DE69920645D1 - Verfahren und Vorrichtung zur Messung von Lichtabsorptionsspektren - Google Patents

Verfahren und Vorrichtung zur Messung von Lichtabsorptionsspektren

Info

Publication number
DE69920645D1
DE69920645D1 DE69920645T DE69920645T DE69920645D1 DE 69920645 D1 DE69920645 D1 DE 69920645D1 DE 69920645 T DE69920645 T DE 69920645T DE 69920645 T DE69920645 T DE 69920645T DE 69920645 D1 DE69920645 D1 DE 69920645D1
Authority
DE
Germany
Prior art keywords
light absorption
measuring light
absorption spectra
spectra
measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69920645T
Other languages
English (en)
Other versions
DE69920645T2 (de
Inventor
Jie Dong
Koh Matsumoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Taiyo Nippon Sanso Corp
Original Assignee
NIPPON SANSO CORP TOKIO/TOKYO
Japan Oxygen Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NIPPON SANSO CORP TOKIO/TOKYO, Japan Oxygen Co Ltd filed Critical NIPPON SANSO CORP TOKIO/TOKYO
Application granted granted Critical
Publication of DE69920645D1 publication Critical patent/DE69920645D1/de
Publication of DE69920645T2 publication Critical patent/DE69920645T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/42—Absorption spectrometry; Double beam spectrometry; Flicker spectrometry; Reflection spectrometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/45—Interferometric spectrometry
    • G01J3/453—Interferometric spectrometry by correlation of the amplitudes

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Spectrometry And Color Measurement (AREA)
DE69920645T 1998-12-28 1999-12-22 Verfahren und Vorrichtung zur Messung von Lichtabsorptionsspektren Expired - Fee Related DE69920645T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP37429698 1998-12-28
JP10374296A JP2000193524A (ja) 1998-12-28 1998-12-28 光吸収スペクトル測定方法及びその装置

Publications (2)

Publication Number Publication Date
DE69920645D1 true DE69920645D1 (de) 2004-11-04
DE69920645T2 DE69920645T2 (de) 2005-12-29

Family

ID=18503606

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69920645T Expired - Fee Related DE69920645T2 (de) 1998-12-28 1999-12-22 Verfahren und Vorrichtung zur Messung von Lichtabsorptionsspektren

Country Status (6)

Country Link
US (1) US6434496B1 (de)
EP (1) EP1016857B1 (de)
JP (1) JP2000193524A (de)
KR (1) KR100346353B1 (de)
DE (1) DE69920645T2 (de)
TW (1) TW440684B (de)

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FR2839147B1 (fr) * 2002-04-30 2004-07-09 Soitec Silicon On Insulator Dispositif et procede de controle automatique de l'etat de surface de plaque par mesure de vitesse de collage
DE102004041373B3 (de) * 2004-08-25 2006-02-09 Technische Universität Dresden Verfahren zur Gewinnung von rauscharmen Messsignalen für einen schnellen infrarotoptischen Sensor
US7546208B2 (en) * 2005-03-07 2009-06-09 Mks Instruments, Inc. Method and apparatus of signal processing for use in spectrometry using an improved apodization function
RU2299424C1 (ru) * 2005-10-11 2007-05-20 Общество с ограниченной ответственностью "Интеллект-Клуб РадиоФосфор-32" Оптико-электронный спектральный газоанализатор
EP1850116B1 (de) * 2006-04-27 2013-09-18 Axetris AG Verfahren zur Gasdetektion
JP5003517B2 (ja) * 2008-01-31 2012-08-15 横河電機株式会社 スペクトラムデータ補正装置及び方法
US9029775B2 (en) 2008-05-19 2015-05-12 Joseph R. Demers Terahertz frequency domain spectrometer with phase modulation of source laser beam
US8604433B2 (en) 2008-05-19 2013-12-10 Emcore Corporation Terahertz frequency domain spectrometer with frequency shifting of source laser beam
CN102288577B (zh) * 2011-08-16 2013-11-13 中国科学技术大学 一种利用激光光谱测量气体参数的系统和方法
US9400214B1 (en) 2013-03-15 2016-07-26 Joseph R. Demers Terahertz frequency domain spectrometer with a single photoconductive element for terahertz signal generation and detection
US9103715B1 (en) 2013-03-15 2015-08-11 Joseph R. Demers Terahertz spectrometer phase modulator control using second harmonic nulling
DE102014101307A1 (de) 2014-02-03 2015-08-06 Osram Opto Semiconductors Gmbh Kodierverfahren zur Datenkompression von Leistungsspektren eines optoelektronischen Bauteils und Dekodierverfahren
US9086374B1 (en) 2014-04-25 2015-07-21 Joseph R. Demers Terahertz spectrometer with phase modulation and method
US9404853B1 (en) 2014-04-25 2016-08-02 Joseph R. Demers Terahertz spectrometer with phase modulation
US9239264B1 (en) 2014-09-18 2016-01-19 Joseph R. Demers Transceiver method and apparatus having phase modulation and common mode phase drift rejection
US9429473B2 (en) 2014-10-16 2016-08-30 Joseph R. Demers Terahertz spectrometer and method for reducing photomixing interference pattern
JP6563683B2 (ja) * 2015-05-12 2019-08-21 トヨタ自動車株式会社 ガス濃度計測装置およびガス濃度計測方法
JP7395846B2 (ja) * 2019-01-17 2023-12-12 富士電機株式会社 レーザ式ガス分析計
US11436716B2 (en) * 2019-04-19 2022-09-06 Canon Kabushiki Kaisha Electronic apparatus, analysis system and control method of electronic apparatus
CN110907384A (zh) * 2019-12-10 2020-03-24 中国海洋大学 一种基于傅里叶域光学相干吸收光谱技术的气体检测系统及其工作方法
CN113310922A (zh) * 2020-02-27 2021-08-27 大唐环境产业集团股份有限公司 一种基于紫外差分吸收光谱的no浓度测量系统及浓度计算方法

