993-06-07 | 1994-07-26 | Rennex Brian G | Inchworm actuator |
| JPH07111143A (ja) * | 1993-08-18 | 1995-04-25 | Jeol Ltd | スリット装置 |
-
1995
- 1995-11-29 US US08/564,018 patent/US5705878A/en not_active Expired - Lifetime
-
1996
- 1996-11-27 DE DE69632691T patent/DE69632691T2/de not_active Expired - Lifetime
- 1996-11-27 JP JP52054597A patent/JP4014054B2/ja not_active Expired - Lifetime
- 1996-11-27 EP EP96940813A patent/EP0864181B1/en not_active Expired - Lifetime
- 1996-11-27 WO PCT/US1996/018553 patent/WO1997020354A1/en not_active Ceased
Also Published As
| Publication number | Publication date |
|---|---|
| EP0864181A4 (en) | 2000-08-02 |
| DE69632691D1 (de) | 2004-07-15 |
| US5705878A (en) | 1998-01-06 |
| WO1997020354A1 (en) | 1997-06-05 |
| JP4014054B2 (ja) | 2007-11-28 |
| JP2000501500A (ja) | 2000-02-08 |
| EP0864181B1 (en) | 2004-06-09 |
| EP0864181A1 (en) | 1998-09-16 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8364 | No opposition during term of opposition |