DE69618264D1 - Verbesserungen bei der Herstellung von Kristallsubstraten - Google Patents
Verbesserungen bei der Herstellung von KristallsubstratenInfo
- Publication number
- DE69618264D1 DE69618264D1 DE69618264T DE69618264T DE69618264D1 DE 69618264 D1 DE69618264 D1 DE 69618264D1 DE 69618264 T DE69618264 T DE 69618264T DE 69618264 T DE69618264 T DE 69618264T DE 69618264 D1 DE69618264 D1 DE 69618264D1
- Authority
- DE
- Germany
- Prior art keywords
- manufacture
- crystal substrates
- substrates
- crystal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
- H01L25/50—Multistep manufacturing processes of assemblies consisting of devices, each device being of a type provided for in group H01L27/00 or H01L29/00
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/12—Mountings, e.g. non-detachable insulating substrates
- H01L23/13—Mountings, e.g. non-detachable insulating substrates characterised by the shape
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/12—Mountings, e.g. non-detachable insulating substrates
- H01L23/14—Mountings, e.g. non-detachable insulating substrates characterised by the material or its electrical properties
- H01L23/147—Semiconductor insulating substrates
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/43—Arrangements comprising a plurality of opto-electronic elements and associated optical interconnections
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/30—Technical effects
- H01L2924/301—Electrical effects
- H01L2924/3011—Impedance
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Optical Integrated Circuits (AREA)
- Optical Couplings Of Light Guides (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Weting (AREA)
- Element Separation (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Light Receiving Elements (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB9505001A GB2298956B (en) | 1995-03-11 | 1995-03-11 | Improvements in crystal substrate processing |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE69618264D1 true DE69618264D1 (de) | 2002-02-07 |
| DE69618264T2 DE69618264T2 (de) | 2002-09-19 |
Family
ID=10771100
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE69618264T Expired - Fee Related DE69618264T2 (de) | 1995-03-11 | 1996-02-29 | Verbesserungen bei der Herstellung von Kristallsubstraten |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US5933707A (de) |
| EP (1) | EP0732739B1 (de) |
| JP (1) | JPH08277200A (de) |
| DE (1) | DE69618264T2 (de) |
| GB (1) | GB2298956B (de) |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19743289C2 (de) * | 1997-09-30 | 2000-02-17 | Siemens Ag | Mehrebenen-Zwischenträgersubstrat mit hoher Verdrahtungsdichte, insbesondere für Multichipmodule, und Verfahren zu seiner Herstellung |
| US6645790B2 (en) * | 2001-01-03 | 2003-11-11 | Anadigics, Inc. | System and method for prototyping and fabricating complex microwave circuits |
| EP1327899A1 (de) * | 2002-01-07 | 2003-07-16 | Alcatel | Eine Methode zur Herstellung eines optischen Moduls und ein optisches Modul |
| EP1376174A1 (de) * | 2002-06-19 | 2004-01-02 | Avanex Corporation | Optisches Modul und zugehöriges Herstellungsverfahren |
| US20110189714A1 (en) * | 2010-02-03 | 2011-08-04 | Ayliffe Harold E | Microfluidic cell sorter and method |
| US9452429B2 (en) | 2006-02-02 | 2016-09-27 | E. I. Spectra, Llc | Method for mutiplexed microfluidic bead-based immunoassay |
| US9293311B1 (en) | 2006-02-02 | 2016-03-22 | E. I. Spectra, Llc | Microfluidic interrogation device |
| US7520164B1 (en) * | 2006-05-05 | 2009-04-21 | E.I. Spectra, Llc | Thin film particle sensor |
| US8171778B2 (en) * | 2006-05-05 | 2012-05-08 | E I Spectra, LLC | Thin film particle sensor |
| US8616048B2 (en) * | 2006-02-02 | 2013-12-31 | E I Spectra, LLC | Reusable thin film particle sensor |
| US20100057508A1 (en) * | 2008-09-02 | 2010-03-04 | Microsoft Corporation | Structured implementation of business functionality changes |
| DE102009026550A1 (de) * | 2009-05-28 | 2010-12-02 | Robert Bosch Gmbh | Integrierter Schaltkreis mit einer Antennenanordnung |
| US8804105B2 (en) | 2012-03-27 | 2014-08-12 | E. I. Spectra, Llc | Combined optical imaging and electrical detection to characterize particles carried in a fluid |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0834264B2 (ja) * | 1987-04-21 | 1996-03-29 | 住友電気工業株式会社 | 半導体装置およびその製造方法 |
| US4826272A (en) * | 1987-08-27 | 1989-05-02 | American Telephone And Telegraph Company At&T Bell Laboratories | Means for coupling an optical fiber to an opto-electronic device |
| FR2667443A1 (fr) * | 1990-09-28 | 1992-04-03 | Thomson Csf | Procede de realisation d'un module hybride. |
| US5302547A (en) * | 1993-02-08 | 1994-04-12 | General Electric Company | Systems for patterning dielectrics by laser ablation |
| GB2279804A (en) * | 1993-07-02 | 1995-01-11 | Plessey Semiconductors Ltd | Insulating layers for multilayer wiring |
-
1995
- 1995-03-11 GB GB9505001A patent/GB2298956B/en not_active Expired - Fee Related
-
1996
- 1996-02-29 DE DE69618264T patent/DE69618264T2/de not_active Expired - Fee Related
- 1996-02-29 EP EP96301377A patent/EP0732739B1/de not_active Expired - Lifetime
- 1996-03-07 US US08/612,314 patent/US5933707A/en not_active Expired - Lifetime
- 1996-03-08 JP JP8052013A patent/JPH08277200A/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| GB9505001D0 (en) | 1995-04-26 |
| US5933707A (en) | 1999-08-03 |
| DE69618264T2 (de) | 2002-09-19 |
| JPH08277200A (ja) | 1996-10-22 |
| GB2298956B (en) | 1999-05-19 |
| GB2298956A (en) | 1996-09-18 |
| EP0732739A1 (de) | 1996-09-18 |
| EP0732739B1 (de) | 2002-01-02 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8364 | No opposition during term of opposition | ||
| 8339 | Ceased/non-payment of the annual fee |