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Publication number Priority date Publication date Assignee Title
US4645300A (en) * 1984-07-30 1987-02-24 Grumman Aerospace Corporation Fourier plane recursive optical filter
JPS61213704A (ja) * 1985-03-20 1986-09-22 Ricoh Co Ltd 波面形状測定装置
US4699466A (en) * 1985-03-27 1987-10-13 Grumman Aerospace Corporation Optical RF filtering system
JPS62291547A (ja) * 1986-06-11 1987-12-18 Olympus Optical Co Ltd 物質の濃度測定方法
JPS6326124A (ja) * 1986-07-18 1988-02-03 Fujitsu Ten Ltd 雑音処理器
JPS63249028A (ja) * 1987-04-03 1988-10-17 Yokogawa Electric Corp 光スペクトラムアナライザ
US5005946A (en) * 1989-04-06 1991-04-09 Grumman Aerospace Corporation Multi-channel filter system
US5166749A (en) * 1991-05-22 1992-11-24 Bio-Rad Laboratories Step scanning technique for interferometer
FR2700038B1 (fr) * 1992-12-24 1995-02-10 Sopha Medical Procédé de traitement des images d'un lot d'images.
US5491551A (en) * 1993-02-22 1996-02-13 Analytical Technology, Inc. Apparatus and method for FTIR spectrometer without compensator
GB2299214B (en) * 1995-03-24 1999-09-15 Commw Of Australia Signal processing
US5612784A (en) * 1996-01-04 1997-03-18 Bio-Rad Laboratories, Inc. Digital signal processing technique for a FT-IR spectrometer using multiple modulations
US6043884A (en) * 1997-08-08 2000-03-28 Bio-Rad Laboratories, Inc. DSP technique for photoacoustic spectroscopy (PAS) sample pulse response for depth profiling
US6054711A (en) * 1997-11-12 2000-04-25 Millennium Pharmaceuticals, Inc. Methods for identifying biological macromolecule interactions with compounds, particularly in complex mixtures

Also Published As

Publication number Publication date
TW440684B (en) 2001-06-16
EP1016857B1 (de) 2004-09-29
DE69920645T2 (de) 2005-12-29
KR100346353B1 (ko) 2002-07-26
JP2000193524A (ja) 2000-07-14
KR20000048032A (ko) 2000-07-25
US6434496B1 (en) 2002-08-13
EP1016857A3 (de) 2002-07-03
EP1016857A2 (de) 2000-07-05

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Legal Events

Date Code Title Description
8327 Change in the person/name/address of the patent owner

Owner name: TAIYO NIPPON SANSO CORPORATION, TOKIO/TOKYO, JP

8328 Change in the person/name/address of the agent

Representative=s name: MEISSNER, BOLTE & PARTNER, 90402 NUERNBERG

8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee