DE69628974D1 - Methode zur Kontrolle eines Fabry-Perot-Interferometers mit einem kurzen Etalon zur Verwendung in einer NDIR Messvorrichtung - Google Patents

Methode zur Kontrolle eines Fabry-Perot-Interferometers mit einem kurzen Etalon zur Verwendung in einer NDIR Messvorrichtung

Info

Publication number
DE69628974D1
DE69628974D1 DE69628974T DE69628974T DE69628974D1 DE 69628974 D1 DE69628974 D1 DE 69628974D1 DE 69628974 T DE69628974 T DE 69628974T DE 69628974 T DE69628974 T DE 69628974T DE 69628974 D1 DE69628974 D1 DE 69628974D1
Authority
DE
Germany
Prior art keywords
fabry
controlling
measuring device
perot interferometer
etalon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69628974T
Other languages
English (en)
Other versions
DE69628974T2 (de
Inventor
Yrjoe Koskinen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Vaisala Oy
Original Assignee
Vaisala Oy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vaisala Oy filed Critical Vaisala Oy
Publication of DE69628974D1 publication Critical patent/DE69628974D1/de
Application granted granted Critical
Publication of DE69628974T2 publication Critical patent/DE69628974T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/27—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands using photo-electric detection ; circuits for computing concentration
    • G01N21/274—Calibration, base line adjustment, drift correction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/314—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry with comparison of measurements at specific and non-specific wavelengths
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3504—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Pathology (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mathematical Physics (AREA)
  • Theoretical Computer Science (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
DE69628974T 1995-07-07 1996-06-28 Methode zur Kontrolle eines Fabry-Perot-Interferometers mit einem kurzen Etalon zur Verwendung in einer NDIR Messvorrichtung Expired - Lifetime DE69628974T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FI953370 1995-07-07
FI953370A FI103216B (fi) 1995-07-07 1995-07-07 Menetelmä NDIR-mittalaitteen lyhyen Fabry-Perot interferometrin ohjaam iseksi

Publications (2)

Publication Number Publication Date
DE69628974D1 true DE69628974D1 (de) 2003-08-14
DE69628974T2 DE69628974T2 (de) 2004-05-06

Family

ID=8543759

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69628974T Expired - Lifetime DE69628974T2 (de) 1995-07-07 1996-06-28 Methode zur Kontrolle eines Fabry-Perot-Interferometers mit einem kurzen Etalon zur Verwendung in einer NDIR Messvorrichtung

Country Status (5)

Country Link
US (1) US5835216A (de)
EP (1) EP0753733B1 (de)
JP (1) JP3778996B2 (de)
DE (1) DE69628974T2 (de)
FI (1) FI103216B (de)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5920391A (en) * 1995-10-27 1999-07-06 Schlumberger Industries, S.A. Tunable Fabry-Perot filter for determining gas concentration
US6590710B2 (en) * 2000-02-18 2003-07-08 Yokogawa Electric Corporation Fabry-Perot filter, wavelength-selective infrared detector and infrared gas analyzer using the filter and detector
US6341039B1 (en) 2000-03-03 2002-01-22 Axsun Technologies, Inc. Flexible membrane for tunable fabry-perot filter
US6373632B1 (en) 2000-03-03 2002-04-16 Axsun Technologies, Inc. Tunable Fabry-Perot filter
US6608711B2 (en) * 2000-03-03 2003-08-19 Axsun Technologies, Inc. Silicon on insulator optical membrane structure for fabry-perot MOEMS filter
US6836366B1 (en) 2000-03-03 2004-12-28 Axsun Technologies, Inc. Integrated tunable fabry-perot filter and method of making same
US6724785B1 (en) * 2000-04-14 2004-04-20 Agilent Technologies, Inc. Tunable fabry-perot filters and lasers with reduced frequency noise
US20030018271A1 (en) * 2001-07-02 2003-01-23 Kimble Allan Wayne Simplified and lightweight system for enhanced visualization of subcutaneous hemoglobin-containing structures
FI114657B (fi) 2003-03-24 2004-11-30 Vaisala Oyj Menetelmä Fabry-Perot-interfometrin peilien välimatkan jänniteriippuvuuden selvittämiseksi
KR101229021B1 (ko) * 2006-06-20 2013-02-01 엘지디스플레이 주식회사 확대된 영상을 표시하는 영상표시장치 및 이를 이용한 영상표시방법
JP4356724B2 (ja) * 2006-09-20 2009-11-04 株式会社デンソー 赤外線式ガス検知装置およびそのガス検知方法
DE102006045253B3 (de) * 2006-09-26 2007-12-20 Dräger Medical AG & Co. KG Gaskonzentrationsmessvorrichtung
JP4784495B2 (ja) * 2006-11-28 2011-10-05 株式会社デンソー 光学多層膜ミラーおよびそれを備えたファブリペロー干渉計
EP2185914B1 (de) * 2007-09-05 2019-10-09 GE Analytical Instruments, Inc. Kohlenstoffmessung in wässrigen proben mittels oxidation bei erhöhten temperaturen und drücken
DE102009011421B3 (de) * 2009-03-03 2010-04-15 Drägerwerk AG & Co. KGaA Gaskonzentrationsmessvorrichtung
JP2010286291A (ja) * 2009-06-10 2010-12-24 Hioki Ee Corp 赤外線分光器および赤外線分光測定装置
WO2013001994A1 (ja) * 2011-06-28 2013-01-03 オリンパス株式会社 分光画像取得装置及び分光画像取得方法
GB2497296B (en) * 2011-12-05 2017-07-12 Gassecure As Gas sensors
US10545049B2 (en) 2014-06-27 2020-01-28 Spectral Engines Oy Method for stabilizing a spectrometer using single spectral notch
DE102017207186A1 (de) * 2017-04-28 2018-10-31 Robert Bosch Gmbh Verfahren und Vorrichtung zum Kalibrieren eines Mikrospektrometermoduls
CN108872124B (zh) * 2017-05-12 2020-12-08 中国石油化工股份有限公司 一种在线一氧化碳分析仪和加热炉燃烧控制系统
JP6720112B2 (ja) * 2017-05-23 2020-07-08 浜松ホトニクス株式会社 フィルタ制御式導出方法、光計測システム、ファブリペロー干渉フィルタの制御方法、及び、フィルタ制御プログラム
JP7335869B2 (ja) 2017-08-07 2023-08-30 オーアイ コーポレーション 高温燃焼を使用した全有機体炭素分析装置（ｔｏｃａ）のパルス注入技術による流れの停止
CN111183343A (zh) * 2017-10-06 2020-05-19 生物辐射实验室股份有限公司 蛋白质定量设备
EP4078115A1 (de) * 2019-12-19 2022-10-26 Ams Sensors Singapore Pte. Ltd. Wellenlängenkalibrierung eines detektors

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3832548A (en) * 1972-10-18 1974-08-27 Oceanetics Inc Gas detector unit
US3914055A (en) * 1974-05-23 1975-10-21 Lansing Research Corp Instrument for high resolution spectral analysis with large optical throughput
DE3812334A1 (de) * 1988-04-14 1989-10-26 Hartmann & Braun Ag Interferometrische einrichtung
US4998017A (en) * 1989-05-01 1991-03-05 Ryan Fredrick M Method and arrangement for measuring the optical absorptions of gaseous mixtures
DE3925692C1 (de) * 1989-08-03 1990-08-23 Hartmann & Braun Ag, 6000 Frankfurt, De
US5357340A (en) * 1989-10-12 1994-10-18 Hartmann & Braun Method for spectroscopy using two Fabry-Perot interference filters
FI96450C (fi) * 1993-01-13 1996-06-25 Vaisala Oy Yksikanavainen kaasun pitoisuuden mittausmenetelmä ja -laitteisto
FI94804C (fi) * 1994-02-17 1995-10-25 Vaisala Oy Sähköisesti säädettävä pintamikromekaaninen Fabry-Perot-interferometri käytettäväksi optisessa materiaalianalyysissä

Also Published As

Publication number Publication date
FI103216B1 (fi) 1999-05-14
EP0753733B1 (de) 2003-07-09
EP0753733A1 (de) 1997-01-15
JP3778996B2 (ja) 2006-05-24
FI103216B (fi) 1999-05-14
FI953370A (fi) 1997-01-08
JPH0933345A (ja) 1997-02-07
DE69628974T2 (de) 2004-05-06
US5835216A (en) 1998-11-10
FI953370A0 (fi) 1995-07-07

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